| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 21 | Resonant operation of MEMS switch | US10054409 | 2001-11-13 | US06744338B2 | 2004-06-01 | Vladimir Nikitin |
| A switch arrangement includes a MEMS switch connected to a voltage supply system. The MEMS switch has a mechanical resonant frequency. The voltage supply system has a capability for supplying a voltage with a frequency corresponding to the mechanical resonant frequency of the switch. A method includes providing a MEMS switch including a movable part which has a mechanical resonant frequency, and then supplying an AC voltage to the movable part. The AC voltage has a frequency corresponding to the mechanical resonant frequency of the movable part. | ||||||
| 22 | Electrostatic actuator | US10349807 | 2003-01-22 | US20030155221A1 | 2003-08-21 | Hiroshi Kawai |
| An electrostatic actuator includes a movable member that is connected to a movable member securing section through a movable connection beam so that the movable member can be displaced in the x-axis direction. Drive electrode supporting sections are connected to drive electrode securing sections through driving connection beams so that they can move towards and away from each other. Gap sizes a, b, and c between first movable electrodes to third movable electrodes and respective first drive electrodes to third drive electrodes are successively larger. When the actuator operates, the movable member is displaced in a plurality of stages by electrostatic forces successively produced between the first movable electrode and the first drive electrode, the second movable electrode and the second drive electrode, and the third movable electrode and the third drive electrode. As a result, it is possible for the movable member to have high rigidity (resonant frequency) and to move stably, so that its amount of displacement is very large. By successively displacing the movable member via the plurality of drive electrodes, the movable member has very high rigidity and is greatly displaced, so that the performance of the actuator is greatly improved. | ||||||
| 23 | High-speed MEMS switch with high-resonance-frequency beam | US10342778 | 2003-01-15 | US20030132824A1 | 2003-07-17 | Qing Ma |
| A microelectromechanical system (MEMS) switch having a high-resonance-frequency beam is disclosed. The MEMS switch includes first and second spaced apart electrical contacts, and an actuating electrode. The beam is adapted to establish contact between the electrodes via electrostatic deflection of the beam as induced by the actuating electrode. The beam may have a cantilever or bridge structure, and may be hollow or otherwise shaped to have a high resonant frequency. Methods of forming the high-speed MEMS switch are also disclosed. | ||||||
| 24 | Microswitch and method of fabricating a microswitch with a cantilevered arm | US09934844 | 2001-08-23 | US06512432B2 | 2003-01-28 | Kenichiro Suzuki |
| A microswitch is realized that can be driven by low voltage, and at the same time, that has increased impedance between switch terminals when the switch is OFF. The relation between upper electrode (4), lower electrode (6), contact electrode (7), and signal lines (8) is arranged such that the minimum distance between contact electrode 7 and signal lines 8 is greater than the minimum distance between upper electrode 4 and lower electrode 6 when the microswitch is in the OFF state. | ||||||
| 25 | MEMS device members having portions that contact a substrate and associated methods of operating | US09822128 | 2001-03-30 | US06496351B2 | 2002-12-17 | Edward A. Hill; Ramaswamy Mahadevan |
| MEMS devices include a substrate, an anchor attached to the substrate, and a multilayer member attached to the anchor and spaced apart from the substrate. The multilayer member can have a first portion that is remote from the anchor and that curls away from the substrate and a second portion that is adjacent the anchor that contacts the substrate. Related methods are also disclosed. | ||||||
| 26 | Electrostatic microrelay | US09822818 | 2001-03-30 | US06486425B2 | 2002-11-26 | Tomonori Seki |
