序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
41 射流真空 CN92100682.9 1992-01-28 CN1074980A 1993-08-04 亚里山·K·雷博尔夫; 威拉迪莫尔·V·罗诺夫; 埃文·G·威利加诺夫; 彼特·A·斯考沃雷德; 瑟吉·F·彻马夫; 戴维德·K·萨丹施蒂恩; 艾万·F·施麦利夫; 夫拉迪朱尔·I·厄莫洛夫; 彼特尔·L·库普里恩科; 肯纳迪·F·尼科拉夫; 朱里·E·门切尔
射流真空包含带有吸气管(2)和预真空排气管(3)的空心壳体(1)和蒸汽导管(5),该蒸汽导管在被抽气体的每一压缩级上都具有超声速喷嘴(16),蒸发器含有储放真空液(10)和加热器(12)的容积(11),外壳(13)被安置在壳体(1)上的蒸发器部分上,并且与壳体(1)形成空腔(14),该空腔保证了蒸发器与壳体(1)空腔(4)连通的周围介质的隔热
42 에너지 절감형 펌프 및 상기 펌프의 제어 시스템 PCT/KR2012/006324 2012-08-08 WO2013022276A2 2013-02-14 임주혁

본 발명은, 증기발생기에서 증기를 전달받도록 설치된 펌프 본체부, 펌프 본체부와 증기발생기 사이의 관로를 개폐하는 증기전달수단, 펌프 본체부와 사용처 사이의 관로를 개폐하는 급수수단을 포함하고, 증기전달수단 및 급수수단을 개방하여 사용처로 급수하는 것을 특징으로 하는, 에너지 절감형 펌프 및 상기 펌프의 제어 시스템에 관한 것이다. 본 발명은, 증기발생기에서 증기를 전달받도록 설치된 펌프 본체부, 펌프 본체부와 증기발생기 사이의 관로를 개폐하는 증기전달수단, 펌프 본체부와 수원사이의 관로를 개폐하는 흡입수단을 포함하고, 증기전달수단을 개폐하여 증기를 전달받은 후에, 흡입수단을 개방하여 수원의 물을 흡입하는 것을 특징으로 하는, 에너지 절감형 펌프 및 상기 펌프의 제어 시스템에 관한 것이다.

43 AN OIL DIFFUSION PUMP COMPRISING A BAFFLE DEVICE PCT/US2007/076742 2007-08-24 WO2008024964A1 2008-02-28 BARKUS, David, A.

A baffle comprising a plurality of apertures wherein at least one of the plurality of apertures comprises a convergent portion and a divergent portion is provided. In some examples, a baffle comprising at least two concentric cones may be used. In other examples, the baffle may be used in an oil diffusion pump for use in an analytical device, such as a mass spectrometer.

44 TREIBMITTEL-VAKUUMPUMPE PCT/EP2005/011660 2005-10-31 WO2006045634A1 2006-05-04 DOMS, Marco; MÜLLER, Jörg

Die Erfindung betrifft eine Treibmittel-Vakuumpumpe der Mikrosystemtechnik, aufweisend eine Verdampferkammer und eine Pumpkammer, die durch eine Düsenanordnung getrennt sind. Die Treibmittel-Vakuumpumpe wird durch eine planare Anordnung von wenigstens einer vertikal in die Tiefe verlaufenden Düse zwischen zwei, insbesondere parallelen Platten, wobei die Platten die Verdampferkammer und die Pumpkammer verschließen, und durch eine Öffnung in der Pumpkammer, vorzugsweise oberhalb der Düsenanordnung, zum Ansaugen eines zu pumpenden Mediums und durch eine Öffnung zum Austreiben eines, vorzugsweise komprimierten, Gases unterhalb der Düsenanordnung weitergebildet.

