Sample conveying apparatus |
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| 申请号 | JP11490084 | 申请日 | 1984-06-05 | 公开(公告)号 | JPS60258013A | 公开(公告)日 | 1985-12-19 |
| 申请人 | Toshiba Corp; | 发明人 | TOUJIYOU TOORU; SUGIHARA KAZUYOSHI; TABATA MITSUO; | ||||
| 摘要 | PURPOSE:To convey a sample in a vacuum with high reliability in a small-sized conveying apparatus for a manufacturing process by providing a vibrator in a conveying path to form a progressive wave on a conveying surface, and conveying the sample in the opposite direction to the progressive wave. CONSTITUTION:When alternating voltage is applied to piezo-electric elements 7, the piezo-electric elements are expanded and contracted according to the degree of voltage so that a creep wave 8 according to the phase of applied voltage is formed on the surface of a conveying path 1. Thus, a sample 4 on the conveying path 1 is conveyed in the opposite direction to the advancing direction. In this arrangement, if the phase of applied alternating voltage is suitably selected, the conveying direction can be freely selected to be normal or reverse. Furthermore, the sample can be conveyed in a vacuum without a rubber or the like reliably. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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