Holder frame for x-ray optical element |
|||||||
| 申请号 | JP158590 | 申请日 | 1990-01-10 | 公开(公告)号 | JPH03207000A | 公开(公告)日 | 1991-09-10 |
| 申请人 | Nikon Corp; | 发明人 | NAKAMURA HAJIME; | ||||
| 摘要 | PURPOSE: To improve reliability of an X-ray optical element system and to size it down by providing a window through which visible radiation permeates, at periphery of a holder part of the X-ray optical element. CONSTITUTION: A base plate W consists of a square silicon plate 0.2mm thick and each of which sides is 14mm long, for instance, and, at its central part, a square hole P each of which sides is 0.2mm long and is covered by a thin film N, is formed as a permeating part of a soft X-ray and also, on the thin film N, a Fresnel zone pattern is drawn. Also, in circumference of the hole P, 5mm by 55mm passing-through windows T1 to T4 of visible radiation are formed and, widths of length and breadth beam parts K1 to K4 are different in the surfaces or the backs as their cross-sectional shapes are trapezoid. An objective zone plate R2 is monolithically formed by the Fresnel zone pattern part and the visible radiation windows T1 to T4, on one single silicon plate. Accordingly, positional accuracy during the Fresnel zone pattern is being formed, affects directly to accuracy of an optical alignment during the plate R2 is being positioned, and moreover the plate R2 does not move after being fixed in an X-ray microscope, and therefore an optical system can be easily assembled and an initial accuracy of the optical alignment can be always maintained. COPYRIGHT: (C)1991,JPO&Japio |
||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
QQ群二维码
意见反馈
意见反馈