| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 1 | 导向装置、冷却剂管道和扩散真空泵 | CN202180052303.6 | 2021-08-25 | CN116097007A | 2023-05-09 | S·G·维尔克; H-W·施维泽尔; T·格拉夫 |
| 一种用于扩散真空泵的导向装置具有多个环形导向板。导向板沿径向布置，其中至少一个导向板具有从连接点开始的第一部分和从该连接点开始的第二部分。其中，第一部分沿第一方向轴向延伸，第二部分沿相反的第二方向轴向延伸。其中，第一部分设计成径向上成锥形和/或第二部分设计成径向上成锥形。 | ||||||
| 2 | 调控系统 | CN202222932865.4 | 2022-11-01 | CN218817283U | 2023-04-07 | 罗军 |
| 本申请公开了一种调控系统，本申请的调控系统，用于调节地区的环境，地区用于安装设备，调控系统包括风机、温度传感器、控制电路和温度控制器，风机用于在启动时形成从地区内向地区外流动的气流；温度传感器设置在地区中，用于检测地区内的环境温度；控制电路与风机连接；温度控制器包括与控制电路连接的第一开关，在温度传感器检测到的环境温度大于温度阈值时，第一开关闭合以使控制电路导通，从而使风机开启。调控系统将温度传感器设置在地区检测地区的环境温度，温度控制器连接控制电路将风机开启，可使地区内的空气流动，从而降低地区内的环境温度，减少因环境温度大于温度阈值造成的安装设备的漏水、漏油问题。 | ||||||
| 3 | Evacuation apparatus with cryogenic pump and trap assembly | US905652 | 1978-05-15 | US4214853A | 1980-07-29 | Gunard O. B. Mahl |
| A thin-film deposition apparatus comprises a cabinet having a vessel mounted therein which defines a vacuum chamber adapted to retain processed articles. A vacuum unit is mounted adjacent to the vessel to communicate in substantially unrestricted communication with an inlet opening to the vacuum chamber for selectively evacuating the same. A valve is reciprocally mounted in a chamber communicating with the inlet opening to selectively expose the inlet opening during the evacuation process. A plurality of water-cooled and V-shaped baffles or a primary trap is mounted between the piston and the vacuum unit to provide an optically dense view of the vacuum chamber from the downstream side of the trap and to trap contaminants, such as oil droplets, prior to their ingress into the vacuum chamber from the vacuum unit. In addition, a plurality of fins or a secondary trap is mounted in nesting relationship within the baffles to provide an optically dense view of the primary trap from the vacuum chamber side thereof. The fins are secured between a pair of laterally spaced copper plates which function to maintain the fins at a substantially low temperature level and further function as a cryogenic pump. The plates are exposed to liquid nitrogen temperature retained in a cooling chamber partially circumventing the valve chamber. A source of vaporizable material, retained in the vacuum chamber, is masked-off from egress into the valve chamber by baffle plates surrounding the same. | ||||||
| 4 | Means for restricting vapor backstreaming in a diffusion pump | US3697195D | 1970-03-26 | US3697195A | 1972-10-10 | JOHNSON FREDERICK R; PALMER DAVID R |
| For use with a diffusion pump having an inlet connectable to an enclosure sought to be evacuated by the pump, an outlet, and means including a liquid chamber between the inlet and the outlet and means for vaporizing the liquid, the present invention provides improved means for restricting backstreaming of vapors of the liquid from the chamber and into the enclosure. Basically, the improved means comprises pivotally mounted baffle means positionable between the chamber and the enclosure and being pivotable between a first position permitting substantially free flow of fluid between the enclosure and the chamber and a second position substantially restricting flow of fluid between the chamber and the enclosure.
