序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
41 Apparatus for transporting levitated objects US10028096 2001-10-25 US06802220B2 2004-10-12 Masaki Takasan; Yoshikazu Koike; Sadayuki Ueha
An apparatus levitates and transports an object. The apparatus levitates the object above the surfaces of a plurality of vibrators by air pressure of sound waves that are generated by the vibrators. The apparatus has a plurality of vibration devices, each of which corresponds to one of the vibrators. Each vibration device includes a first transducer for vibrating the corresponding vibrator. Each transducer includes a super-magnetostrictive material. A common power source is connected to at least two of the first transducers for actuating the first transducers.
42 Device for gripping and holding and object in a contactless manner US10332338 2003-11-25 US20040070221A1 2004-04-15 Michael Hoehn; Juergen Hoeppner
A device is proposed for the contactless grasping and holding of an object (1) from a direction (z) directed at least partially in the direction (z) of the force of gravity (F), using a holding element (3) situated counter to the direction (z) of the force of gravity (F), at least partially above the object (1) and at a distance from the latter, which to the greatest extent possible avoids the carrying off or migrating of particles that are possibly present. According to the present invention this is achieved in that the holding element (3) is designed as a vibrating holding element (3) for generating levitation waves.
43 Handler for the transporting of flat substrates for application in the semi-conductor industry US09924146 2001-08-07 US06609874B2 2003-08-26 Jürgen Höppner; Josef Zimmermann; Johannes Schlip
A handler for transporting planar substrates, in particular wafers, used in the semiconductor industry, between at least two stations. The handler includes a movable flat support arm for receiving a substrate and means for defining the location of the substrate in the area of a predetermined point on the support arm. A vibration generator for generating a longitudinal ultrasonic vibration is provided, that the vibration generator interacts with the support arm in such a way that a substantially stationary vibration with at least one antinode can be set on the flat support arm, which permits a levitation of a substrate placed thereon. A means for defining the location of the substrate provide a lateral positioning exclusively by an interaction with the edge area of a substrate.
44 Object levitating apparatus, an object transporting apparatus equipped with said apparatus, and an object levitating process US08796478 1997-02-10 US06455982B1 2002-09-24 Yoshiki Hashimoto
An object levitating apparatus, an object transporting apparatus, and an object levitating process are described which, simultaneous to not placing restrictions on the material and so forth of the objects handled, are able to handle objects having relatively large weights and dimensions, while also being compact in size, inexpensive, preferable in terms of safety and so forth, and easy to control. The above effects are obtained by exciting a vibrator and levitating or transporting an object above the surface of the vibrator by the radiation pressure of the sound waves of the vibrator, and in particular, since there are no vibration nodes present as a result of in-phase piston mode vibration, the dimensions of the object to be levitated and transported can be small.
45 Apparatus for transporting levitated objects US10028096 2001-10-25 US20020088280A1 2002-07-11 Masaki Takasan; Yoshikazu Koike; Sadayuki Ueha
An apparatus levitates and transports an object. The apparatus levitates the object above the surfaces of a plurality of vibrators by air pressure of sound waves that are generated by the vibrators. The apparatus has a plurality of vibration devices, each of which corresponds to one of the vibrators. Each vibration device includes a first transducer for vibrating the corresponding vibrator. Each transducer includes a super-magnetostrictive material. A common power source is connected to at least two of the first transducers for actuating the first transducers.
46 Handler for the transporting of flat substrates for application in the semi-conductor industry US09924146 2001-08-07 US20020044863A1 2002-04-18 Jurgen Hoppner; Josef Zimmermann; Johannes Schlip
The proposal is for a handler for the transporting of flat substrates, in particular or wafers (9) for application in the semi-conductor industry between at least two stations with a mobile planar carrying arm (6) for taking up a substrate as well as the means for layering information of the substrate in the area of a pre-given place on the carrying arm (6). The invention is based on the task of avoiding detrimental effect to the underside of a substrate during layer positioning and the generation of particles on layer positions. This problem has been solved by providing an oscillator (4) for the generation of a longitudinal ultrasonic vibration which works in conjunction with the carrying arm (6) in such a way that on the planar carrying arm (6) an essentially stationary vibration with at least one vibration amplitude can be adjusted which facilitates a levitation of a substrate (9) set down on it and that the means of layer information for the substrate for lateral positioning is achieved exclusively be interaction with the edge area of a substrate (9).
