序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
81 CEILING-MOUNTED SCARA ROBOT US13817939 2010-09-03 US20130145893A1 2013-06-13 Yoshitaka Kumagai; Mitsuhiro Fukatsu
A ceiling-mounted SCARA robot includes a base, a first arm that is connected to the base via a first coupling part centering around a first articulated shaft and that can pivotally move around the first articulated shaft as a center of pivotal movement within a horizontal plane, a second arm that is connected to the first arm via a second coupling part centering around a second articulated shaft and that can pivotally move around the second articulated shaft as a center of pivotal movement within a horizontal plane, a working shaft that is mounted on the second arm, and a base mounting part that is mounted on the base and places the base on a beam as a structural body for mounting located at a position vertically above an operating area of the working shaft.
82 Microelectronic workpiece transfer devices and methods of using such devices in the processing of microelectronic workpieces US10080910 2002-02-22 US06749391B2 2004-06-15 Daniel J. Woodruff; Randy Harris
Microelectronic workpiece transfer devices and methods for using such transfer devices. One embodiment of a transfer device includes a transport unit configured to move along a linear track and a lift assembly carried by the transport unit. The transfer device can also include an arm assembly having an arm actuator carried by the lift assembly to move along a lift path and an arm carried by the arm actuator to rotate about the lift path. The arm can include an extension projecting from one side of the lift path. The arm actuator can rotate the arm about the lift path. The transfer device can also include a first end-effector and a second end-effector. The end-effectors are rotatably coupled to the extension of the arm and can rotate independently about a common axis, with the first and second end-effectors at different elevations relative to the arm.
83 Workpiece handling robot US09483625 2000-01-14 US06634851B1 2003-10-21 Anthony C. Bonora; Roger G. Hine; Michael Krolak; John F. Grilli
A wafer handling robot is disclosed for transporting workpieces such as semiconductor wafers and flat panel displays between process tools and/or workpiece storage locations within a wafer fab. The robot includes a base comprising a rigid backbone for providing a significant degree of structural stability to the robot. The base further includes a mast, a linear drive system for translating the mast, and a shoulder drive system for rotating the mast. The shoulder drive system includes a harmonic drive reduction system for providing a stiff, smooth and precise output rotation of the mast section. The robot further includes a proximal link fixedly mounted to the mast for rotation with the mast, and a distal link rotatably mounted to the proximal link. An end effector for supporting various workpieces is rotationally mounted to the distal end of the distal link. An elbow drive is mounted to the proximal link, extending down into the mast section, for driving rotation of the distal link with respect to the proximal link. Torque is transmitted from the elbow drive to the distal link by steel straps wrapped around a drive pulley from the elbow drive and a driven pulley in the distal link. Similarly, torque is transmitted from the distal link to the end effector via a second set of steel straps wrapped around pulleys provided in the distal link and end effector, respectively.
84 Robot US602972 1996-02-16 US5713244A 1998-02-03 Hiroyasu Ito; Minoru Kikuya; Yoshiyuki Sakaguchi
An orthogonal coordinate type robot comprises a slider and a support frame supporting the slider for movement within a predetermined range along an axis. The support frame has an inner wall surface, at least one hollow portion, and a connecting hole for communicating the hollow portion with the inner wall surface. A suction device evacuates air from the hollow portion of the support frame.
85 Rectilineal movement speed enhancing apparatus of an orthogonal coordinate robot US466525 1995-06-06 US5612603A 1997-03-18 Hee J. Kim
A robotic mechanism includes a horizontal base, a vertical support mounted on the base, and a horizontal arm mounted on the vertical support. The vertical support is movable horizontally relative to the base. The arm includes a body which is movable horizontally relative to the vertical support and carries a member which is movable horizontally relative to the body. When the body moves horizontally relative to the vertical support, the member moves horizontally relative to the body to increase the effective rate of movement of the arm.
86 Linear slide apparatus and method of combining two or more linear slides US414713 1995-03-31 US5560281A 1996-10-01 Jeffrey R. Schneid
A fluid actuated linear slide for producing linear movement has a rigid body with a pair of spaced apart parallel bores for slidably receiving a pair of guide rods and a mounting plate fixed to one end of the guide rods. A fluid actuated cylinder is carried by the body between and parallel to the guide rods and has a casing and a rod slidably received in and extending from one end. The rod is connected with the mounting plate for reciprocating the plate and the guide rods with respect to the body. The linear slide is constructed in such a manner that two or more of the slides can be attached in series for producing movement in one or more paths.
