| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 1 | 微机电开关性能的提高 | CN03820157.7 | 2003-08-26 | CN1679130A | 2005-10-05 | D·A·伊万尼西维; C·希尔伯特 |
| 在用于采用辅助电路系统以提高微机电开关性能的方法和电路中，方法实施例中的一个实施例是包括把随时间变化的电压加到已导通开关的控制元件的接触调整过程。在另一实施例中，可修整加到开关控制元件的电压分布来改善开关的驱动速度或可靠性。在另一方法实施例中，开关的性能可通过测量性能参数来评估，如果确定必需改善开关性能，则启动校正操作。用于维持微机电开关性能的电路包括第一和第二信号线节点，耦合到该两根信号线节点、且适于传感开关性能参数值的传感电路系统，和可操作地耦合到开关的至少一端的控制电路系统。 | ||||||
| 2 | 触点开关器和具有触点开关器的装置 | CN200310119891.4 | 2003-12-05 | CN1519877A | 2004-08-11 | 积知范; 宇野裕; 增田贵弘 |
| 本发明提供一种触点开关器和具有触点开关器的装置，可以以简单的结构变化来降低触点部分的膜厚偏差，降低触点间的间隙量的偏差，实现触点闭合时的动作的稳定化，同时提高高频特性而降低信号的传递损失。该触点开关器是在固定基板(1)上配置多个固定触点(4a、5a)和信号线(4、5)。在与固定基板(1)对向的可动基板(10)上，设置与固定触点(4a、5a)闭合、分离的可动触点(18)。使固定触点(4a、5a)的膜厚比信号线(4、5)的膜厚小，在固定触点(4a、5a)和可动触点(18)闭合时，将可动触点(18)插入到由固定触点(4a、5a)构成的凹部中，将信号线(4、5)直线导通。 | ||||||
| 3 | 触点开关器和具有触点开关器的装置 | CN200310119891.4 | 2003-12-05 | CN100353475C | 2007-12-05 | 积知范; 宇野裕; 增田贵弘 |
| 本发明提供一种触点开关器和具有触点开关器的装置，可以以简单的结构变化来降低触点部分的膜厚偏差，降低触点间的间隙量的偏差，实现触点闭合时的动作的稳定化，同时提高高频特性而降低信号的传递损失。该触点开关器是在固定基板(1)上配置多个固定触点(4a、5a)和信号线(4、5)。在与固定基板(1)对向的可动基板(10)上，设置与固定触点(4a、5a)闭合、分离的可动触点(18)。使固定触点(4a、5a)的膜厚比信号线(4、5)的膜厚小，在固定触点(4a、5a)和可动触点(18)闭合时，将可动触点(18)插入到由固定触点(4a、5a)构成的凹部中，将信号线(4、5)直线导通。 | ||||||
| 4 | 微机械元件的控制方法及配置 | CN01811158.0 | 2001-04-12 | CN1436357A | 2003-08-13 | T·赖海宁; V·埃尔莫洛夫 |
| 本发明涉及微机械元件的控制。特别是本发明涉及微机械开关的控制。按照控制至少一个微机械元件的方法，一个第一控制信号和一个第二控制信号被传递给微机械元件。第二控制信号被设置为将微机械元件置于激活态，第一控制信号被设置为将微机械元件保持在激活态。用于控制至少一个微机械元件(402)的配置，包括至少一个用于产生至少一个第一控制信号和一个第二控制信号的装置，用于提升至少第二控制信号电压电平的装置，以及将第一控制信号和已提升电压电平的第二控制信号传递给微机械元件的装置。通过本发明，较低的电压电平可以用于微机械领域。 | ||||||
| 5 | 可变电容器及相关的制造方法 | CN00803826.0 | 2000-11-28 | CN1408120A | 2003-04-02 | 阿伦·B·考恩; 维加库玛·R·度勒; 爱德华·A·希尔; 戴维·A·科斯特; 拉玛斯瓦米·马哈德万 |
| 提供一种有低损耗和相应的高Q值的可变电容器。除了基片外，该可变电容器包括配置在该基片上的至少一个基片电极和一基片电容器板，它们由低电阻材料如HTS材料或厚金属层形成。可变电容器还包括一双晶构件，它由基片向外延伸并覆盖在至少一个基片电极之上。双晶构件包括由具有不同热膨胀系数的材料形成的第一和第二层。双晶构件的第一和第二层限定至少一个双晶电极和双晶电容器板，使得在基片电极和双晶电极间建立的电压差能使双晶构件相对于基片电极移动，从而改变极间距离和电容器板间的距离。因此，可变电容器的电容量可根据双晶构件及其下面的基片间的相对间距而控制。还提供一种方法以微细加工或者用别的方式制造一可变电容器，其电极和电容器板由低电阻材料形成，使所得的电容器有低损耗和相应的高Q值。该可变电容器因此可用于高频应用，例如某些可调谐滤波器所需要的。 | ||||||
| 6 | SPRING STRUCTURE FOR MEMS DEVICE | EP05807167.1 | 2005-10-24 | EP1807856A1 | 2007-07-18 | STEENEKEN, Peter G.; VAN BEEK, Jozef Thomas Martinus; RIJKS, Theo |
| A MEM device has a movable element (30), a pair of electrodes (e1, e2) to move the movable element, one electrode having an independently movable section (e3), resiliently coupled to the rest of the respective electrode to provide additional resistance to a pull in of the electrodes. This can enable a higher release voltage Vrel, and thus reduced risk of stiction. Also, a ratio of Vpi to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This enables faster switching. The area of the independently movable section is smaller than the rest of the electrode, and the spring constant of the resilient coupling is greater than that of the flexible support. Alternatively, the movable element can have a movable stamp section resiliently coupled and protruding towards the substrate to provide an additional resistance to pull in when it contacts the substrate. | ||||||
| 7 | BI-STABLE MEMORY ELEMENT | EP94914474.5 | 1994-05-06 | EP0698279B1 | 1997-11-26 | Smith,Charles Gordon |
| A bi-stable memory element (1) comprises a base contact (3), and a bridging contact (8), both made from an electrically conductive material. The bridging contact (8) is dimensioned so as to have two stable positions, in one of which the bridging contact (8) is in contact with the base contact (3), and in the other of which the bridging contact (8) is spaced apart from the base contact (3). Deflection means (4, 5) deflects the bridging contact (8) from one stable position to the other. | ||||||
| 8 | BI-STABLE MEMORY ELEMENT | EP94914474.0 | 1994-05-06 | EP0698279A1 | 1996-02-28 | Smith,Charles Gordon |
