| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 161 | Electrostatically controlled micro-relay device | EP99830731.8 | 1999-11-25 | EP1026718B1 | 2003-02-05 | Pizzi, Marco; Koniachkine, Valerian; Perlo, Piero; Sinesi, Sabino |
| 162 | MICROMACHINED ELECTROSTATIC ACTUATOR WITH AIR GAP | EP00930822.2 | 2000-05-19 | EP1183566A1 | 2002-03-06 | GOODWIN-JOHANSSON, Scott, Halden |
| A MEMS (Micro Electro Mechanical System) electrostatic device operated with lower and more predictable operating voltages is provided. An electrostatic actuator, an electrostatic attenuator of electromagnetic radiation, and a method for attenuating electromagnetic radiation are provided. Improved operating voltage characteristics are achieved by defining a non increasing air gap between the substrate electrode and flexible composite electrode within the electrostatic device. A medial portion of a multilayer flexible composite overlying the electromechanical substrate is held in position regardless of the application of electrostatic force, thereby sustaining the defined air gap. The air gap is relatively constant in separation from the underlying microelectronic surface when the medial portion is cantilevered in one embodiment. A further embodiment provides an air gap that decreases to zero when the medial portion approaches and contacts the underlying microelectronic surface. A moveable distal portion of the flexible composite is biased to curl naturally due to differences in thermal coefficients of expansion between the component layers. In response to electrostatic forces, the distal portion moves and thereby alters the distance separating the flexible composite from the underlaying microelectronic surface. Structures and techniques for controlling bias in the medial portion and the resulting air gap are provided. The electrostatic device may be disposed to selectively clear or intercept the path of electromagnetic radiation. Materials used in the attenuator can be selected to pass, reflect, or absorb various types of electromagnetic radiation. A plurality of electromagnetic attenuators may be disposed in an array and selectively activated in subsets. | ||||||
| 163 | VARIABLE CAPACITOR AND ASSOCIATED FABRICATION METHOD | EP00993453.0 | 2000-11-28 | EP1157396A1 | 2001-11-28 | COWEN, Allen, Bruce; DHULER, Vijayakumar, Rudrappa; HILL, Edward, Arthur; KOESTER, David, Alan; MAHADEVAN, Ramaswamy |
| A variable capacitor having low loss and a correspondingly high Q is provided. In addition to a substrate, the variable capacitor includes at least one substrate electrode and a substrate capacitor plate that are disposed upon the substrate and formed of a low electrical resistance material, such as HTS material or a thick metal layer. The variable capacitor also includes a bimorph member extending outwardly from the substrate and over the at least one substrate electrode. The bimorph member includes first and second layers formed of materials having different coefficients of thermal expansion. The first and second layers of the bimorph member define at least one bimorph electrode and a bimorph capacitor plate such that the establishment of a voltage differential between the substrate electrode and the bimorph electrode moves the bimorph member relative to the substrate electrode, thereby altering the interelectrode spacing as well as the distance between the capacitor plates. As such, the capacitance of the variable capacitor can be controlled based upon the relative spacing between the bimorph member and the underlying substrate. A method is also provided for micromachining or otherwise fabricating a variable capacitor having an electrode and a capacitor plate formed of a low electrical resistance material such that the resulting variable capacitor has low loss and a correspondingly high Q. The variable capacitor can therefore be employed in high frequency applications, such as required by some tunable filters. | ||||||
| 164 | Mikromechanisches Relais mit verbessertem Schaltverhalten | EP00121231.5 | 2000-09-29 | EP1156504A2 | 2001-11-21 | Faul, Robert; Drost, Andreas; Pradel, Helmut |
