| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 181 | Method and apparatus for transferring a wafer | US10120477 | 2002-04-10 | US06991419B2 | 2006-01-31 | Ki-Sang Kim |
| The present invention relates to a transfer apparatus for a wafer, in which the wafer may be transferred in a narrow space by reducing a transfer device footprint. The transfer device has a base, a lower arm, an upper arm and a hand. The lower arm is configured to be vertically adjustable and rotatable on a vertical axis. The upper arm is pivotably coupled to the lower arm, and the hand is horizontally coupled to the upper arm. | ||||||
| 182 | Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces | US10873568 | 2004-06-22 | US20040228719A1 | 2004-11-18 | Daniel J. Woodruff; Randy Harris |
| Transfer devices for handling microelectronic workpieces, apparatus for processing microelectronic workpieces, and methods for manufacturing and using such transfer devices. One embodiment of a transfer device includes a transport unit configured to move along a linear track and a lift assembly carried by the transport unit. The transfer device can also include an arm assembly having an arm actuator carried by the lift assembly to move along a lift path and an arm carried by the arm actuator to rotate about the lift path. The arm can include a first extension projecting from one side of the lift path and a second extension projecting from another side of the lift path. The arm actuator can rotate the arm about the lift path. The transfer device can also include a first end-effector and a second end-effector. The first end-effector is rotatably coupled to the first section of the arm to rotate about a first rotation axis, and the second end-effector is rotatably coupled to the second extension of the arm to rotate about a second rotation axis. The first and second rotation axes can be generally parallel to the lift path, which itself can be substantially vertical, and the first and second end-effectors can be at different elevations relative to the arm. | ||||||
| 183 | TRANSFER DEVICES FOR HANDLING MICROELECTRONIC WORKPIECES WITHIN AN ENVIRONMENT OF A PROCESSING MACHINE AND METHODS OF MANUFACTURING AND USING SUCH DEVICES IN THE PROCESSING OF MICROELECTRONIC WORKPIECES | US09875300 | 2001-06-05 | US06752584B2 | 2004-06-22 | Daniel J. Woodruff; Randy Harris |
| Transfer devices for handling microelectronic workpieces, apparatus for processing microelectronic workpieces, and methods for manufacturing and using such transfer devices. One embodiment of a transfer device includes a transport unit configured to move along a linear track and a lift assembly carried by the transport unit. The transfer device can also include an arm assembly having an arm actuator carried by the lift assembly to move along a lift path and an arm carried by the arm actuator to rotate about the lift path. The arm can include a first extension projecting from one side of the lift path and a second extension projecting from another side of the lift path. The arm actuator can rotate the arm about the lift path. The transfer device can also include a first end-effector and a second end-effector. The first end-effector is rotatably coupled to the first section of the arm to rotate about a first rotation axis, and the second end-effector is rotatably coupled to the second extension of the arm to rotate about a second rotation axis. The first and second rotation axes can be generally parallel to the lift path, which itself can be substantially vertical, and the first and second end-effectors can be at different elevations relative to the arm. | ||||||
| 184 | Method and apparatus for transferring a wafer | US10120477 | 2002-04-10 | US20020150456A1 | 2002-10-17 | Ki-Sang Kim |
| The present invention relates to a transfer apparatus for a wafer, in which the wafer may be transferred in a narrow space by reducing a transfer device footprint. The transfer device has a base, a lower arm, an upper arm and a hand. The lower arm is configured to be vertically adjustable and rotatable on a vertical axis. The upper arm is pivotably coupled to the lower arm, and the hand is horizontally coupled to the upper arm. | ||||||
| 185 | Microelectronic workpiece transfer devices and methods of using such devices in the processing of microelectronic workpieces | US10080910 | 2002-02-22 | US20020102156A1 | 2002-08-01 | Daniel J. Woodruff; Randy Harris |
| Microelectronic workpiece transfer devices and methods for using such transfer devices. One embodiment of a transfer device includes a transport unit configured to move along a linear track and a lift assembly carried by the transport unit. The transfer device can also include an arm assembly having an arm actuator carried by the lift assembly to move along a lift path and an arm carried by the arm actuator to rotate about the lift path. The arm can include an extension projecting from one side of the lift path. The arm actuator can rotate the arm about the lift path. The transfer device can also include a first end-effector and a second end-effector. The end-effectors are rotatably coupled to the extension of the arm and can rotate independently about a common axis, with the first and second end-effectors at different elevations relative to the arm. | ||||||
