| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 81 | CHARGED-PARTICLE MICROSCOPE WITH EXCHANGEABLE POLE PIECE EXTENDING ELEMENT | US15683734 | 2017-08-22 | US20180061613A1 | 2018-03-01 | Bohuslav Sed'a; Lubomír Tuma; Petr Hlavenka; Marek Uncovský; Radovan Vasina; Jan Trojek; Mostafa Maazouz |
| A charged-particle microscope having a vacuum chamber comprises a specimen holder, a particle-optical column, a detector and an exchangeable column extending element. The specimen holder is for holding a specimen. The particle-optical column is for producing and directing a beam of charged particles along an axis so as to irradiate the specimen. The column has a terminal pole piece at an extremity facing the specimen holder. The detector is for detecting a flux of radiation emanating from the specimen in response to irradiation by the beam. The exchangeable column extending element is magnetically mounted on the pole piece in a space between the pole piece and the specimen holder. Methods of using the microscope are also disclosed. | ||||||
| 82 | Coherent diffractive imaging with arbitrary angle of incidence | US14839738 | 2015-08-28 | US09891584B2 | 2018-02-13 | Bosheng Zhang; Matthew D. Seaberg; Daniel E. Adams; Henry C. Kapteyn; Margaret M. Murnane |
| Apparatus and methods for coherent diffractive imaging with arbitrary angle of illumination incidence utilize a method of fast remapping of a detected diffraction intensity pattern from a detector pixel array (initial grid) to a uniform spatial frequency grid (final grid) chosen to allow for FFT on the remapped pattern. This is accomplished by remapping the initial grid to an intermediate grid chosen to result in a final grid that is linear in spatial frequency. The initial grid is remapped (generally by interpolation) to the intermediate grid that is calculated to correspond to the final grid. In general, the initial grid (x,y) is uniform in space, the intermediate grid ({tilde over (x)},{tilde over (y)}) is non-uniform in spatial frequency, and the final grid ({tilde over (f)}x,{tilde over (f)}y) is uniform in spatial frequency. | ||||||
| 83 | Semiconductor X-ray Detector | US15122456 | 2015-04-07 | US20180017686A1 | 2018-01-18 | Peiyan CAO; Yurun LIU |
| Disclosed herein is an apparatus suitable for detecting x-ray, comprising: an X-ray absorption layer comprising an electrode; an electronics layer, the electronics layer comprising: a substrate having a first surface and a second surface, an electronics system in or on the substrate, an electric contact on the first surface, a via, and a redistribution layer (RDL) on the second surface; wherein the RDL comprises a transmission line; wherein the via extends from the first surface to the second surface; wherein the electrode is electrically connected to the electric contact; wherein the electronics system is electrically connected to the electric contact and the transmission line through the via. | ||||||
| 84 | Inspection apparatus, inspection method and manufacturing method | US15230937 | 2016-08-08 | US09823586B2 | 2017-11-21 | Richard Quintanilha |
| A product structure (407, 330′) is formed with defects (360-366). A spot (S) of EUV radiation which is at least partially coherent is provided on the product structure (604) to capture at least one diffraction pattern (606) formed by the radiation after scattering by the product structure. Reference data (612) describes a nominal product structure. At least one synthetic image (616) of the product structure is calculated from the captured image data. Data from the synthetic image is compared with the reference data to identify defects (660-666) in the product structure. In one embodiment, a plurality of diffraction patterns are obtained using a series overlapping spots (S(1)-S(N)), and the synthetic image is calculated using the diffraction patterns and knowledge of the relative displacement. The EUV radiation may have wavelengths in the range 5 to 50 nm, close to dimensions of the structures of interest. | ||||||
| 85 | X-RAY LASER MICROSCOPY SAMPLE ANALYSIS SYSTEM AND METHOD | US15442670 | 2017-02-26 | US20170169910A1 | 2017-06-15 | Allison Sihan Jia; Muzhi Liu; Yuhao Wang; Kevin Shaokang You; Jingyi Zhang; Zhuotong Xian |
| Improved system and method of X-ray laser microscopy that combines information obtained from both X-ray diffraction and X-ray imaging methods. At least one sample is placed in an ultra-cold, ultra-low pressure vacuum chamber, often using a sample administration device configured to present a plurality of samples. The sample is exposed to brief bursts of coherent X-ray illumination, often further concentrated using X-ray mirrors and pinhole collimation methods. Higher resolution data from the samples is obtained using hard X-ray lasers, such as free electron X-ray lasers, and X-ray diffraction methods. Lower resolution data from the same samples can be obtained using any of hard or soft X-ray laser sources, and X-ray imaging methods employing nanoscale etched zone plate technology. In some embodiments both diffraction and imaging data can be obtained simultaneously. Data from both sources are combined to create a more complete representation of the samples. | ||||||
