| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 21 | Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same | US09885713 | 2001-06-20 | US06646525B2 | 2003-11-11 | Carl O. Bozler; Richard G. Drangmeister; Robert J. Parr; Lawrence J. Kushner |
| A microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode. The device includes first and second electrically conductive regions which are isolated from one another by the fixed electrode. The moveable electrode moves to cover the fixed electrode and to electrically couple to the second conductive region, thus electrically coupling the first and second conductive regions, in response to a potential being applied across the fixed and moveable electrodes. The fixed electrode is transparent to electromagnetic signals or waves and the moveable electrode impedes or allows transmission of electromagnetic signals or waves. | ||||||
| 22 | Electrostatic actuators with intrinsic stress gradient | US09944867 | 2001-08-31 | US06625004B1 | 2003-09-23 | Jurgen Musolf; Paul Kohl |
| An electrostatic actuator with an intrinsic stress gradient is provided. The electrostatic actuator comprises an electrode and an electrostatically actuated beam fixed at one end relative to the electrode. The electrostatically actuated beam further includes a metal layer made substantially of a single metal with an induced stress gradient therein. The stress gradient in the metal layer determines the initial curvature of the beam. Upon electrostatic actuation of the beam, the beam is deflected from its initial curvature relative to the electrode. In one embodiment, the electrostatically actuated beam is used as a top movable electrode of an electrostatically actuated variable capacitor. The capacitance of the electrostatically actuated capacitor is changed upon electrostatic actuation of the beam. | ||||||
| 23 | Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods | US09661997 | 2000-09-14 | US06590267B1 | 2003-07-08 | Scott H. Goodwin-Johansson; Gary E. McGuire |
| A MEMS (Micro Electro Mechanical System) valve device driven by electrostatic forces is provided. This valve device can provide for fast actuation, large valve force and large displacements while utilizing minimal power. The MEMS valve device includes a substrate having an aperture formed therein, a substrate electrode, a moveable membrane that overlies the aperture and has an electrode element and a biasing element. Additionally, at least one resiliently compressible dielectric layer is provided to insure electrical isolation between the substrate electrode and electrode element of the moveable membrane. In operation, a voltage differential is established between the substrate electrode and the electrode element of the moveable membrane to move the membrane relative to the aperture to thereby controllably adjust the portion of the aperture that is covered by the membrane. Additional embodiments provide for the resiliently compressible dielectric layer to be formed on either or both the substrate electrode and the moveable membrane and provide for either or both the valve seat surface and the valve seal surface. In yet another embodiment the resiliently compressible dielectric layer(s) have a textured surface; either at the valve seat, the valve seal or at both surfaces. In another embodiment of the invention a pressure-relieving aperture is defined within the substrate and is positioned to underlie the moveable membrane. Alternatively, additional embodiments of the present invention provide for MEMS valve arrays driven by electrostatic forces. The MEMS valve array comprises a substrate having a plurality of apertures defined therein. A method for making the MEMS valve device is also provided. | ||||||
| 24 | Stress bimorph MEMS switches and methods of making same | US10251677 | 2002-09-19 | US20030058069A1 | 2003-03-27 | Robert N. Schwartz; Ming Wu; Tsung-Yuan Hsu; Adele E. Schmitz; Robert Y. Loo; James H. Schaffner; Gregory L. Tangonan |
