| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 181 | MICRO ELECTRO-MECHANICAL SYSTEM DEVICE WITH PIEZOELECTRIC THIN FILM ACTUATOR | EP03786748.8 | 2003-11-14 | EP1560787B1 | 2007-04-04 | PARK, Joon, c/o Raytheon Company; NAKAHIRA, Ron, K., c/o Raytheon Company; ALLISON, Robert, C., c/o Raytheon Company |
| A radio frequency (RF) micro electro-mechanical system (MEMS) device and method of making same are provided, the device including an RF circuit substrate (24) and an RF conducting path (32, 34) disposed on the RF circuit substrate, a piezoelectric thin film actuator (16), and a conducting path electrode (18). The piezoelectric thin film actuator has a proximal end (54) that is fixed relative to the RF circuit substrate and a cantilever end (56) that is spaced from the RF circuit substrate. The conducting path electrode is disposed on the cantilever end of the piezoelectric thin film actuator. The cantilever end of the piezoelectric thin film actuator is movable between a first position whereat the conducting path electrode is spaced from the RF path electrode and a second position whereat the conducting path electrode is spaced from the RF path electrode a second distance, wherein the second distance is less than the first distance. The RF MEMS device is particularly useful as a tunable capacitor. The RF MEMS device requires lower operating voltage, and provides variable RF tuning capacity, fewer stiction problems, simplified fabrication, and an improved switching time. | ||||||
| 182 | Microsystème électromécanique pouvant basculer entre deux positions stables | EP05290164.2 | 2005-01-25 | EP1562207B1 | 2007-01-03 | Bouche, Guillaume |
| The system has a beam (111) and resistive units (121, 122, 132) to assure switching of a beam (110) between open and closed positions. An electrical continuity is established between two disjointed conductors (141, 142) in the closed position through contact between contact arms (151, 152) and the continuity is broken by spacing the arms in the open position. The open and closed positions correspond to buckling positions of beams. | ||||||
| 183 | ELEKTRONISCHES GERÄT MIT EINEM MIKRO-ELEKTROMECHANISCHEN SCHALTER AUS PIEZOELEKTRISCHEM MATERIAL | EP04806609.6 | 2004-12-21 | EP1706883A1 | 2006-10-04 | PELZER, Heiko; STEENEKEN, Peter, G.; LEWALTER, Astrid |
| The device improved according to the invention comprises a micro-electromechanical switch (MEMS) with a piezoelectric element connected to a mechanical support on both sides at the edges. The electrode design of this piezoelectric element is characterized by two electrodes mounted on at least one of the surfaces. | ||||||
| 184 | Mécanisme de déplacement utilisant un organe d'actionnement piezo-électrique | EP00401352.0 | 2000-05-17 | EP1058322B9 | 2006-03-22 | Beyrard, Norbert |
| 185 | Low voltage micro switch | EP04009465.8 | 2004-04-22 | EP1471558A3 | 2006-03-01 | Park, Jae Yeong |
A low voltage micro switch includes a substrate having an actuating space therein; an actuating unit having a piezoelectric material extended in a cantilever beam shape from a portion of the substrate to the actuating space of the substrate and a bias electrode; a conductive signal line extendedly formed at a certain interval from one side of the substrate and having a disconnected portion ; a supporting unit connected to the actuating unit, positioned in the actuating space, and moving according to actuation of the actuating unit; a switching unit formed at the supporting unit and connecting or disconnecting the disconnected portion of the conductive signal line according to movement of the supporting unit; and one or more ground units formed at the substrate.