| A bi-stable memory element (1) comprises a base contact (3), and a bridging contact (8), both made from an electrically conductive material. The bridging contact (8) is dimensioned so as to have two stable positions, in one of which the bridging contact (8) is in contact with the base contact (3), and in the other of which the bridging contact (8) is spaced apart from the base contact (3). Deflection means (4, 5) deflects the bridging contact (8) from one stable position to the other. | ||||||
| 9 | Stiction reduction for MEMS devices | US13706913 | 2012-12-06 | US08948706B2 | 2015-02-03 | Adrian Napoles; Vijay L. Asrani; Gregory R. Black |
| A capacitive micro-electromechanical switch (MEMS) integrated circuit (IC) comprises a plurality of capacitors, each having a voltage terminal for applying an actuation voltage to the individual capacitor, wherein each capacitor is capable of being individually cycled. The MEMS IC further includes: a high voltage driver having a voltage distribution mechanism that couples to the voltage terminal of each of the plurality of capacitors to enable the high voltage driver to selectively provide a pre-determined voltage input required to actuate and charge a selected one or more of the plurality of capacitors; and control logic communicatively coupled to the high voltage driver and which deterministically applies power cycle times (less than a stiction limit) for an actuation and de-actuation of at least a first capacitor of the plurality of capacitors to substantially reduce an occurrence of stiction within at least the first capacitor during operation of the MEMS device. | ||||||
| 10 | Spring structure for MEMS device | US11718130 | 2005-10-24 | US08098120B2 | 2012-01-17 | Peter G. Steeneken; Jozef Thomas Martinus Van Beek; Theo Rijks |
| A MEM device has a movable element (30), a pair of electrodes (e1, e2) to move the movable element, one electrode having an independently movable section (e3), resiliently coupled to the rest of the respective electrode to provide additional resistance to a pull in of the electrodes. This can enable a higher release voltage Vrel, and thus reduced risk of stiction. Also, a ratio of Vpi to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This enables faster switching. The area of the independently movable section is smaller than the rest of the electrode, and the spring constant of the resilient coupling is greater than that of the flexible support. Alternatively, the movable element can have a movable stamp section resiliently coupled and protruding towards the substrate to provide an additional resistance to pull in when it contacts the substrate. | ||||||
| 11 | Electrostatic relay | US11237843 | 2005-09-29 | US07619497B2 | 2009-11-17 | Takashi Yuba; Hideki Iwata |
| An electrostatic micro relay, in which the contact gap between moving and fixed contacts may be increased and the reliability and high-performance regarding contacting and separating the moving contact with and from the fixed contact may be improved. In the micro relay according to the invention, as a comb-shaped moving electrode is supported at an obliquely upper position relative to a fixed comb-shaped electrode, the contact gap may be lengthened. When a predetermined voltage is applied between the contacts, the moving electrode is moved obliquely downward toward the fixed electrode such that the contact surface of the moving electrode slidably contacts the contact surface of the fixed electrode. This slidably contact may cause a wiping effect, whereby each contact surface may be kept clean. | ||||||
| 12 | Micro-electromechanical system (MEMS) switch | US11317960 | 2005-12-22 | US07602261B2 | 2009-10-13 | Tsung-Kuan Allen Chou; Quan Tran |
| An electromechanical switch includes an actuation electrode, a cantilever electrode, a contact, a suspended conductor, and a signal line. The actuation electrode is mounted to a substrate, the cantilever electrode is suspended proximate to the actuation electrode, and the contact is mounted to the cantilever electrode. The suspended conductor is coupled to the contact and straddles a portion of the cantilever electrode. The signal line is positioned to form a closed circuit with the contact and the suspended conductor when an actuation voltage is applied between the actuation electrode and the cantilever electrode. | ||||||