| A micro-electromechanical system (MEMS) switch formed on a substrate, the switch comprising a transmission line formed on the substrate, a substrate electrostatic plate formed on the substrate, and an actuating portion. The actuating portion comprises a cantilever anchor formed on the substrate and a cantilevered actuator arm extending from the cantilever anchor. Attraction of the actuator arm toward the substrate brings an electrical contact into engagement with the portions of the transmission line separated by a gap, thus bridging the transmission line gap and closing the circuit. In order to maximize electrical isolation between the transmission line and the electrical contact in an OFF-state while maintaining a low actuation voltage, the actuator arm is bent such that the minimum separation distance between the transmission line and the electrical contact is equal to or greater than the maximum separation distance between the substrate electrostatic plate and arm electrostatic plate. | ||||||
| 25 | Microelecto-mechanical system actuator device and reconfigurable circuits utilizing same | US09885713 | 2001-06-20 | US20020030566A1 | 2002-03-14 | Carl O. Bozler; Richard G. Drangmeister; Robert J. Parr; Lawrence J. Kushner |
| A microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode. The device includes first and second electrically conductive regions which are isolated from one another by the fixed electrode. The moveable electrode moves to cover the fixed electrode and to electrically couple to the second conductive region, thus electrically coupling the first and second conductive regions, in response to a potential being applied across the fixed and moveable electrodes. The fixed electrode is transparent to electromagnetic signals or waves and the moveable electrode impedes or allows transmission of electromagnetic signals or waves. | ||||||
| 26 | High voltage micromachined electrostatic switch | US09345722 | 1999-06-30 | US06229683B1 | 2001-05-08 | Scott Halden Goodwin-Johansson |
| A MEMS (Micro Electro Mechanical System) electrostatically operated high voltage switch or relay device is provided. This device can switch high voltages while using relatively low electrostatic operating voltages. The MEMS device comprises a microelectronic substrate, a substrate electrode, and one or more substrate contacts. The MEMS device also includes a moveable composite overlying the substrate, one or more composite contacts, and at least one insulator. In cross section, the moveable composite comprises an electrode layer and a biasing layer. In length, the moveable composite comprises a fixed portion attached to the underlying substrate, a medial portion, and a distal portion moveable with respect to the substrate electrode. The distal and/or medial portions of the moveable composite are biased in position when no electrostatic force is applied. Applying a voltage between the substrate electrode and moveable composite electrode creates an electrostatic force that attracts the moveable composite to the underlying microelectronic substrate. The substrate contact and composite contact are selectively interconnected in response to the application of electrostatic force. Once electrostatic force is removed, the moveable composite reassumes the biased position such that the substrate and composite contacts are disconnected. Various embodiments further define components of the device. Other embodiments further include a source of electrical energy, a diode, and a switching device connected to different components of the MEMS device. A method of using the aforementioned electrostatic MEMS device is provided. | ||||||
| 27 | Micromechanical relay | US538367 | 1995-10-03 | US5673785A | 1997-10-07 | Helmut Schlaak; Joachim Schimkat |
| The micromechanical electrostatic relay has, on the one hand, a base substrate with base electrode and a base contact piece and, on the other hand, an armature substrate with an armature spring tongue that is etched free and curved away from the base substrate, and that has an armature electrode and an armature contact piece. When a control voltage is applied between the two electrodes, the spring tongue unrolls on the base substrate until it is stretched and causes the two contact pieces to touch. In order to obtain a high contacting force given an optimally large electrode area, the armature contact piece is arranged on a contact spring section that is cut free from the spring tongue via spring webs in the form of a sun wheel with spoke sections helically interengaging such that it is surrounded on all sides by the spring tongue. | ||||||
