| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 141 | Substrate transferring arm and substrate transferring apparatus including the same | US14735253 | 2015-06-10 | US09496166B2 | 2016-11-15 | Young Seok Choi |
| A substrate transporting arm and a substrate transporting apparatus to prevent a substrate from sliding and increase a process speed of the substrate, thereby improving productivity. The substrate transporting arm includes a body and a plurality of substrate supporters coupled to the body. Each of the plurality of substrate supporters includes a substrate holder and a substrate supporter pin, and an inner side of the substrate holder includes an inclined portion. | ||||||
| 142 | WAFER SWAPPER | US14972366 | 2015-12-17 | US20160314995A1 | 2016-10-27 | Dale R. DU BOIS; Juan Carlos ROCHA-ALVAREZ; Karthik JANAKIRAMAN; Hari K. PONNEKANTI; Sanjeev BALUJA; Prajeeth WILTON |
| The present disclosure generally relates to semiconductor process equipment used to transfer semiconductor substrates between process chambers. More specifically, embodiments described herein are related to systems and methods used to transfer, or swap, semiconductor substrates between process chambers using a transport device that employs at least two blades for the concurrent transfer of substrates between processing chambers. | ||||||
| 143 | Mechanisms for positioning robot blade | US14079779 | 2013-11-14 | US09457476B2 | 2016-10-04 | Shih-Hung Chen |
| Embodiments of mechanisms for measuring the distance between a robot blade and at least one measurement target are provided. A method for measuring the distance includes emitting a signal to the measurement target by a signal source assembly. The method also includes receiving the signal reflected from the measurement target by a signal reception assembly. The method further includes determining the distance between the robot blade and the measurement target. The distance is determined based on the time difference between the emission of the signal from the signal source assembly and the receipt of the signal by the signal reception assembly. | ||||||
| 144 | Conveying apparatus | US14993359 | 2016-01-12 | US09455175B2 | 2016-09-27 | Wu Bin; Kodai Mikami; Shojiro Yamada |
| A conveying apparatus includes a holding plate having a holding surface destined to face a surface of a wafer to be held; a restriction member on one end side of the holding surface adapted to contact the periphery of the wafer so as to restrict movement of the wafer; and a moving unit adapted to move the holding plate. At the holding surface, a non-contact type suction holding part is adapted to jet a fluid obliquely to the surface of the wafer to be held so as to move the wafer toward the restriction member and generate a negative pressure between the holding surface and the surface to be held, thereby holding the wafer by suction. The fluid is jetted from the suction holding part so as to abut the wafer against the restriction member, thereby positioning the wafer at a predetermined position on the holding plate. | ||||||
| 145 | Robot blade design | US13959851 | 2013-08-06 | US09434076B2 | 2016-09-06 | Lee-Chuan Tseng; Chih-Jen Chan; Shih-Wei Lin; Che-Ming Chang; Chung-Yen Chou; Yuan-Chih Hsieh |
| The present disclosure relates to a wafer transfer robot having a robot blade that can be used to handle substrates that are patterned on both sides without causing warpage of the substrates. In some embodiments, the wafer transfer robot has a robot blade coupled to a transfer arm that varies a position of the robot blade. The robot blade has a wafer reception area that receives a substrate. Two or more spatially distinct contact points are located at positions along a perimeter of the wafer reception area that provide support to opposing edges of the substrate. The two or more contact points are separated by a cavity in the robot blade. The cavity mitigates contact between a backside of the substrate and the robot blade, while providing support to opposing sides of the substrate to prevent warpage of the substrate. | ||||||
| 146 | ADAPTABLE END EFFECTOR | US15046527 | 2016-02-18 | US20160247706A1 | 2016-08-25 | Arnon Ben-Natan |
| An adaptable end effector may include a substrate interface may be configured to support a substrate. The substrate interface may include multiple groups of vacuum openings that are associated with a plurality of types of substrates. A vacuum system may be configured to supply vacuum only to one or more selected groups of vacuum openings that are associated with a given type of substrates when the adaptable end effector supports a substrate of the given type of substrates. | ||||||
| 147 | CONVEYING HAND AND LITHOGRAPHY APPARATUS | US15049445 | 2016-02-22 | US20160243707A1 | 2016-08-25 | Yasunao Matsuhira |
