| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 141 | Method of manufacturing MEMS switches with reduced switching voltage | US14883825 | 2015-10-15 | US10017383B2 | 2018-07-10 | Stephen E. Luce; Anthony K. Stamper |
| An approach includes a method of fabricating a switch. The approach includes forming a fixed electrode, forming a first cantilevered electrode, forming a second cantilevered electrode aligned vertically over the first fixed electrode, and which has an end that overlaps and is operable to directly contact an end of the first cantilevered electrode upon an application of a voltage to the fixed electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode. | ||||||
| 142 | Liquid Dielectric Electrostatic Mems Switch And Method Of Fabrication Thereof | US15735213 | 2016-06-14 | US20180174788A1 | 2018-06-21 | Mohammed Affan Zidan; Jurgen Kosel; Khaled Nabil Salama |
| A microelectromechanical system (MEMS) switch with liquid dielectric and a method of fabrication thereof are provided. In the context of the MEMS switch, a MEMS switch is provided including a cantilevered source switch, a first actuation gate disposed parallel to the cantilevered source switch, a first drain disposed parallel to a movable end of the cantilevered source switch, and a liquid dielectric disposed within a housing of the microelectromechanical system switch. | ||||||
| 143 | Method of manufacture MEMS switches with reduced voltage | US14883843 | 2015-10-15 | US09944518B2 | 2018-04-17 | Stephen E. Luce; Anthony K. Stamper |
| An approach includes a method of fabricating a switch. The approach includes forming a first fixed electrode and a second fixed electrode, forming a first cantilevered electrode aligned vertically over the first fixed electrode, forming a second cantilevered electrode aligned vertically over the first fixed electrode and which has an end that overlaps the first cantilevered electrode, forming a third cantilevered electrode aligned vertically over the second fixed electrode and operable to directly contact the first cantilevered electrode upon an application of a voltage to the second fixed electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode. | ||||||
| 144 | METHOD OF MANUFACTURING MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE | US15809066 | 2017-11-10 | US20180093884A1 | 2018-04-05 | Stephen E. LUCE; Anthony K. STAMPER |
| An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode, forming a second cantilevered electrode over an electrode and operable to contact the first cantilevered electrode upon an application of a voltage to the electrode, and forming an arm on the first cantilevered electrode with an extending protrusion extending upward from an upper surface of the arm. | ||||||
| 145 | Nonuniform corrugated diaphragm for MEMS tuners and actuators | US15098969 | 2016-04-14 | US09917344B2 | 2018-03-13 | Juan Zeng; Zhengan Yang; Dimitrios Peroulis |
| A cavity resonator tuning diaphragm comprising a plurality of inner corrugations, the plurality of inner corrugations having a first depth. An outer corrugation located between the plurality of inner corrugations and a perimeter of the diaphragm is also included, the outer corrugation having a second depth greater than the first depth. The addition of the outer deep corrugation provides increased thermal stability and reduced required actuation voltage. | ||||||
| 146 | METHOD OF MANUFACTURING MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE | US15807661 | 2017-11-09 | US20180065847A1 | 2018-03-08 | Stephen E. LUCE; Anthony K. STAMPER |
| An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode over a first electrode, forming a second cantilevered electrode over a second electrode and operable to directly contact the first cantilevered electrode upon an application of a voltage to at least one of the first electrode and a second electrode, and the first cantilevered electrode includes an arm with an extending protrusion which extends upward from an upper surface of the arm. | ||||||
| 147 | MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFACTURE | US15717187 | 2017-09-27 | US20180016137A1 | 2018-01-18 | Stephen E. LUCE; Anthony K. STAMPER |
| An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode over a first fixed electrode, forming a second cantilevered electrode with an end that overlaps the first cantilevered electrode, forming a third cantilevered electrode operable to directly contact the first cantilevered electrode upon an application of a voltage to a second fixed electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode. | ||||||
| 148 | Membrane-based NANO-electromechanical systems device and methods to make and use same | US14587259 | 2014-12-31 | US09831804B2 | 2017-11-28 | Joseph F Pinkerton; David A Badger; William Neil Everett; William Martin Lackowski |
| Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions. | ||||||
| 149 | Membrane-based nano-electromechanical systems device and methods to make and use same | US14409731 | 2013-06-19 | US09515580B2 | 2016-12-06 | Joseph F Pinkerton; David A Badger; William Neil Everett; William Martin Lackowski |
| Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions. | ||||||
| 150 | MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFACTURE | US14883843 | 2015-10-15 | US20160035513A1 | 2016-02-04 | Stephen E. LUCE; Anthony K. STAMPER |
| MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode. | ||||||
| 151 | MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFACTURE | US14670671 | 2015-03-27 | US20150200069A1 | 2015-07-16 | Stephen E. LUCE; Anthony K. STAMPER |
| MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode. | ||||||