| 28 | Micromechanical relay having a hybrid drive | US505312 | 1995-08-17 | US5666258A | 1997-09-09 | Hans-Jurgen Gevatter; Lothar Kiesewetter; Joachim Schimkat; Helmut Schlaak |
| A micromechanical relay is provided having a cantilevered armature (53) which is etched out from an armature substrate (52). The armature is in the form of a tongue, is elastically connected to the armature substrate, and forms an electrostatic drive with a base electrode (58) of a base substrate (51) located underneath. In addition, a piezo-layer (60) is provided on the armature (53). The piezo-layer (60) acts as a bending transducer and forms a supplemental actuator for a quick response time. When a voltage is applied to the electrodes of the armature (53), base substrate (51) and piezo-layer (60), the armature is attracted toward the base substrate and then rests over a large area on the base, closing at least one contact (55, 56). The different characteristics of the electrostatic actuator, on the one hand, and of the piezo-drive, on the other hand, are complementarily combined to provide a strong attraction force at the start of the armature movement, and a strong contact force is produced after the armature has been attracted. | ||||||
| 29 | Electric display device | US665345 | 1991-03-06 | US5233459A | 1993-08-03 | Carl O. Bozler; Steven Rabe |
| A bistable electrostatic light valve display in which a movable electrode is disposed opposite a fixed electrode and is biased to move in a preferred direction upon application of an electric field across the electrodes to produce a light valve or light shutter. In one embodiment, the movable electrode is restrained at one end and coils about the fixed end in a preferential roll direction. The bias is achieved by inducing anisotropic stress or anisotropic stiffness. In another embodiment, the moveable electrode is restrained at both ends and is biased upwardly by anisotropic stress or stiffening. | ||||||
| 30 | 마이크로 스위칭 소자 및 마이크로 스위칭 소자 제조 방법 | KR1020070125163 | 2007-12-04 | KR100958503B1 | 2010-05-17 | 나까따니다다시; 구엔투엔안; 우에다사또시; 요네자와유; 미시마나오유끼 |
| 구동 전압을 저감하는 데에 알맞은 마이크로 스위칭 소자를 제공한다. 본 발명의 마이크로 스위칭 소자 X1은, 베이스 기판 S1과, 고정부(11)와, 고정부(11)에 고정된 고정단(12a)을 갖고 베이스 기판 S1을 따라 연장되는 가동부(12)와, 가동부(12) 상에 형성된 가동 컨택트 전극(13)과, 가동 컨택트 전극(13)에 대향하는 부위를 각각이 갖고 또한 각각이 고정부(11)에 접합되어 있는 한쌍의 고정 컨택트 전극(14)과, 가동부(12) 상에서 가동 컨택트 전극(13) 및 고정단(12a) 사이에 형성된 가동 구동 전극(15)과, 가동 구동 전극(15)에 대향하는 부위를 포함하는 고가부(16A)를 갖고 또한 고정부(11)에 접합되어 있는 고정 구동 전극(16)을 구비한다. 고가부(16A)는, 가동 구동 전극(15)측에, 복수의 단(16a')으로 이루어지는 계단 형상(16a)을 갖고, 계단 형상(16a)의 각 단(16a')은, 가동 컨택트 전극(13)으로부터 먼 단(16a')일수록 베이스 기판 S1에 가깝다. 컨택트 전극, 베이스 기판, 구동 전극, 고가부, 계단 형상 | ||||||
| 31 | 정전 마이크로 접점 개폐기 및 그 제조 방법, 및 정전 마이크로 접점 개폐기를 이용한 전자 장치 | KR1020060016569 | 2006-02-21 | KR1020060100928A | 2006-09-21 | 마스다타카히로; 세키토모노리 |
| 본 발명은 종래와 동등한 복귀력을 확보하면서, 접촉력의 향상, 인가 전압의 저감, 및/또는, 전극의 치수의 축소를 실현하기 위한 것으로서, 상기 목적을 달성하기 위한 해결 수단에 있어서, 정전 마이크로 릴레이(10)는, 베이스(11)에 마련한 고정 전극(12)과, 액추에이터(21)의 가동 전극(24) 사이에 전압을 인가하여 생기는 정전 인력으로 가동 전극(24)을 구동하고, 베이스(11)에 마련한 고정 접점(13a·14a)에 액추에이터(21)에 마련한 가동 접점(26)을 접리시켜서 전기 회로를 개폐한다. 액추에이터(21)는, 베이스(11)에 마련한 지지부(22)와, 지지부(22)로부터 측방으로 연재되고, 가동 전극(24) 및 가동 접점(26)을 탄성 지지하는 들보부(23)를 구비한다. 들보부(23)는, 지지부(22)의 측으로부터 가동 전극(24) 및 가동 접점(26)의 순번으로 탄성 지지하고 있다. 들보부(23)와 가동 전극(24)을 접속하는 접속부(28)는, 지지부(22)의 측으로부터 슬릿(27)이 형성되어 있다. 정전 마이크로 접점 개폐기 | ||||||
| 32 | Ultrananocrystalline Diamond Films With Optimized Dielectric Properties For Advanced RF MEMS Capacitive Switches | US14731830 | 2015-06-05 | US20150311022A1 | 2015-10-29 | Anirudha V. Sumant; Orlando H. Auciello; Derrick C. Mancini |
| An efficient deposition process is provided for fabricating reliable RF MEMS capacitive switches with multilayer ultrananocrystalline (UNCD) films for more rapid recovery, charging and discharging that is effective for more than a billion cycles of operation. Significantly, the deposition process is compatible for integration with CMOS electronics and thereby can provide monolithically integrated RF MEMS capacitive switches for use with CMOS electronic devices, such as for insertion into phase array antennas for radars and other RF communication systems. | ||||||
| 33 | Ultrananocrystalline diamond films with optimized dielectric properties for advanced RF MEMS capacitive switches | US13080255 | 2011-04-05 | US08354290B2 | 2013-01-15 | Anirudha V. Sumant; Orlando H. Auciello; Derrick C. Mancini |
