| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 81 | Control method and object levitation device of object levitation device | JP2000285605 | 2000-09-20 | JP3928343B2 | 2007-06-13 | 貞行 上羽; 義和 小池; 正己 高三 |
| 82 | Transport of non-contact of parts and materials, equipment for handling and storage | JP2006538652 | 2004-11-11 | JP2007510606A | 2007-04-26 | シルプ，ミハエル; チッツマン，アドルフ; ツィマーマン，ヨセフ; ボリッグ，トビアス |
| 音響レビテーションに適当である少なくとも１つの面部分を有する物体（１）の音響レビテーションによる振動状態を発生させるための装置であって、その際この面部分が音響放射する面の上方を浮遊する前記装置において、前記装置が次の特徴：
振動する物体の重力もしくは加速によってその支持構造体表面（３）に対して垂直に作用する力を受けるための支持構造体表面（３）を有する剛性が高い支持構造体（２）、 支持構造体表面（３）に対して平行に配置されている振動可能な薄い面エレメント（４）、 この振動可能な薄い面エレメント（４）を、前記面エレメント（４）が支持構造体表面（３）の上方を非接触で浮遊し、かつ前記物体（１）が前記面エレメント（４）の上方を浮遊するような振動状態にするための振動発生手段（５） を有する、物体の音響レビテーションによる振動状態を発生させるための装置である。 |
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| 83 | Controlling method for object floating device and the same device | JP2000285605 | 2000-09-20 | JP2002096920A | 2002-04-02 | TAKASABU MASAMI; UEHA SADAYUKI; KOIKE YOSHIKAZU |
| PROBLEM TO BE SOLVED: To hold an object in a prescribed range without providing a guide and a regulating member when floating the object by using a plurality of vibrators. SOLUTION: This object floating device 1 is provided with the plurality of vibrators 2a to 2d and 3 formed into rectangular plate shapes. Each of the vibrators 2a to 2d and 3 is fastened to horns 5a and 5b. A vibrator 6 for exciting the vibrator 2a is connected with oscillators 12a to 12e. A control device 14 is provided with a CPU 15. Each vibrator 6 is equipped with an impedance detection means 16 for detecting impedance of each vibration system for vibrating each of the vibrators 2a to 2d and 3. The impedance detection means 16 is connected with the CPU 15. The CPU 15 judges whether an object 4 is deviated from the prescribed range or not based on a detection signal of the impedance detection means 16 and controls at least one of frequencies and voltage of the oscillators 12a to 12c so as to correct the deviation when the object 4 is deviated. COPYRIGHT: (C)2002,JPO | ||||||
| 84 | Object levitating device and object carrying device having same device and object levitating method | JP34781793 | 1993-12-24 | JPH07187388A | 1995-07-25 | HASHIMOTO YOSHIKI |
| PURPOSE: To provide an object levitating device and an object carrying device having the device and an object levitating method by which a restriction such as a construction material of an object to be handled is not imposed and an object having comparatively large weight and dimension can be also handled and the devices are downsized and cost is reduced and which are ideal in the aspect of safety or the like and whose control is easy. CONSTITUTION: A vibratory body is excited, and an object 7 is levitated and carried on a surface of the vibratory body by radiation pressure of a sound wade of the vibratory body, and an effect is obtained. Since a vibrational node does not particularly exist in in-phase piston mode vibration, levitation and a carry of a small object also become possible. COPYRIGHT: (C)1995,JPO | ||||||
| 85 | Ultrasonic conveyer | JP576785 | 1985-01-18 | JPS61166429A | 1986-07-28 | MOTODA KENRO |