45 油拡散ポンプ PCT/JP2014/073165 2014-09-03 WO2016035162A1 2016-03-10 税所 慎一郎

 オーバーホール時の作業安全を考慮した油拡散ポンプを提供する。油拡散ポンプ50はポンプ本体としてのケーシング51を有する。ケーシング51は、底部が開放された筒状のケーシング本体51aと、該本体51aの底部側を真空シールするシール材(図示省略)を介して大気側下方から支持して閉塞させる下蓋90とを有する。下蓋90は締結手段92によりケーシング本体51aの下部に着脱自在に取り付けられている。このように本発明では、ケーシング51の底部を筒状の側壁部に対して分離可能に構成したことを特徴とする。

46 ENERGY-SAVING PUMP AND CONTROL SYSTEM FOR THE PUMP PCT/KR2012006324 2012-08-08 WO2013022276A3 2013-04-04 YIM JOO-HYUK
The present invention relates to an energy-saving pump, and to a control system for the pump, wherein the pump comprises: a pump body installed to receive steam from a steam generator; a steam transfer means for opening/closing a pipeline between the pump body and the steam generator; and a water supply means for opening/closing a pipeline between the pump body and a water usage space, wherein the steam transfer means and the water supply means are opened to supply water to the water usage space. The present invention further relates to an energy-saving pump, and to a control system for the pump, wherein the pump comprises: a pump body arranged to receive steam from a steam generator; a steam transfer means for opening/closing a pipeline between the pump body and the steam generator; and a suFig. 6 200 Steam transfer means 210 Temperature sensor 300 Suction means 400 Water supply means 500 Atmospheric pressure formation means 600 Steam chamber 700 Small-capacity pump 800 Thermostatic means AA Water level sensor BB Temperature sensor CC Pressure sensor DD Steam energy determination module EE Pump interior determination module FF Valve opening control module GG Atmospheric pressure formation module HH Small-capacity pump driving module II Thermostatic module ction means for opening/closing a pipeline between the pump body and a water source, wherein the steam transfer means is closed to receive steam and then the suction means is opened to suction water from the water source.
47 SUB-ATMOSPHERIC PRESSURE GAS SCRUBBERS PCT/GB2012/051584 2012-07-06 WO2013014421A3 2013-01-31 RANA, Manilal Gordhandas; COLLINS, Donovan

In order to minimise the amount of contaminants that pass through a pump, or that are allowed to accumulate therein, a sub-atmospheric pressure gas scrubber (100) suitable for use upstream of a vacuum pump is provided. The gas scrubber comprising a vessel (12) and means (22) for forming a spray of cleaning solvent within the vessel, the vessel comprising an inlet (14) and an outlet (18) for the gas to be cleaned at sub atmospheric pressure, the inlet and outlet being arranged to cause the gas to be cleaned to pass through the spray of cleaning solvent, the means for forming a spray comprising a cleaning solvent inlet (24) connected to at least one spray nozzle (22) and a cleaning solvent outlet (28) through which used solvent can be pumped from the vessel using a pump, wherein the pump (102) is arranged to recirculate the used solvent back to the cleaning solvent inlet.

48 VAPOR JET VACUUM PUMP HAVING EJECTOR STAGE IN FORELINE CONDUIT PCT/US2003/035214 2003-11-03 WO2004044435A1 2004-05-27 HABLANIAN, Marsbed

A vapor jet vacuum pump includes a housing having an inlet port and a foreline conduit, a vapor jet assembly within the housing, a vapor source for supplying a vapor to the vapor jet assembly, and at least one ejector stage. The ejector stage includes an ejector nozzle mounted in the foreline conduit and a fluid inlet located external to the housing and coupled by an ejector conduit to the ejector nozzle. The fluid inlet may be an air inlet for drawing in air at atmospheric pressure. The ejector stage may be driven by a backing pump coupled to the foreline conduit.

49 A SET OF PUMPS, AND A METHOD AND SYSTEM FOR EVACUATING A VACUUM CHAMBER IN A RADIOACTIVE ENVIRONMENT PCT/GB2019/052946 2019-10-16 WO2020079428A1 2020-04-23 CHEW, Andrew

A set of pumps, method and system for providing a high vacuum within a radioactive environment is disclosed. The set of pumps comprise: a primary pump configured for operation outside of the radioactive environment and configured to connect to a chamber within the radioactive environment via a conduit, the primary pump being configured to evacuate the chamber to a first pressure; a radiation resistant intermediate pump configured for operation within the radioactive environment and configured to evacuate the chamber from the first pressure to a second lower pressure; and a radiation resistant high vacuum pump configured for operation within the radioactive environment and configured to evacuate the chamber from the second lower pressure to a third operational vacuum pressure.

