| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 161 | 압전 구동 ＭＥＭＳ 디바이스 | KR1020070031694 | 2007-03-30 | KR1020070098735A | 2007-10-05 | 니시가끼미찌히꼬; 나가노도시히꼬; 미야자끼다까시; 이따야가즈히꼬; 가와꾸보다까시 |
| A piezoelectric driven MEMS device is provided to control a displacement quantity of a piezoelectric drive with high reproducibility and high precision. A piezoelectric driven MEMS device includes a first actuator(11), a second actuator(21), and an electrical circuit element. The first actuator(11) includes a lower electrode(13), a piezoelectric film(14), an intermediate electrode(15), a piezoelectric film(16), and an upper electrode(17). The first actuator(11) is a piezoelectric driven actuator having the bimorph structure. An action part(12) is connected to a second part of the first actuator(11). The second actuator(21) is formed with the same stacked structure as the first actuator(11), under the same fabrication condition as the first actuator(11), or concurrently with the first actuator(11). A first end of the first actuator(11) is a fixed end, and is fixed to a substrate through an anchor(28). The second actuator(21) includes a lower electrode(23), a piezoelectric film(24), an intermediate electrode(25), a piezoelectric film(26), and an upper electrode(27). | ||||||
| 162 | 압전형 ＭＥＭＳ 스위치 및 그 제조방법 | KR1020060028991 | 2006-03-30 | KR1020070097963A | 2007-10-05 | 김종석; 송인상; 이상훈; 권상욱; 이창승; 홍영택; 김재흥 |
| A piezoelectric MEMS(Micro Electric Mechanical system) switch and a manufacturing method for the same are provided to form a piezoelectric actuator firstly before an RF signal line for preventing the excessive etching process of the rear surface of the substrate, and for improving the driving efficiency of the actuator. A piezoelectric MEMS(Micro Electric Mechanical system) switch comprises a substrate(101), first and second fixed signal lines, a piezoelectric actuator(130), and a moving signal line(150). The piezoelectric actuator is placed at the same line as the first and second fixed signal lines. One end of the piezoelectric actuator is supported by the substrate to be longitudinally driven. At least one side of the moving signal line is connected to an upper surface of the piezoelectric actuator. One end of the piezoelectric actuator is connected to at least one of the signal lines, and the other end of the actuator is contacted and separated with or from the signal lines. An interval part of the substrate is formed with a first cavity. A second cavity is formed to one side of the first cavity. The moving signal line has first and second supports(151,153), and a contact part(155). | ||||||
| 163 | 네비게이션 키 구조 및 동작 방법 | KR1020050016530 | 2005-02-28 | KR1020060095120A | 2006-08-31 | 구본관; 오영민 |
| 본 발명은 동서남북 이외의 대각선 방향 등 보다 세분화된 방향으로의 조작이 용이하게 수행될 수 있는 네비게이션 키 구조 및 동작 방법에 관한 것으로서, 본 발명에 따른 네비게이션 키 구조는 외부의 물리적 힘의 인가에 의해 제반 방향으로의 조작이 가능한 폴과, 상기 폴의 측부에 구비되며, 동서남북 방향을 포함한 적어도 5개 이상의 방향을 가리키는 방향 돌기와, 상기 폴의 측부로부터 소정 거리 이격된 위치에 상기 폴의 둘레를 따라 구비되는 원통형 부재와, 상기 원통형 부재 내측면의 상기 폴의 방향 돌기와 대응되는 위치에 상기 방향 돌기에 상응하는 수만큼 구비되는 적어도 5개 이상의 감지 센서를 포함하여 이루어지는 것을 특징으로 한다. 네비게이션, 방향, 조이스틱 | ||||||
| 164 | 작은 개수의 구성품을 갖는 카운트 해제 기구 | KR1019997008114 | 1998-03-06 | KR100614854B1 | 2006-08-25 | 파웰사이먼 |
| 전기 제어식 액츄에이터는 시트 재료의 U형 프레싱물에 의해 형성되면서 동일 평면 상에 위치되는 두 개 이상의 블레이드들을 구비한다. 하나의 블레이드(60)의 단부는 액츄에이터를 위한 장착부로서 사용되고, 다른 하나의 블레이드(85)의 단부는 작동 표면으로서 사용된다. 압전세라믹 재료가 두 개의 블레이드들의 대향 표면에 고정되어 고정 표면에 관하여 작동 표면이 휘어질 수 있도록 한다. 이러한 액츄에이터를 통합하는 전기 릴레이 또는 누전차단기가 개시된다. | ||||||
| 165 | 마이크로 스위칭 소자 | KR1020050093283 | 2005-10-05 | KR1020060088001A | 2006-08-03 | 나카타니다다시; 안트엔구엔; 시마노우치다케아키; 이마이마사히코; 우에다사토시 |