| 186 | Robots for microelectronic workpiece handling | US09386590 | 1999-08-31 | US06322119B1 | 2001-11-27 | Wayne J. Schmidt; Thomas H. Oberlitner |
| An improved conveyor system for transporting a microelectronic workpiece within a processing tool is set forth. The conveyor system includes a transport unit slidably guided on a conveyor rail for transporting and manipulating the workpieces. The transport unit includes a vertical member which is connected to a base end of a two section robot arm. The robot arm includes an end effector at a distal end thereof which is actuated to grip a surrounding edge of a workpiece. A first rotary actuator is arranged to rotate the vertical member about its axis to rotate the entire robot arm. A second rotary actuator is positioned to rotate the second section of the robot arm, via a belt, with respect to the first section of the robot arm. A third rotary actuator is arranged to rotate the end effector about its horizontal axis. The third rotary actuator permits the end effector to flip the microelectronic workpiece between a face up and a face down orientation. In a further aspect of the invention, two transport units are mounted to slide laterally on the conveyor rail. The transport units include a vertical space between respective end effectors and the first sections of the robot arms to allow wafers carried by the end effectors to overlap in plan. Two different end effectors are disclosed, a plunger activated gripping device and a vacuum operated gripping device which uses raised pad areas, vacuum ports and locating pins. | ||||||
| 187 | Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces | US09875300 | 2001-06-05 | US20010043856A1 | 2001-11-22 | Daniel J. Woodruff; Randy Harris |
| Transfer devices for handling microelectronic workpieces, apparatus for processing microelectronic workpieces, and methods for manufacturing and using such transfer devices. One embodiment of a transfer device includes a transport unit configured to move along a linear track and a lift assembly carried by the transport unit. The transfer device can also include an arm assembly having an arm actuator carried by the lift assembly to move along a lift path and an arm carried by the arm actuator to rotate about the lift path. The arm can include a first extension projecting from one side of the lift path and a second extension projecting from another side of the lift path. The arm actuator can rotate the arm about the lift path. The transfer device can also include a first end-effector and a second end-effector. The first end-effector is rotatably coupled to the first section of the arm to rotate about a first rotation axis, and the second end-effector is rotatably coupled to the second extension of the arm to rotate about a second rotation axis. The first and second rotation axes can be generally parallel to the lift path, which itself can be substantially vertical, and the first and second end-effectors can be at different elevations relative to the arm. | ||||||
| 188 | Actuator structural body | US602795 | 1996-03-04 | US5799543A | 1998-09-01 | Shigekazu Nagai; Koji Sugano; Akio Saitoh; Masahiko Suzuki |
| An actuator structural body is constructed of standardized columnar bodies connected for moving a workpiece. The Actuator structural body includes actuators shaped as columnar bodies and having T-shaped grooves defined in outer side surfaces thereof, columnar member shaped as columnar bodies and having T-shaped grooves defined in outer side surfaces thereof and through holes defined therein, and joint members for joining the columnar members and the actuators bodies 204, 206, 208, 210 by engaging in the T-shaped grooves or fitting in the through holes in the columnar bodies. The columnar members 202 and the actuators bodies may be assembled or reassembled into a desired shape by the joint members. | ||||||
| 189 | Hand mechanism for robot | US936642 | 1992-08-28 | US5593293A | 1997-01-14 | Masaki Machino; Sumiyoshi Ito; Shojiro Danmoto; Fumio Kanno; Takao Komiya |
| A hand mechanism for a robot is attached to the distal end of an arm portion of a robot and has independent modules for executing predetermined elementary motions, which modules can be combined with each other in selected arbitrary combinations to attain desired elementary motions. The hand mechanism includes a holder module which includes a fixing member fixed to the arm portion, an attaching plate to be attached to other modules and a coupling mechanism for coupling the fixing member and the attaching plate. The coupling mechanism includes angle an adjustment pin for adjusting the attaching angle of the attaching plate about the arm portion, and a shear pin bolt for releasing a coupling state between the fixing member and the attaching plate upon application of a shock to the hand mechanism. | ||||||