| PURPOSE:To provide a conveyer which can eliminate a need of mechanical structure portion and prevent generation of noise and trouble due to its structure by exciting progressive wave by ultrasonic vibration on the surface of an elastic body, and bringing a body into contact with the progressive wave on the elastic body surface. CONSTITUTION:Ultrasonic vibrators 2 are installed on the inner surface or the lower outer surface of a conveyer main body 1 comprising a belt-like elastic body formed like an endless oval, for example, at spaces half the vibration wavelength. In this arrangement, when the vibrators 2 are driven to apply vibration to the conveyer main body 1 in direction of bending, elastic wave due to bending vibration is generated, so that by the ratio of the longitudinal displacement to the transversal displacement in a certain material point on the surface of the main body 1, the material point is caused to make elliptic motion and progress. Accordingly, a body is brought into contact with the material point to be conveyed through frictional force. | ||||||
| 86 | JPS61500017A - | JP50366084 | 1984-10-04 | JPS61500017A | 1986-01-09 | |
| 87 | Sample conveying apparatus | JP11490084 | 1984-06-05 | JPS60258013A | 1985-12-19 | TOUJIYOU TOORU; SUGIHARA KAZUYOSHI; TABATA MITSUO |
| PURPOSE:To convey a sample in a vacuum with high reliability in a small-sized conveying apparatus for a manufacturing process by providing a vibrator in a conveying path to form a progressive wave on a conveying surface, and conveying the sample in the opposite direction to the progressive wave. CONSTITUTION:When alternating voltage is applied to piezo-electric elements 7, the piezo-electric elements are expanded and contracted according to the degree of voltage so that a creep wave 8 according to the phase of applied voltage is formed on the surface of a conveying path 1. Thus, a sample 4 on the conveying path 1 is conveyed in the opposite direction to the advancing direction. In this arrangement, if the phase of applied alternating voltage is suitably selected, the conveying direction can be freely selected to be normal or reverse. Furthermore, the sample can be conveyed in a vacuum without a rubber or the like reliably. | ||||||
| 88 | DEVICE FOR TRANSPORTING AND HOLDING OBJECTS OR MATERIAL IN A CONTACT FREE MANNER | PCT/DE2008000595 | 2008-04-09 | WO2008122283A3 | 2008-12-31 | SCHILP MICHAEL; ZIMMERMANN JOSEF; ZITZMANN ADOLF |
| The invention relates to a device for transporting and holding contact-sensitive components or material. Said device comprises the following characteristics: at least one oscillatory plate-shaped receiving element (2) for receiving the object that is to be transported or held and that is secured to the at least one oscillation generator (3), and at least two support elements (4), said oscillation generator (3) being arranged on a predetermined point of the plate-shaped receiving element (2) in order to displace the plate-shaped receiving element (2) in a swinging manner and the support elements (4) are disposed on one point on which the amplitude of the swinging movements is at least 50 % less than the maximum amplitude and the oscillation generator (3) is operated at a frequency that offsets the plate-shaped receiving element (2) into said oscillations such that the components or the material levitate in a contact-free manner. | ||||||
