| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 101 | Microelectromechanical system valve and its manufacturing method | JP2007197284 | 2007-07-30 | JP2007321986A | 2007-12-13 | GOODWIN-JOHANSSON SCOTT H; MCGUIRE GARY E |
| <P>PROBLEM TO BE SOLVED: To provide a microelectromechanical system (MEMS) valve device having advantages of quick operation, large valve force and large displacement while consuming minimal power. <P>SOLUTION: The MEMS valve device includes a substrate 20 having an aperture 70 formed therein, a substrate electrode 40, and a movable membrane 60 located on the aperture 70 and having an electrode element layer 62 and biasing element layers 64, 66. At least one resiliently compressible dielectric layer 50 is provided to ensure electrical isolation between the substrate electrode 40 and the electrode element layer 62 of the movable membrane 60. In operation, voltage difference is established between the substrate electrode 40 and the electrode element layer 62 of the movable membrane 60 to move the movable membrane 60 relative to the aperture 70 to thereby controllably adjust the portion of the aperture 70 covered with the movable membrane 60. <P>COPYRIGHT: (C)2008,JPO&INPIT | ||||||
| 102 | With a curved switching device high frequency mems switch and a manufacturing method of this switch | JP2007500039 | 2005-02-25 | JP2007525805A | 2007-09-06 | ウルリヒ・プレヒテル; フォルカー・ツィーグラー |
| 本発明は、湾曲した弾性可撓性領域(131,132)を有しかつ自己支持方式で基板(11)に固定された細長いスイッチング素子(13)のほかに、基板(11)の上にある信号導体(12)を備える高周波MEMSスイッチ(10)に関する。 電極組立品(14a,14b)は、スイッチング素子を導体(12)の方に動かすためにスイッチング素子(13)に作用する静電力を発生させる。 素子(13)は、長手方向で導体(12)と並列に並べられ、そして導体(12)の上を素子(13)に対して横方向に延びる接触領域(15)を備えている。 素子(13)の弾性可撓性領域(131,132)は、静電力の作用で、導体(12)に平行に延在方向で電極組立品(14a,14b)の方に漸進的に動く。 素子(13)は、例えば2つの平行なスイッチングアーム(13a,13b)を備え、これらのスイッチングアームは、接触領域(15)を形成するブリッジによって相互接続され、さらに導体(12)の両側に位置し、信号導体に平行に延在している。 | ||||||
| 103 | Micromachine electrostatic actuator with air gap | JP2004129835 | 2004-04-26 | JP2004312999A | 2004-11-04 | GOODWIN-JOHANSSON SCOTT HALDEN |
| PROBLEM TO BE SOLVED: To provide an MEMS electrostatic device which operates at a lower and more predictable operating voltage. SOLUTION: An intermediate portion 80 of a multilayer flexible composite material laminated on a substrate is retained at a predetermined position regardless of application of electrostatic force, wherein a predetermined air gap is maintained and its distance is relatively fixed from a microelectronic surface 10 of a lower part and may be reduced up to zero. A movable end portion 100 of the flexible composite material curls by itself unidirectionally due to a difference in thermal expansion coefficient between composite material layers. The end portion 100 moves in response to the electrostatic force, and as a result a distance that the flexible composite material separates from the microelectronic surface 10 changes. The device is disposed so that it may selectively cause electromagnetic radiation to pass through a pathway or block the pathway. A material used for an attenuator is selected so that it may cause various types of electromagnetic radiation to pass through, reflect or absorb. A plurality of electromagnetic attenuators are disposed in an array, and their subsets are selectively operated. COPYRIGHT: (C)2005,JPO&NCIPI | ||||||
| 104 | Micro-switching element driven by low voltage | JP2002339261 | 2002-11-22 | JP2003205498A | 2003-07-22 | CHO JIN-WOO |
| PROBLEM TO BE SOLVED: To provide a micro-switching element providing a desired deformation amount even by weak electrostatic force when an applied voltage is lowered, and capable of preventing a sticking phenomenon while having small rigidity. SOLUTION: In the micro-switching element including an elastically operating spring, a membrane formed and held on one end part of the spring, and a lower electrode formed below the membrane and generating electrostatic force by application of a voltage, the membrane is a non-planar type. COPYRIGHT: (C)2003,JPO | ||||||