| An electrostatic microrelay is disclosed. The electrostatic microrelay includes a fixed substrate having a fixed electrode and a fixed terminal on its upper surface and a moveable substrate having a moveable electrode and a moveable terminal on its lower surface. The moveable substrate is elastically supported by a support member that is disposed between the fixed substrate and the moveable substrate in a manner that the lower surface of the moveable substrate faces the upper surface of the fixed substrate at a certain distance. A protrusion is provided on the upper surface of the fixed substrate or the lower surface of the moveable substrate. The protrusion has a certain height. Upon applying voltage between the moveable electrode and the fixed electrode, the moveable electrode is attracted to the fixed electrode such that the protrusion provided on the upper surface of the fixed substrate or the lower surface of the moveable substrate contacts the other substrate and the moveable terminal elastically contacts the fixed terminal to close the microrelay in this order. Also, upon releasing the voltage from the electrode, the moveable terminal becomes reliably separated from the fixed terminal by a repulsive elastic force caused by the contact between the protrusion and the other substrate. | ||||||
| 27 | Variable capacitor and associated fabrication method | US09461247 | 1999-12-15 | US06229684B1 | 2001-05-08 | Allen Bruce Cowen; Vijayakumar Rudrappa Dhuler; Edward Arthur Hill; David Alan Koester; Ramaswamy Mahadevan |
| A variable capacitor having low loss and a correspondingly high Q is provided. In addition to a substrate, the variable capacitor includes at least one substrate electrode and a substrate capacitor plate that are disposed upon the substrate and formed of a low electrical resistance material, such as HTS material or a thick metal layer. The variable capacitor also includes a bimorph member extending outwardly from the substrate and over the at least one substrate electrode. The bimorph member includes first and second layers formed of materials having different coefficients of thermal expansion. The first and second layers of the bimorph member define at least one bimorph electrode and a bimorph capacitor plate such that the establishment of a voltage differential between the substrate electrode and the bimorph electrode moves the bimorph member relative to the substrate electrode, thereby altering the interelectrode spacing as well as the distance between the capacitor plates. As such, the capacitance of the variable capacitor can be controlled based upon the relative spacing between the bimorph member and the underlying substrate. A method is also provided for micromachining or otherwise fabricating a variable capacitor having an electrode and a capacitor plate formed of a low electrical resistance material such that the resulting variable capacitor has low loss and a correspondingly high Q. The variable capacitor can therefore be employed in high frequency applications, such as required by some tunable filters. | ||||||
| 28 | Collapsing zipper varactor having interdigitated type drive electrode of the variable filter | JP2008504233 | 2006-03-24 | JP4885209B2 | 2012-02-29 | チョウ，ツン−クアン |
| 29 | Electrostatic relay | JP2004306862 | 2004-10-21 | JP4540443B2 | 2010-09-08 | 英樹 岩田; 誉嗣 柚場 |
| 30 | Collapsing zipper varactor having interdigitated type drive electrode of the variable filter | JP2008504233 | 2006-03-24 | JP2008536308A | 2008-09-04 | チョウ，ツン−クアン |
| 微小電気機械（ＭＥＭＳ）スイッチが開示される。 このＭＥＭＳスイッチは、基板（205）、基板上に備えられた複数の駆動電極（230）、基板上に備えられた複数の底部電極（210）、２つ以上の底部電極（210）に備えられた部分成分群を有するキャパシタ（C1、C2、C3）、及び基板上に備えられた屈曲可能な頂部電極（215）を含んでいる。 頂部電極（215）は、駆動電極（230）の１つ以上に第１の電圧が印加されたとき、駆動電極（230）側に第１の大きさだけつぶれ、駆動電極（230）に第２の電圧が印加されたとき、駆動電極（230）側に第２の大きさだけつぶれる。 | ||||||
| 31 | Mems switch and a method of manufacturing the same. | JP2005364301 | 2005-12-19 | JP4027388B2 | 2007-12-26 | 炯 宰 愼; 相 勳 李; 純 ▲チョル▼ 權; 奎 植 金; 載 興 金 |
| 32 | Mems switch and its manufacturing method | JP2005364301 | 2005-12-19 | JP2006173132A | 2006-06-29 | KIM CHE-HEUNG; SHIN KEISAI; KEN JUNCHORU; KIM KEISHOKU; LEE SANG HOON |
