序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
141 Phase contrast X-ray microscope US436284 1995-05-16 US5550887A 1996-08-27 Gunter Schmal; Dietbert Rudolph
An X-ray microscope has the following features: a pulsed x-ray source that delivers an intense line radiation, an annular condenser that focuses the radiation of the X-ray source on the object to be investigated, an X-ray optics constructed as a micro zone plate that images the object with high resolution on an X-ray detector, and a phase ring positioned in the rear focal plane of the micro zone plate and applies to the zero order X-ray radiation coming from the object a phase shift, with respect to the higher order radiation deflected by the object structures, which is determined by the thickness and material of the phase ring. The phase shift amounts, for example, to 90.degree. or 270.degree..
142 X-ray microscope US171719 1993-12-22 US5450463A 1995-09-12 Yoshinori Iketaki
An X-ray microscope for observing a transmitted X-ray microscopic image of a specimen by irradiating the specimen with X-rays and exciting radiation rays, in which the exciting radiation rays are made incident upon the specimen at a large photon flux in an efficient manner without loss, so that a contrast of the image can be increased. The invention provides a desired relationship between thickness of specimen, wavelength of X-rays and tone resolving power of image for obtaining a transmitted X-ray microscopic image having an excellent contrast. The invention further proposes optimizations for a photon flux of exciting radiation rays as well as for a timing of irradiation of X-rays and exciting radiation rays. The X-ray microscope can observe particular element contained in particular substance without being affected by the same element contained in other substances which constitute a specimen together with the particular substance by suitably selecting a wavelength of the exciting radiation rays. The invention further propose a secondary electron microscope, in which a specimen is irradiated with X-rays and exciting radiation rays and secondary electrons emitted from the specimen are detected by an electron monochrometer.
143 Soft X-ray microscope US162470 1993-12-07 US5434901A 1995-07-18 Komei Nagai; Yoshiaki Horikawa; Yoshinori Iketaki; Shoichiro Mochimaru
In a soft X-ray microscope including a soft X-ray source for emitting soft X-rays, a condenser lens for focusing the soft X-rays onto a specimen under inspection, an objective lens for focusing soft X-rays emanating from the specimen, a soft X-ray detector for receiving the soft X-rays focused by the objective lens, and a visually observing optical system for forming a visible image of the specimen by converting an optical property of the specimen other than contrast and color into a contrast in brightness or color. The visually observing optical system may be formed as phase contrast microscope, dark field microscope, polarizing microscope, differential interference microscope, or fluorescent microscope. Then, alignment and focus adjustment can be performed by observing the visible image of the specimen without irradiating the specimen with the soft X-rays even if the specimen has substantially no contrast and color.
144 Fourier transform microscope for x-ray and/or gamma-ray imaging US31410 1993-03-15 US5432349A 1995-07-11 Kent S. Wood; Uri Feldman
A Fourier transform microscope for use in imaging a source of x-ray and/or gamma-ray radiation includes first and second grids arranged in proximity to the source. The first grid includes an arrangement of first subgrids elements with a first predetermined number n of approximately parallel, equally-spaced linear first ribs which are opaque to the radiation of interest, and first radiation-transparent regions which are arranged in alternation with the first ribs. The second grid includes an arrangement of second subgrids elements which are larger than the first subgrids elements, and which have a common field of view with corresponding first subgrid elements. Each second subgrid element has a second predetermined number n+m of approximately parallel, equally-spaced linear second ribs which are opaque to the radiation of interest, and second radiation-transparent regions which alternate with the second ribs. Each first subgrid element and its corresponding second subgrid element is termed a `subgrid system`. Each subgrid system can be used to derive an amplitude and phase of an associated Fourier component. A position-sensitive detector detects a Moire or fringe pattern from wach subgrid system and generates a signal indicative of the radiation intensity distribution image of the source in spatial frequency domain which can be converted into a radiation intensity distribution image of the source in spatial domain using a Fourier transform.
145 Three-dimensional microtomographic analysis system US100778 1993-08-02 US5402460A 1995-03-28 Roger H. Johnson; Alan C. Nelson; Robert M. Fisher
A microtomographic system (10) for generating high-resolution, three dimensional images of a specimen (16) is disclosed. The microtomograph system includes an x-ray generator (12) that produces an x-ray beam (14), a specimen holder (18) that holds the specimen in the beam, and an x-ray detector (20) that measures the attenuation of the beam through the specimen. Two projections of each view of the specimen are made with this microtomographic system. Each projection is made with a different intensity x-ray beam. After the projections of one view of the specimen are made, the specimen is rotated on the specimen holder and another set of projections are made. The projections of each view of the specimen are analyzed together to provide a quantitative indication of the phase fraction of the material comprising the specimen. The projections of the different views are combined to provide a three-dimensional image of the specimen.