| 190 | Electric Actuator | US224576 | 1994-04-07 | US5554899A | 1996-09-10 | Hiroshi Teramachi |
| An electric actuator which is used for e.g. an arm of an industrial robot includes a composite shaft having a ball screw groove and a ball spline groove, a hollow motor through which the composite shaft extends, a ball screw nut fitted threadedly about the composite shaft and secured to a motor shaft, and a ball spline nut fitted about the composite shaft and secured to a motor housing. The ball spline nut, ball screw nut, and motor are arranged in the order mentioned as viewed from an attachment for a moving body which is provided at one end of the composite shaft. An angular-contact bearing which supports the motor shaft rotatably is situated closer to the ball screw nut than the motor is. | ||||||
| 191 | Ball screw integrated linear guide unit | US156912 | 1993-11-24 | US5454278A | 1995-10-03 | Shinichi Kasuga |
| A ball screw integrated linear guide unit arranging on an inner end surface of an end cap not only linear guide ball lubricating grease feed passages reaching the curved passages from the grease nipple and a ball screw ball lubricating grease feed passage reaching the ball screw spiral groove from the grease nipple, whereby simultaneous lubrication for linear guide feed line and ball screw feed line can be achieved. | ||||||
| 192 | Linear guide system with integrally formed rack | US95012 | 1993-07-22 | US5390557A | 1995-02-21 | Toru Tsukada |
| In order to provide a linear guide system having rolling grooves on both sides and an integrally formed rack, which can be used with either a guide rail or sliders fixed and in which the direction of the deflection of the rail with its self-weight is different from the direction of vibration caused by movement of the rack, rack teeth are integrally formed in one of the side surfaces of the guide rail on which rolling grooves for rolling members are formed so that the direction of the tooth traces of the rack teeth is orthogonal to the direction along which the rolling grooves for the rolling members of the guide rail are formed. Accordingly, vibration of the rack does not overlap with the deflection of the rail, thereby producing good effects on prolongation of the life of the rack, prevention of the noise and improvement of precision in positioning. Note that, this system can be used both with the rail fixed and with the sliders fixed. | ||||||
| 193 | Pressure-medium actuated linear unit | US986568 | 1992-12-07 | US5305683A | 1994-04-26 | Gerhard Gosdowski; Josef Neuwirth |
| A pressure medium linear unit for handling devices for industrial manufacture includes a housing block, at least one operating cylinder for at least one piston, at least one piston rod, at least one guide rod, and guide elements for at least one piston rod and at least one guide rod. The housing block accommodates the at least one operating cylinder for the at least one piston and the guide elements for the at least one piston rod and the at least one guide rod. The housing block is a modular unit and includes a guide unit and a drive unit releasably connected with the guide unit, one behind the other, to form a compact unit in the direction of linear movement. The guide rod and the piston rod are arranged in an axially parallel manner. The end of the guide rod at the end of the drive can be moved within the drive unit. If the guide rod is moved into the drive unit, the drive unit extends at least over the moved-in length of the guide rod. The guide unit includes the guide elements for the piston rod and the guide rod. | ||||||
| 194 | Direct-acting actuator for an industrial robot | US477872 | 1990-04-11 | US5099707A | 1992-03-31 | Nobutoshi Tori; Susumu Ito; Masayuki Hamura; Akira Tanaka |
| A direct-acting actuator for an industrial robot has an elongate ball screw or feed screw which is attached or detached quickly and safely in a narrow working space. In attaching the ball screw, upper and lower end portions of the ball screw, diagonally inserted in the inside space of a column (10), are respectively fitted into holes (12a, 33a) of a column top plate (12) and a plate member (33) of a slider (30) through a passage (12b), formed in the top plate and opening in a slider-side end face of the same plate, and a passage (33b), formed in the plate member and opening in the distal end face of the same member. Then, the lower end of the ball screw is coupled to a reduction gear (52), and a bearing unit (22) mounted on the upper end of the ball screw and a ball nut (34) threadedly engaged with the ball screw are respectively fitted into the holes (12a, 32a) so that the bearing unit and the ball nut are fixed to the top plate and the plate member, respectively. | ||||||
| 195 | Device and method for active vibration damping | US506344 | 1990-04-09 | US5086564A | 1992-02-11 | Karl-Josef Schalz |