47 Object levitating apparatus, object transporting apparatus, and object levitating bearing along with an object levitating process and object transporting process US220635 1994-03-31 US5890580A 1999-04-06 Yoshiki Hashimoto; Ryoji Tsuchiko; Satoshi Arai
An object levitating apparatus, an object transporting apparatus equipped with said object levitating apparatus, and an object levitating bearing as well as an object levitating process and object transporting process are described which, simultaneous to not placing restrictions on the material and so forth of the objects handled, are able to handle objects having relatively large weights and dimensions, while also being compact in size, inexpensive, preferable in terms of safety and so forth, and easy to control. The above effects are obtained by exciting a vibrator and levitating, transporting or bearing an object above the surface of the vibrator by the radiation pressure of the sound waves of the vibrator.
48 Object levitating apparatus object transporting apparatus and object levitating bearing along with an object levitating process and object transporting process US882045 1997-06-25 US5810155A 1998-09-22 Yoshiki Hashimoto; Ryoji Tsuchiko; Satoshi Arai
An object levitating apparatus, an object transporting apparatus equipped with the object levitating apparatus, and an object levitating bearing as well as an object levitating process and object transporting process are described which, simultaneous to not placing restrictions on the material and so forth of the objects handled, are able to handle objects having relatively large weights and dimensions, while also being compact in size, inexpensive, preferable in terms of safety and so forth, and easy to control.
49 Transport system for material in powder or like form US737350 1985-05-16 US4648557A 1987-03-10 Michael J. R. Young
There is disclosed a transport system for material in powdered, particulate, granular or the like form. A generally horizontal flow channel extends from an inlet (20) to an outlet (11) for the material. An ultrasonic standing wave is set up in the body (10) surrounding the flow channel by means of a piezo-ceramic transducer (12). The standing wave is arranged to have an antinode at or near the inlet and a node at or near the outlet whereby the material flows along the channel.
50 VORRICHTUNG ZUM BERÜHRUNGSLOSEN TRANSPORTIEREN UND HALTEN VON GEGENSTÄNDEN ODER MATERIAL EP08734476.8 2008-04-09 EP2244961B1 2011-12-14 SCHILP, Michael; ZIMMERMANN, Josef; ZITZMANN, Adolf
The invention relates to a device for transporting and holding contact-sensitive components or material. Said device comprises the following characteristics: at least one oscillatory plate-shaped receiving element (2) for receiving the object that is to be transported or held and that is secured to the at least one oscillation generator (3), and at least two support elements (4), said oscillation generator (3) being arranged on a predetermined point of the plate-shaped receiving element (2) in order to displace the plate-shaped receiving element (2) in a swinging manner and the support elements (4) are disposed on one point on which the amplitude of the swinging movements is at least 50 % less than the maximum amplitude and the oscillation generator (3) is operated at a frequency that offsets the plate-shaped receiving element (2) into said oscillations such that the components or the material levitate in a contact-free manner.
51 VORRICHTUNG ZUM BERÜHRUNGSLOSEN TRANSPORTIEREN VON FLACHELEMENTEN EP04802711.4 2004-11-11 EP1685046B1 2008-02-27 ZIMMERMANN, Josef; ZITZMANN, Adolf; SCHILP, Michael; BOLIG, Tobias
52 ULTRASONIC LEVITATION DEVICE EP03744045.0 2003-03-11 EP1484269A1 2004-12-08 FUJINAGA, Teruaki, c/o IAI CORPORATION; YAMASHITA, Yoshifumi, c/o IAI CORPORATION

An ultrasonic levitation device, comprising a fixed part and a movable part movably installed on the fixed part, wherein thin ultrasonic vibrators are installed on the fixed part or the movable part and, for example, floating surfaces are formed, in sloped surfaces, stacking piezoelectric elements are installed on the fixed part or the movable part, plate oscillating devices are installed on the fixed part or the movable part through pillar members, or the direction of ultrasonic vibration of the fixed part or the movable part is changed by a vibrating direction changing means, whereby the movable part can be floated through the floating surfaces by ultrasonic vibration of the fixed part or the movable part.

