| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 121 | 접점 개폐기 및 접점 개폐기를 구비한 장치 | KR1020030086637 | 2003-12-02 | KR100516278B1 | 2005-09-21 | 세키토모노리; 우노유타카; 마스다타카히로 |
| 요약 접점 부분에 있어서의 막두께 편차를, 간단한 구조 변경으로 저감할 수 있고, 접점간 갭 량의 편차를 저감하고, 접점 폐쇄시의 동작을 안정화함과 함께, 고주파 특성을 향상시켜서 신호의 전반 손실을 저감한다. 해결 수단 고정 기판(1)에, 복수의 고정 접점(4a, 5a)과 신호선(4, 5)을 배설한다. 고정 기판(1)에 대향하는 가동 기판(10)에, 고정 접점(4a, 5a)과 폐쇄, 개리를 행하는 가동 접점(18)을 마련한다. 고정 접점(4a, 5a)의 막두께를 신호선(4, 5)의 막두께보다 작게 하고, 고정 접점(4a, 5a)과 가동 접점(18)의 폐쇄시에, 고정 접점(4a, 5a)에 의해 구성된 오목부에 가동 접점(18)을 들어가게 하여, 신호선(4, 5)을 직선적으로 도통시킨다. | ||||||
| 122 | 정전 마이크로 릴레이, 그 정전 마이크로 릴레이를 이용한무선장치, 계측장치 및 접점 개폐방법 | KR1020020015990 | 2002-03-25 | KR1020020076131A | 2002-10-09 | 세키토모노리 |
| PURPOSE: To obtain the suitable contact separation force excellent in a high frequency characteristic with a simple and small-size structure that can be easily manufactured with low cost. CONSTITUTION: Signal lines 5a, 5b formed on a fixed substrate 1 are arranged on the same line. A movable substrate 2 is elastically supported on the fixed substrate 1 through a beam part 11 arranged in two places of point symmetry positions by using a movable contact 16 as a center point. The part facing to the signal lines 5a, 5b is removed from the movable substrate 2. The movable contact is elastically supported on two places orthogonal to the line where the signal lines 5a, 5b are arranged as well as not facing to the signal lines 5a, 5b. A pair of projections 17 are formed in point symmetry to the movable contact 16 as a center on a position attaching to either of the substrates 1, 2 that faces first. | ||||||
| 123 | 비선형적 복원력의 스프링을 가지는 ＭＥＭＳ 소자 | KR1020010009955 | 2001-02-27 | KR1020020069652A | 2002-09-05 | 심동하 |
| PURPOSE: A MEMS(Micro-Electro-Mechanical System) element having a non-linear restorative force spring is provided to enlarge the range of position controlling by using a spring element of non-linear restorative force, to obtain strong restorative force by using the spring when sticktion is generated, and to improve reliability by avoiding sticktion. CONSTITUTION: A MEMS element comprises a support element(20) formed on a substrate, a motion element(30) placed on the substrate and moving relative to the substrate, a spring element(40) to elastically suspend the motion element against the support element, a drive element to induce the relative motion of the motion element, and a stopper(60) to non-linearly increase the repulsive force of the spring element when the spring element is elastically deformed. | ||||||
| 124 | MICRO-ELECTRO MECHANICAL TUNNELING SWITCH | PCT/US2007085224 | 2007-11-20 | WO2008064216A3 | 2008-11-27 | BOZLER CARL O; KEAST CRAIG L; MULDAVIN JEREMY |
| A micro-electromechanical system switch includes a substrate (40) and a plurality of actuating electrodes (3000) formed the substrate wherein each actuating electrode is activatable. A cantilever beam (10) has a first end and a second end and a plurality of stops (2000) formed thereon. The plurality of stops engages the substrate between the plurality of actuating electrode. A contact area (2100) is formed in the substrate and located to engage the second end (2000) of the cantilever beam. A voltage source applies a voltage to each actuating electrode independently in a sequence from an actuating electrode located adjacent to the first end of the cantilever beam to an actuating electrode located adjacent to the second end of the cantilever beam so that the plurality of stops sequentially engage the substrate between the plurality of actuating electrodes. | ||||||
| 125 | 접촉 스프링을 포함하는 스위치 구조체 및 그 제조 방법 | KR1020160049028 | 2016-04-22 | KR101776661B1 | 2017-09-12 | 조일주; 이병철; 채의규 |
| 스위치구조체는제1 전극을향하여둥근형상으로볼록하게돌출형성되며외력에의해탄성적으로변형가능하고전도성재질로이루어지는접촉스프링을구비하는스위치몸체를포함하며, 상기접촉스프링은상기스위치몸체의이동또는변형에의해상기제1 전극과접촉되거나이격되도록이동가능하며, 상기접촉스프링이상기제1 전극과접촉함으로써, 상기제1 전극은제2 전극과서로전기적으로연결된다. | ||||||
