专利汇可以提供Processing method by laser beam专利检索,专利查询,专利分析的服务。并且PURPOSE: To make possible the adjustment of a focal position by passing fluid through which a laser beam passes at all times stop a condenser lens below a work to wash away the generated vapor and sputter and adjusting the thickness of the fluid so as to focus always the beam to the processing surface.
CONSTITUTION: The laser beam 2 passes through the fluid 8 of the prescribed thickness flowing atop the condenser lens 4. The vapor and sputter 7 generated from the work 5 are thereby incorporated into the fluid 8 by the laser beam 2 irradiated on the processing surface of the work 5 and are thereby prevented from sticking to the lens 4. The vapor and sputter 7 in the fluid 8 are fed together with the fluid 8 through a piping 18 into a filter 14, by which the vapor and sputter are removed. As a result, the fluid 8 supplied again atop the lens 4 through a fluid supplying port 11 does not contain the vapor and sputter 7 and therefore the lens 4 is protected. The matching of the processing surface of the work 5 and the focus of the laser beam 2 is executed by detecting the input intensity of the beam by a photoelectric converting element 16 and controlling the thickness of the fluid 8 by moving upward and downward a gate 9 via a servocontrol motor 10.
COPYRIGHT: (C)1986,JPO&Japio,下面是Processing method by laser beam专利的具体信息内容。
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