序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
61 x-ray microscope with x-ray source of soft x-ray JP2001547401 2000-12-07 JP2003518252A 2003-06-03 ビュエイセ,バルト
(57)【要約】 軟X線は、X線顕微鏡による生体試料の検査に非常に適している。 流体ジェット中にレーザーで励起したプラズマによってこのような軟X線を発生させることが知られている。 本発明によれば、流体ジェット2上に電子ビーム6を集束させ、このようにジェット上に非常に小さな電子のフォーカス、故に非常に小さな単色のX線スポット8を生成することによって、X線を発生させる。 電子スポット8は、標準的な電子顕微鏡(SEM)によって、又は陰極線管の標準的な電子銃(CRT銃)によって得ることができる。 X線顕微鏡中の結像光学素子18、34、40は、フレネルゾーンプレートであってもよい。
62 X-ray microscope device JP2001235678 2001-08-03 JP2003043200A 2003-02-13 FUJII SADAO; MURO MIKIO; SATO EIJI
PROBLEM TO BE SOLVED: To provide a small and easily handling X-ray microscope by using a close contact method for obtaining a clear X-ray image causing no blur. SOLUTION: This X-ray microscope device is provided with an X-ray generator 12, a photoelectric conversion surface 2, an electron image magnifying device 3, an electron beam detecting element 4, and an image processor 5. The electron image magnifying device 3 is provided with an anode 32 for pulling out an electron generated on the photoelectric conversion surface 2, and electromagnetic coils 33 and 34 for forming an image on a prescribed surface by magnifying an electron group. A sample 6 is arranged in close contact on the photoelectric conversion surface 2, and an electron image is formed on the photoelectric conversion surface 2 by irradiating an X-ray from the back of the sample. The electron image magnifying device 3 pulls out and magnifies the electron emitted from the electron image, and forms the electron image on an electron beam detecting element 4 surface. Since an image processor 5 presents the electron image formed on the electron beams detecting element surface as a visible image, an X-ray optical system is not used.
63 Microscope system JP9792498 1998-04-09 JP3350442B2 2002-11-25 尾松  孝茂; 慶記 池滝; 正明 藤井
64 X-ray imaging device JP4831694 1994-03-18 JP3191554B2 2001-07-23 洋哉 越柴
65 Microscopic system JP9792498 1998-04-09 JP2001100102A 2001-04-13 IKETAKI YOSHINORI; FUJII MASAAKI; OMATSU TAKASHIGE
PROBLEM TO BE SOLVED: To provide a new microscopic system capable of condensing erase light for exciting a molecule in a 1st electronic exciting state to a 2nd electronic exciting state by using a simple and compact optical system in excellent beam profile, making stability and operability high and having excellent super resolution. SOLUTION: This system is equipped with the light source of wavelength λ1 light for exciting the molecule from a base state to the 1st electronic exciting state, the light source of wavelength λ2 light for exciting the molecule in the 1st electronic exciting state to the 2nd electronic exciting state or a higher electronic exciting state, a condensing optical system condensing the wavelength λ1 light and the wavelength λ2 light on an adjusted sample, and a superposing means for partially superposing an irradiation area by the wavelength λ1 light and an irradiation area by the wavelength λ2 light on the adjusted sample. By radiating the wavelength λ1 light and the wavelength λ2 light through the superposing means, a light emitting region in the case of de-exciting the molecule from the 1st electronic exciting state to the base state is restrained.