| 126 | 진동형 멤스 스위치 및 그 제조방법 | KR1020040056579 | 2004-07-20 | KR100599115B1 | 2006-07-12 | 이문철; 정희문; 박태식 |
| 진동형 멤스 스위치가 개시된다. 본 스위치는, 교류전압이 인가되면 소정 방향으로 진동하는 진동체 및 진동체의 진동방향을 따라 소정거리 이격된 위치에 형성되는 고정접점을 포함한다. 이에 따라, 고정접점에 소정크기의 직류전압이 인가되면, 진동체의 진동폭이 증가하여 고정접점에 접촉하게 됨으로써 스위치가 온되게 된다. 한편, 진동체를 사이에 두고 소정의 제1기판 및 제2기판을 상호 접합시켜, 진동체를 진공상태의 밀폐된 공간에 고립시키는 것이 바람직하다. 본 발명에 따르면, 공진현상을 이용하여 스위치를 온/오프시키므로, 저전압으로도 안정적인 스위칭 동작을 수행할 수 있게 된다. 멤스, 스위치, 공진, 진동체 | ||||||
| 127 | ＭＥＭＳ 스위치 및 그 제조 방법 | KR1020040107858 | 2004-12-17 | KR1020060068915A | 2006-06-21 | 신형재; 김규식; 권순철; 이상훈; 김재흥 |
| 개시된 MEMS 스위치는 기판과, 기판상의 양측에 형성되고 스위칭접점부를 갖는 복수의 신호라인과, 기판상에 형성되며 복수의 신호라인의 사이에 형성된 복수의 고정전극과, 기판의 중앙을 중심으로 시소 운동하는 이너작동부재와, 이너작동부재의 시소운동에 연동되어 시소운동하는 아우터작동부재와, 이너작동부재의 상면 양단에 형성되되 그 단부가 아우터작동부재의 상부에 오버랩되도록 돌출 형성된 가압로드, 및 가압로드가 가압되는 위치인 아우터작동부재의 하면에 형성되어 신호라인의 스위칭접점부와 접촉되는 접촉부재를 포함한다. 이러한 구성을 통해 스위칭접점부의 스위칭 동작성을 향상시켜 삽입손실이 발생되는 것을 줄이고, 스틱션을 효과적으로 해소함과 아울러서 저전압 구동이 가능하다. MEMS, 스위치, 스틱션(Stiction), 삽입손실. 신호라인, 전극 | ||||||
| 128 | 마이크로-전기기계 스위치의 성능 향상을 위한 장치 및 방법 | KR1020057003514 | 2003-08-26 | KR1020050039867A | 2005-04-29 | 이반씨우,댄,에이.; 힐버트,클라우드 |
| In methods and circuits for using associated circuitry to enhance performance of a micro-electromechanical switch, one of the method embodiments is a contact conditioning process including applying a time-varying voltage to the control element of a closed switch. In another embodiment, a voltage profile applied to the control element of the switch can be tailored to improve the actuation speed or reliability of the switch. In another method embodiment, the performance of a switch may be evaluated by measuring a performance parameter, and corrective action initiated if the switch performance is determined to need improvement. An embodiment of a circuit for maintaining performance of a micro-electromechanical switch includes first and second signal line nodes, sensing circuitry coupled to the signal line nodes and adapted to sense a performance parameter value of the switch, and control circuitry operably coupled to at least one terminal of the switch. | ||||||
| 129 | 정전 마이크로 릴레이, 그 정전 마이크로 릴레이를 이용한무선장치, 계측장치 및 접점 개폐방법 | KR1020020015990 | 2002-03-25 | KR100455949B1 | 2004-11-08 | 세키토모노리 |
| Signal lines (5a, 5b) formed on a fixed substrate 1 are arranged on the same straight line. A movable substrate (2) is elastically supported on the fixed substrate (1) through beam portions (11) provided at two positions which are point-symmetrical with each other with a movable contact (16) centered thereon. At least portions opposing the signal lines (5a, 5b) are removed from the movable substrate (2). The movable contact (16) is elastically supported at two points that are orthogonal to the straight line on which the signal lines (5a, 5b) are arranged and do not face the signal lines (5a, 5b). A pair of protrusions 17 are formed at positions at which after closing the contacts, if a voltage were applied between the fixed electrode 4 and the movable electrode 12 without the protrusion, the fixed substrate 1 and the movable substrate 2 would contact each other following the contact between the fixed contact 7 and the movable contact 16, in a point-symmetrical manner with the movable contact 16 centered thereon. With this arrangement, it is possible to provide an electrostatic micro-relay which has a simple and small-size structure that is easily manufactured at low costs, and is superior in high-frequency characteristics with a suitable contact release force. <IMAGE> | ||||||
| 130 | 접점 개폐기 및 접점 개폐기를 구비한 장치 | KR1020030086637 | 2003-12-02 | KR1020040049796A | 2004-06-12 | 세키토모노리; 우노유타카; 마스다타카히로 |