50 DIFFUSIONSPUMPE PCT/EP2015/062987 2015-06-10 WO2016000924A1 2016-01-07 SCHWEIZER, Hans-Werner

Diffusionspumpe, insbesondere energieeffiziente Diffusionspumpe, mit einem Gehäuse (10) und einem mit dem Gehäuse (10) verbundenen Siederaum (14). In dem Bereich des Siederaums (14) ist ein Heizelement (16) angeordnet. Weiter ist im Gehäuse (10) eine Düse (20, 22) angeordnet, welche mit dem Siederaum (14) verbunden ist. Im Bereich der Düse (20, 22) ist an einer Innenseite des Gehäuses (10) ein Kondensator (24) angeordnet, wobei im Bereich des Kondensators (24) eine Kühlung (26) zur Kühlung des Kondensators (24) vorgesehen ist. Dabei ist der Siederaum (14) thermisch vom Kondensator (24) durch einen Isolator (52) getrennt. Alternativ oder zusätzlich handelt es sich bei der Kühlung (26) des Kondensators (24) zumindest teilweise um eine Wasserkühlung. Alternativ oder zusätzlich ist die Kühlung (26) des Kondensators (24) über eine Wärmepumpe (40) mit dem Heizelement (16) verbunden, sodass Wärme vom Kondensator (24) zum Heizelement (16) gefördert wird. Alternativ oder zusätzlich ist eine Temperaturerfassung (34) vorgesehen, die die Kondensatortemperatur erfasst, wobei die Temperaturerfassung (34) mit einer Kondensatorkühlungsregelung zur Regelung der Kühlung (26) des Kondensators (24) verbunden ist. Alternativ oder zusätzlich ist mit dem Heizelement (16) eine Heizelementregelung verbunden zur Anpassung der Heizleistung des Heizelements (16) an die vorliegende Pumpsituation.

51 油拡散ポンプ及びそれに用いる油蒸気発生器 PCT/JP2014/066723 2014-06-24 WO2015198397A1 2015-12-30 税所 慎一郎

 作動油加熱源としてヒータ線を用いたときの問題を解消できる油蒸気発生器を備えた油拡散ポンプを提供する。ケーシング51内に油蒸気発生器70が配置され、この油蒸気発生器70を作動させることで作動油8を蒸気化して油蒸気とし、この油蒸気をジェット53,53aから噴射して吸入気体を排気動作する真空ポンプである。油蒸気発生器70は、立設方向に延在する、筒状のケース71(被加熱体)と、絶縁材料73を介して筒部材71の周囲に巻回された誘導コイル75と、誘導コイル75に交流を印加する給電手段とを備える。ケース71と誘導コイル75は、ケーシング51内に貯留する作動油8に浸漬される配置でケーシングに組み込まれる。そして、給電手段を作動させ誘導コイル75に交流を印加することによってケース71自体を加熱させ、作動油8を気化させるように構成した。

52 油拡散ポンプ及び真空成膜装置 PCT/JP2013/057145 2013-03-14 WO2014141421A1 2014-09-18 税所 慎一郎

 作動油加熱源としてヒータ線を用いたときの問題を解消できる油蒸気発生器を備えた油拡散ポンプを提供する。ケーシング51内に油蒸気発生器70が配置され、この油蒸気発生器70を作動させることで作動油8を蒸気化して油蒸気とし、この油蒸気をジェット53,53aから噴射して吸入気体を排気動作する真空ポンプである。油蒸気発生器70は、立設方向に延在する、被加熱材料からなる筒部材71の下端を閉塞させた、内部に油を貯留するための容器71,72と、絶縁材料73を介して筒部材71(特にケース内壁71b)の大気側周囲に巻回された誘導コイル75と、誘導コイル75に数10Hzから数100Hzの低周波交流を印加する給電手段とを備える。そして、給電手段を作動させコイル75に低周波交流を印可することによって筒部材71自体を加熱させ、容器内の油を蒸気化させるように構成した。