| 13 | Ultra-low voltage capable zipper switch | US11165795 | 2005-06-23 | US07321275B2 | 2008-01-22 | Tsung-Kuan Allen Chou; Hanan Bar; Quan Tran; Joseph Melki; John Heck; Qing Ma |
| An electromechanical switch includes an actuation electrode, an anchor, a cantilever electrode, a contact, and signal lines. The actuation electrode and anchor are mounted to a substrate. The cantilever electrode is supported by the anchor above the actuation electrode. The contact is mounted to the cantilever electrode. The signal lines are positioned to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the cantilever electrode causing the cantilever electrode to bend towards the actuation electrode in a zipper like movement starting from a distal end of the cantilever electrode. | ||||||
| 14 | Electrostatic micro-switch for components with low operating voltages | US10536632 | 2003-11-27 | US07283023B2 | 2007-10-16 | Philippe Robert |
| The invention relates to an electrostatic micro-switch intended to connect two conductor paths (4, 5) placed on a support, the connection between the two conductor paths being created by means of a contact stud (6) fitted to the distortion means (3) made in insulating material and capable of distorting in relation to the support, under the influence of an electrostatic force generated by control electrodes, the contact stud connecting the ends (14, 15) of the two conductor paths (4, 5) when the distortion means are sufficiently distorted. The control electrodes are laid out on the distortion means and the support in two sets of electrodes, a first set of electrodes (101, 102, 33, 53) intended to generate a first electrostatic force to initiate the distorting of the distortion means, a second set of electrodes (101, 102, 7, 8) intended to generate a second electrostatic force to continue the distorting of the distortion means (3) so that the contact stud (6) connects the ends (14, 15) of the two conductor paths. | ||||||
| 15 | Electro-mechanical micro-switch device | US10979706 | 2004-11-02 | US07250837B2 | 2007-07-31 | Gregory N. Nielson; George Barbastathis |
| The electro-mechanical micro-switch device includes first and second fixed electrodes. A movable electrode is positioned with respect to the first and second fixed electrodes so that the position of the movable electrode can be selectively placed in one of two opposing states defined by the fixed electrodes. The stored elastic potential energy of the movable electrode and its flexible supporting structure is used for switching between the two states. An electrostatic hold voltage is used to hold the movable electrode in the two switch states. | ||||||
| 16 | Micro-Electromechanical Switch Performance Enhancement | US11674233 | 2007-02-13 | US20070127186A1 | 2007-06-07 | Dan Ivanciw; Claude Hilbert |
| In methods and circuits for using associated circuitry to enhance performance of a micro-electromechanical switch, one of the method embodiments is a contact conditioning process including applying a time-varying voltage to the control element of a closed switch. In another embodiment, a voltage profile applied to the control element of the switch can be tailored to improve the actuation speed or reliability of the switch. In another method embodiment, the performance of a switch may be evaluated by measuring a performance parameter, and corrective action initiated if the switch performance is determined to need improvement. An embodiment of a circuit for maintaining performance of a micro-electromechanical switch includes first and second signal line nodes, sensing circuitry coupled to the signal line nodes and adapted to sense a performance parameter value of the switch, and control circuitry operably coupled to at least one terminal of the switch. | ||||||
