| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 61 | Micro-electromechanical system (MEMS) switch | US11317960 | 2005-12-22 | US20070146095A1 | 2007-06-28 | Tsung-Kuan Allen Chou; Quan Tran |
| An electromechanical switch includes an actuation electrode, a cantilever electrode, a contact, a suspended conductor, and a signal line. The actuation electrode is mounted to a substrate, the cantilever electrode is suspended proximate to the actuation electrode, and the contact is mounted to the cantilever electrode. The suspended conductor is coupled to the contact and straddles a portion of the cantilever electrode. The signal line is positioned to form a closed circuit with the contact and the suspended conductor when an actuation voltage is applied between the actuation electrode and the cantilever electrode. | ||||||
| 62 | Ultra-low voltage capable zipper switch | US11165795 | 2005-06-23 | US20060290443A1 | 2006-12-28 | Tsung-Kuan Chou; Hanan Bar; Quan Tran; Joseph Melki; John Heck; Qing Ma |
| An electromechanical switch includes an actuation electrode, an anchor, a cantilever electrode, a contact, and signal lines. The actuation electrode and anchor are mounted to a substrate. The cantilever electrode is supported by the anchor above the actuation electrode. The contact is mounted to the cantilever electrode. The signal lines are positioned to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the cantilever electrode causing the cantilever electrode to bend towards the actuation electrode in a zipper like movement starting from a distal end of the cantilever electrode. | ||||||
| 63 | Collapsing zipper varactor with inter-digit actuation electrodes for tunable filters | US11092022 | 2005-03-29 | US20060226501A1 | 2006-10-12 | Tsung-Kuan Allen Chou |
| According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a substrate, a plurality of actuation electrodes mounted on the substrate, a plurality of bottom electrodes mounted on the substrate, a capacitor having subcomponents mounted on the two or more bottom electrodes and a top bendable electrode mounted on the substrate. The top electrode collapses a first magnitude towards the actuation electrodes whenever a first voltage is applied to one or more of the actuation electrodes and collapses a second magnitude towards the actuation electrodes whenever a second voltage is applied to the actuation electrodes. | ||||||
| 64 | Electrostatic micro-switch for components with low operating voltages | US10536632 | 2003-11-27 | US20060164193A1 | 2006-07-27 | Philippe Robert |
| The invention relates to an electrostatic micro-switch intended to connect two conductor paths (4, 5) placed on a support, the connection between the two conductor paths being created by means of a contact stud (6) fitted to the distortion means (3) made in insulating material and capable of distorting in relation to the support, under the influence of an electrostatic force generated by control electrodes, the contact stud connecting the ends (14, 15) of the two conductor paths (4, 5) when the distortion means are sufficiently distorted. The control electrodes are laid out on the distortion means and the support in two sets of electrodes, a first set of electrodes (101, 102, 33, 53) intended to generate a first electrostatic force to initiate the distorting of the distortion means, a second set of electrodes (101, 102, 7, 8) intended to generate a second electrostatic force to continue the distorting of the distortion means (3) so that the contact stud (6) connects the ends (14, 15) of the two conductor paths. | ||||||
| 65 | Switching matrix with two control inputs and a hold input at each switching element | US11283430 | 2005-11-18 | US20060147027A1 | 2006-07-06 | Georg Rauh |
| A switching matrix has a first number of inputs and a second number of outputs with a conductor arrangement and controllable switching elements by means of which the inputs can be connected with the outputs. The switching matrix has a first number of control lines and a second number of hold lines. Each switching element is connected with at least two control lines and at least one hold line. The control lines supply a switching signal to the switching element, by means of which switching signal one of the inputs is connected with one of the outputs by the switching element. The hold line supplies a hold signal to the switching element via which the connection between the respective input and the respective output is maintained. | ||||||
| 66 | Vibration type MEMS switch and fabricating method thereof | US11182775 | 2005-07-18 | US20060017125A1 | 2006-01-26 | Moon-chul Lee; Tae-sik Park; Hee-moon Jeong |
| A vibration type MEMS switch and a method of fabricating the vibration type MEMS switch. The vibration type MEMS switch includes a vibrating body supplied with an alternating current voltage of a predetermined frequency to vibrate in a predetermined direction; and a stationary contact point spaced apart from the vibrating body along a vibration direction of the vibrating body. When a direct current voltage with a predetermined magnitude is applied to the stationary contact point, a vibration margin of the vibrating body is increased, the vibrating body contacts the stationary contact point and the vibration type MEMS switch is turned on. A first substrate is bonded to a second substrate to isolate the vibrating body in a sealed vacuum space. The vibration type MEMS switch is turned on and/off by a resonance. | ||||||
| 67 | Method of forming a beam for a MEMS switch | US10342778 | 2003-01-15 | US06880235B2 | 2005-04-19 | Qing Ma |