| 본 발명은 닫힌 상태에서의 삽입 손실의 저감을 꾀하는데 적합하고, 또한 적절하게 제조할 수 있는 마이크로 스위칭 소자를 제공하는 것을 과제로 한다. 본 발명의 마이크로 스위칭 소자(X1)는 베이스 기판과, 베이스 기판에 접합하고 있는 고정부(10)와, 고정부(10)에 고정된 고정단(20a)을 가지고 베이스 기판에 따라 연장하며, 또한 한 쌍의 폐단(閉端)(41a)을 갖는 슬릿(41)을 통하여 고정부(10)로 둘러싸인 가동부(20)와, 가동부(20)에서의 베이스 기판과 반대 측에 설치된 가동 콘택트부(31)와, 가동 콘택트부(31)에 대향하는 부위를 각각 갖고, 또한 각각 고정부(10)에 접합되어 있는 한 쌍의 고정 콘택트 전극(32)을 구비한다. 마이크로 스위칭 소자, 가동 콘택트부, 고정 콘택트 전극, 슬릿 | ||||||
| 166 | ＭＥＭＳ 액츄에이터 | KR1020040107033 | 2004-12-16 | KR1020060068370A | 2006-06-21 | 김기출; 김상협; 김혜진; 조두희 |
| 본 발명은 마이크로 전자기계 시스템 액츄에이터에 관한 것으로, 보다 상세하게는 압전 캔틸레버 액츄에이터와 콤브 액츄에이터가 결합되어 2축 구동을 하는 마이크로 전자기계 시스템 액츄에이터를 제공한다. 본 액츄에이터에 의하면, 가동 콤브가 압전물질로 구성되어 있어 평면 액츄에이션뿐만 아니라, z축으로의 포커싱 액츄에이션도 병행가능하여 초박형 광 디스크 드라이브의 구동장치에 사용가능하다. 콤브 액츄에이터, 압전 액츄에이터, 압전 단결정 액츄에이터 | ||||||
| 167 | 스위치 | KR1020057019483 | 2004-01-30 | KR1020060004668A | 2006-01-12 | 웅마빈글렌 |
| Fluid-based switcnes are disclosed. In one embodiment, the switch (400) comprises first (100) and second (402) mated substrates defining therebetween at least portions of a number of cavities, the first substrate defining a plurality of indentations (102, 104, 106) defined within a first one of the cavities (406), a plurality of electrical contacts (112, 114, 116), each electrical contact deposited within one of the indentations, a switching fluid (418), held within the first cavity, that serves to open and close at least a pair of the plurality of electrical contacts in response to forces that are applied to the switching fluid, and an actuating fluid (410), held within one or more of the cavities, that applies the forces to the switching fluid. | ||||||
| 168 | 압전 박막 액추에이터를 갖는 마이크로 전기-기계 시스템장치 | KR1020057008642 | 2003-11-14 | KR1020050086629A | 2005-08-30 | 박,준; 나까히라,론,케이.; 앨리슨,로버트,씨. |
| A radio frequency (RF) micro electro- mechanical system (MEMS) device and method of making same are provided, the device including an RF circuit substrate (24) and an RF conducting path (32, 34) disposed on the RF circuit substrate, a piezoelectric thin film actuator (16), and a conducting path electrode (18). The piezoelectric thin film actuator has a proximal end (54) that is fixed relative to the RF circuit substrate and a cantilever end (56) that is spaced from the RF circuit substrate. The conducting path electrode is disposed on the cantilever end of the piezoelectric thin film actuator. The cantilever end of the piezoelectric thin film actuator is movable between a first position whereat the conducting path electrode is spaced from the RF path electrode and a second position whereat the conducting path electrode is spaced from the RF path electrode a second distance, wherein the second distance is less than the first distance. The RF MEMS device is particularly useful as a tunable capacitor. The RF MEMS device requires lower operating voltage, and provides variable RF tuning capacity, fewer stiction problems, simplified fabrication, and an improved switching time. | ||||||
| 169 | 마이크로 릴레이 및 그 제조 방법 | KR1019997001582 | 1997-08-26 | KR1020000035875A | 2000-06-26 | 사카타미노루; 나카지마다쿠야; 세키도모노리; 후지와라데루히코; 다케우치마사시 |
| PURPOSE: An extremely small micro relay having such a mechanical contact mechanism is provided for smaller resistance when the contact is turned on and for an excellent vibration resistance, frequency characteristic. CONSTITUTION: The property is constituted in such a way that a piezoelectric element (24)or heater layer (27) is provided on a thin plate like single crystal substrate (21) and a mobile piece (20) carrying a traveling contact (25) on one surface is supported on a base (11) while both ends of the piece (20) are fixed to the base (11) so that the traveling contact (25) can be brought into contact with or separated from a pair of fixed contacts (38 and 39) faced to the contact (25) when the piece (20) is bent by the action of the piezoelectric element (24) or the heater layer (27). | ||||||