| 86 | Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale | US14282281 | 2014-05-20 | US09613729B2 | 2017-04-04 | Deming Shu; Jie Liu; Sophie C. Gleber; Joan Vila-Comamala; Barry Lai; Jorg M. Maser; Christian Roehrig; Michael J. Wojcik; Franz Stefan Vogt |
| An enhanced mechanical design of multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale is provided. The precision alignment apparatus includes a zone plate alignment base frame; a plurality of zone plates; and a plurality of zone plate holders, each said zone plate holder for mounting and aligning a respective zone plate for hard x-ray focusing. At least one respective positioning stage drives and positions each respective zone plate holder. Each respective positioning stage is mounted on the zone plate alignment base frame. A respective linkage component connects each respective positioning stage and the respective zone plate holder. The zone plate alignment base frame, each zone plate holder and each linkage component is formed of a selected material for providing thermal expansion stability and positioning stability for the precision alignment apparatus. | ||||||
| 87 | Devices processed using x-rays | US14732674 | 2015-06-06 | US09607724B2 | 2017-03-28 | David Lewis Adler |
| Objects undergoing processing by a high resolution x-ray microscope with a high flux x-ray source that allows high speed metrology or inspection of objects such as integrated circuits (ICs), printed circuit boards (PCBs), and other IC packaging technologies. The object to be investigated is illuminated by collimated, high-flux x-rays from an extended source having a designated x-ray spectrum. The system also comprises a stage to control the position and orientation of the object; a scintillator that absorbs x-rays and emits visible photons positioned in very close proximity to (or in contact with) the object; an optical imaging system that forms a highly magnified, high-resolution image of the photons emitted by the scintillator; and a detector such as a CCD array to convert the image to electronic signals. | ||||||
| 88 | POSITIVE/NEGATIVE PHASE SHIFT BIMETALLIC ZONE PLATE | US15311879 | 2014-05-22 | US20170082560A1 | 2017-03-23 | Kun Gao; Jian Chen; Renfang Hu; Zhili Wang; Dajiang Wang; Zhiyun Pan; Wangsheng Chu; Shiqiang Wei |
| The invention provides a positive/negative phase shift bimetallic zone plate and production method thereof, wherein the positive/negative phase shift bimetallic zone plate comprises: a first metallic material having a positive phase shift; a second metallic material having a negative phase shift at a working energy point; wherein the first metallic material and the second metallic material are alternately arranged, so that the second metallic material replaces the blank portion in a cycle of a traditional zone plate. | ||||||
| 89 | HIGH SPEED X-RAY MICROSCOPE | US15231774 | 2016-08-08 | US20160351283A1 | 2016-12-01 | David Lewis Adler; Benjamin Thomas Adler; Freddie Erich Babian |
| A high resolution x-ray microscope with a high flux x-ray source that allows high speed metrology or inspection of objects such as integrated circuits (ICs), printed circuit boards (PCBs), and other IC packaging technologies. The object to be investigated is illuminated by collimated, high-flux x-rays from a movable, extended source having a designated x-ray spectrum. The system also comprises a means to control the relative positions of the x-ray source and the object; a scintillator that absorbs x-rays and emits visible photons positioned in very close proximity to (or in contact with) the object; an optical imaging system that forms a highly magnified, high-resolution image of the photons emitted by the scintillator; and a detector such as a CCD array to convert the image to electronic signals. | ||||||
| 90 | X-RAY LASER MICROSCOPY SYSTEM AND METHOD | US15218017 | 2016-07-23 | US20160329119A1 | 2016-11-10 | Yiying Cao; Roger Kim; Michael Chang; Zhuotong Xian; Katherine Han |
| Improved system and method of X-ray laser microscopy that combines information obtained from both X-ray diffraction and X-ray imaging methods. The sample is placed in an ultra-cold, ultra-low pressure vacuum chamber, and exposed to brief bursts of coherent X-ray illumination further concentrated using X-ray mirrors and pinhole collimation methods. Higher resolution data from a sample is obtained using hard X-ray lasers, such as free electron X-ray lasers, and X-ray diffraction methods. Lower resolution data from the same sample can be obtained using any of hard or soft X-ray laser sources, and X-ray imaging methods employing nanoscale etched zone plate technology. In some embodiments both diffraction and imaging data can be obtained simultaneously. Data from both sources are combined to create a more complete representation of the sample. | ||||||