| 105 | Electrostatic drive type relay | JP1060793 | 1993-01-26 | JP3402642B2 | 2003-05-06 | レヴィナー ジャッキー; ペリノ ディディエール; 光雄 一矢; 文宏 笠野; 広海 西村 |
| 106 | Microswitch and manufacturing method therefor | JP2000265285 | 2000-09-01 | JP2002075156A | 2002-03-15 | SUZUKI KENICHIRO |
| PROBLEM TO BE SOLVED: To realize high impedance and low-voltage drive, when a switch is off. SOLUTION: An upper electrode 4, a lower electrode 6, a contact electrode 7 and a signal wire 8 are disposed, in such a manner that a shortest distance between the contact electrode 7 and the signal wire 8 in a switch-off state is made longer than the shortest distance between the electrodes 4 and 6. COPYRIGHT: (C)2002,JPO | ||||||
| 107 | Electrostatic micro relay | JP12554697 | 1997-05-15 | JP3139413B2 | 2001-02-26 | 政次 高橋 |
| 108 | Micromechanical electrostatic relay | JP26871495 | 1995-10-17 | JPH08227647A | 1996-09-03 | HERUMUUTO SHIYURAAKU; YOAHIMU SHIMUKATO |
| PROBLEM TO BE SOLVED: To avoid a bend in the lateral direction so as to provide an optimum switching characteristic by dividing a layer, in which mechanical stress is generated, into each parallel strip extended in the orthogonal direction to a required curving direction by means of a movable element spring, tongue piece. SOLUTION: Between a movable element spring tongue piece 2, which is provided with a movable element electrode 5 and is curved, and a base electrode 11, a wedge type air gap 14 is formed. When voltage is impressed between these electrodes 5, 11 from a voltage source 15, the tongue piece 2 is extended onto the electrode 11, and the movable element contact piece 7 is connected to a base contact piece 13. The tongue piece 2 is provided with a double layer 4 consisting of a SiO 2 layer 41 and a Si 3N 4 layer 42, and when the number of longitudinal slits 21 or a width of a strip 22 is properly selected, compensation for a lateral bend can be carried out as it is desired. COPYRIGHT: (C)1996,JPO | ||||||
| 109 | Electric switch unit | JP4033282 | 1982-03-16 | JPS57197728A | 1982-12-04 | JIYON KURISUTOFUAA GURIINUTSUD |
| 110 | Flexible electrostatic actuator | JP2007509717 | 2005-04-25 | JP4754557B2 | 2011-08-24 | スコット・エイチ・グッドウィン; デーヴィッド・イー・ドウシュ |
| An electrostatic actuator having a base including a first electrode and a flexible membrane including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode electrically isolated from the first electrode. The flexible membrane includes a fixed end connected to the base and a free end opposite the fixed end and spaced apart from the base. The second electrode has at least first and second portions separated by a third portion and in combination defining a first and second step provided in a vicinity of the fixed end. | ||||||
| 111 | Micro-electro-mechanical system valve and a method of manufacturing the same | JP2007197284 | 2007-07-30 | JP4704398B2 | 2011-06-15 | グッドウィン−ヨハンソン，スコット・エイチ; マグワイア，ゲイリー・イー |
| 112 | switch | JP2002170613 | 2002-06-11 | JP4109498B2 | 2008-07-02 | 邦彦 中村; 淑人 中西 |
| 113 | Flexible electrostatic actuator | JP2007509717 | 2005-04-25 | JP2007535287A | 2007-11-29 | スコット・エイチ・グッドウィン; デーヴィッド・イー・ドウシュ |
| An electrostatic actuator having a base including a first electrode and a flexible membrane including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode electrically isolated from the first electrode. The flexible membrane includes a fixed end connected to the base and a free end opposite the fixed end and spaced apart from the base. The second electrode has at least first and second portions separated by a third portion and in combination defining a first and second step provided in a vicinity of the fixed end. | ||||||
