Liquid Dielectric Electrostatic Mems Switch And Method Of Fabrication Thereof |
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| 申请号 | US15735213 | 申请日 | 2016-06-14 | 公开(公告)号 | US20180174788A1 | 公开(公告)日 | 2018-06-21 |
| 申请人 | King Abdullah University of Science and Technology; | 发明人 | Mohammed Affan Zidan; Jurgen Kosel; Khaled Nabil Salama; | ||||
| 摘要 | A microelectromechanical system (MEMS) switch with liquid dielectric and a method of fabrication thereof are provided. In the context of the MEMS switch, a MEMS switch is provided including a cantilevered source switch, a first actuation gate disposed parallel to the cantilevered source switch, a first drain disposed parallel to a movable end of the cantilevered source switch, and a liquid dielectric disposed within a housing of the microelectromechanical system switch. | ||||||
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| 说明书全文 | |||||||
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