| 91 | Coherent Diffractive Imaging With Arbitrary Angle of Incidence | US14839738 | 2015-08-28 | US20160187849A1 | 2016-06-30 | Bosheng Zhang; Matthew D. Seaberg; Daniel E. Adams; Henry C. Kapteyn; Margaret M. Murnane |
| Apparatus and methods for coherent diffractive imaging with arbitrary angle of illumination incidence utilize a method of fast remapping of a detected diffraction intensity pattern from a detector pixel array (initial grid) to a uniform spatial frequency grid (final grid) chosen to allow for FFT on the remapped pattern. This is accomplished by remapping the initial grid to an intermediate grid chosen to result in a final grid that is linear in spatial frequency. The initial grid is remapped (generally by interpolation) to the intermediate grid that is calculated to correspond to the final grid. In general, the initial grid (x,y) is uniform in space, the intermediate grid ({tilde over (x)},{tilde over (y)}) is non-uniform in spatial frequency, and the final grid ({tilde over (f)}x,{tilde over (f)}y) is uniform in spatial frequency. | ||||||
| 92 | Wave front aberration metrology of optics of EUV mask inspection system | US14010484 | 2013-08-26 | US09335206B2 | 2016-05-10 | Qiang Zhang; Yanwei Liu; Abdurrahman Sezginer |
| Disclosed is test structure for measuring wave-front aberration of an extreme ultraviolet (EUV) inspection system. The test structure includes a substrate formed from a material having substantially no reflectivity for EUV light and a multilayer (ML) stack portion, such as a pillar, formed on the substrate and comprising a plurality of alternating pairs of layers having different refractive indexes so as to reflect EUV light. The pairs have a count equal to or less than 15. | ||||||
| 93 | MULTIPLEXED FOURIER PTYCHOGRAPHY IMAGING SYSTEMS AND METHODS | US14960252 | 2015-12-04 | US20160088205A1 | 2016-03-24 | Roarke W. Horstmeyer; Guoan Zheng; Changhuei Yang |
| Certain embodiments pertain to Multiplexed Fourier Ptychographic imaging systems and methods. In one example, the Multiplexed Fourier Ptychographic imaging system includes an LED array configured to illuminate a sequence of LED patterns for illuminating a sample being imaged. The system includes LED circuitry configured to independently control power to turn on multiple LEDs simultaneously in each LED pattern of the array. The system has a light detector that acquires a first set of lower resolution images of the sample each image acquired during exposure time during illumination by a unique LED pattern. The system uses the first set of lower resolution images to generate a second set of lower resolution images associated with each LED in the LED array and iteratively updates overlapping regions in the Fourier domain with the second set of lower resolution images to generate a higher resolution image. | ||||||
| 94 | Imaging modality using penetrating radiations | US13807950 | 2011-06-29 | US09200947B2 | 2015-12-01 | Szabolcs Osvath; Krisztián Szigeti |
| Systems and methods which use penetrating radiation to obtain novel type of information about objects of interest. This information may be represented as novel type of image. In the present embodiments, penetrating radiation is directed through the object of interest. The attenuated radiation emerging from the object of interest is detected by at least one detector. A plurality of measurements is collected. At least one statistical parameter describing variations of the measurements may be calculated and used for reconstructing an image representing fluctuations of the attenuation of the penetrating radiation in the object of study. At least one other statistical parameter representing the mean attenuation image, the error of the fluctuation image, or the error of the mean attenuation image may also be calculated and used to reconstruct images of the object of interest. | ||||||
| 95 | MECHANICAL DESIGN OF MULTIPLE ZONE PLATES PRECISION ALIGNMENT APPARATUS FOR HARD X-RAY FOCUSING IN TWENTY-NANOMETER SCALE | US14282281 | 2014-05-20 | US20150340114A1 | 2015-11-26 | Deming Shu; Jie Liu; Sophie C. Gleber; Joan Vila-Comamala; Barry Lai; Jorg M. Maser; Christian Roehrig; Michael J. Wojcik; Franz Stefan Vogt |
| An enhanced mechanical design of multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale is provided. The precision alignment apparatus includes a zone plate alignment base frame; a plurality of zone plates; and a plurality of zone plate holders, each said zone plate holder for mounting and aligning a respective zone plate for hard x-ray focusing. At least one respective positioning stage drives and positions each respective zone plate holder. Each respective positioning stage is mounted on the zone plate alignment base frame. A respective linkage component connects each respective positioning stage and the respective zone plate holder. The zone plate alignment base frame, each zone plate holder and each linkage component is formed of a selected material for providing thermal expansion stability and positioning stability for the precision alignment apparatus. | ||||||