| PROBLEM TO BE SOLVED: To reduce occurrences of insertion losses, effectively eliminate a sticking phenomenon and also make it possible to be driven even at a low voltage by improving a switching operation property of a switching contact part. SOLUTION: A micro electronic mechanical system switch includes a substrate 101: a plurality of signal lines 151, 153 having switching contact parts formed on both sides on the substrate 101, respectively; a plurality of fixed electrodes 131, 133 formed on the substrate 101 and formed between the plurality of the signal lines 151, 153, respectively; an inner operation member 171 for making a seesaw motion about the center of the substrate 101; an outer operation member 173 for making a seesaw motion in conjunction with the seesaw motion of the inner operation member 171; pressure bars 117a, 117b formed on both ends of the upper face of the inner operation member 171, of which end parts thereof are protrusively arranged so as to overlap with an upper part of the outer operation member 173; and contact members 179a, 179b formed on the lower face of the outer operation member 173 toward positions where the pressure bars 177a, b are pressed to make contacts with switching contact parts of the signal lines 151, 153. COPYRIGHT: (C)2006,JPO&NCIPI | ||||||
| 33 | Electrostatic microrelay and radio device and measuring device using the same | JP2001089900 | 2001-03-27 | JP2002289081A | 2002-10-04 | SEKI TOMONORI |
| PROBLEM TO BE SOLVED: To obtain the suitable contact separation force excellent in a high frequency characteristic with a simple and small-size structure that can be easily manufactured with low cost. SOLUTION: Signal lines 5a, 5b formed on a fixed substrate 1 are arranged on the same line. A movable substrate 2 is elastically supported on the fixed substrate 1 through a beam part 11 arranged in two places of point symmetry positions by using a movable contact 16 as a center point. The part facing to the signal lines 5a, 5b is removed from the movable substrate 2. The movable contact is elastically supported on two places orthogonal to the line where the signal lines 5a, 5b are arranged as well as not facing to the signal lines 5a, 5b. A pair of projections 17 are formed in point symmetry to the movable contact 16 as a center on a position attaching to either of the substrates 1, 2 that faces first. COPYRIGHT: (C)2002,JPO | ||||||
| 34 | Electrostatic microrelay | JP33572598 | 1998-11-26 | JP2000164104A | 2000-06-16 | SEKI TOMONORI |
| PROBLEM TO BE SOLVED: To improve contact point opening performance without enlarging an electrostatic microrelay by forming a projecting part at least in either one of a fixed base board and a movable base board, and allowing the projecting part to abut to the other base board before closing a contact point. SOLUTION: A movable base board 20 is arranged on an upper surface of a fixed base board 10 composed of a glass substrate 11a. A projecting part 24 is formed on a connecting part under surface of a first beam part 22 of the movable base board 20 and a movable electrode 25. When the movable base board 20 deflects by electrostatic attraction, the projecting part 24 surely abuts to the fixed base board 10 before closing a contact point. When allowing the projecting part 24 to abut to the fixed base board 10, a distance between a fixed electrode 12 and the movable electrode 25 is formed so as to become 1/3 or less of an interval between the separated fixed base board 10 and the movable base board 20. The electrostatic attraction suddenly increases when the projecting part 24 abuts to the fixed base board 10, and the movable electrode 25 can be reliably attracted to the fixed electrode 12. The projecting part 24 is arranged on the fixed base board 10 side or may be arranged on both base boards 10, 20. | ||||||
| 35 | Micro-electro mechanical tunneling switch | US11943146 | 2007-11-20 | US08432239B2 | 2013-04-30 | Carl O. Bozler; Craig L. Keast; Jeremy Muldavin |
| A micro-electromechanical system switch includes a substrate and a plurality of actuating electrodes formed the substrate wherein each actuating electrode is activatable. A cantilever beam has a first end and a second end and a plurality of stops formed thereon. The plurality of stops engages the substrate between the plurality of actuating electrode. A contact area is formed in the substrate and located to engage the second end of the cantilever beam. A voltage source applies a voltage to each actuating electrode independently in a sequence from an actuating electrode located adjacent to the first end of the cantilever beam to an actuating electrode located adjacent to the second end of the cantilever beam so that the plurality of stops sequentially engage the substrate between the plurality of actuating electrodes. | ||||||