Die vorliegende Erfindung betrifft ein mikromechanisches Relais mit verbesserten Schalteigenschaften, bei dem der Kontaktbügel zur Überbrückung eines Schaltkontaktes beabstandet vom freien Ende eines einseitig eingespannten, mikromechanischen, beweglichen Biegebalkenelementes an diesem angeordnet ist. Beidseitig des Kontaktbügels sind am beweglichen Element Steuerelektroden vorgesehen, die in Zusammenwirkung mit gegenüberliegenden Steuerelektroden am Substrat sowie entsprechenden Steuersignalen das Öffnen und Schließen des Kontaktes bewirken. Sowohl durch die beidseitige Anordnung der Steuerelektrodengebiete als auch die erweiterten und beispielsweise getrennten Ansteuerungsmöglichkeiten der Steuerelektroden beidseitig des Kontaktbügels bzw. der entsprechenden Steuerelektroden am Substrat lässt sich ein verbessertes Schaltverhalten erzielen. |
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| 165 | Electrostatically controlled micro-relay device | EP99830731.8 | 1999-11-25 | EP1026718A3 | 2001-09-12 | Pizzi, Marco; Koniachkine, Valerian; Perlo, Piero; Sinesi, Sabino |
An electrostatically controlled micro-relay device comprises a base (2) provided with a pair of separate electrodes (5, 6) and a petal (8) constituted by a conductive film having the ends connected to the base (2) and a movable part carrying a pair of movable contacts (10) adapted to co-operate with respective fixed contacts (11, 12) carried by the base (2). By applying an electric voltage between the petal (8) and one of electrode (5, 6) of the other, an adhesion is caused by electrostatically effect of one part of the petal to the base, which causes engagement of one or the other of the movable contacts (10) with the respective fixed contacts (11, 12). |
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| 166 | MIKROMECHANISCHES ELEKTROSTATISCHES RELAIS | EP98966571.6 | 1998-12-21 | EP1057196A1 | 2000-12-06 | SCHLAAK, Helmut; HANKE, Martin; HESSE, Susanna, Kim; GEVATTER, Hans-Jürgen |
| The present invention relates to a micro-mechanical electrostatic relay comprising at least one base substrate (1) with a flat base electrode, as well as a rotor blade (21) which is stamped from the rotor substrate (2) and has a flat rotor electrode, wherein a wedge-shaped air gap (10) is formed between the base substrate (1) and said rotor blade. An electret layer (4) is further formed on one at least of the surfaces defining the air gap so as to obtain a switching characteristic providing for closing, opening or change-over. | ||||||
| 167 | Electrostatically controlled micro-relay device | EP99830731.8 | 1999-11-25 | EP1026718A2 | 2000-08-09 | Pizzi, Marco; Koniachkine, Valerian; Perlo, Piero; Sinesi, Sabino |
An electrostatically controlled micro-relay device comprises a base (2) provided with a pair of separate electrodes (5, 6) and a petal (8) constituted by a conductive film having the ends connected to the base (2) and a movable part carrying a pair of movable contacts (10) adapted to co-operate with respective fixed contacts (11, 12) carried by the base (2). By applying an electric voltage between the petal (8) and one of electrode (5, 6) of the other, an adhesion is caused by electrostatically effect of one part of the petal to the base, which causes engagement of one or the other of the movable contacts (10) with the respective fixed contacts (11, 12). |
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| 168 | MIKROMECHANISCHES RELAIS MIT HYBRIDANTRIEB | EP94906870.4 | 1994-02-14 | EP0685109B1 | 1997-08-13 | GEVATTER, Hans-Jürgen; KIESEWETTER, Lothar; SCHIMKAT, Joachim; SCHLAAK, Helmut |
| A micromechanical relay has a tongue-shaped armature (53) etched out of an armature substrate (52). The armature (53) is elastically linked to the armature substrate and forms an electrostatic actuator together with the base electrode (58) of an underlying base substrate (51). In addition, a piezoelectric layer (60) which acts as a flexural transducer and forms an additional actuator is provided on the armature (53). When a potential is applied on the electrodes of the armature (53), the base substrate (51) and the piezoelectric layer (60), the armature is drawn towards the base substrate and lies then flat on the base, closing at least one contact (55, 56). The characteristics of both an electrostatic actuator on the one hand and a piezoelectric actuator on the other hand are thus obtained, so that a strong attraction force is generated when the armature begins to move and a strong contact force is generated after the armature is drawn. | ||||||
| 169 | Mikromechanisches elektrostatisches Relais | EP95115647.0 | 1995-10-04 | EP0713235A1 | 1996-05-22 | Kiesewetter, Lothar, Prof. Dr.; Schimkat, Joachim; Schlaak, Helmut, Dr.; Gevatter, Hans-Jürgen, Prof. Dr. |