146 Schwarzschild optical system US800236 1991-11-29 US5291339A 1994-03-01 Shoichiro Mochimaru; Yoshiaki Horikawa; Mikiko Kato
A Schwarzschild optical system comprising a concave mirror having an opening formed at the center thereof and a convex mirror arranged in opposite to the opening of the concave mirror, and has a numerical aperture of at least 0.25 on the object side, the concave mirror being formed to have an aspherical surface. This Schwarzschild optical system has a relatively large numerical aperture, a relatively large departure between the centers of curvature of the concave mirror and the convex mirror, and favorably corrected aberrations.
147 Hard x-ray magnification apparatus and method with submicrometer spatial resolution of images in more than one dimension US808850 1991-12-17 US5259013A 1993-11-02 Masao Kuriyama; Ronald C. Dobbyn; Richard D. Spal
An apparatus and a method are provided for employing hard monochromatic x-rays to generate high resolution, dimensionally altered undistorted images of either the internal structure or surface feature details of a specimen at the submicron level in up to three-dimensions. A monochromatic hard x-ray beam is applied to the specimen and thereafter is directed to arrive at a small angle of incidence at a preferably flat, optically polished surface of a nearly perfect crystal, to be diffracted at the surface thereof to carry a first one-dimensional alteration of the image of the observed structure of the specimen. This x-ray beam is then directed, at a small angle of incidence, to the surface of a second nearly perfect crystal, the receiving surface being oriented orthogonal to the surface of the first nearly perfect crystal, to generate a further diffracted beam containing an undistorted two-dimensionally altered inverted image of the specimen with micrometer spatial resolution. The "magnification factor" of the same set of highly-perfect crystals can be varied by zooming by changing the x-ray energy of the incident beam. This last beam is received on a CCD array for direct conversion of x-ray photons into electrical charges and storage and processing of the resultant data in digitized form. By a small controlled rotation to the specimen relative to the apparatus, additional two-dimensional data are obtained and may be processed to generate high resolution three-dimensional images of the specimen structure.
148 X-ray tomographic image magnification process, system and apparatus therefor US681269 1991-04-05 US5245648A 1993-09-14 John H. Kinney; Ulrich K. Bonse; Quintin C. Johnson; Monte C. Nichols; Ralph A. Saroyan; Warren N. Massey; Rudolph Nusshardt
A computerized three-dimensional x-ray tomographic microscopy system is disclosed, comprising:a) source means for providing a source of parallel x-ray beams,b) staging means for staging and sequentially rotating a sample to be positioned in the path of thec) x-ray image magnifier means positioned in the path of the beams downstream from the sample,d) detecting means for detecting the beams after being passed through and magnified by the image magnifier means, ande) computing means for analyzing values received from the detecting means, and converting the values into three-dimensional representations. Also disclosed is a process for magnifying an x-ray image, and apparatus therefor.
149 Reflection soft X-ray microscope and method US749277 1991-08-23 US5177774A 1993-01-05 Szymon Suckewer; Charles H. Skinner; Roy Rosser
A reflection soft X-ray microscope is provided by generating soft X-ray beams, condensing the X-ray beams to strike a surface of an object at a predetermined angle, and focusing the X-ray beams reflected from the surface onto a detector, for recording an image of the surface or near surface features of the object under observation.
150 X-ray microscope US598139 1990-10-16 US5132994A 1992-07-21 Mikiko Kato
An X-ray microscope is provided with an X-ray source, a converging optical system collecting radiation emitted from the X-ray source, a stage on which an object is placed, and a detector having sensitivity with respect to radiation of wavelengths ranging from an X-ray region to a vacuum ultraviolet ray region, in which a filter eliminating long wavelength components from the radiation emitted from the X-ray source is disposed in an optical path from the X-ray source to the detector. Whereby, the X-ray microscope has important advantages in practical use that radiation of a desired wavelength region can be sensitively detected from the X-ray source, without bringing about large size and high cost of the optical instrument even where the X-ray source is used as a radiation source for white light.
151 Method for reflection-type two-dimensional pattern-reducing-copying using single convergence mirror and equipment thereof US636989 1990-12-26 US5120971A 1992-06-09 Hideki Matsumura; Yoshihide Watanabe
The invention relates to a method and a device for reflection-type pattern copying, characterized by letting beams of light be incident on a pattern reflection plate on which a pattern to be copied is drawn, converging a pattern figure contained in the light reflected by the pattern reflection plate by means of a concave mirror and copying a two-dimensionally reduced pattern of the above pattern onto a surface of a specimen. Unlike conventional methods, the invention achieves two-dimensional reduced pattern copying by using one concave convergence mirror. A region of copying in which the blur size is not larger than a certain sufficiently small value can be expanded by parallelly arrnaging many concave convergence mirrors having the same shape and combining mechanical sweeping of the pattern reflection plate and the specimen.