| 114 | Electrostatic micro-contact switch, its manufacturing method, and apparatus using the switch | JP2006016973 | 2006-01-25 | JP2006294591A | 2006-10-26 | MASUDA TAKAHIRO; SEKI TOMONORI |
| <P>PROBLEM TO BE SOLVED: To achieve, while securing the restoring force equal to conventional one, improvement in contacting force, reduction of applied voltage and/or down-sizing of electrode. <P>SOLUTION: In the electrostatic micro-relay 10, a movable electrode 24 is driven by an electrostatic attractive force generated by applying a voltage between a fixed electrode 12 installed on a base 11 and the movable electrode 24 of an actuator 21, and an electric circuit is opened/closed by a movable contact 26 installed on the actuator 21 being contacted with/separated from fixed contacts 13a, 14a installed on the base 11. The actuator 21 is equipped with a supporting part 22 for standing the base 11, and a beam 23 extending from the supporting part 22 to the side direction and elastically supporting the movable electrode 24 and the movable contact 26. The beam 23 supports elastically the movable electrode 24 and the movable contact 26 in this order from the supporting part 22 side. A connection part 28 to connect the beam 23 and the movable electrode 24 is provided with a slit 27 formed from the supporting part 22 side. <P>COPYRIGHT: (C)2007,JPO&INPIT | ||||||
| 115 | Switch pad and microswitch equipped with the same | JP2006039083 | 2006-02-16 | JP2006228734A | 2006-08-31 | KEN JUNCHORU; SHIN KEISAI; KIM CHE-HEUNG; LEE SANG HOON; DA SILVA MARK; BOUWSTRA SIEBE |
| PROBLEM TO BE SOLVED: To provide a switch pad capable of stably drive, even at a low drive voltage, and to provide a microswitch equipped with the same. SOLUTION: The switch pad includes the body, formed further separated from a static driving part provided on a substrate as moving away from the center to the perimeter. As a result of this, there is no need to lower the rotational strain strength of first and second springs of a spring structure body, and moreover, the problem wherein the weakness to vibrating circumstances, generated when the rotational strain strength of the first and the second springs is lowered, can be prevented. COPYRIGHT: (C)2006,JPO&NCIPI | ||||||
| 116 | Micro - process for the production of electro-mechanical relays and the relay | JP2001514444 | 2000-07-28 | JP2003506822A | 2003-02-18 | シュアラク，ヘルミュト; ハンクエ，マーチン |
| The invention relates to a relay, especially a miniaturized electrostatic relay, comprising a bridge-type make contact. The contact spring is designed as a torsion spring that is linked with a switching spring (3) via multiply bent spring parts (7). It is thus possible in particular to compensate fixed contacts (2) of different heights. The invention further relates to a method for producing the relay as a micro-mechanical electrostatic relay. | ||||||
| 117 | Micromachine electrostatic actuator having an air gap | JP2001500902 | 2000-05-19 | JP2003501274A | 2003-01-14 | グッドウィン‐ヨハンソン，スコット・ホールデン |
| (57)【要約】 より低くより予測可能な動作電圧で動作するＭＥＭＳ静電装置を提供する。 静電アクチュエータ、電磁放射線の静電減衰器、及び電磁放射線を減衰する方法を提供する。 改善された動作電圧特性は、静電装置内の基板電極とフレキシブル複合材電極との間に増大しないエアギャップを定めることによって実現される。 エレクトロメカニカル基板上に重なる多層のフレキシブル複合材の中間部分は、静電力の印加に関係なく所定に位置に保持され、定められたエアギャップが維持される。 中間部分が片持されるときに、エアギャップが、下に横たわるマイクロ電子面からの分離について比較的一定である実施態様を提供する。 あるいは、中間部分が下に横たわるマイクロ電子面に近づいて接触するときにゼロまで減少するエアギャップが与えられる実施態様も更に提供する。 フレキシブル複合材の可動性の末端部分は、複合材層の間の熱膨張係数の違いによって一方に偏って自然にカールする。 静電力に応答して、末端部分が動いて、その結果、フレキシブル複合材が下に横たわるマイクロ電子面から離れる距離が変化する。 中間部分において一方への偏りを制御するための構造と技術、そして結果として生じるエアギャップを提供する。 静電装置は、電磁放射線の経路を選択的に通過させたり遮ったりするように配置できる。 減衰器に使用される材料は、様々なタイプの電磁放射線を通過させたり、反射したり、あるいは吸収したりするよう選択できる。 複数の電磁減衰器がアレイに配置され、そして選択的にそのサブセットを作動することができる。 | ||||||