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| 186 | METAL-ELECTROACTIVE CERAMIC COMPOSITE TRANSDUCERS | EP96944975.0 | 1996-12-12 | EP0867043B1 | 2006-03-01 | NEWNHAM, Robert, E.; DOGAN, Aydin |
| A metal-ceramic device includes an electroactive ceramic substrate (34) having a pair of opposed planar surfaces and a thickness aspect. Conductive electrodes sandwich the ceramic substrate and a first sheet metal cap (30) having a concave shape, a substantially unchanging thickness and a rim is joined to a first planar surface of the ceramic substrate. A second sheet metal cap (32) having a concave shape, a substantially unchanging thickness and a rim is bonded to a second planar surface of the ceramic substrate, the second planar surface opposed to the first planar surface. In an actuator embodiment, a potential is applied across the conductive electrodes to cause an expansion of the ceramic substrate in the thickness dimension and a concomitant contraction in its planar dimensions. The contraction causes a flexure of the sheet metal caps, which flexures are used for actuation purposes. In a sensor embodiment, the sheet metal caps are subjected to a displacement by an instrumentality, and a resulting change in voltage across the ceramic substrate is sensed. | ||||||
| 187 | MICRO-RELAY AND METHOD FOR MANUFACTURING THE SAME | EP97936864.4 | 1997-08-26 | EP0923099B1 | 2006-02-01 | SAKATA, Minoru Omron Corp. 801, Minamifudodo-cho; NAKAJIMA, Takuya Omron Corp. 801,Minamifudodo-cho; Seki, Tomonori Omron Corp. 801, Minamifudodo-cho; FUJIWARA,Teruhiko Omron Corp. 801,Minamifudodo-cho; TAKEUCHI, Masashi Omron Corp. 801,Minamifudodo-cho |
| An extremely small micro-relay having such a mechanical contact mechanism that it becomes smaller in resistance when the contact is turned on and has an excellent vibration resistance, frequency characteristic, and insultating property is constituted in such a way that a piezoelectric element (24) or heater layer (27) is provided on a thin plate-like single-crystal substrate (21) and a mobile piece (20) carrying a traveling contact (25) on one surface is supported on a base (11) while both ends of the piece (20) are fixed to the base (11) so that the traveling contact (25) can be brought into contact with or separated from a pair of fixed contacts (38 and 39) faced to the contact (25) when the piece (20) is bent by the action of the piezoelectric element (24) or the heater layer (27). | ||||||
| 188 | FLUID-BASED SWITCHES | EP04706947.1 | 2004-01-30 | EP1614132A2 | 2006-01-11 | WONG, Marvin, Glenn |
| Fluid-based switcnes are disclosed. In one embodiment, the switch (400) comprises first (100) and second (402) mated substrates defining therebetween at least portions of a number of cavities, the first substrate defining a plurality of indentations (102, 104, 106) defined within a first one of the cavities (406), a plurality of electrical contacts (112, 114, 116), each electrical contact deposited within one of the indentations, a switching fluid (418), held within the first cavity, that serves to open and close at least a pair of the plurality of electrical contacts in response to forces that are applied to the switching fluid, and an actuating fluid (410), held within one or more of the cavities, that applies the forces to the switching fluid. | ||||||
| 189 | Electrostatic RF mems switches | EP03254975.0 | 2003-08-11 | EP1391906A3 | 2005-10-26 | Song, In-sang; Lee, Moon-chul; Kim, Young-il; Shim, Dong-ha; Hong, Young-tack; Park, Sun-hee; Nam, Kuang-woo |
A micro switch having a dielectric layer (2) having a movement region formed on a substrate (1), a conductive layer (3) formed on a predetermined portion of the movement region, a dielectric film (3') formed on the conductive layer (3), first and second electric conductors (9a,9b) formed a predetermined distance above the dielectric film (2), one or two lower electrodes formed on the movement region, and one or two upper electrodes formed a predetermined distance above the two lower electrodes, the one or two upper electrodes moving the conductive layer (3) and the dielectric film (2) upwards when an electrostatic force occurs between the upper and lower electrodes, and capacitively coupled with the first and second electric conductors (9a,9b) to allow a current to flow between the first and second electric conductors. Such a micro switch has a high on/off ratio and isolation degree and a simple structure, and can be fabricated in a very easy process. |
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| 190 | Mécanisme de déplacement utilisant un organe d'actionnement piezo-électrique | EP00401352.0 | 2000-05-17 | EP1058322B8 | 2005-10-05 | Beyrard, Norbert |
