MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFACTURE专利检索- 静电继电器;电附着继电器专利检索查询-专利查询网

MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFACTURE
申请号	US15717187	申请日	2017-09-27	公开(公告)号	US20180016137A1	公开(公告)日	2018-01-18
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION;			发明人	Stephen E. LUCE; Anthony K. STAMPER;
摘要	An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode over a first fixed electrode, forming a second cantilevered electrode with an end that overlaps the first cantilevered electrode, forming a third cantilevered electrode operable to directly contact the first cantilevered electrode upon an application of a voltage to a second fixed electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.
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