Das mikromechanische elektrostatische Relais besitzt einerseits ein Basissubstrat (10) mit einer Basiselektrode (11) und einem Basis-Kontaktstück (13), andererseits ein Ankersubstrat (1) mit einer freigeätzten, vom Basissubstrat weg gekrümmten Anker-Federzunge (2) mit einer Ankerelektrode (5) und einem Anker-Kontaktstück (7). Bei Anlegen einer Steuerspannung zwischen den beiden Elektroden (5,11) rollt die Federzunge auf dem Basissubstrat ab, bis sie gestreckt ist und die beiden Kontaktstücke (7,13) zur Berührung bringt. Um dabei eine schleichende Kontaktgabe zu verhindern und das Schließen und Öffnen des Kontaktes abrupt zu gestalten, ist im keilförmigen Luftspalt zwischen den beiden Elektroden (5,11) eine geometrische Diskontinuität vorgesehen, welche durch eine teilweise gekrümmte, teilweise gerade Formgebung der Federzunge, durch einen Versatz des Elektrodenbeginns gegenüber der Federeinspannung und/oder durch einen Luftspalt zwischen der Federeinspannung und der Basiselektrode gebildet wird. Das Ergebnis ist eine eindeutige Schalthysterese mit Kippvorgängen beim Schließen und Öffnen des Kontaktes. |
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| 170 | MIKROMECHANISCHES RELAIS MIT HYBRIDANTRIEB | EP94906870.0 | 1994-02-14 | EP0685109A1 | 1995-12-06 | GEVATTER, Hans-Jürgen; KIESEWETTER, Lothar; SCHIMKAT, Joachim; SCHLAAK, Helmut |
| A micromechanical relay has a tongue-shaped armature (53) etched out of an armature substrate (52). The armature (53) is elastically linked to the armature substrate and forms an electrostatic actuator together with the base electrode (58) of an underlying base substrate (51). In addition, a piezoelectric layer (60) which acts as a flexural transducer and forms an additional actuator is provided on the armature (53). When a potential is applied on the electrodes of the armature (53), the base substrate (51) and the piezoelectric layer (60), the armature is drawn towards the base substrate and lies then flat on the base, closing at least one contact (55, 56). The characteristics of both an electrostatic actuator on the one hand and a piezoelectric actuator on the other hand are thus obtained, so that a strong attraction force is generated when the armature begins to move and a strong contact force is generated after the armature is drawn. | ||||||
| 171 | MICRO-ELECTRO MECHANICAL SWITCH DESIGNS | PCT/US2006011589 | 2006-03-29 | WO2006105265A3 | 2007-01-18 | BOZLER CARL O; BERRY SHAUN R; MULDAVIN JEREMY; KEAST CRAIG L |
| A capacitive RF switch and DC RF switch include a fixed electrode having a thin layer of metal and at least one pull-down electrode. A moving plate has a plurality of corrugations and a selective finger design. The capacitive switch includes a selective finger that comes into contact with the fixed electrode so as to minimize the stiction between the moving plate and the fixed electrode when the switch is closed. The DC switch comprises a plurality of dimples that are formed on the selective portion of the moving plate and are positioned to come into contact with the fixed electrode when the switch is closed so as to increase the contact force and lower the resistance between the moving plate and fixed electrode. | ||||||
| 172 | LIQUID METAL CONTACT MICRORELAY | PCT/US2005018552 | 2005-05-27 | WO2005119721A3 | 2006-05-11 | SIMON JONATHAN; ROSENAU STEVEN A |
| Liquid metal microrelays (500) may be made where a contact (509) is formed by constraining a quantity of liquid metal (509) at the end of a contact support suspended over a substrate (101). Movement of the contact support typically drags the liquid metal (509) along the surface of the substrate and allows the liquid metal (509) to bridge contacts located on the substrate (101). Coplanar waveguides may be used for the switched signal instead of microstrip transmission lines to reduce transmission line discontinuities due to impedance changes. | ||||||
| 173 | FLEXIBLE ELECTROSTATIC ACTUATOR | PCT/US2005014104 | 2005-04-25 | WO2005104717A3 | 2006-04-27 | DAUSCH DAVID E; GOODWIN SCOTT H |