| 191 | MICRO ELECTRO-MECHANICAL SYSTEM DEVICE WITH PIEZOELECTRIC THIN FILM ACTUATOR | EP03786748.8 | 2003-11-14 | EP1560787A2 | 2005-08-10 | PARK, Joon,c/o Raytheon Company; NAKAHIRA, Ron, K.,c/o Raytheon Company; ALLISON, Robert, C.,c/o Raytheon Company |
| A radio frequency (RF) micro electro-mechanical system (MEMS) device and method of making same are provided, the device including an RF circuit substrate (24) and an RF conducting path (32, 34) disposed on the RF circuit substrate, a piezoelectric thin film actuator (16), and a conducting path electrode (18). The piezoelectric thin film actuator has a proximal end (54) that is fixed relative to the RF circuit substrate and a cantilever end (56) that is spaced from the RF circuit substrate. The conducting path electrode is disposed on the cantilever end of the piezoelectric thin film actuator. The cantilever end of the piezoelectric thin film actuator is movable between a first position whereat the conducting path electrode is spaced from the RF path electrode and a second position whereat the conducting path electrode is spaced from the RF path electrode a second distance, wherein the second distance is less than the first distance. The RF MEMS device is particularly useful as a tunable capacitor. The RF MEMS device requires lower operating voltage, and provides variable RF tuning capacity, fewer stiction problems, simplified fabrication, and an improved switching time. | ||||||
| 192 | MICROFABRICATED DOUBLE-THROW RELAY WITH MULTIMORPH ACTUATOR AND ELECTROSTATIC LATCH MECHANISM | EP02752736.5 | 2002-08-08 | EP1527465A1 | 2005-05-04 | HYMAN, Daniel, J.; HYMAN, Mark, K.; BOGDANOFF, Peter, D. |
| This invention is a new type of relay that incorporates the functional combination of multimorph actuator elements with electrostatic state holding mechanisms in the development of a micromachined switching device. This combination of elements provides the benefits of high-force multimorph actuators with those of zero-power electrostatic capacitive latching in microfabricated relays with high reliability and low power consumption. The operation of the relay invention allows for several stable states for the device: a passive state using no power, an active state driving the multimorph actuator with some power, and a latched state electrostatically holding the switch rate requiring essentially no power. Multimorph actuators covered by this invention include piezoelectric, thermal, and buckling multimorph actuation mechanisms. These devices use one or more sets of actuator armatures in cantilever or fixed-beam configurations, and use one or more sets of electrostatic latch electrodes for state holding. | ||||||
| 193 | Micro-relay and method for manufacturing the same | EP04028872.2 | 1997-08-26 | EP1517344A1 | 2005-03-23 | Sakata, Minoru, c/o Omron Corporation; Nakajima, Takuya, c/o Omron Corporation; Seki, Tomonori, c/o Omron Corporation; Fujiwara, Teruhiko, c/o Omron Corporation; Takeuchi, Masashi, c/o Omron Corporation |
A thin plate-shaped substrate 21 comprised of a monocrystal is provided with a piezoelectric element 24, and both ends of a movable piece 20 whose one surface is provided with a movable contact 25 are fixed and supported to a base 11. Then, by curving the movable piece 20 via the piezoelectric element 24, the movable contact 25 is brought in and out of contact with a pair of fixed contacts 38 and 39 that face the movable contact. With this arrangement, a subminiature micro-relay having a mechanical contact mechanism that has a small resistance in turning on the contact and the desired vibration resistance, frequency characteristic and insulating property can be obtained. |
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| 194 | Micro-relay and method for manufacturing the same | EP03023641.8 | 1997-08-26 | EP1394826A2 | 2004-03-03 | Sakata, Minoru, Omron Corp., 801, Minamifudodo-cho; Nakajima, Takuya, Omron Corp 801 Minamifudodo-cho; Seiki, Tomonori, Omron Corp 801 Minamifudodo-cho; Fujiwara, Teruhiko Omron Corp 801 Minamifudodo-cho; Takeuchi, Masashi Omron Corp 801 Minamifudodo-cho |
A thin plate-shaped substrate 21 comprised of a monocrystal is provided with a piezoelectric element 24, and both ends of a movable piece 20 whose one surface is provided with a movable contact 25 are fixed and supported to a base 11. Then, by curving the movable piece 20 via the piezoelectric element 24, the movable contact 25 is brought in and out of contact with a pair of fixed contacts 38 and 39 that face the movable contact. With this arrangement, a subminiature micro-relay having a mechanical contact mechanism that has a small resistance in turning on the contact and the desired vibration resistance, frequency characteristic and insulating property can be obtained. |