| This conveying hand is used for conveying a conveyed object in an adsorbed state with a negative pressure, and comprises a pad having a contact portion that contacts the conveyed object and a concave portion having an internal space that can be evacuated; a base that moves while loading the pad; a first elastic member that movably supports the pad on the base in the direction of gravity of the conveyed object and restricts a movement of the pad on the base in the direction perpendicular to the direction of gravity; and a second elastic member that seals a space communicating with the internal space of the concave portion and movably supports the pad on the base in the direction of gravity. | ||||||
| 148 | Robot and substrate handling apparatus including the same | US14643702 | 2015-03-10 | US09381653B2 | 2016-07-05 | Byeongsang Kim; Kang-Min Park; Jungjun Park; JaeChul Hwang |
| The robot including a main body, an arm connected to the main body, a hand connected to the arm, the hand including a hand base and a finger, and a hand bracket unit between the hand base and the finger or between the hand base and the arm, may be provided. The hand bracket unit may include a vibration damping member provided between the hand base and the finger or between the hand base and the arm, thereby damping vibration of the hand base or the finger. | ||||||
| 149 | Attaching device and attaching method | US14431902 | 2013-09-05 | US09337074B2 | 2016-05-10 | Yoshihiro Inao; Shigeru Kato; Shugo Tsushima; Junichi Katsuragawa; Satoshi Kobari; Akihiko Nakamura |
| An attaching device configured to attach a substrate and a support via an adhesive layer is provided with support holding members. Holding tools of the support holding members are configured to hold the support with oblique surface parts (contact members) of the holding tools without coming into contact with a surface of the support, which is to be attached to the substrate. The attaching device attaches, to the substrate, the support of which the surface is held not to be contacted. | ||||||
| 150 | ROBOT HAVING END EFFECTOR AND METHOD OF OPERATING THE SAME | US14984008 | 2015-12-30 | US20160107317A1 | 2016-04-21 | Yasuhiko Hashimoto; Tetsuya Yoshida |
| The present invention relates to an end effector including: blade members for holding substrates, each configured to hold the substrate, and configured such that each interval between the blade members can be changed; a blade support unit configured to support the blade members, the blade support unit being configured to be driven integrally with the blade members by the robot; and blade drive means configured to change the interval between the blade members by moving at least one of the blade members relative to another blade member. | ||||||
| 151 | TRANSPORT MODULE FOR A SEMICONDUCTOR FABRICATION DEVICE OR COUPLING DEVICE | US14785308 | 2014-04-16 | US20160079104A1 | 2016-03-17 | Martin FREUNDT; Walter FRANKEN |
| The invention concerns a transport module (2) for purposes of loading and unloading a process module (1) of a semiconductor production device, with a housing (3), which has a chamber (4) that can be evacuated, which has an opening (6) that can be closed in a gas-tight manner by a closure device (5), which opens out into a coupling duct (7) associated with the transport module (2), which coupling duct is connected with a flange plate (9) using an elastic intermediate element (8), wherein the flange plate (9) can be seated in a plane parallel, sealing manner on a flange plate (11) of a coupling duct (10) associated with the process module (1), such that after opening the closure device (5) an evacuated loading and unloading duct to the process module (1) is created, wherein a mounting section of the intermediate element (8) is connected with the wall (12, 12′) of the coupling duct (7). Provision is made for the mounting sections to be spaced apart from one another in the radial direction, with respect to the axis of the coupling duct (7), by a deformation zone. | ||||||
| 152 | Semiconductor Module with Gripping Sockets, Methods for Gripping, for Moving and for Electrically Testing a Semiconductor Module | US14830333 | 2015-08-19 | US20160057875A1 | 2016-02-25 | Rene Cordes; Christoph Koch; Michael Larisch; Sven Schennetten |
| One aspect of the invention relates to a semiconductor module with an outer housing having four side walls, and a circuit carrier, which is mounted on the outer housing and has an upper side and a lower side opposite the upper side. A semiconductor chip is arranged on the upper side and in the outer housing. A first gripping socket, which is formed as an indentation, extends from the outer side of the outer housing into a first of the side walls. | ||||||