| An electrostatic actuator having a base (10) including a first electrode (20), and having a flexible membrane (50) including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode (40) electrically isolated from the first electrode. The flexible membrane includes a fixed end where the flexible membrane connects to the base and a free end opposite the fixed end. In the flexible membrane, the second electrode has at least first and second portions separated by a third portion an in combination defining a step provided in a vicinity of the fixed end. The first step is closest to the fixed end and separated by a shorter distance from the first electrode than the second portion. A stiffening member (310) can be disposed on the flexible membrane toward the free end of the flexible membrane. The electrostatic actuator can include an elongated orifice (420,320) extending through the base and extending along a direction away from the fixed end. The first electrode of the base can extends past an end of the second electrode of the flexible membrane in a direction defined toward the fixed end. The flexible membrane can include a peripheral or side cut out configured to communicate to an interior of the flexible membrane. | ||||||
| 174 | VARIABLE CAPACITOR AND ASSOCIATED FABRICATION METHOD | PCT/IB0002051 | 2000-11-28 | WO0145120A3 | 2002-03-28 | COWEN ALLEN BRUCE; DHULER VIJAYAKUMAR RUDRAPPA; HILL EDWARD ARTHUR; KOESTER DAVID ALAN; MAHADEVAN RAMASWAMY |
| A variable capacitor having low loss and a correspondingly high Q is provided. In addition to a substrate, the variable capacitor includes at least one substrate electrode and a substrate capacitor plate that are disposed upon the substrate and formed of a low electrical resistance material, such as HTS material or a thick metal layer. The variable capacitor also includes a bimorph member extending outwardly from the substrate and over the at least one substrate electrode. The bimorph member includes first and second layers formed of materials having different coefficients of thermal expansion. The first and second layers of the bimorph member define at least one bimorph electrode and a bimorph capacitor plate such that the establishment of a voltage differential between the substrate electrode and the bimorph electrode moves the bimorph member relative to the substrate electrode, thereby altering the interelectrode spacing as well as the distance between the capacitor plates. As such, the capacitance of the variable capacitor can be controlled based upon the relative spacing between the bimorph member and the underlying substrate. A method is also provided for micromachining or otherwise fabricating a variable capacitor having an electrode and a capacitor plate formed of a low electrical resistance material such that the resulting variable capacitor has low loss and a correspondingly high Q. The variable capacitor can therefore be employed in high frequency applications, such as required by some tunable filters. | ||||||
| 175 | MICROSWITCH AND PROCESS FOR ITS PRODUCTION | PCT/IB0100236 | 2001-02-23 | WO0163634A2 | 2001-08-30 | SCHWAB MICHAEL; KRUPKA KAY |
| The invention relates to a microswitch with a substrate (1) and a spring (2). The spring (2) consists of an intrinsically biased material. Therefore, deposition of an additional layer producing the curvature of the spring (2) can be dispensed with. As a result, temperature dependence on contact spacing, contact resistance and contact force is largely avoided. Adhesion problems of the additional layer are also avoided. The invention further relates to the production of the microswitch by surface micromechanical methods and sacrificial layer technology. | ||||||
| 176 | MICROELECTROMECHANICAL FLEXIBLE MEMBRANE ELECTROSTATIC VALVE DEVICE AND RELATED FABRICATION METHODS | PCT/US0128608 | 2001-09-14 | WO0222492A8 | 2003-11-20 | GOODWIN-JOHANSSON SCOTT H; MCGUIRE GARY E |
| A MEMS valve device driven by electrostatic forces is provided. The MEMS valve device includes a substrate having an aperture formed therein, a substrate electrode, a moveable membrane that overlies the aperture and has an electrode element and a biasing element. Additionally, at least one resiliently compressible dielectric layer is provided to insure electrical isolation between the substrate electrode and electrode element of the moveable membrane. In operation, a voltage differential is established between the substrate electrode and the electrode element of the moveable membrane to move the membrane relative to the aperture to thereby controllably adjust the portion of the aperture that is covered by the membrane. In another embodiment the resiliently compressible dielectric layer(s) have a textured surface; either at the valve seat, the valve seal or at both surfaces. In another embodiment of the invention a pressure-relieving aperture is defined within the substrate and is positioned to underlie the moveable membrane. | ||||||
