Method of manufacture MEMS switches with reduced voltage专利检索- 静电继电器;电附着继电器专利检索查询-专利查询网

Method of manufacture MEMS switches with reduced voltage
申请号	US14883843	申请日	2015-10-15	公开(公告)号	US09944518B2	公开(公告)日	2018-04-17
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION;			发明人	Stephen E. Luce; Anthony K. Stamper;
摘要	An approach includes a method of fabricating a switch. The approach includes forming a first fixed electrode and a second fixed electrode, forming a first cantilevered electrode aligned vertically over the first fixed electrode, forming a second cantilevered electrode aligned vertically over the first fixed electrode and which has an end that overlaps the first cantilevered electrode, forming a third cantilevered electrode aligned vertically over the second fixed electrode and operable to directly contact the first cantilevered electrode upon an application of a voltage to the second fixed electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.
权利要求
说明书全文