| 96 | Multi Energy X-Ray Microscope Data Acquisition and Image Reconstruction System and Method | US14806099 | 2015-07-22 | US20150323474A1 | 2015-11-12 | Thomas A. Case; Susan Candell; Srivatsan Seshadri; Paul McGuinness |
| A multi energy, such as dual-energy (“DE”), x-ray imaging system data acquisition and image reconstruction system and method enables optimizing the image contrast of a sample. Using the DE x-ray imaging system and its associated user interface applications, an operator performs a low energy (“LE”) and high energy (“HE”) x-ray scan of the same volume of interest of the sample. The system creates a low-energy reconstructed tomographic volume data set from the set of low-energy projections and a high-energy tomographic volume data set from the set of high-energy projections. This enables the operator to control the image contrast of selected slices, and apply the information associated with optimizing the contrast of the selected slice to all slices in the low-energy and high-energy tomographic data sets. This creates a combined volume data set from the LE and HE volume data sets with optimized image contrast throughout. | ||||||
| 97 | HIGH ASPECT RATIO X-RAY TARGETS AND USES OF SAME | US14645689 | 2015-03-12 | US20150303021A1 | 2015-10-22 | N. William Parker; Mark W. Utlaut; Laurens Franz Taemsz Kwakman; Thomas G. Miller |
| An x-ray target, a method of using the x-ray target, and a computer program product with instructions for carrying out a method of using the x-ray target. The x-ray target includes a substrate made from a soft x-ray producing material and a high aspect ratio structure made from a hard x-ray producing material. The hard x-ray producing material is embedded in the substrate, formed on the substrate, cantilevered out from the edge of the substrate, or any combination thereof. The high aspect ratio structure comprises a plurality of high aspect ratio structures arranged in one or more grids or arrays, and the high aspect ratio structures in one of the one or more grids or arrays are arranged to form a Hadamard matrix structure. | ||||||
| 98 | Optical module for X-ray microscope | US13733421 | 2013-01-03 | US09075245B2 | 2015-07-07 | En-Te Hwu |
| An optical module includes at least a carrying stage, at least an actuator unit and at least an optical assembly. The carrying stage has a first aperture. The actuator unit is disposed at one side of the carrying stage and has a second aperture. The optical assembly is connected with the actuator unit, and the actuator unit adjusts the position of the optical assembly. A radiated wave enters from one side of the optical module and passes through the first aperture, the second aperture and the optical assembly. A microscope with the optical module has compact size and is easily assembled and carried. The optical module and microscope can efficiently reduce the effect of ambient temperature variations so as to improve the measuring stability thereof. | ||||||
| 99 | X-ray microscope system with cryogenic handling system and method | US14081282 | 2013-11-15 | US09016943B2 | 2015-04-28 | Chris J. Jacobsen; Wenbing Yun |
| A cartridge-based cryogenic imaging system includes a sample handling system. This system uses a kinematic base and cold interface system that provides vertical loading to horizontally mounted high-precision rotation stages that are able to facilitate automated high-resolution three-dimensional (3D) imaging with computed tomography (CT). Flexible metal braids are used to provide cooling and also allow a large range of rotation. A robotic sample transfer and loading system provides further automation by allowing a number of samples to be loaded and automatically sequentially placed on the sample stage and imaged. These characteristics provide the capability of high-throughput and highly automated cryogenic x-ray microscopy and computed tomography. | ||||||
| 100 | Specimen supporting member for X-ray microscope image observation, specimen containing cell for X-ray microscope image observation, and X-ray microscope | US13581141 | 2011-02-23 | US08891728B2 | 2014-11-18 | Toshihiko Ogura |
| A specimen supporting member (10) includes: a specimen supporting film (11) such as a silicon nitride film, a carbon film, and a polyimide film; an X-ray radiation film (13) provided on one principal surface of the specimen supporting film, and for radiating a characteristic X-ray in a soft X-ray region upon irradiation with charged particles; and a specimen adsorption film (12) which is a metal film provided on another principal surface of the specimen supporting film (11), and which fixes by adsorption a specimen (1) to be observed. Since a protein which is a constitutive substance of a biological specimen has a characteristic to easily adsorb to a metallic ion, a specimen adsorption film (12) is formed on one principal surface of the specimen supporting film (11) so that an observation specimen adsorbs thereto. | ||||||
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