METHOD OF MANUFACTURING MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE |
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| 申请号 | US15809066 | 申请日 | 2017-11-10 | 公开(公告)号 | US20180093884A1 | 公开(公告)日 | 2018-04-05 |
| 申请人 | INTERNATIONAL BUSINESS MACHINES CORPORATION; | 发明人 | Stephen E. LUCE; Anthony K. STAMPER; | ||||
| 摘要 | An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode, forming a second cantilevered electrode over an electrode and operable to contact the first cantilevered electrode upon an application of a voltage to the electrode, and forming an arm on the first cantilevered electrode with an extending protrusion extending upward from an upper surface of the arm. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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