| 89 | 초음파 부상모듈 및 초음파를 이용한 대상물 부상장치 | KR1020170075018 | 2017-06-14 | KR101876463B1 | 2018-07-16 | 소병록; 이성일; 이상준 |
| 본발명의실시예에따른초음파부상모듈은부상대상물과대향되는플레이트, 상기플레이트에상기부상대상물을부상하기위한진동을인가하는진동자및 상기진동자에의하여상기플레이트에형성되는노달라인에결합되며, 상기플레이트를지지하는지지부재를포함한다. | ||||||
| 90 | 기판 이송 장치 및 이를 구비한 기판 처리 시스템 | KR1020160144937 | 2016-11-02 | KR101836797B1 | 2018-03-09 | 이기우; 조문기 |
| 본발명은기판이송장치및 이를구비한기판처리시스템에관한것으로, 약액도포공정이처리되는기판을이송하는기판이송장치는, 독립적으로분할되는복수개의부상파트를포함하며기판을부상시킨상태로이송하는기판이송부와, 복수개의부상파트에의한부상력을개별적으로제어하는제어부를포함하는것에의하여, 기판의처짐없이기판을평탄하게부상시키고, 약액의도포균일성을향상시키는효과를얻을수 있다. | ||||||
| 91 | 공기부양식 운반장치 | KR1020140160753 | 2014-11-18 | KR1020160059521A | 2016-05-27 | 이공열 |
| 본발명은공기부양구조를적용함으로써물품의운반을용이하게할 수있는공기부양식운반장치에관한것이다. 본발명에의한공기부양식운반장치는, 운반하고자하는물품이안착되는운반프레임; 상기운반프레임의하부에설치된부양유닛; 및상기부양유닛에압축공기를공급하는압축공기공급유닛;을포함하고, 상기부양유닛은상기압축공기공급유닛으로부터공급받은압축공기를지면을향해분사시킴으로써상기운반프레임을지면으로부터부양시키도록구성되는것을특징으로한다. | ||||||
| 92 | 자기 부상 이송 장치 | KR1020130123023 | 2013-10-16 | KR1020150044107A | 2015-04-24 | 이기창; 박병건; 정시욱; 김지원; 문석환 |
| 본발명은자기부상이송장치에관한것으로서, 대면적디스플레이패널등의무거운이송체를효과적으로이송하기위하여, 이송트레이를부상시키기위한자기력을제공하기위하여이송트레이의이동방향에따라챔버의상부에형성되는하나이상의부상용전자석, 부상용전자석과대향되게이송트레이측에설치되어부상용전자석의자기력과의인력작용을통하여이송트레이를부상시키는하나이상의제1 강자성체코어, 이송트레이를수평방향으로이동시키는자기력을제공하기위하여이송트레이의이동방향에따라서챔버의내측의어느한면이상에형성되는하나이상의고정자코일, 이송트레이의이동방향을따라서이송트레이의어느하나이상의면에구비되고, 고정자코일이제공하는자기력과의인력또는척력작용을통하여이송트레이의수평방향추진력을제공하는하나이상의이동자추진모듈, 이동자추진모듈이설치되는방향을따라서설치되어고정자코일과의인력작용에의하여이송트레이와챔버간의간격을조정하는하나이상의이동자안내모듈을포함하는것을특징으로한다. | ||||||
| 93 | 열처리 장치 및 열처리 방법 | KR1020127021274 | 2011-09-13 | KR101229184B1 | 2013-02-01 | 시모미야오사무; 안도히로시 |
| 본 발명은 물품을 열처리하는 열처리로와, 상기 열처리로의 내부에 적어도 일부가 배치되는 진동체와, 상기 진동체를 여진(excite)시키는 진동자를 구비하고, 상기 열처리로의 내부에 있어서, 상기 진동체로부터의 음파의 방사압에 의해 상기 진동체의 상방으로 상기 물품을 띄우는 열처리 장치에 관한 것이다.
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| 94 | 공기부상을 이용한 이동장치 | KR1020030006526 | 2003-02-03 | KR1020040070367A | 2004-08-09 | 최군휘 |
| PURPOSE: A moving apparatus using the rise with air is provided to reduce the load applied to the moving apparatus by rising a body using air. CONSTITUTION: A moving apparatus(30) using the rise with air comprises a box type body(32) having a hollow space(31) therein; a suction unit(35) having a power generating unit(33) and a suction fan(34) to suck air to the hollow space; a ball receiving part(37) protruded at the bottom of the body; a ball(38) received in the ball receiving part; a ball guide(39) having a guide hole(40), smaller than the ball, formed at the bottom of the ball receiving part to prevent the separation of the ball; and an air discharge hole(41,42) discharging air at the ball receiving part to rise the body. | ||||||
| 95 | 경사구조를 이용한 기판 부상 이송장치 | KR20160125353 | 2016-09-29 | KR20180025074A | 2018-03-08 | BYUN SANG DOO |
| 본발명은다수개의핫존을통과하면서기판을건조하는경사구조를이용한기판부상이송장치에있어서, 경사지도록설치되는메인프레임; 상기다수개의핫존에각각배치되며, 상기메인프레임의상향에상기메인프레임과평행하게설치되는히팅플레이트; 상기히팅플레이트로부터상향으로평행하게이격배치되며, 초음파에의해가진되어기판을부상시킨상태로지지하는진동플레이트; 상기진동플레이트를지지하도록상기메인프레임에설치되는다수의진동지지부; 및, 상기진동플레이트에의해부상된기판이상기메인프레임의경사진방향으로이동시, 경사방향으로기울어진기판의일 측면을지지하면서상기다수개의핫존을연속적으로통과시키도록설치되는기판이송롤러;를포함하여, 기판건조시다단계로진행되는기판건조공정을초음파로기판을부상시킨상태에서연속적으로통과하면서건조가능한경사구조를이용한기판부상이송장치인것을특징으로한다. | ||||||