| A microelectromechanical system (MEMS) switch having a high-resonance-frequency beam is disclosed. The MEMS switch includes first and second spaced apart electrical contacts, and an actuating electrode. The beam is adapted to establish contact between the electrodes via electrostatic deflection of the beam as induced by the actuating electrode. The beam may have a cantilever or bridge structure, and may be hollow or otherwise shaped to have a high resonant frequency. Methods of forming the high-speed MEMS switch are also disclosed. | ||||||
| 68 | Contact switch and apparatus provided with contact switch | US10727060 | 2003-12-03 | US20040121510A1 | 2004-06-24 | Tomonori Seki; Yutaka Uno; Takahiro Masuda |
| A plurality of fixed contacts and signal lines are provided on a fixed substrate. A movable contact which is closed or opened with the fixed contacts is provided on a movable substrate opposed to the fixed substrate. A film thickness of the fixed contacts is made to be smaller than that of the signal lines so that the movable contact is set in a concave portion constituted by the fixed contacts when the fixed contacts, and the movable contact are closed and the signal lines are linearly connected. | ||||||
| 69 | Micro-electromechanical switch performance enhancement | US10229586 | 2002-08-28 | US20040040828A1 | 2004-03-04 | Dan A. Ivanciw; Claude Hilbert |
| In methods and circuits for using associated circuitry to enhance performance of a micro-electromechanical switch, one of the method embodiments is a contact conditioning process including applying a time-varying voltage to the control element of a closed switch. In another embodiment, a voltage profile applied to the control element of the switch can be tailored to improve the actuation speed or reliability of the switch. In another method embodiment, the performance of a switch may be evaluated by measuring a performance parameter, and corrective action initiated if the switch performance is determined to need improvement. An embodiment of a circuit for maintaining performance of a micro-electromechanical switch includes first and second signal line nodes, sensing circuitry coupled to the signal line nodes and adapted to sense a performance parameter value of the switch, and control circuitry operably coupled to at least one terminal of the switch. | ||||||
| 70 | Reducing the actuation voltage of microelectromechanical system switches | US10185283 | 2002-06-28 | US20040000696A1 | 2004-01-01 | Qing Ma; Tsung-Kuan Allen Chou; Valluri Rao |
| A microelectromechanical system switch may include a relatively stiff cantilevered beam coupled, on its free end, to a more compliant or flexible extension. A contact may be positioned at the free end of the cantilevered beam. The extension reduces the actuation voltage that is needed and compensates for the relative stiffness of the cantilevered beam in closing the switch. In opening the switch, the stiffness of the cantilevered beam may advantageously enable quicker operation which may be desirable in higher frequency situations. | ||||||
| 71 | Device adapted to pull a cantilever away from a contact structure | US09895455 | 2001-06-29 | US06646215B1 | 2003-11-11 | Richard D. Nelson |
| A device is provided which is adapted to electrostatically pull a cantilever away from a conductive pad. In particular, a microelectromechanical device is provided which includes a fulcrum contact structure interposed between two electrodes spaced under a cantilever and a conductive pad arranged laterally adjacent to one of the electrodes. The cantilever may be brought into contact with the conductive pad by residual forces within the cantilever and/or an application of a closing voltage to one of the electrodes. Such a device may be adapted bring the cantilever in contact with the fulcrum contact structure by applying an actuation voltage to the other of the electrodes. In addition, the actuation voltage may deflect the cantilever away from the conductive pad. In some cases, deflecting the cantilever from the conductive pad may include releasing the closing voltage and increasing the actuation voltage subsequent to the release of the closing voltage. | ||||||
| 72 | HIGH-SPEED MEMS SWITCH WITH HIGH-RESONANCE-FREQUENCY BEAM | US09943451 | 2001-08-30 | US20030042117A1 | 2003-03-06 | Qing Ma |
| A microelectromechanical system (MEMS) switch having a high-resonance-frequency beam is disclosed. The MEMS switch includes first and second spaced apart electrical contacts, and an actuating electrode. The beam is adapted to establish contact between the electrodes via electrostatic deflection of the beam as induced by the actuating electrode. The beam may have a cantilever or bridge structure, and may be hollow or otherwise shaped to have a high resonant frequency. Methods of forming the high-speed MEMS switch are also disclosed. | ||||||
| 73 | Microelectromechanical (MEMS) switch using stepped actuation electrodes | US09900614 | 2001-07-06 | US06529093B2 | 2003-03-04 | Qing Ma |
| A microelectromechanical (MEMS) switch is described. The switch comprises a cantilever beam having a proximal end and a distal end. The cantilever beam is supported by its proximal end above a substrate by a raised anchor. An intermediate actuation electrode is placed beneath the cantilever beam and is separated from the bottom of the cantilever beam by a narrow gap. Finally, a contact pad or transmission line is placed beneath the cantilever beam and separated from the bottom of the cantilever beam by a larger gap. | ||||||
| 74 | MEMS device having flexures with non-linear restoring force | US10075224 | 2002-02-15 | US20020149071A1 | 2002-10-17 | Dong-Ha Shim |