| 170 | MIKRO-ELEKTRO-MECHANISCHES SYSTEM UND VERFAHREN ZUM HERSTELLEN DESSELBEN | EP15704009.8 | 2015-02-12 | EP3105770A1 | 2016-12-21 | LISEC, Thomas; STOPPEL, Fabian |
| A microelectromechanical system comprises a deflectable actuator plate and a stop surface. An integral piezoelectric functional layer of the deflectable actuator plate is formed over an area (A PS) of the actuator plate. The deflectable actuator plate is designed to implement a concave curvature in at least one driven or non-driven state, wherein the stop surface is arranged in a manner facing a concave side of the deflectable actuator plate defined by the concave curvature. The deflectable actuator plate is designed to provide a mechanical contact between the deflectable actuator plate and the stop surface in the state in which said deflectable actuator plate implements the concave curvature. In the other state, the deflectable actuator plate is arranged at a distance from the stop surface. | ||||||
| 171 | MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING | EP11766622.2 | 2011-04-06 | EP2556014B1 | 2016-08-03 | GOGGIN, Raymond; FITZGERALD, Padraig |
| 172 | MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING | EP11766622 | 2011-04-06 | EP2556014A4 | 2014-11-26 | GOGGIN RAYMOND; FITZGERALD PADRAIG |
| 173 | Operation input device | EP12193995.3 | 2012-11-23 | EP2610706A3 | 2014-03-12 | Taka, Yoichiro; Koyama, Ryoji; Adachi, Kazuhide |
An operation input device comprises a touch pad that includes an operation plate, on a surface of which an operation surface is formed, and senses an object to be sensed in contact with or in proximity to the operation surface to receive input corresponding to a position of the sensed object, a hole portion provided to penetrate through the operation plate, a protrusion member inserted into the hole portion, and a drive mechanism provided on a back surface side with respect to the operation plate and capable of causing advancing/retracting operation of the protrusion member along a direction intersecting the operation surface between a first state in which a distal end portion of the protrusion member is above the operation surface and a second state in which the distal end portion is not above the operation surface.
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| 174 | Planar voltage protection assembly | EP11161268.5 | 2011-04-06 | EP2375877A3 | 2013-10-09 | Harrison, William; Dalmia, Sidharth; Das, Jaydip |
A voltage protection assembly (100) comprises a planar substrate (102) having a thickness dimension (300) that vertically extends from an upper surface (304) of the substrate to an opposite lower surface (302) of the substrate. The substrate includes one or more conductive traces (104). The voltage protection assembly comprises a conductive input terminal (106) conductively coupled with at least one of the conductive traces, and a conductive output terminal (108) conductively coupled with at least one of the conductive traces. The output terminal, an inductive element (120), a capacitive element (118, 600), and the input terminal are connected in series by the conductive traces to form a voltage protection circuit (110, 112) that filters one or more frequencies of a data signal transmitted through the voltage protection circuit. At least one of the capacitive element (118, 600) and the inductive element (120) are entirely disposed within the thickness dimension (300) of the substrate.