| 152 | Membrane-Based Nano-Electromechanical Systems Device And Methods To Make And Use Same | US14409731 | 2013-06-19 | US20150180372A1 | 2015-06-25 | Joseph F Pinkerton; David A Badger; William Neil Everett; William Martin Lackowski |
| Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions. | ||||||
| 153 | Membrane-Based Nano-Electromechanical Systems Device And Methods To Make And Use Same | US14587119 | 2014-12-31 | US20150108872A1 | 2015-04-23 | Joseph F. Pinkerton; David A. Badger; William Neil Everett; William Martin Lackowski |
| Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions. | ||||||
| 154 | Horizontal coplanar switches and methods of manufacture | US13768235 | 2013-02-15 | US08878315B2 | 2014-11-04 | Felix P. Anderson; Thomas L. McDevitt; Anthony K. Stamper |
| A MEMS structure and methods of manufacture. The method includes forming a sacrificial metal layer at a same level as a wiring layer, in a first dielectric material. The method further includes forming a metal switch at a same level as another wiring layer, in a second dielectric material. The method further includes providing at least one vent to expose the sacrificial metal layer. The method further includes removing the sacrificial metal layer to form a planar cavity, suspending the metal switch. The method further includes capping the at least one vent to hermetically seal the planar cavity. | ||||||
| 155 | Driving member and driving member array module | US12869130 | 2010-08-26 | US08780146B2 | 2014-07-15 | Sung-Hui Huang; Wei-Chou Lan; San-Long Lin |
| An exemplary driving member and an exemplary array module formed by a plurality of the driving members are disclosed in the invention. The driving member includes a first suspending beam module, a second suspending beam module and a conductive suspending beam module. When a voltage is provided between the first suspending beam module and the second suspending beam module, or the first suspending beam module and the second suspending beam module are provided with two homopolar voltages, when the electric field force is larger than the deforming force threshold of the first suspending beam, the first suspending beam moves to contact with the conductive suspending beam module, so that the first suspending beam has a voltage same with the conductive suspending beam module. When the electric field force is smaller than the deforming force threshold of the first suspending beam, the first suspending beam module rebounds to an original state. | ||||||
| 156 | MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFACTURE | US13826070 | 2013-03-14 | US20130192964A1 | 2013-08-01 | Stephen E. LUCE; Anthony K. STAMPER |
| MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode. | ||||||
| 157 | INPUT APPARATUS | US13735318 | 2013-01-07 | US20130175148A1 | 2013-07-11 | Shinsuke Hisatsugu |
| An input apparatus includes a touch plate, a film sensor, an electrode portion, and a wire portion. The touch plate has a front side touched by the finger in the finger manipulation. The film sensor is bonded to a rear side of the touch plate. The electrode portion and wire portion are provided on the film sensor and connected to each other. The touch plate is composed of a plurality of different members including at least a first member and a second member. The plurality of different members have respective dielectric constants and being layered and laminated, respectively, in a plate thickness direction of the touch plate. The plurality of different members have different dimension ratios in the plate thickness direction to provide different dielectric constants depending on the electrode portion and the wire portion and provide a uniform plate thickness over a whole of the touch plate. | ||||||
| 158 | INTEGRATED ELECTRO-MECHANICAL ACTUATOR | US13732832 | 2013-01-02 | US20130140157A1 | 2013-06-06 | Michel Despont |
| The present invention provides an integrated electro-mechanical actuator and a manufacturing method for manufacturing such an integrated electro-mechanical actuator. The integrated electro-mechanical actuator comprises an electrostatic actuator gap between actuator electrodes and an electrical contact gap between contact electrodes. An inclination with an inclination angle is provided between the actuator electrodes and the contact electrodes. The thickness of this electrical contact gap is equal to the thickness of a sacrificial layer which is etched away in a manufacturing process. | ||||||
| 159 | MEMS switches with reduced switching voltage and methods of manufacture | US12107118 | 2008-04-22 | US08451077B2 | 2013-05-28 | Stephen E. Luce; Anthony K. Stamper |
| MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode. | ||||||
| 160 | DRIVING MEMBERAND DRIVING MEMBER ARRAY MODULE | US12869130 | 2010-08-26 | US20110187765A1 | 2011-08-04 | Sung-Hui Huang; Wei-Chou Lan; San-Long Lin |
| An exemplary driving member and an exemplary array module formed by a plurality of the driving members are disclosed in the invention. The driving member includes a first suspending beam module, a second suspending beam module and a conductive suspending beam module. When a voltage is provided between the first suspending beam module and the second suspending beam module, or the first suspending beam module and the second suspending beam module are provided with two homopolar voltages, when the electric field force is larger than the deforming force threshold of the first suspending beam, the first suspending beam moves to contact with the conductive suspending beam module, so that the first suspending beam has a voltage same with the conductive suspending beam module. When the electric field force is smaller than the deforming force threshold of the first suspending beam, the first suspending beam module rebounds to an original state. | ||||||
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