X-ray apparatus and structure manufacturing method |
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| 申请号 | US14668029 | 申请日 | 2015-03-25 | 公开(公告)号 | US09953799B2 | 公开(公告)日 | 2018-04-24 |
| 申请人 | NIKON CORPORATION; NIKON METROLOGY NV; | 发明人 | Fumihiko Hakoda; Satoshi Takahashi; Jim Smith; | ||||
| 摘要 | Provided is an X-ray apparatus including: a target configured to generate an X-ray by collision of electrons or transmission of electrons; a filament configured to release the electrons to the target; a housing that has the filament therein; and a first holding member configured to hold a portion of the target disposed on an outer side of the housing on the outer side of the housing. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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