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| 5 | High-vacuum baffle using cooled, chevron-shaped members | US44096665 | 1965-03-18 | US3410100A | 1968-11-12 | CARLSON JOHN G |
| 6 | MULTIPHASE SEPARATION AND PRESSURE LETDOWN METHOD | PCT/US2019/067510 | 2019-12-19 | WO2020132261A1 | 2020-06-25 | RIZEA, Steven; WODEHOUSE, James; SMITH, Paul; HALKYARD, John; ANDERSON, Michael Rai |
A method and apparatus for the separation of gas and liquid-solid slurry under pressure, and passage of the liquid-solid slurry to an atmospheric discharge. |
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| 7 | MULTIPHASE SEPARATION AND PRESSURE LETDOWN METHOD | EP19899704.1 | 2019-12-19 | EP3897908A1 | 2021-10-27 | RIZEA, Steven; WODEHOUSE, James; SMITH, Paul; HALKYARD, John; ANDERSON, Michael Rai |
| A method and apparatus for the separation of gas and liquid-solid slurry under pressure, and passage of the liquid-solid slurry to an atmospheric discharge. | ||||||
| 8 | Improvements in diffusion pumps | EP96301396.6 | 1996-02-29 | EP0730096A1 | 1996-09-04 | Huntley, Graeme |
A diffusion pump comprising
wherein the pump also comprises baffle means which are thermally substantially isolated from the guard ring and which are contained substantially wholly within the outer body. |
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| 9 | Diffusion pumps | US609805 | 1996-03-01 | US5700134A | 1997-12-23 | Graeme Huntley |
| A diffusion pump is provided with an outer body and a chimney positioned within the outer body. A top cap is positioned about the top of the chimney to form an annular passageway (or an annular array of passageways) therebetween. A guard ring is positioned generally above the top cap. Coolers cool the outer body and the guard ring and working fluid present in the base of the outer body is heated to cause evaporated oil to pass up the chimney. A baffle, substantially thermally isolated from the guard ring, is contained within the outer body. | ||||||
| 10 | Combined vacuum baffle and valve for diffusion pump | US664002 | 1976-03-04 | US4081222A | 1978-03-28 | Ronald D. Smith; Steven B. Frankel; John R. Reeher; Michael S. Story |
| In a vacuum system a baffle-valve acts first as a baffle to reduce the backstreaming of a diffusion pump fluid into the main vacuum chamber being evacuated and secondly it can be used as a valve to provide complete isolation between the diffusion pump and the vacuum chamber. This enables the chamber to be open for service work while the diffusion pump is kept operating for rapid pump down. The foregoing dual use of the baffle/valve increases pumping efficiency because of higher conductance. | ||||||
| 11 | Vacuum pump | US44955174 | 1974-03-08 | US3902330A | 1975-09-02 | POWER BASIL DIXON |
| A vapor vacuum pump including a housing enclosing a cooled baffle and vapor jet assembly. A cooled multipart trap is positioned within the housing in the gas flow path. One portion of the trap is secured to and extends through the side wall of the housing to act as a heat sink while the other portion extends through the top of the housing and is thermally connected to the heat sink portion of the trap.