53 DUAL INLET VACUUM PUMPS PCT/US2000/002583 2000-02-01 WO00046508A1 2000-08-10
A high-vacuum pump includes a first vacuum pump section and a second vacuum pump section coupled in series and having an interstage region between them. The vacuum pump further includes a housing containing the first and second vacuum pump sections. The housing includes a high conductance peripheral duct surrounding all or part of the interstage region and coupled to the interstage region. The housing defines a first inlet port coupled to an inlet of the first vacuum pump section, a second inlet port coupled to the peripheral duct, and an exhaust port coupled to an outlet of the second vacuum pump section. Examples of high-vacuum pumps according to the invention include turbomolecular vacuum pumps, diffusion pumps and mixed vacuum pumps which include both axial flow stages and molecular drag stages.
54 OIL DIFFUSION PUMP AND OIL VAPOR GENERATOR USED THEREFOR EP14895619.6 2014-06-24 EP3088749B1 2019-10-30 SAISHO, Shinichiro
55 OIL DIFFUSION PUMP AND OIL VAPOR GENERATOR USED THEREFOR EP14895619.6 2014-06-24 EP3088749A1 2016-11-02 SAISHO, Shinichiro

Provided is an oil diffusion pump equipped with an oil vapor generator capable of eliminating a problem that arises when a heater wire is used as a heating source for a hydraulic oil. The oil diffusion pump is a vacuum pump in which an oil vapor generator (70) is arranged in a casing (51) and operated to vaporize a hydraulic oil (8) and produce oil vapor, and this oil vapor is sprayed from a jet (53, 53a) to exhaust an intake air. The oil vapor generator (70) comprises a tubular case (71) (object to be heated) extending in an upright direction, an induction coil (75) wound around the tubular member (71) via an insulating material (73), and a power supply means for applying an alternating current to the induction coil (75). The case (71) and the coil (75) are installed in the casing so as to be immersed in the hydraulic oil (8) stored in the casing (51). The power supply means is operated to apply an alternating current to the induction coil (75) to heat the case (71) itself and thus vaporize the hydraulic oil (8).

56 TREIBMITTEL-VAKUUMPUMPE EP05803340.8 2005-10-31 EP1805420A1 2007-07-11 DOMS, Marco; MÜLLER, Jörg
The invention relates to a motivating fluid vacuum pump used in microsystems technology, comprising an evaporator chamber and a pump chamber that are separated by a nozzle arrangement. The design of the motivating fluid vacuum pump is improved by: a planar arrangement of at least one nozzle, which vertically extends into the depth and which is situated between two, in particular, parallel plates, these plates closing the evaporator chamber and the pump chamber; an opening in the pump chamber, preferably above the nozzle arrangement, for drawing in a medium to be pumped, and; an opening for expulsing a preferably compressed gas underneath the nozzle arrangement.
57 VAPOR JET VACUUM PUMP HAVING EJECTOR STAGE IN FORELINE CONDUIT EP03768663.1 2003-11-03 EP1468191B1 2007-04-11 HABLANIAN, Marsbed
A vapor jet vacuum pump includes a housing having an inlet port and a foreline conduit, a vapor jet assembly within the housing, a vapor source for supplying a vapor to the vapor jet assembly, and at least one ejector stage. The ejector stage includes an ejector nozzle mounted in the foreline conduit and a fluid inlet located external to the housing and coupled by an ejector conduit to the ejector nozzle. The fluid inlet may be an air inlet for drawing in air at atmospheric pressure. The ejector stage may be driven by a backing pump coupled to the foreline conduit.
58 Process and apparatus for generating a vacuum EP92203755.1 1992-12-03 EP0563465A2 1993-10-06 Ansorge, Joachim; Kueh, Lip Piang