| 36 | Moving a free-standing structure between high and low adhesion states | US12405758 | 2009-03-17 | US08289674B2 | 2012-10-16 | Charles Gordon Smith; Richard L. Knipe |
| Embodiments disclosed herein generally solve a stiction problem in switching devices by using a series of pulses of force which take the switch from being strongly adhered to a landing electrode to the point where it is only weakly adhered. Once in the low adhesion state, the switch can then be pulled away from contact with a lower force provided by either the spring constant of the switch and/or the electrostatic forces resulting from low voltages applied to nearby electrodes. | ||||||
| 37 | Vibration type MEMS switch and fabricating method thereof | US11182775 | 2005-07-18 | US07528689B2 | 2009-05-05 | Moon-chul Lee; Tae-sik Park; Hee-moon Jeong |
| A vibration type MEMS switch and a method of fabricating the vibration type MEMS switch. The vibration type MEMS switch includes a vibrating body supplied with an alternating current voltage of a predetermined frequency to vibrate in a predetermined direction; and a stationary contact point spaced apart from the vibrating body along a vibration direction of the vibrating body. When a direct current voltage with a predetermined magnitude is applied to the stationary contact point, a vibration margin of the vibrating body is increased, the vibrating body contacts the stationary contact point and the vibration type MEMS switch is turned on. A first substrate is bonded to a second substrate to isolate the vibrating body in a sealed vacuum space. The vibration type MEMS switch is turned on and/off by a resonance. | ||||||
| 38 | Reducing the actuation voltage of microelectromechanical system switches | US10185283 | 2002-06-28 | US07358579B2 | 2008-04-15 | Qing Ma; Tsung-Kuan Allen Chou; Valluri Rao |
| A microelectromechanical system switch may include a relatively stiff cantilevered beam coupled, on its free end, to a more compliant or flexible extension. A contact may be positioned at the free end of the cantilevered beam. The extension reduces the actuation voltage that is needed and compensates for the relative stiffness of the cantilevered beam in closing the switch. In opening the switch, the stiffness of the cantilevered beam may advantageously enable quicker operation which may be desirable in higher frequency situations. | ||||||
| 39 | Mems switch and method of fabricating the same | US11806143 | 2007-05-30 | US07342710B2 | 2008-03-11 | Che-heung Kim; Hyung-jae Shin; Soon-cheol Kweon; Kyu-sik Kim; Sang-hun Lee |
| A micro electro mechanical system switch and a method of fabricating the same. The micro electro mechanical system switch includes a substrate a plurality of signal lines formed at sides an upper surface of the substrate and including switching contact points and a plurality of immovable electrodes on the upper surface of the substrate and between the plurality of signal lines. An inner actuating member performs a seesaw based on a center of the substrate and together with an outer actuating member. Pushing rods are formed at ends of an upper surface of the inner actuating member with ends protruding from and overlapping with an upper portion of the outer actuating member. Contacting members are formed on a lower surface of the outer actuating member so as to be pushed by the pushing rods and contacting the switching contact points of the signal lines. | ||||||
| 40 | Collapsing zipper varactor with inter-digit actuation electrodes for tunable filters | US11092022 | 2005-03-29 | US07319580B2 | 2008-01-15 | Tsung-Kuan Allen Chou |
| According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a substrate, a plurality of actuation electrodes mounted on the substrate, a plurality of bottom electrodes mounted on the substrate, a capacitor having subcomponents mounted on the two or more bottom electrodes and a top bendable electrode mounted on the substrate. The top electrode collapses a first magnitude towards the actuation electrodes whenever a first voltage is applied to one or more of the actuation electrodes and collapses a second magnitude towards the actuation electrodes whenever a second voltage is applied to the actuation electrodes. | ||||||
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