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| 12 | Hemispheric cryogenic vacuum trap and vacuum system using same | US3472039D | 1968-02-19 | US3472039A | 1969-10-14 | HAIT PAUL W |
| 13 | Trap for organic vapors in vacuum systems | US3458115D | 1967-10-09 | US3458115A | 1969-07-29 | HARRIS LAWRENCE A |
| 14 | Fins for eliminating backstreaming in a vacuum pump | US3454214D | 1967-10-25 | US3454214A | 1969-07-08 | MILLERON NORMAN |
| 15 | Dual passage cold trap | US42826165 | 1965-01-26 | US3322330A | 1967-05-30 | MINER CLAIRE E; REIMERS RICHARD M |
| 16 | VAKUUM-PUMPENEINHEIT | PCT/EP2014/074829 | 2014-11-18 | WO2015075009A1 | 2015-05-28 | PIRK, Mathys; RUETH, Christian |
Bekannte Vakuum-Pumpeneinheiten zur Evakuierung eines Rezipienten über einen Ansaugraum weisen eine Vakuumpumpe auf, diemit dem Rezipienten eine Evakuierungsrichtung durch den Ansaugraum festlegt.Um hiervon ausgehend eine Vakuum-Pumpeneinheit anzugeben, bei der die Abscheidung von Öl- Molekülen im Rezipienten verringert ist,wird erfindungsgemäß vorgeschlagen, dass zur Zersetzung von Ölmolekülen im Ansaugraum mindestens eine UV- Strahlungsquelle angeordnet ist. |
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| 17 | AN OIL DIFFUSION PUMP COMPRISING A BAFFLE DEVICE | PCT/US2007/076742 | 2007-08-24 | WO2008024964A1 | 2008-02-28 | BARKUS, David, A. |
A baffle comprising a plurality of apertures wherein at least one of the plurality of apertures comprises a convergent portion and a divergent portion is provided. In some examples, a baffle comprising at least two concentric cones may be used. In other examples, the baffle may be used in an oil diffusion pump for use in an analytical device, such as a mass spectrometer. |
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| 18 | Self-cleansing diffusion pump | US52270874 | 1974-11-11 | US3923424A | 1975-12-02 | BUGGELE ALVIN E |
| A diffusion pump capable of separating impurities from its pump fluid during operation is disclosed. Skimming drains are provided in the pump''s boiler for periodically skimming the evaporative surface of the working fluid. This eliminates nearly all contaminants of higher molecular weight than the pump fluid. In the foreline of the pump, a series of peripheral gutters are provided for trapping, separating and draining off condensates. The gutters facilitate the removal of impurities of lower molecular weight than that of the pump fluid. Means are also provided for further removing trace quantities of residual volatile impurities which tend to backstream up the diffusion pump barrel. The highly purified pump fluid allows for a more vigorously working evaporative surface, thereby increasing the throughput of the diffusion pump. Together with the elimination of volatile impurities from the pump barrel, this facilitates the attainment of significantly higher ultimate chamber vacuum. The withdrawn condensates and skimmed residues also form the basis for use of the apparatus as a device for obtaining a high degree of separation between liquids of very close vapor pressures.
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| 19 | High vacuum pumping systems | US34141973 | 1973-03-15 | US3876337A | 1975-04-08 | LANDFORS ARTHUR A |
| A trap assembly in a high vacuum system for intercepting back streaming liquid or suspended liquid molecules from a diffusion pump to prevent contamination of the working high vacuum chamber is disclosed. The trap assembly includes a tubular member defining a passageway between the hollow inlet means of the chamber and the inlet orifice of the pump, and a restriction means across the passageway. The tubular member includes an envelope wall physically forming the passageway in the region of the restriction means, and fastener means extending within said passageway inside the confines of said wall to interconnect said wall with said pump and with said hollow inlet means of said chamber to gain maximum internal area for a given overall outer dimensional extent of the tubular member. The fastener means includes mating flanges and a plurality of bolts around the flanges. The bolts may be sealed by sleeves that also bear at least a portion of the tightening load of the bolts and thereby assist the envelope wall in this function. The restriction means in the passageway includes a plate positioned at an angle to allow draining action of condensed liquid, and a cooling tube is effective to cool the plate and the sleeves to increase condensation. The sleeves are cylindrical and only slightly larger than the bolts to provide minimum volume displacement. The radius of the passageway has been increasaed by approximately 50 percent over prior art devices, with a consequent cross-sectional area increase in the full region of the passageway of substantially 100 percent. The retained speed of the pump is increased over the prior art capability by approximately 50 percent.
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| 20 | Vacuum pumps | US3801225D | 1972-05-12 | US3801225A | 1974-04-02 | POWER B |
| This invention provides an integral combination of a vapour vacuum pump, a baffle and an isolation valve as a single unit which offers substantial economies in construction and volume, compared with known pumps of the same performance, and which has only a single flange for attachment to the equipment to be evacuated.
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