152 Chromatic X-ray magnifying method and apparatus by Bragg reflective planes on the surface of Abbe sphere US462254 1990-01-09 US5027377A 1991-06-25 Robert S. Thoe
Method and apparatus for producing sharp, chromatic, magnified images of X-ray emitting objects, are provided. The apparatus, which constitutes an X-ray microscope or telescope, comprises a connected collection of Bragg reflecting planes, comprised of either a bent crystal or a synthetic multilayer structure, disposed on and adjacent to a locus determined by a spherical surface. The individual Bragg planes are spatially oriented to Bragg reflect radiation from the object location toward the image location. This is accomplished by making the Bragg planes spatially coincident with the surfaces of either a nested series of prolate ellipsoids of revolution, or a nested series of spheres. The spacing between the Bragg reflecting planes can be tailored to control the wavelengths and the amount of the X-radiation that is Bragg reflected to form the X-ray image.
153 Method and device for producing phase-contrast images US361558 1989-06-05 US4953188A 1990-08-28 Augustin Siegel; Gunter Schmahl; Dietbert Rudolph
For producing phase-contrast images with a microscope which scans the object point-by-point with a beam of illuminating radiation, the illuminating radiation is focused by an objective (31, 32) including a phase-shifting element (33) of preselective geometry. A radiation-sensitive detector (36) is positioned directly behind the object plane (34), seen in the direction of the light; and the shape of the radiation-sensitive area of the detector is adapted to encompass the path of the radiation passing through the geometry of the phase-shifting element (33) of the objective (31, 32), e.g., where the phase-shifting elements (33) comprise an annular aperture, an appropriately conforming annular diaphragm (35) is arranged in front of the detector (36). The advantage of this arrangement is that it does not use any radiation-collecting lens system between the object plane (34) and the detector (36).
154 Multispectral glancing incidence X-ray telescope US765979 1985-08-15 US4941163A 1990-07-10 Richard B. Hoover
A multispectral glancing incidence X-ray telescope is illustrated capable of broadband, high-resolution imaging of solar and stellar X-ray and extreme ultraviolet radiation sources which includes a primary optical system preferably of the Wolter I type having a primary mirror system (20, 22). The primary optical system further includes an optical axis (24) having a primary focus (F1) at which the incoming radiation is focused by the primary mirrors. A plurality of ellipsoidal mirrors (30a, 30b, 30cand 30d) are carried at an inclination to the optical axis behind the primary focus (F1). A rotating carrier (32) is provided on which the ellipsoidal mirrors are carried so that a desired one of the ellipsoidal mirrors may be selectively positioned in front of the incoming radiation beam (26). In the preferred embodiment, each of the ellipsoidal mirrors has an identical concave surface carrying a layered synthetic microstructure coating tailored to reflect a desired wavelength of 1.5 .ANG. or longer. Each of the identical ellipsoidal mirrors has a second focus (F2) at which a detector (16) is carried. Thus the different wavelength image is focused upon the detector irregardless of which mirror is positioned in front of the radiation beam. In this manner, a plurality of low wavelengths in a wavelength band generally less than 30 angstroms can be imaged with a high resolution.
155 X-ray microscope US130755 1987-12-09 US4870674A 1989-09-26 Gunter Schmahl; Dietbert Rudolph
An x-ray microscope in which the object is illuminated coherently or partially coherently via a condenser with quasi-monochromatic x-radiation and is imaged enlarged in the image plane by a high resolution x-ray objective. To obtain the highest possible image contrast, there is arranged in the Fourier plane of the x-ray objective an element which imparts a phase shift to a preselected order of diffraction of the radiation. The element extends over the surface region in the Fourier plane which is acted on here by the diffracted radiation to be influenced. The utilization of the phase shift of a preselected order of diffraction of the radiation as compared with the uninfluenced radiation makes it possible to carry out examinations, in particular of biological structures, with a low dose of radiation and nevertheless to produce a high image contrast. Moreover, it is possible to shift the wavelength region of the x-ray radiation to be used toward shorter wavelengths at which, as a result of the lesser absorption, x-ray microscopy was not meaningfully possible heretofore.
156 Anastigmatic catoptric device US48710555 1955-02-09 US2941078A 1960-06-14 MARC MONTEL
157 X-ray microscope US44338454 1954-07-14 US2877353A 1959-03-10 NEWBERRY STERLING P
158 Design, construction, and application of a device for obtaining radiographs of microscopic objects in a commercial model electron microscope US56346656 1956-02-06 US2843751A 1958-07-15 CHARLES BOTTY MARTIN; GEORGE ROWE FREDERICK
159 Mclachlan US2735018D US2735018A 1956-02-14
160 Process of making optical zone plates US13620449 1949-12-31 US2679474A 1954-05-25 SZMUL PAJES WOLF
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