| A MEMS device having flexure elements with non-linear restoring force. The MEMS device has a substrate, support elements formed on the substrate, a moveable element positioned over the substrate by the support elements to move relative substrate, flexure elements for elastically suspending the moveable element on the support elements, a driving element for moving the moveable element, and repulsive elements for increasing the repulsive force of the flexure elements when the flexure elements supporting the moveable element are resiliently deformed during movement of the moveable element. In a MEMS device, the range of controlling the position of a moveable element is extended if flexure elements having non-linear repulsive force control the position of the moveable element. A restoring force is obtained by flexure elements having non-linear repulsive force and the moveable element is prevented from sticking. The MEMS device has much higher reliability than a general MEMS device. | ||||||
| 75 | Method and arrangement for controlling micromechanical element | US09834198 | 2001-04-12 | US20020066659A1 | 2002-06-06 | Tapani Ryhanen; Vladimir Ermalov |
| The invention relates to a controlling of micromechanical elements. Especially the invention relates to the controlling of the micromechanical switches. According to a method for controlling at least one micromechanical element a first control signal and a second control signal are fed to the micromechanical element. The second control signal is arranged to set the micromechanical element to an active state and the first control signal is arranged to hold the micromechanical element in the active state. An arrangement for controlling at least one micromechanical element (402) contains at least means for generating at least a first control signal and a second control signal, means for raising a voltage level of at least the second control signal and means for feeding the first control signal and the second control signal with raised voltage level to the micromechanical element. By means of the invention lower voltage levels can be used in micromechanical applications. | ||||||
| 76 | Radio device and measuring device utilizing electrostatic microrelay and electrostatic microrelay | US09822818 | 2001-03-30 | US20020005341A1 | 2002-01-17 | Tomonori Seki |
| A protrusion 24 that is formed on at least any one of a fixed substrate 10 and a moveable substrate 20 contacts the remained another substrate 20 or 10 after a moveable substrate 20 is operated and before the contacts are closed. | ||||||
| 77 | Electrostatic relay | US196128 | 1998-11-20 | US6115231A | 2000-09-05 | Yukihiko Shirakawa |
| An electrostatic relay comprises: a torsional elasticity portion supported on a substrate such that a gap is maintained from the substrate and arranged to have a beam shape; a movable structure portion which can be rotated by dint of elastic support of the torsional elasticity portion; at least one movable contact provided for at least an end of the movable structure portion; a movable electrode disposed between a fulcrum P of rotation of the movable structure portion and the movable contact; at least one fixed contact formed on the substrate at a position opposite to the movable contact such that contact is permitted; and a fixed electrode formed on the substrate at a position opposite to the movable electrode, wherein at least a portion between the fulcrum P of rotation of the movable structure portion and the movable contact is formed into an elastic connection portion. | ||||||
| 78 | Device equipped with a contact switch and contact switch | JP2003373208 | 2003-10-31 | JP4182861B2 | 2008-11-19 | 貴弘 増田; 裕 宇野; 知範 積 |
| 79 | Electrostatic relay | JP2004306862 | 2004-10-21 | JP2006120449A | 2006-05-11 | YUZUBA YOSHITSUGU; IWATA HIDEKI |
| PROBLEM TO BE SOLVED: To provide an electrostatic relay capable of taking a contact gap large, and especially, of high reliability concerning connection and disconnection between a fixed contact and a movable contact. SOLUTION: A contact gap for the micro relay 10 is made larger by arranging a movable comb-teeth electrode 24 obliquely upside of a fixed comb-teeth electrode 14. Further, when a given voltage is impressed between the both electrodes, the movable comb-teeth electrode 24 is moved obliquely downward toward the fixed comb-teeth electrode 14, and a contact face 28 of the movable contact comes in contact with contact faces 18a, 18b of the fixed contact so as to slide against them. This slide contact brings forth a so-called wiping effect, which enables to always keep each contact face clean. COPYRIGHT: (C)2006,JPO&NCIPI | ||||||
| 80 | Vibrating mems switch and method for manufacturing the same | JP2005209426 | 2005-07-20 | JP2006032353A | 2006-02-02 | LEE MOON-CHUL; PARK TAE-SIK; JEONG HEE-MOON |
| PROBLEM TO BE SOLVED: To provide a vibrating MEMS switch for performing a stable switching operation even in applying of a low voltage by turning on/off the MEMS switch using a resonating phenomenon. SOLUTION: The MEMS switch includes a vibrator vibrating in a prescribed direction by applying an AC voltage and a stationary contact formed at a position separated by a prescribed distance along with a vibration direction of the vibrator. When a DC voltage of a prescribed value is applied to the fixed contact, a vibration amplitude of the vibrator is increased to contact with the stationary contact then the MEMS switch is turned on. On the other hand, it is preferable for the MEMS switch to mutually joint a prescribed first substrate and a second substrate by sandwiching the vibrator therebetween and to isolate the vibrator in a sealed space in a vacuum state. COPYRIGHT: (C)2006,JPO&NCIPI | ||||||
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