5n7 A process for the generation of a vacuum in a vessel comprises generating a vapour by heating a reservoir of a paraffin wax, discharging the vapour through an inlet into a gas entrainment zone connected to the vessel, thereby generating a vapour jet in the entrainment zone, allowing gas from the vessel to enter the vapour jet, allowing the vapour jet containing the gas to pass to a condensation zone, condensing vapour from the vapour jet in the condensation zone and separately recovering the condensed wax and the uncondensed material. Apparatus for the generation of a vacuum comprises a reservoir of a paraffin wax, heating means (15) to generate a vapour from the paraffin wax, a vapour conduit (16) providing a passage for the vapour, a pump vessel (1), which vessel (1) comprises a gas entrainment zone, a vapour inlet (8) connected to the vapour conduit (16) and of a form whereby vapour entering the pump vessel (1) is formed into a vapour jet (17) extending into the gas entrainment zone, a gas inlet (4) whereby gas entering the pump vessel is caused to contact the vapour jet (17), a vapour condensation zone arranged to receive the gas and vapour jet leaving the entrainment zone, cooling means (10) to condense vapour in the vapour condensation zone and means to recover separately from the condensation zone the condensed vapour and the gas. The paraffin wax is preferably a synthetic wax, in particular a wax prepared by a Fischer-Tropsch synthesis.

59 DAMPFSTRAHLVAKUUMPUMPE EP91907455.9 1991-03-13 EP0476157A1 1992-03-25 GROSHKOV, Anatoly Nikitich; KEMENOV, Vladimir Nikolaevich; UKSUSOV, Arkady Stepanovich

Die Dampfstrahlvakuumpumpe enthält ein vertikal aufgestelltes hermetisches Gehäuse (1) mit einem Flansch (2) zum Anschluss an ein auszupumpendes Volumen und einem Auslasstutzen (3). Im unteren Teil des Gehäuses (1) ist eine Wanne (6) angeordnet, die mit einer Treibflüssigkeit gefüllt und mit einem Erhitzer (7) ausgestattet ist. Im Gehäuse (1) ist entlang seiner Längsachse eine Dampfleitung (4) mit in Höhenrichtung derselben angebrachten Düsen (5) zum Austritt der Strahlen des Treibflüssigkeitsdampfes installiert. Im Anordnungsbereich des Fusses der Dampfleitung (4) befindet sich im Gehäuse (1) ein hydraulischer Verschluss (8), der für die Überströmung des Kondensats in die Wanne (6) sorgt. Das Kühlsystem zur Kühlung des Gehäuses (1) ist in Form eines auf die Gehäusewand spiralförmig gewickelten Rohres (9) mit Stutzen (10) für die Kältemittelzu- und -abführung ausgeführt. Hierbei ist ein Teil der Wand des Gehäuses (1) durch Versteifungsrippen gebildet, die im Abschnitt der Aufwicklung des Rohres (9) aus in der Wicklungsrichtung angeordneten konkaven Abschnitten (11), welche mit in ihnen aufgenommenen Rohren (9) in Berührung stehen und einen Krümmungsradius besitzen, der dem Aussenhalbmesser des Rohres (9) im wesentlichen gleich ist, und aus mit denselben verbundenen konischen Abschnitten (12) bestehen, welche sich in Richtung der aus den Düsen (5) austretenden Dampfstrahlen verengen.

60 一种扩散底板 CN202223363344.8 2022-12-14 CN219529418U 2023-08-15 谭炳德; 王富华
本实用新型公开了一种扩散底板,包括板体和安装组件;所述安装组件包括安装在所述板体顶面的多个内侧安装和多个外侧安装块,所述内侧安装块和所述外侧安装块均为弧形,多个所述内侧安装块呈圆形分布可拆卸安装在所述板体顶面,多个所述外侧安装块也呈圆形分布可拆卸安装在所述内侧安装块的外围。安装时,板体设置在底面,由于外侧安装块和内侧安装块均为弧形而且呈圆形分布,因此泵芯的外罩可以套接在外侧安装块配合固定,内罩套接在内侧安装块配合固定,因此方便安装,另外由于外侧安装块和内侧安装块均可拆卸的安装在板体顶面,因此需要清理时,只需将外侧安装块和内侧安装块拆下来,板体顶面为平面,易于清理。
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