| 96 | 비접촉 방식으로 물체 또는 물질을 전달 및 유지하는 장치 | KR1020097023366 | 2008-04-09 | KR101507185B1 | 2015-04-06 | 쉴프,미카엘; 침머만,요세프; 치쯔만,아돌프 |
| 본발명은접촉감응형구성요소들또는물질들을전달및 유지하는장치에관한것으로, 상기장치는, 적어도하나의오실레이션(oscillation) 발생기(3)가고정되는, 전달되거나유지될상기물체를수용하는적어도하나의진동하는판 형상테이크-업(2), 및적어도 2개의지지부재(4)를포함하며, 상기오실레이션발생기(3)는상기판 형상테이크-업(2)을휨 진동으로설정하기위해상기판 형상테이크-업(2)의미리정해진위치에배치되고, 상기지지부재(4)는상기휨 진동의진폭이최대진폭보다적어도 50%만큼낮은위치에배치되며, 상기오실레이션발생기(3)는상기판 형상테이크-업(2)을진동으로설정하는주파수에서동작되어, 전달되어온 물체또는물질(1)이기체나공기의막 상에서떠돌게한다. | ||||||
| 97 | 평면요소의 무접촉 운송장치 | KR1020067011488 | 2004-11-11 | KR101227926B1 | 2013-01-31 | 짐머만,요세프; 지쯔만,아돌프; 쉴프,마이클; 볼리그,토비아스 |
| 본 발명은 콘베이어의 경로를 따라 구성 요소(1) 또는 기구들이 접촉이 없이 또는 최소한의 접촉으로 운반되는 운송 장치에 관련된 것이다. 본 발명은 역시 접촉이 없거나 또는 최소한의 접촉으로 구성 요소(1)나 기구들을 취급하고 보관하는 장치에 관련된다. 본 발명은 음파 공중 부양에 의하여 부양 상태를 창조한 장치를 제공하며 다음과 같은 특색 즉, 평면(3)이 있는 견고한 지지 구조물(2)이 중력 또는 부양된 대상 물체(1)의 가속으로 인한 수직으로 작용된 힘을 흡수하고, 진동할 수 있는 얇은 표면요소(4)는 지지 구조물의 평면과 평행으로 설치되어 있고, 진동 발생은 발진할 수 있는 얇은 표면요소(4)가 발진 상태로 설치되어 있고, 표면요소(4)는 무접촉으로 지주 구조 평면(3) 윗 쪽에서 공중 부양하며, 대상 목적물(1)은 표면요소(4) 윗 쪽에서 공중 부양하도록 되어 있다. 공중부양, 평면요소 | ||||||
| 98 | 열처리 장치 및 열처리 방법 | KR1020127021274 | 2011-09-13 | KR1020120097420A | 2012-09-03 | 시모미야오사무; 안도히로시 |
| 본 발명은 물품을 열처리하는 열처리로와, 상기 열처리로의 내부에 적어도 일부가 배치되는 진동체와, 상기 진동체를 여진(excite)시키는 진동자를 구비하고, 상기 열처리로의 내부에 있어서, 상기 진동체로부터의 음파의 방사압에 의해 상기 진동체의 상방으로 상기 물품을 띄우는 열처리 장치에 관한 것이다.
|
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| 99 | 비뉴턴 유체를 이용하여 기판을 이송하는 방법 및 장치 | KR1020110103118 | 2011-10-10 | KR1020110120853A | 2011-11-04 | 드라리오스존엠; 레브킨마이크; 파크존; 코로리크미하일; 리데커프레드씨 |
| PURPOSE: A method for transferring a substrate using a non-newtonian fluid and an apparatus thereof are provided to prevent the deterioration of a substrate by alleviating stress which is applied to a substrate. CONSTITUTION: A chamber(216) has the cavity of a conduit shape. The chamber is filled with non-Newtonian fluid(210). A substrate(212) is floated in the non-Newtonian fluid. The transport part of the chamber is defended as the channel conduit having a substrate transferable size. The channel conduit includes an upper plane(230) and a lower plane(232) which is opposite to the upper plane. | ||||||
| 100 | 기판 이송 장치 | KR1020100001686 | 2010-01-08 | KR1020110081494A | 2011-07-14 | 이정수 |
| PURPOSE: An apparatus for transferring a substrate is provided to transfer the substrate without damage to a substrate by holding the substrate to be floated by a certain height without the direct absorption of grippers. CONSTITUTION: In an apparatus for transferring a substrate, a plurality of first air holes are formed on the bottom of a substrate and floats the substrate. A vacuum hole forms second air holes(121) supplying air to the both edges of the substrate to hold the vertical position of the substrate and also forms vacuum pressure adjacent to the second air hole. A plurality of grippers(120) includes a plurality of stopper pins guiding the corner of the substrate to hold the horizontal position of the floated substrate. A driving part moves grippers in horizontal direction to transfer the floated substrate in horizontal direction. | ||||||
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