| 17 | Micro-electromechanical switch performance enhancement | US10983539 | 2004-11-08 | US07190092B2 | 2007-03-13 | Dan A. Ivanciw; Claude Hilbert |
| In methods and circuits for using associated circuitry to enhance performance of a micro-electromechanical switch, one of the method embodiments is a contact conditioning process including applying a time-varying voltage to the control element of a closed switch. In another embodiment, a voltage profile applied to the control element of the switch can be tailored to improve the actuation speed or reliability of the switch. In another method embodiment, the performance of a switch may be evaluated by measuring a performance parameter, and corrective action initiated if the switch performance is determined to need improvement. An embodiment of a circuit for maintaining performance of a micro-electromechanical switch includes first and second signal line nodes, sensing circuitry coupled to the signal line nodes and adapted to sense a performance parameter value of the switch, and control circuitry operably coupled to at least one terminal of the switch. | ||||||
| 18 | Contact switch for high frequency application | US10727060 | 2003-12-03 | US07038301B2 | 2006-05-02 | Tomonori Seki; Yutaka Uno; Takahiro Masuda |
| A plurality of fixed contacts and signal lines are provided on a fixed substrate. A movable contact which is closed or opened with the fixed contacts is provided on a movable substrate opposed to the fixed substrate. A film thickness of the fixed contacts is made to be smaller than that of the signal lines so that the movable contact is set in a concave portion constituted by the fixed contacts when the fixed contacts, and the movable contact are closed and the signal lines are linearly connected. | ||||||
| 19 | Electro-mechanical micro-switch device | US10979706 | 2004-11-02 | US20050173235A1 | 2005-08-11 | Gregory Nielson; George Barbastathis |
| The electromechanical micro-switch device includes first and second fixed electrodes. A movable electrode is positioned with respect to the first and second fixed electrodes so that the position of the movable electrode can be selectively placed in one of two opposing states defined by the fixed electrodes. The stored elastic potential energy of the movable electrode and its flexible supporting structure is used for switching between the two states. An electrostatic hold voltage is used to hold the movable electrode in the two switch states. | ||||||
| 20 | Electrostatic actuator | US10349807 | 2003-01-22 | US06856219B2 | 2005-02-15 | Hiroshi Kawai |
| An electrostatic actuator includes a movable member that is connected to a movable member securing section through a movable connection beam so that the movable member can be displaced in the x-axis direction. Drive electrode supporting sections are connected to drive electrode securing sections through driving connection beams so that they can move towards and away from each other. Gap sizes a, b, and c between first movable electrodes to third movable electrodes and respective first drive electrodes to third drive electrodes are successively larger. When the actuator operates, the movable member is displaced in a plurality of stages by electrostatic forces successively produced between the first movable electrode and the first drive electrode, the second movable electrode and the second drive electrode, and the third movable electrode and the third drive electrode. As a result, it is possible for the movable member to have high rigidity (resonant frequency) and to move stably, so that its amount of displacement is very large. By successively displacing the movable member via the plurality of drive electrodes, the movable member has very high rigidity and is greatly displaced, so that the performance of the actuator is greatly improved. | ||||||
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