66 X-ray concentrating device and x-ray device JP28112299 1999-10-01 JP2001099994A 2001-04-13 TAGUCHI TAKEYOSHI; OGISO KATSUHIKO
PROBLEM TO BE SOLVED: To provide an X-ray concentrating device capable of extremely reducing the size of a concentrated point of an X-ray. SOLUTION: This X-ray concentrating device 16 concentrates an X-ray R0 radiated from an X-ray source F into a microscopic concentrated point P. The X-ray R0 radiated from the X-ray source F is formed into a parallel X-ray beam R2 by a parallel paraboloid reflector 17, this parallel X-ray beam R2 is turned into monochrome by an analyzing crystal 18, and the monochrome parallel X-ray beam is condensed into a condensing point P by a zone plate 19. The zone plate 19 is formed by mutually arranging X-ray transmission bands and X-ray screening bands and it can converge an X-ray into an extremely microscopic focal point when a parallel X-ray beam is emitted onto it. COPYRIGHT: (C)2001,JPO
67 Microfocus x-ray generator JP52806796 1996-03-16 JP3150703B2 2001-03-26 ラインホルト アルフレート
68 X-ray microscope JP27353089 1989-10-20 JP2883122B2 1999-04-19 KATO MIKIKO
69 X-ray optical element holding frame JP158590 1990-01-10 JP2775949B2 1998-07-16 NAKAMURA HAJIME
70 Reflection type two-dimensional pattern reduced transfer method and device according to the single focusing mirror JP33503289 1989-12-26 JPH0616485B2 1994-03-02 MATSUMURA HIDEKI; WATANABE YOSHIHIDE
71 Observation device utilizing x-ray JP14387090 1990-06-01 JPH0438500A 1992-02-07 HAYASHIDA MASAMI; WATANABE YUTAKA; NIIBE MASATO; IIZUKA TAKASHI; FUKUDA YOSHIAKI
PURPOSE: To improve brightness of a lighting system and to enable highly graded observation of objects image by using a multi-layer membranes reflecting mirror at a part of the lighting system, in the case of observation of the objects which are irradiated by X-ray, with focusing the image thereof on a preset plane. CONSTITUTION: X-ray 1 is focused onto an object 3 surface by a multi-layer membranes convex reflection mirror 2, and, at the same time, is selected to wave length to be used. The X-ray permeating through the object 3 and being confused thereby, comes into a Fresnel ring zones plate 4, and the Fresnel ring zones plate 4 focuses image 6 of the object on a detector 5 surface. Also, a part of wave length of the X-ray reflected by the multi-layer membranes reflecting mirror 2, and a part of wave length of the X-ray diffracted by the Fresnel ring zones plate 4, are made to correspond each other. Consequently, a device having a large area, can be easily manufactured, and wave length resolution thereof is not so higher than required, and also a more brighter lighting system having more higher reflectivity, can be easily obtained. COPYRIGHT: (C)1992,JPO&Japio
72 Holder frame for x-ray optical element JP158590 1990-01-10 JPH03207000A 1991-09-10 NAKAMURA HAJIME
PURPOSE: To improve reliability of an X-ray optical element system and to size it down by providing a window through which visible radiation permeates, at periphery of a holder part of the X-ray optical element. CONSTITUTION: A base plate W consists of a square silicon plate 0.2mm thick and each of which sides is 14mm long, for instance, and, at its central part, a square hole P each of which sides is 0.2mm long and is covered by a thin film N, is formed as a permeating part of a soft X-ray and also, on the thin film N, a Fresnel zone pattern is drawn. Also, in circumference of the hole P, 5mm by 55mm passing-through windows T1 to T4 of visible radiation are formed and, widths of length and breadth beam parts K1 to K4 are different in the surfaces or the backs as their cross-sectional shapes are trapezoid. An objective zone plate R2 is monolithically formed by the Fresnel zone pattern part and the visible radiation windows T1 to T4, on one single silicon plate. Accordingly, positional accuracy during the Fresnel zone pattern is being formed, affects directly to accuracy of an optical alignment during the plate R2 is being positioned, and moreover the plate R2 does not move after being fixed in an X-ray microscope, and therefore an optical system can be easily assembled and an initial accuracy of the optical alignment can be always maintained. COPYRIGHT: (C)1991,JPO&Japio
73 Method and device for researching substance by x rays JP30796788 1988-12-07 JPH02138856A 1990-05-28 SHIAAGI WAN
PURPOSE: To observe a sample without exposing a sample to a large amount of radioactive ray by perforating an opening on the end face of a chamber where X rays are projected and embedding a metal wheel for transmitting X rays to it, and projecting the X rays through the metal wheel to a sample that is a substance for research. CONSTITUTION: An opening 2d is perforated in a side wall 2c of a long and narrow chamber housing 2 where first edge walls 2b and 2c are provided at opposing edge parts and is embedded by an X-ray-transmission metal wheel 12 with a surface 13a at the side of the chamber 2 or a surface 13b at outside. Electron beams 9 are applied to the side of the surface 13a while being narrowed down by on objective lens 7, and beams through the wheel 12 pass through a sample 14 in a sample holder 15 provided at the side of the surface 13b and are detected by an X-ray detector 22 as transmission X rays 16. Also, X rays 17 that deviate from X rays 16 are detected by an X-ray detector 19, and the output of the detectors 22 and 19 are transferred to a multi-channel analyzer 25 via a detector selector switch 24 and is sent to an amplifier 27 for operating a CRT 28.