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| 175 | APPAREIL ELECTRIQUE A ACTIONNEUR PIEZOELECTRIQUE PILOTE | EP03735776.1 | 2003-03-10 | EP1485931B1 | 2013-05-15 | BATAILLE, Christian; FOLLIC, Stéphane |
| 176 | MICRO ELECTROMECHANICAL SYSTEM SWITCH. | EP04768261.2 | 2004-08-27 | EP1658627B1 | 2011-11-09 | BUNYAN, Robert John Tremayne, QinetiQ Limited; COMBES, David Jonathon, QinetiQ Limited; BRUNSON, Kevin Michael, QinetiQ Limited |
| A micro electromechanical system (MEMS) switch includes a fixed contact (24) and a moveable contact (35) on an armature (30). The switch has electrodes (22, 34) associated with both the fixed and moveable contacts for providing an electrostatic switch operation and piezoelectric material with associated electrodes (36, 40) for bending the armature upon application of an electric voltage and providing an initial piezoelectric switch operation followed by electrostatic switching and clamping. The armature is of curved shape which is bent away from the fixed contact when in a switch open condition with zero applied voltage. This gives a large, e.g. 3 pm, switch gap in an OFF state which is reduced by piezoelectric operation suitable for electrostatic switch closing. A curved condition is provided by varying strain across the armature thickness, and is produced during manufacture of the switch. | ||||||
| 177 | SELF-LOCKING MICRO ELECTRO MECHANICAL DEVICE | EP07805222.2 | 2007-07-24 | EP2052396A2 | 2009-04-29 | HILGERS, Achim |
| The proposed invention application describes a novel configuration of an extremely small self-locking switching component, based on micro- electromechanical systems (MEMS) technology. Conventional MEMS switches need a continual control signal in order to obtain the wanted active (switching) state. The proposed invention needs only a short control signal (non-locking key) such as e.g. a pulse in order to switch the component on and/or off. RF-noise (ripples) on the de-control signal or bouncing effects can be neglected according to the proposed extension of the MEMS devices. This contributes to an easier and especially more robust design of electronic circuitries and allows for enhanced functionalities. | ||||||
| 178 | ELECTRONIC DEVICE | EP04806599.9 | 2004-12-20 | EP1726048B1 | 2008-09-10 | KLEE, Mareike, K.; RIJKS, Theodoor, G., S., M.; LOK, Pieter; MAUCZOK, Ruediger, G. |
| The microelectromechanical system (MEMS) element ( 101 ) comprises a first electrode ( 31 ) that is present on a surface of substrate ( 30 ) and a movable element ( 40 ). This overlies at least partially the first electrode ( 31 ) and comprises a piezoelectric actuator, which movable element ( 40 ) is movable towards and from the substrate ( 30 ) by application of an actuation voltage between a first and a second position, in which first position it is separated from the substrate ( 30 ) by a gap. Herein the piezoelectric actuator comprises a piezoelectric layer ( 25 ) that is on opposite surfaces provided with a second and a third electrode ( 21,22 ) respectively, said second electrode ( 21 ) facing the substrate ( 30 ) and said third electrode ( 22 ) forming an input electrode of the MEMS element ( 101 ), so that a current path through the MEMS element ( 101 ) comprises the piezoelectric layer ( 25 ) and the tunable gap. | ||||||
| 179 | Microelectromechanical System Actuator | EP05105264.5 | 2005-06-15 | EP1672654B1 | 2007-08-15 | Kim, Ki Chul; Kim, Sang Hyeob; Kim, Hye Jin; Cho, Doo Hee |
| 180 | ELECTRONIC DEVICE | EP05794816.8 | 2005-10-24 | EP1807855A1 | 2007-07-18 | STEENEKEN, Peter G., c/o Philips Intellectual Property & Standards GmbH; VAN BEEK, Jozef T. M., c/o Philips Intell. Property & Standards GmbH; RIJKS, Theo, c/o Philips Intellectual Property & Standards GmbH |
| The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate. The MEMS element includes a first electrode and a second electrode, that is part of a movable element and movable towards and from the first electrode between a first and a second position. The second electrode is separated from the first electrode by an air gap in its first position. The movable element includes a mechanical layer and an intermediate layer, in which the second electrode is defined. The second electrode is constituted by a plurality of sections in the intermediate layer, each of which is mechanically connected by a separate vertical interconnect to the mechanical layer. | ||||||
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