| A device and method for active vibration damping of an object which comprises a beam with two free ends comprises a vibration sensor, a control circuit, and an actuator. The sensor is located near the first end of the beam and the actuator is located near the second end of the beam. The control circuit converts input signals from said vibration sensor into control signals for controlling the actuator. The damping device is particularly useful where it forms part of a precision coordinate measuring machine which has a beam of varying length. In this instance, the sensor is located on a sliding spindle of the measuring machine. | ||||||
| 196 | Industrial robot apparatus | US536868 | 1990-06-12 | US5085556A | 1992-02-04 | Sadayuki Ohtomi |
| An industrial robot apparatus for palletizing or depalletizing loads onto or from a pallet, having a robot body, a slider supported on the robot body and movable in a first direction, a mechanism for moving the slider, a first arm provided on one end of the slider and rotatable parallel to a plane perpendicular to the first direction, a first motor for rotating the first arm, a second arm provided on a distal end of the first arm, rotatable parallel to the perpendicular plane and substantially extendible and retractable, a second motor for rotating the second arm, an extension/retraction mechanism for substantially extending and retracting the second arm, a wrist provided on a distal end of the second arm, rotatable parallel to the perpendicular plane and used to hold a load; and a third motor for rotating the wrist. | ||||||
| 197 | Linear unit for an assembly device in handling technology | US214330 | 1988-07-01 | US4913613A | 1990-04-03 | Gregory C. Hirschmann |
| A linear unit, particularly for a handling technology assembly device operatively connected to an external energy source and an external signal generator is proposed. The linear unit comprises a casing, a control valve incorporated into the casing, an actuator formed as a piston/cylinder unit and at least one guide device provided with a guide tube extended axially in parallel with the piston rod. In order to provide a closed pneumatic or hydraulic energy supply to the linear unit, the piston/cylinder unit is operatively connected by a first duct system integrated into the casing and by a second duct system integrated into the casing and the guide device to a mounting element which carries a gripper. The electric power can be supplied from the control valve via cables integrated into the casing and a second guide tube to the mounting element. | ||||||
| 198 | Apparatus for handling an assembly system having a carrier member and a slide unit | US232628 | 1988-08-15 | US4885996A | 1989-12-12 | Gregory C. Hirschmann |
| An apparatus for a handling assembly comprises at least one carrier member and at least one slide unit displaceably arranged on the carrier member. The slide unit is in operative connection via a cable drag member electrically/pneumatically or electrically/hydraulically with an energy and a signal source. The carrier member is a one-piece cellular structure and has an integrated guideway which, has an inclined position within the carrier member, so that a space-saving arrangement of the cable drag member, substantially protected against external action, is obtained. The slide unit comprises a driving unit, which is arranged in a U-shaped head guided with the lateral legs on the carrier member and is operatively connected with a rack arranged on the carrier member, for linear movement. Protective members are provided laterally on the carrier member. The slide unit together with the carrier member forms a closed system protected against external action or intervention. | ||||||
| 199 | Two servo axis, AC powered robot wrist | US863483 | 1986-05-15 | US4712973A | 1987-12-15 | John Garin; Allan J. Riggs; Robert S. Palmer |
| The wrist includes a first frameless permanent magnet AC powered motor 22 in a first housing 12 with this motor providing movement of a rack 34 along a translational axis A1 with a second frameless permanent magnet motor 42 carried in a second housing 18 connected to the carriage 16 of which the rack 34 is a part so that the housing 18 is movable along an insertion or translation axis A1 with the second motor 42 providing a rotary output. Both of the motors are AC powered and the rotors thereof are each supported solely by a single X type bearing 28 and 48. | ||||||
| 200 | Machine for effecting the transfer of objects in the space between positions having predetermined co-ordinates | US537483 | 1983-09-30 | US4630992A | 1986-12-23 | Luigi Gilli; Franco Sartorio |
| A machine (1) (53) (75) for effecting the transfer of objects in the space between positions having predetermined co-ordinates, in which said objects are supported by a head (25) integral with a pinion (20) (60) mounted rotatable on a slide (12a) (59) sliding in a direction perpendicular to the axis of said pinion (20) (60); the pinion (20) (60) meshing by opposing means with teeth (21) (64, 65) (76, 77) extending along said slide (12a) (59) and axially moving under the bias of driving apparatus (41, 42) (68, 69). | ||||||
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