| An efficient deposition process is provided for fabricating reliable RF MEMS capacitive switches with multilayer ultrananocrystalline (UNCD) films for more rapid recovery, charging and discharging that is effective for more than a billion cycles of operation. Significantly, the deposition process is compatible for integration with CMOS electronics and thereby can provide monolithically integrated RF MEMS capacitive switches for use with CMOS electronic devices, such as for insertion into phase array antennas for radars and other RF communication systems. | ||||||
| 34 | Micro-switching device and manufacturing method for the same | US11987885 | 2007-12-05 | US07965159B2 | 2011-06-21 | Tadashi Nakatani; Anh Tuan Nguyen; Satoshi Ueda; Yu Yonezawa; Naoyuki Mishima |
| A micro-switching device includes a base substrate, a fixing member on the substrate, a movable part having an end fixed to the fixing member and extending along the substrate, a movable contact electrode provided on the movable part and facing away from the substrate, a pair of stationary contact electrodes bonded to the fixing member and including a region facing the movable contact electrode, a movable driver electrode between the movable contact electrode and the stationary end on the movable part at a surface facing away from the substrate, and a stationary driver electrode bonded to the fixing member and including an elevated portion having a region facing the movable driver electrode. The elevated portion is provided with steps facing the movable driver electrode, where the steps are closer to the substrate as they are farther from the movable contact electrode. | ||||||
| 35 | High frequency MEMS switch having a bent switching element and method for its production | US10590699 | 2005-02-25 | US07786829B2 | 2010-08-31 | Ulrich Prechtel; Volker Ziegler |
| A high-frequency MEMS switch comprises a signal conductor which is arranged on a substrate and an oblong switching element which has a bent elastic bending area and is fastened on the substrate in a cantilevered manner. An electrode arrangement generates an electrostatic force which bends the switching element toward the signal conductor. The switching element is arranged longitudinally parallel to the signal conductor, and has a contact area which extends transversely to the switch element over the signal conductor. Under the effect of the electrostatic force, the elastic bending area of the switching element progressively approaches the electrode arrangement in a direction parallel to the signal line. The switching element has, for example, two mutually parallel extending switching arms, which are mutually connected by a bridge as the contact area and are arranged on both sides of the signal line and parallel thereto. | ||||||
| 36 | Method and apparatus for an actuator having an intermediate frame | US11097053 | 2005-04-01 | US07699296B1 | 2010-04-20 | Clifford F. Knollenberg; Michael Albert Helmbrecht |
| A micromachined actuator including a body or platform mounted to a suspension system anchored to a substrate. In one embodiment, the suspension system is comprised of a set of one or more spring flexures connecting the actuator body to the substrate with strain relief provided via connecting torsional elements. In another embodiment, the suspension system includes a first set of one or more spring flexures each with one end anchored to a largely rigid intermediate frame and the other end attached to the body. A second set of one or more flexures is attached between the intermediate frame and the substrate. A third actuator embodiment maximizes force electrode area to minimize voltage required for electrostatic actuation. A fourth embodiment provides electrical interconnect to an actuator or an actuator array using polysilicon with silicon nitride isolation. | ||||||
| 37 | Micromechanical actuator with asymmetrically shaped electrodes | US11096395 | 2005-04-01 | US07629725B1 | 2009-12-08 | Clifford F. Knollenberg; Michael Albert Helmbrecht |
