Method and device for researching substance by x rays

申请号 JP30796788 申请日 1988-12-07 公开(公告)号 JPH02138856A 公开(公告)日 1990-05-28
申请人 Chia-Gee Wang; 发明人 SHIAAGI WAN;
摘要 PURPOSE: To observe a sample without exposing a sample to a large amount of radioactive ray by perforating an opening on the end face of a chamber where X rays are projected and embedding a metal wheel for transmitting X rays to it, and projecting the X rays through the metal wheel to a sample that is a substance for research. CONSTITUTION: An opening 2d is perforated in a side wall 2c of a long and narrow chamber housing 2 where first edge walls 2b and 2c are provided at opposing edge parts and is embedded by an X-ray-transmission metal wheel 12 with a surface 13a at the side of the chamber 2 or a surface 13b at outside. Electron beams 9 are applied to the side of the surface 13a while being narrowed down by on objective lens 7, and beams through the wheel 12 pass through a sample 14 in a sample holder 15 provided at the side of the surface 13b and are detected by an X-ray detector 22 as transmission X rays 16. Also, X rays 17 that deviate from X rays 16 are detected by an X-ray detector 19, and the output of the detectors 22 and 19 are transferred to a multi-channel analyzer 25 via a detector selector switch 24 and is sent to an amplifier 27 for operating a CRT 28.
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