| PURPOSE: A contact switch and an apparatus including the contact switch are provided to reduce variations of film thickness in a contact portion and variations of gap volume between contacts, and achieve improved operating stability. CONSTITUTION: A contact switch comprises a first contact arranged on a substrate; a second contact for performing shutting and opening operation with respect to the first contact; and signal lines(4,5) electrically connected by the shutting operation of the first contact and the second contact, wherein the signal lines are arranged on the substrate and insulated from each other. The film thickness of the first contact is smaller than the film thickness of the signal lines. | ||||||
| 131 | MICRO-ELECTROMECHANICAL SWITCH PERFORMANCE ENHANCEMENT | PCT/US0326696 | 2003-08-26 | WO2004021382A2 | 2004-03-11 | IVANCIW DAN A; HILBERT CLAUDE |
| In methods and circuits for using associated circuitry to enhance performance of a micro-electromechanical switch, one of the method embodiments is a contact conditioning process including applying a time-varying voltage to the control element of a closed switch. In another embodiment, a voltage profile applied to the control element of the switch can be tailored to improve the actuation speed or reliability of the switch. In another method embodiment, the performance of a switch may be evaluated by measuring a performance parameter, and corrective action initiated if the switch performance is determined to need improvement. An embodiment of a circuit for maintaining performance of a micro-electromechanical switch includes first and second signal line nodes, sensing circuitry coupled to the signal line nodes and adapted to sense a performance parameter value of the switch, and control circuitry operably coupled to at least one terminal of the switch. | ||||||
| 132 | VARIABLE CAPACITOR AND ASSOCIATED FABRICATION METHOD | PCT/IB0002051 | 2000-11-28 | WO0145120A3 | 2002-03-28 | COWEN ALLEN BRUCE; DHULER VIJAYAKUMAR RUDRAPPA; HILL EDWARD ARTHUR; KOESTER DAVID ALAN; MAHADEVAN RAMASWAMY |
| A variable capacitor having low loss and a correspondingly high Q is provided. In addition to a substrate, the variable capacitor includes at least one substrate electrode and a substrate capacitor plate that are disposed upon the substrate and formed of a low electrical resistance material, such as HTS material or a thick metal layer. The variable capacitor also includes a bimorph member extending outwardly from the substrate and over the at least one substrate electrode. The bimorph member includes first and second layers formed of materials having different coefficients of thermal expansion. The first and second layers of the bimorph member define at least one bimorph electrode and a bimorph capacitor plate such that the establishment of a voltage differential between the substrate electrode and the bimorph electrode moves the bimorph member relative to the substrate electrode, thereby altering the interelectrode spacing as well as the distance between the capacitor plates. As such, the capacitance of the variable capacitor can be controlled based upon the relative spacing between the bimorph member and the underlying substrate. A method is also provided for micromachining or otherwise fabricating a variable capacitor having an electrode and a capacitor plate formed of a low electrical resistance material such that the resulting variable capacitor has low loss and a correspondingly high Q. The variable capacitor can therefore be employed in high frequency applications, such as required by some tunable filters. | ||||||
| 133 | 触点开关器和具有触点开关器的装置 | CN200320116795.X | 2003-12-05 | CN2679833Y | 2005-02-16 | 积知范; 宇野裕; 增田贵弘 |
| 本实用新型提供一种触点开关器和具有触点开关器的装置，可以以简单的结构变化来降低触点部分的膜厚偏差，降低触点间的间隙量的偏差，实现触点闭合时的动作的稳定化，同时提高高频特性而降低信号的传递损失。该触点开关器是在固定基板(1)上配置多个固定触点(4a、5a)和信号线(4、5)。在与固定基板(1)对向的可动基板(10)上，设置与固定触点(4a、5a)闭合、分离的可动触点(18)。使固定触点(4a、5a)的膜厚比信号线(4、5)的膜厚小，在固定触点(4a、5a)和可动触点(18)闭合时，将可动触点(18)插入到由固定触点(4a、5a)构成的凹部中，将信号线(4、5)直线导通。 | ||||||
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