Nonuniform corrugated diaphragm for MEMS tuners and actuators |
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| 申请号 | US15098969 | 申请日 | 2016-04-14 | 公开(公告)号 | US09917344B2 | 公开(公告)日 | 2018-03-13 |
| 申请人 | Purdue Research Foundation; | 发明人 | Juan Zeng; Zhengan Yang; Dimitrios Peroulis; | ||||
| 摘要 | A cavity resonator tuning diaphragm comprising a plurality of inner corrugations, the plurality of inner corrugations having a first depth. An outer corrugation located between the plurality of inner corrugations and a perimeter of the diaphragm is also included, the outer corrugation having a second depth greater than the first depth. The addition of the outer deep corrugation provides increased thermal stability and reduced required actuation voltage. | ||||||
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