| 118 | Micromechanical electrostatic relay and its manufacturing method | JP2000508127 | 1998-07-24 | JP2001514434A | 2001-09-11 | シュラーク ヘルムート; キーゼヴェッター ロタール |
| (57)【要約】 マイクロメカニカル静電リレーは、ベースサブストレート（１）を有し、該ベースサブストレート（１）上には、片側にて結合された接極子ばね舌片（４１）が可動コンタクト（８）と共に、次のように構造化されている、即ち、休止状態にて、弾性的にベースサブストレート（１）から曲げ出されているように構造化されている。 可動のコンタクト（８）と共働する固定コンタクト（７）が、同様に弾性的にベースサブストレート（１）から曲げ出された固定コンタクト−ばね舌片（４２）上に配されており、ここで、両接極子ばね舌片は、それの自由端部を以て、相対向し、可動のコンタクト（８）は、固定コンタクト（７）と重なりオーバーラップするように配置構成されている、２つのばね舌片上でのコンタクトの配置により、静電駆動部にて可能な接極子変位距離にも拘わらず、延伸された状態のほかにコンタクトにて比較的大きなオーバーストロークが得られ、それにより十分な接触力が生ぜしめられる。 | ||||||
| 119 | Electrostatic micro-relay | JP12554697 | 1997-05-15 | JPH10312734A | 1998-11-24 | TAKAHASHI MASAJI |
| PROBLEM TO BE SOLVED: To increase the electrostatic attraction between both electrodes, eliminate the concurrent use of piezoelectric drive, miniaturize a micro-relay, increase sensitivity, reduce powder consumption, and improve productivity by molding the fixed electrode of a stator substrate into a protruded curved surface shape gradually separated from a moving electrode toward the tip of the plane-shaped moving electrode of a moving element substrate. SOLUTION: A moving element 2 integrally formed by etching on a moving element substrate 1 is fixed to the moving element substrate 1 at one end, has a free cantilever spring at the tip, and is provided with an insulated moving contact 7 on the lower face. A fixed electrode 11 of a metal film deposited on a protruded curved surface section formed at the opposite position to a moving electrode 5 is covered with an insulating layer 12 on a fixed element substrate 10 stuck to the moving element substrate 1 at the peripheral section, and an insulated fixed contact 13 is formed at the opposite position the moving contact 7. The electrostatic attraction inversely proportional to the square of distance is increased by the complete wedge-shaped electrode gap 14 between the moving and fixed electrodes 5, 11 when the motion of the moving element 2 is started by the application of a voltage. COPYRIGHT: (C)1998,JPO | ||||||
| 120 | Micro-relay, manufacture and control method therefor | JP31344496 | 1996-11-25 | JPH10154456A | 1998-06-09 | GOTO HIROSHI |
| PROBLEM TO BE SOLVED: To decrease the driving voltage and increase the withstand pressure by forming the upper face of a base cantilever, supporting a moving contact piece contacted to or separated from driving electrodes into a slant face, so that the facing distance is increased from the base section of the moving contact piece toward the free end. SOLUTION: Drive electrodes 19, 20 are provided in parallel outside printed wires 15, 16 connected to fixed contact points 13, 14, provided below an insulating film-covered slant face 12 formed on one side on a base 10 such as a single- crystal silicon substrate. A springy moving contact piece 30, cantilever-supported on the base 10 is preferably made of a single-crystal silicon material having a nearly U-shaped plane, and a moving contact point 31 made of a thin metal film is formed at the center of the lower face via an insulating film. The slant face 12 is preferably formed into a curved face or a taper face, and the contact separation is set to 30-50μm. The moving contact piece 30 is deformed by the applied voltage between the electrodes 19, 20, conduction is finally attained by the contact between the fixed contact points 13, 14 and the moving contact point 31, and since a base section is initially abutted against the slant face 12 having a short distance, low voltage is sufficient for the operation. COPYRIGHT: (C)1998,JPO | ||||||
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