A voltage protection assembly (100) comprises a planar substrate (102) having a thickness dimension (300) that vertically extends from an upper surface (304) of the substrate to an opposite lower surface (302) of the substrate. The substrate includes one or more conductive traces (104). The voltage protection assembly comprises a conductive input terminal (106) conductively coupled with at least one of the conductive traces, and a conductive output terminal (108) conductively coupled with at least one of the conductive traces. The output terminal, an inductive element (120), a capacitive element (118, 600), and the input terminal are connected in series by the conductive traces to form a voltage protection circuit (110, 112) that filters one or more frequencies of a data signal transmitted through the voltage protection circuit. At least one of the capacitive element (118, 600) and the inductive element (120) are entirely disposed within the thickness dimension (300) of the substrate.

A piezoelectric MEMS device, comprises a cantilever beam arrangement (16) with a piezoelectric actuation layer (24) for actuating movement of the cantilever beam arrangement between an open position and a closed position in which the cantilever beam arrangement causes contact with a first electrical contact (15). The cantilever beam arrangement (16) comprises at least three adjacent cantilever beams (40,42,44,46,48), wherein the beams each have a fixed connection end and are coupled together at their free contact ends to define a single shared contact region (54).

The device thus comprises at least three cantilevers actuated next to each other in such a way that all contribute to the contact force. The contact force is thus increased nearly linearly with the number of cantilevers.

A piezoelectric Micro Electro Mechanical System (MEMS) switch includes a substrate (101), first and second fixed signal lines (103,105) symmetrically formed in a spaced-apart relation to each other on the substrate to have a predetermined gap (G) therebetween, a piezoelectric actuator (130) disposed in alignment with the first and the second fixed signal lines (103,105) in the predetermined gap (G), and having a first end supported on the substrate (101) to allow the piezoelectric actuator to be movable up and down, and a movable signal line (150) having a first end connected to one of the first and the second fixed signal lines, and a second end configured to be in contact with, or separate from the other of the first and second fixed signal lines, the movable signal line at at least one side thereof being connected to an upper surface of the piezoelectric actuator (130).

Provided is a microelectromechanical system (MEMS) actuator in which a cantilever piezoelectric actuator and a comb actuator are combined to perform dual shaft drive. The MEMS includes: a stationary comb (10) fixed on a substrate; a movable comb (11) disposed separately from the substrate; and a spring (12) connected to the movable comb and the substrate to resiliently support the movable comb, wherein the movable comb includes a piezoelectric material layer (111d) in a laminated manner to be perpendicularly moved by a piezoelectric phenomenon and laterally moved by an electrostatic force to the stationary comb, whereby the MEMS actuator can be used in a driving apparatus of an ultra-slim optical disk drive since the movable comb is made of a piezoelectric material to simultaneously perform focusing actuation to a Z-axis as well as planar actuation.