53 VERFAHREN ZUM BERÜHRUNGSLOSEN GREIFEN UND POSITIONIEREN VON BAUTEILEN EP00936622.0 2000-04-13 EP1173375B1 2004-03-31 HÖPPNER, Jürgen; ZIMMERMANN, Josef
The present invention relates to a device for contactlessly gripping, holding and positioning, preferably contact sensitive, components. The device is provided with the following characteristics: sound producing means (2a) for producing levitation sound waves (3) which can be used for keeping the component (1) in suspension in a selected nodal point of energy (4) and in a holding level (5), whereby the nodal point pertains to the sound waves (3). The sound producing means (2a) are arranged in such a way that the planar edge sections (1a) extend only partially into the active area of the sound-radiating areas (6) belonging to the sound producing means (2a) and that the sum (A) of the sound-radiating surfaces (6) belonging to the sound producing means (2a) is smaller that the surface (B) of the component (1).
54 VORRICHTUNG ZUM BERÜHRUNGSLOSEN GREIFEN UND HALTEN EINES GEGENSTANDES EP02740229.6 2002-04-05 EP1387808A1 2004-02-11 HOEHN, Michael; HOEPPNER, Juergen
The invention relates to a device for gripping and holding an object (1) in a contactless manner from a direction (z) that is oriented at least partially towards the direction (z) of gravity (F), using a holding element (3), which is located in opposition to the direction (z) of gravity (F) and lies at least partially above the object (1) at a distance from the latter. Said device prevents to a great extent the entrainment or migration of particles that are potentially present. To achieve this, the holding element (3) is configured as an oscillating holding element (3) for generating levitation waves.
55 VORRICHTUNG ZUM BERÜHRUNGSLOSEN GREIFEN UND POSITIONIEREN VON BAUTEILEN EP00936622.0 2000-04-13 EP1173375A1 2002-01-23 HÖPPNER, Jürgen; ZIMMERMANN, Josef
The present invention relates to a device for contactlessly gripping, holding and positioning, preferably contact sensitive, components. The device is provided with the following characteristics: sound producing means (2a) for producing levitation sound waves (3) which can be used for keeping the component (1) in suspension in a selected nodal point of energy (4) and in a holding level (5), whereby the nodal point pertains to the sound waves (3). The sound producing means (2a) are arranged in such a way that the planar edge sections (1a) extend only partially into the active area of the sound-radiating areas (6) belonging to the sound producing means (2a) and that the sum (A) of the sound-radiating surfaces (6) belonging to the sound producing means (2a) is smaller that the surface (B) of the component (1).
56 TRANSPORT SYSTEM FOR MATERIAL IN POWDER OR LIKE FORM EP84903652.0 1984-10-04 EP0157846B1 1987-08-12 YOUNG, Michael, John, Radley
A transport system for material in powdered, particulate, granular or the like form. A generally horizontal flow channel extends from an inlet (20) to an outlet (11) for the material. An ultrasonic standing wave is set up in the body (10) surrounding the flow channel by means of a piezo-ceramic transducer (12). The standing wave is arranged to have an antinode at or near the inlet and a node at or near the outlet whereby the material flows along the channel.
57 音響分離装置 JP2017558776 2016-01-29 JP2018506488A 2018-03-08 ベルゼ・ミカエル; ティマー・グィード; シーファー・パトリック
【課題】分離されるパーツのサイズ、重量、または形状に対してより柔軟で、簡易化かつ改良されたパーツ分離を可能にする。【解決手段】製造プロセスにおいてパーツ(16)を分離する装置であって、音波を発生する音発生装置(19)と、前記音発生装置に機械的に結合されておらず、分離表面(14)を構成する支持台(12)と、を備え、前記支持台は、前記音発生装置(19)によって発振される前記音波が、前記分離表面(14)の少なくとも一部を運動させて、この分離装置上に載置された前記パーツ(16)が励起されて運動するように配置され、かつ構成されている分離装置。【選択図】図6
58 熱処理装置および熱処理方法 JP2012524433 2011-09-13 JP5874634B2 2016-03-02 下宮 修; 安藤 博史
59 音波浮上装置及び音波浮上方法 JP2012105514 2012-05-02 JP2015131731A 2015-07-23 下宮 修; 安藤 博史
【課題】ガラスリボンの損傷を抑制できる音波浮上装置を提供する。
【解決手段】音波浮上装置410は、幅が1〜8mであって幅方向中央部の板厚が0.05〜3mmであるガラスリボン14のうち、温度が300〜800℃の部分に音波を放射する上面を有する振動板411と、振動板411の下面から放射される音波を反射する上面を有する反射体450とを備える。振動板411の長手方向は、ガラスリボン14の幅方向と平行である。振動板411の上面の横断面形状は、上に凸状である。
【選択図】図5
60 Non-contact transport apparatus JP2008054570 2008-03-05 JP5099435B2 2012-12-19 浩已 磯部
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