87 Gripper mechanism US140165 1993-10-28 US5484181A 1996-01-16 Mohsen M. Saadat
The invention relates to a gripper mechanism for a manipulator or the like, having at least one movable gripper finger (6) swingable around a slide axis, as coupler of a kinematically multi-member positive guide mechanism (1, 2, 3, 4, 5, 6), which contains at least one slider/crank mechanism (1, 2, 3, 4) as actuating unit which has a crank (2) acting at one end on a first link (3) and pivoted at the other end on a slide rod (1), and a slide (4) which is guided on the slide rod (1) and abuts against the first link (3), a second link (5) being supported axially displaced therefrom on the slide (4) and both links (3, 5) of the guide mechanism acting on the gripper finger (6), the slide rod (1) carrying out no movement in the direction of the slide axis upon the movement of the gripper, and its strives for and achieves a flexurally as well as torsionally stiff development of such a gripper mechanism by a slide rod (1) which is formed of several decentrally arranged rods (7) as cage.
88 Electric jack having a rotation-translation movement conversion system and with energy recovery US162064 1993-12-09 US5444348A 1995-08-22 Philippe Garrec
An electric jack of the type used in robotics having a rotation-translation movement transformation system, at least one electric motor connected to the movement transformation system, means for controlling the electric motor for driving the movement transformation system with acceleration and deceleration phases and energy recovery means for recovering electrical energy generated by the electric motor during deceleration phases. The movement transformation system has a rotation part and a translation part and is mechanically reversible such that, during deceleration phases, the translation part is capable of driving the rotation part with substantially identical efficiency as the rotation part drives the translation part during acceleration phases. During deceleration phases, the kinetic energy of the translation part causes the electric motor to generate energy which is recovered and stored in an energy recovery system utilizing a capacitor and a diode.
89 Structure of shaft supporter in industrial robot US465115 1990-02-20 US5105136A 1992-04-14 Nobutoshi Torii; Susumu Ito; Masayuki Hamura; Akira Tanaka
A gear box (30) housing a reduction gear unit (24) and supporting a drive motor (22), and a elongated screw shaft (12) is fitted over a base plate (14) so that an area of a shaft supporter (10) projected in a plane perpendicular to a longitudinal direction of the elongated screw shaft is reduced, which supporter supports both ends of the elongaged screw shaft (12) for moving a movable element such as an arm of an industrial robot in a predetermined direction. Furthermore, a circular boss portion (32b) provided at the lower face of the gear box (30) and a hole (14a) provided at the base plate (14) are used for positioning the gear box on the base plate (14), and the positioning in a height direction is achieved by positioning elements (40) having a predetermined height dimension when the gear box (30) is attached to the base plate (14).
90 Infinitely adjustable travel lead screw and multi-cylinder driven movement unit US258594 1988-10-17 US5059089A 1991-10-22 Harutyun A. Kocaoglan
A multi-cylinder and short lead screw driven travel arm or machinery movement unit achieving infinitely variable travel through the design limits of travel imposed thereon. In one working configuration using 1", 2", 4" and 8" travel pneumatic cylinders and a 1" travel screw together yield a sixteen inch travel range with an infinite range of fully programmable settings through selected activation of cylinders along with the selected vernier setting of the 1" threaded travel screw. The travel range of settings may be increased even further by adding additional travel cylinders and increased length travel guide structure adequate for such increased travel range of settings, for example, addition of a 5" travel cylinder extends the range of settings to a maximum of twenty one inches.
91 Industrial robot US355550 1989-05-23 US5002242A 1991-03-26 Masahide Nagai
An industrial robot having an expansion axis, a turning axis and a vertical axis, wherein the one end of flexible supporting plate supporting an internal wiring and piping system of the robot is fixed to the expansion axis which is capable of making free linear motion for a base plate arranged to the vertical axis. The flexible supporting plate is bent in the form of letter U in parallel to the turning plane of the expansion axis. Therefore, the expansion axis can be located at the sufficient lower position for the base plate, and the strength and accuracy of the drive mechanism can be improved.
92 Transporting robot for semiconductor wafers US119839 1987-11-12 US4904153A 1990-02-27 Yoshiyuki Iwasawa; Tsutomu Ishida; Hiroshi Harada; Shintaro Kobayashi; Kenji Okamoto; Takashi Matsumoto; Kiwamu Yamamoto; Toshio Takasu
There is disclosed a robot used in a clean room and adapted to transport a wafer cassette containing semiconductor wafers. The robot includes: a guide rail disposed in the clean room; a robot body slidably connected to the guide rail for movement along the guide rail; and a first drive mechanism for driving the robot body along the guide rail. The robot body includes: a clamping hand for releasably clamping the wafer cassette; an arm assembly, extending between the guide rail and the clamping hand, for controlling the position of the clamping hand; and a wrist assembly, interposed between the arm assembly and the clamping hand, for adjusting the orientation of the clamping hand. The wrist assembly includes: a wrist frame connected via a horizontal pivot to the arm assembly for upward and downward movement, the wrist frame rotatably supporting the clamping hand for turning about an axis perpendicular to the horizontal pivot; a second drive mechanism for pivoting the wrist frame relative to the arm assembly; and a third drive mechanism for turning the clamping hand relative to the wrist frame.