| A micromachined actuator including a body or platform mounted to a suspension system anchored to a substrate. In one embodiment, the suspension system is comprised of a set of one or more spring flexures connecting the actuator body to the substrate with strain relief provided via connecting torsional elements. In another embodiment, the suspension system includes a first set of one or more spring flexures each with one end anchored to a largely rigid intermediate frame and the other end attached to the body. A second set of one or more flexures is attached between the intermediate frame and the substrate. A third actuator embodiment maximizes force electrode area to minimize voltage required for electrostatic actuation. A fourth embodiment provides electrical interconnect to an actuator or an actuator array using polysilicon with silicon nitride isolation. Actuators may be fabricated by combining the key features of all four embodiments or actuators may be fabricated using any combination of two or three of the embodiments. | ||||||
| 38 | Micro-switching device and manufacturing method for the same | US11987885 | 2007-12-05 | US20080210531A1 | 2008-09-04 | Tadashi Nakatani; Anh Tuan Nguyen; Satoshi Ueda; Yu Yonezawa; Naoyuki Mishima |
| A micro-switching device includes a base substrate, a fixing member on the substrate, a movable part having an end fixed to the fixing member and extending along the substrate, a movable contact electrode provided on the movable part and facing away from the substrate, a pair of stationary contact electrodes bonded to the fixing member and including a region facing the movable contact electrode, a movable driver electrode between the movable contact electrode and the stationary end on the movable part at a surface facing away from the substrate, and a stationary driver electrode bonded to the fixing member and including an elevated portion having a region facing the movable driver electrode. The elevated portion is provided with steps facing the movable driver electrode, where the steps are closer to the substrate as they are farther from the movable contact electrode. | ||||||
| 39 | Flexible Electrostatic Actuator | US11578556 | 2005-04-25 | US20080123171A1 | 2008-05-29 | David E. Dausch; Scott H. Goodwin |
| An electrostatic actuator having a base (10) including a first electrode (20), and having a flexible membrane (50) including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode (40) electrically isolated from the first electrode. The flexible membrane includes a fixed end where the flexible membrane connects to the base and a free end opposite the fixed end. In the flexible membrane, the second electrode has at least first and second portions separated by a third portion an in combination defining a step provided in a vicinity of the fixed end. The first step is closest to the fixed end and separated by a shorter distance from the first electrode than the second portion. A stiffening member (310) can be disposed on the flexible membrane toward the free end of the flexible membrane. The electrostatic actuator can include an elongated orifice (420,320) extending through the base and extending along a direction away from the fixed end. The first electrode of the base can extends past an end of the second electrode of the flexible membrane in a direction defined toward the fixed end. The flexible membrane can include a peripheral or side cut out configured to communicate to an interior of the flexible membrane. | ||||||
| 40 | Electromechanical switch | US11292421 | 2005-12-02 | US20070126536A1 | 2007-06-07 | David Fork; Thomas Hantschel; Koenraad Van Schuylenbergh; Jeng Lu |
| In one aspect, an electromechanical switching device is illustrated. The electromechanical switching device includes a relay with at least one first conductive portion, at least one second conductive portion, and at least one actuation component that moves the at least one first conductive portion and the at least one second conductive portion into and out of conductive contact. The at least one first conductive portion includes a conductive stationary end coupled to a substrate and a conductive free-floating end. The at least one actuation component includes an actuation stationary end coupled to the substrate and an actuation free-floating end. The actuation free floating end, when the at least one actuation component is not energized, curls, which curls the conductive free floating end into or out of conductive contact with the at least one second conductive portion. | ||||||
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