| 177 | MEMS SWITCHES AND METHODS OF MAKING SAME | PCT/US0229629 | 2002-09-18 | WO03028059A8 | 2003-07-31 | SCHAFFNER JAMES H; TANGONAN GREGORY L; SCHWARTZ ROBERT N; WU MING; HSU TSUNG-YUAN; SCHMITZ ADELE E; LOO ROBERT Y |
| A micro-electromechanical system (MEMS) switch (124) formed on a substrate (110), the switch comprising a transmission line (114) formed on the substrate, a substrate electrostatic plate (120) formed on the substrate, and an actuating portion (126). The actuating portion comprises a cantilever anchor formed on the substrate and a cantilevered actuator arm (130) extending from the cantilever anchor. Attraction of the actuator arm toward the substrate brings an electrical contact (134) into engagement with the portions of the transmission line (114) separated by a gap, thus bridging the transmission line gap and closing the circuit. In order to maximize electrical isolation between the transmission line (114) and the electrical contact (134) in an OFF-state while maintaining a low actuation voltage, the actuator arm (130) is bent such that the minimum separation distance between the transmission line (114) and the electrical contact (134) is equal to or greater than the maximum separation distance between the substrate electrostatic plate (120) and arm electrostatic plate (132). | ||||||
| 178 | MICROELECTROMECHANICAL FLEXIBLE MEMBRANE ELECTROSTATIC VALVE DEVICE AND RELATED FABRICATION METHODS | PCT/US0128608 | 2001-09-14 | WO0222492A3 | 2002-08-01 | GOODWIN-JOHANSSON SCOTT H; MCGUIRE GARY E |
| A MEMS valve device driven by electrostatic forces is provided. The MEMS valve device includes a substrate having an aperture formed therein, a substrate electrode, a moveable membrane that overlies the aperture and has an electrode element and a biasing element. Additionally, at least one resiliently compressible dielectric layer is provided to insure electrical isolation between the substrate electrode and electrode element of the moveable membrane. In operation, a voltage differential is established between the substrate electrode and the electrode element of the moveable membrane to move the membrane relative to the aperture to thereby controllably adjust the portion of the aperture that is covered by the membrane. In another embodiment the resiliently compressible dielectric layer(s) have a textured surface; either at the valve seat, the valve seal or at both surfaces. In another embodiment of the invention a pressure-relieving aperture is defined within the substrate and is positioned to underlie the moveable membrane. | ||||||
| 179 | A MICRO RELAY | PCT/US0112508 | 2001-04-18 | WO0180258A3 | 2002-03-21 | TRIMMER WILLIAM |
| This invention relates to the area of microelectromechanical systems and micro relays and micro switches. The relays disclosed allow high currents, inductive loads, and high frequencies to be controlled using a relay that increases its resistance during opening and decreases its resistance during closing. | ||||||
| 180 | MICROELECTRO-MECHANICAL SYSTEM ACTUATOR DEVICE AND RECONFIGURABLE CIRCUITS UTILIZING SAME | PCT/US9824344 | 1998-11-13 | WO9926333A2 | 1999-05-27 | BOZLER CARL O; DRANGMEISTER RICHARD G; PARR ROBERT J; KUSHNER LAWRENCE J |
| A microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode. The device includes first and second electrically conductive regions which are isolated from one another by the fixed electrode. The moveable electrode moves to cover the fixed electrode and to electrically couple to the second conductive region, thus electrically coupling the first and second conductive regions, in response to a potential being applied across the fixed and moveable electrodes. The fixed electrode is transparent to electromagnetic signals or waves and the moveable electrode impedes or allows transmission of electromagnetic signals or waves. In one embodiment of the invention, the fixed and moveable electrodes are configured within an array of similar devices, and each device or groups of devices in the array are individually addressable to actuate the moveable electrodes. In another embodiment of the invention, there is provided a reconfigurable circuit including an array of actuatable devices which are addressed individually or in selected groups, each of the actuatable devices having a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode. | ||||||
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