93 Manipulator drive mechanism US198748 1988-05-25 US4864880A 1989-09-12 Daniel W. Grant; Walter Bell, Jr.
A manipulator drive mechanism employing splined shafts in both a vertical and a horizontal axes. The horizontal splined shaft is rotatably driven by a rack assembly and a pinion gear rotatably fixed with respect to the horizontal splined shaft and which is also slidable along the horizontal splined shaft.
94 Robotic automobile assembly US825752 1986-02-03 US4781517A 1988-11-01 Craig S. Pearce; Clayton V. Pearce; Carl Utz
A new robotic system is provided in which the robotic tool is mounted for movement on a gantry above the work piece upon which the work is to be performed. The tool is supported on two carriages each of which is movable with respect to each other and with respect to the gantry so that the tool has the capacity to move through five degrees of freedom and permit a more accurate response to a sensing system which determines the position of the work piece relative to a master and then moves the tool to a working position in substantial operational compliance with the master position.
95 System for handling structural components US854776 1986-04-22 US4725193A 1988-02-16 Walter Sticht
A handling system for components or tools comprises a guiding track formed by a pair of spaced parallel guiding posts, on which is displaceably mounted an intermediate carrier for the components coupled to an apparatus for displacing and positioning the intermediate carrier along the guiding posts, in which the guiding posts are associated with respective support elements extending parallel and lengthwise of the posts and transversely therefrom the support elements being arranged to stiffen the guiding posts and support them against bending due to operating forces on the carrier when handling components or tools.
96 Position incrementer US794791 1985-11-04 US4686870A 1987-08-18 James F. Mack
Apparatus utilized in combination with a carriage reciprocating between a primary base position and a second position spaced away from the primary base position. The apparatus varies the distance of the second position of the carriage from the primary base portion of the carriage and includes a stop surface on the carriage and a plurality of secondary stop surfaces operatively associated with the carriage stop surface. The secondary stop surfaces are each movable between at least two operative positions, a first operative position in which one of the secondary stop surfaces contacts the carriage stop surface when the carriage is moving away from its primary base position, and, a second operative position in which another of the secondary stop surfaces contacts the carriage stop surface when the carriage is moving from its primary base position. When a secondary stop surface contacts the carriage stop surface, the carriage is halted in its second position. Movement of the secondary stop surface between their first and second operative positions is activated by a control mechanism carried on the reciprocating carriage.
97 Apparatus for upward and downward movement of an arm in a robot system for taking out injection molded and die casting products US787238 1985-10-15 US4682930A 1987-07-28 Kiyoji Hachisu
An apparatus connected to an arm in a robot system removes injection molded and die cast products while compensating for the load on the piston rods of the apparatus. A chuck for grasping the products is moved up and down by a pair of pneumatic cylinders on a frame and intermediate frame. The pneumatic cylinders carry the load of the various elements of the apparatus. In order to eliminate variations in the load carried by the cylinders and absorb the shock at the ends of the cylinder strokes, the apparatus includes surge tanks connected to the cylinders. Compressed air is provided through the surge tanks to provide an upward pressure offsetting the load on the cylinders. When the motor is axially movable on the frame of the apparatus, the chuck is moved over a ball nut rotatably supported on the frame, a first ball screw axially movable on the frame and connected to the motor output shaft and the intermediate frame, and a second ball screw fixed to a chuck lift frame and axially movable on the intermediate frame. The first and second ball screws are connected for synchronous rotation. When the motor is fixed on the frame, first and second ball screws are rotated synchronously through a spline shaft.
98 Robot and control system US328726 1981-12-08 US4507044A 1985-03-26 Burleigh M. Hutchins; Raymond R. Dunlap; Louis Abrahams
A compact robot of the 3-axis type comprising a base-mounted motor control system with means to sense the position of a robot arm through a servo-system comprising position-sensing potentiometers mounted in the motor control system and a feed-back control system to co-ordinate the vertical and horizontal movement of a robot arm.
99 Industrial robot US304267 1981-09-21 US4502830A 1985-03-05 Hajimu Inaba; Seiichiro Nakashima; Shigemi Inagaki; Susumu Ito
An industrial robot having a trunk mounted for vertical and rotational movement on a stationary base is provided with two arm members extensible from the said trunk having a robot wrist mechanism attached to their ends. The extending and contracting movements of the arm members, rotational movement of the wrist and swinging movement of the wrist are controlled, respectively, by three electric servo motors mounted in a mounting compartment positioned on the side of the trunk opposite to the extensible arms.
100 Stroke enlarging mechanism US362543 1982-03-26 US4495828A 1985-01-29 Norihiro Iwamoto
A stroke enlarging mechanism comprises a stationary rack, a saddle member driven by an actuator relative to the stationary rack, an operating arm movable relative to the saddle member, and a movable rack secured to the operating arm. A first pinion and a second pinion are rotatably mounted in the saddle member to be engageable with the stationary rack and the movable rack, respectively. A coupling device couples the two pinions with each other. Upon driving the saddle member relative to the stationary rack, the two pinions are rotated thus displacing the operating arm for a distance larger than the driving stroke of the saddle member.
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