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| 195 | PIEZOELECTRIC ACTUATOR | EP98910831.1 | 1998-03-06 | EP0965147B1 | 2003-12-10 | POWELL, Simon |
| An electrically controlled actuator comprises at least two co-planar blades formed by a U-shaped pressing from a sheet of material. The end of one blade (60) is used as a mounting for the actuator and the end of the other blade (85) is used as an actuation surface. Piezo ceramic material is fixed to opposite surface of the two blades in order to flex the actuation surface with respect to the fixed surface. An electrically relay or residual current device incorporating such an actuator is disclosed. | ||||||
| 196 | Electronic driving circuit for a bistable actuator | EP99204082.4 | 1999-12-02 | EP1014413A3 | 2001-12-12 | Colombo, Franco; Colonna, Donato; Manara, Angelo; Turati, Walter |
An electronic driving circuit for a bistable actuator activated by piezoelectric elements, particularly for residual-current devices, the circuit comprising voltage step-up means which are suitable to step up and store a voltage generated across a secondary winding of a current sensor, the step-up means being connected to threshold setting means which are suitable to determine an intervention threshold of a bistable actuator activated by piezoelectric elements, whose activation is determined by an excitation voltage applied across it which is higher than the voltage threshold set by the threshold setting means. |
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| 197 | Mécanisme de déplacement utilisant un organe d'actionnement piezo-électrique | EP00401352.0 | 2000-05-17 | EP1058322A1 | 2000-12-06 | Beyrard, Norbert |
L'invention est relative à un dispositif d'actionnement comprenant au moins un moteur piézo-électrique et une pièce mobile, dans lequel ledit moteur piézo-électrique est formé d'au moins un élément piézo-électrique associé à des moyens d'alimentation en courant électrique permettant d'induire des déformations oscillatoires dudit élément piézo-électrique, et dans lequel la pièce mobile comprend au moins une micro crémaillère destinée à permettre la transmission à la pièce mobile de la force motrice engendrée par les déformations oscillatoires de l'élément piézo-électrique. |
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| 198 | MICRO-RELAY AND METHOD FOR MANUFACTURING THE SAME | EP97936864 | 1997-08-26 | EP0923099A4 | 2000-08-16 | SAKATA MINORU; NAKAJIMA TAKUYA; SEIKI TOMONORI; FUJIWARA TERUHIKO; TAKEUCHI MASASHI |
| An extremely small micro-relay having such a mechanical contact mechanism that it becomes smaller in resistance when the contact is turned on and has an excellent vibration resistance, frequency characteristic, and insultating property is constituted in such a way that a piezoelectric element (24) or heater layer (27) is provided on a thin plate-like single-crystal substrate (21) and a mobile piece (20) carrying a traveling contact (25) on one surface is supported on a base (11) while both ends of the piece (20) are fixed to the base (11) so that the traveling contact (25) can be brought into contact with or separated from a pair of fixed contacts (38 and 39) faced to the contact (25) when the piece (20) is bent by the action of the piezoelectric element (24) or the heater layer (27). | ||||||
| 199 | Electronic driving circuit for a bistable actuator | EP99204082.4 | 1999-12-02 | EP1014413A2 | 2000-06-28 | Colombo, Franco; Colonna, Donato; Manara, Angelo; Turati, Walter |
An electronic driving circuit for a bistable actuator activated by piezoelectric elements, particularly for residual-current devices, the circuit comprising voltage step-up means which are suitable to step up and store a voltage generated across a secondary winding of a current sensor, the step-up means being connected to threshold setting means which are suitable to determine an intervention threshold of a bistable actuator activated by piezoelectric elements, whose activation is determined by an excitation voltage applied across it which is higher than the voltage threshold set by the threshold setting means. |
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| 200 | LOW COMPONENT COUNT RELEASE MECHANISM | EP98910831.0 | 1998-03-06 | EP0965147A1 | 1999-12-22 | POWELL, Simon |
| An electrically controlled actuator comprises at least two co-planar blades formed by a U-shaped pressing from a sheet of material. The end of one blade (60) is used as a mounting for the actuator and the end of the other blade (85) is used as an actuation surface. Piezo ceramic material is fixed to opposite surface of the two blades in order to flex the actuation surface with respect to the fixed surface. An electrically relay or residual current device incorporating such an actuator is disclosed. | ||||||