74 X-ray source JP18547185 1985-08-22 JPS6244940A 1987-02-26 SOEJIMA HIROYOSHI
PURPOSE: To obtain a simple structure X-ray source which can irradiate or excite micro section selectively or can produce a parallel X-ray beam by bundling many micro caliper capillary tube to forma plate then applying a thin film X-ray target tightly while irradiating an electron beam onto the endface of plate and taking out the produced X-ray. CONSTITUTION: Many capillary tubes 20 are arranged such that the endface will be in a plane then they are bundled to form a plate 21. A thin film X-ray target 22 is applied tightly onto one endface of said plate 21 while a thin film 24 is applied tightly onto the other endface. When applying positive voltage from a power source 30 onto the thin film 24, the electrons produced in the capillary tube 20 can be removed more effectively. Electron beam 26 focused to micro diameter is irradiated onto the thin film X-ray target 22. X-ray 28 is produced from X-ray target 22 then passes through the capillary tube 20 and transmitted through the thin film 24 on the other endface. COPYRIGHT: (C)1987,JPO&Japio
75 Method for three-dimensionally measuring a 3D aerial image of a lithography mask US15410918 2017-01-20 US10068325B2 2018-09-04 Ulrich Matejka; Christoph Husemann; Johannes Ruoff; Sascha Perlitz; Hans-Jürgen Mann
In a method for three-dimensionally measuring a 3D aerial image in the region around an image plane during the imaging of a lithography mask, which is arranged in an object plane, a selectable imaging scale ratio in mutually perpendicular directions (x, y) is taken into account. For this purpose, an electromagnetic wavefront of imaging light is reconstructed after interaction thereof with the lithography mask. An influencing variable that corresponds to the imaging scale ratio is included. Finally, the 3D aerial image measured with the inclusion of the influencing variable is output. This results in a measuring method with which lithography masks that are optimized for being used with an anamorphic projection optical unit during projection exposure can also be measured.
76 X-ray apparatus and structure manufacturing method US14668029 2015-03-25 US09953799B2 2018-04-24 Fumihiko Hakoda; Satoshi Takahashi; Jim Smith
Provided is an X-ray apparatus including: a target configured to generate an X-ray by collision of electrons or transmission of electrons; a filament configured to release the electrons to the target; a housing that has the filament therein; and a first holding member configured to hold a portion of the target disposed on an outer side of the housing on the outer side of the housing.
77 Semiconductor X-ray Detector US15122449 2015-04-07 US20180017685A1 2018-01-18 Peiyan CAO
An apparatus for detecting X-ray, comprising: an X-ray absorption layer comprising an electrode; a first voltage comparator configured to compare a voltage of an electrode to a first threshold; a second voltage comparator configured to compare the voltage to a second threshold; a counter configured to register a number of X-ray photons absorbed by the X-ray absorption layer; a controller; the controller is configured to start a time delay from a time at which the first voltage comparator determines that an absolute value of the voltage equals or exceeds an absolute value of the first threshold; the controller is configured to activate the second voltage comparator during the time delay; the controller is configured to cause the number registered by the counter to increase by one, if, during the time delay, the second voltage comparator determines that an absolute value of the voltage equals or exceeds an absolute value of the second threshold.
78 Embedded pupil function recovery for fourier ptychographic imaging devices US14572493 2014-12-16 US09864184B2 2018-01-09 Xiaoze Ou; Jaebum Chung; Roarke Horstmeyer; Guoan Zheng; Changhuei Yang
Certain aspects pertain to Fourier ptychographic imaging systems, devices, and methods that implement an embedded pupil function recovery.
79 X-ray laser microscopy sample analysis system and method US15442670 2017-02-26 US09859029B2 2018-01-02 Allison Sihan Jia; Muzhi Liu; Yuhao Wang; Kevin Shaokang You; Jingyi Zhang; Zhuotong Xian
Improved system and method of X-ray laser microscopy that combines information obtained from both X-ray diffraction and X-ray imaging methods. At least one sample is placed in an ultra-cold, ultra-low pressure vacuum chamber, often using a sample administration device configured to present a plurality of samples. The sample is exposed to brief bursts of coherent X-ray illumination, often further concentrated using X-ray mirrors and pinhole collimation methods. Higher resolution data from the samples is obtained using hard X-ray lasers, such as free electron X-ray lasers, and X-ray diffraction methods. Lower resolution data from the same samples can be obtained using any of hard or soft X-ray laser sources, and X-ray imaging methods employing nanoscale etched zone plate technology. In some embodiments both diffraction and imaging data can be obtained simultaneously. Data from both sources are combined to create a more complete representation of the samples.
80 RADIOGRAPH DENSITY DETECTION DEVICE US15524044 2015-11-06 US20170332989A1 2017-11-23 Michael Scott ECHOLS
Systems and process are provided to make X-ray radiographs sufficiently quantitative and standardized for bone and other biological material or non-biologic material density evaluations. The X-ray radiograph methodology and system provide a cost effective diagnostic tool that may be used with existing X-ray radiography sources already present in many clinics and hospitals to ultimately produce large volumes of scientifically valid data and useful diagnostic and prognostic information. A calibration bar is added to a conventional X-ray film cartridge and images thereof subsequently incorporated into radiographs for interpretation or a cartridge is designed to integrate a calibration function. The calibration standard affords a standard against which material density is measured. A software program is provided to interpret tissue densities (including bone) to ultimately identify values compared to preselected thresholds.
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