| 153 | INTERFACING WITH A MOBILE TELEPRESENCE ROBOT | US14924471 | 2015-10-27 | US20160046021A1 | 2016-02-18 | Yulun Wang; Charles S. Jordan; Tim Wright; Michael Chan; Marco Pinter; Kevin Hanrahan; Daniel Sanchez; James Ballantyne; Cody Herzog; Blair Whitney; Fuji Lai; Kelton Temby; Eben Christopher Rauhut; Justin H. Kearns; Cheuk Wah Wong; Timothy Sturtevant Farlow |
| A telepresence robot may include a drive system, a control system, an imaging system, and a mapping module. The mapping module may access a plan view map of an area and tags associated with the area. In various embodiments, each tag may include tag coordinates and tag information, which may include a tag annotation. A tag identification system may identify tags within a predetermined range of the current position and the control system may execute an action based on an identified tag whose tag information comprises a telepresence robot action modifier. The telepresence robot may rotate an upper portion independent from a lower portion. A remote terminal may allow an operator to control the telepresence robot using any combination of control methods, including by selecting a destination in a live video feed, by selecting a destination on a plan view map, or by using a joystick or other peripheral device. | ||||||
| 154 | Robot having end effector and method of operating the same | US12656358 | 2010-01-27 | US09254566B2 | 2016-02-09 | Yasuhiko Hashimoto; Tetsuya Yoshida |
| The present invention relates to an end effector including: blade members for holding substrates, each configured to hold the substrate, and configured such that each interval between the blade members can be changed; a blade support unit configured to support the blade members, the blade support unit being configured to be driven integrally with the blade members by the robot; and blade drive means configured to change the interval between the blade members by moving at least one of the blade members relative to another blade member. | ||||||
| 155 | SUBSTRATE TRANSFERRING ARM AND SUBSTRATE TRANSFERRING APPARATUS INCLUDING THE SAME | US14735253 | 2015-06-10 | US20150380286A1 | 2015-12-31 | Young Seok CHOI |
| A substrate transporting arm and a substrate transporting apparatus including the same prevent a substrate from sliding and increase a process speed of the substrate, thereby improving productivity. The substrate transporting arm includes a body and a plurality of substrate supporters coupled to the body. Each of the plurality of substrate supporters includes a substrate holder and a substrate supporter pin, and an inner side of the substrate holder includes an inclined portion | ||||||
| 156 | EDGE GRIP SUBSTRATE HANDLER | US14758718 | 2013-12-20 | US20150371886A1 | 2015-12-24 | Isao Sato; Hiroki Ueno; Yasutoshi Ito; Masataka Ryu; Troy Palm |
| A mechanism for handling substrates such as semiconductor wafers is disclosed. The mechanism supports the substrate in a tilted orientation to ensure that undesirable contact between a bowed substrate and the mechanism does not occur. The structure that supports the substrate in a tilted orientation may be fixed or adjustable. A sensor may be provided to measure and/or monitor a distance between a substrate and the mechanism. Alternatively, a sensor for determining contact between the substrate and the mechanism may be provided. | ||||||
| 157 | Compact direct drive spindle | US13547786 | 2012-07-12 | US09186799B2 | 2015-11-17 | Robert T. Caveney |
| A substrate transport apparatus including a frame, at least one arm link rotatably connected to the frame and a shaftless drive section. The shaftless drive section including stacked drive motors for rotating the at least one arm link relative to the frame through a shaftless interface, each of the stacked drive motors including a stator having stator coils disposed on a fixed post fixed relative to the frame and a rotor substantially peripherally surrounding the stator such that the rotor is connected to a respective one of the at least one arm link for rotating the one of the at least one arm link relative to the frame causing an extension or retraction of the one of the at least one arm link, where the stacked drive motors are disposed in the at least one arm link so that part of each stator is within a common arm link. | ||||||
| 158 | CONVEYANCE BASE AND CONVEYANCE SYSTEM | US14650316 | 2013-12-12 | US20150318197A1 | 2015-11-05 | Tsutomu HIROKI; Takehiro NAKAYAMA |
| Provided is a conveyance system that adjusts the position of a conveyed substrate, prevents damage resulting from the heat of another apparatus in a conveyance base, prevents insufficient electrical power of another apparatus in the conveyance base, and can move the conveyance base smoothly. A substrate processing system is provided with a conveyance chamber and a sliding box moving within the conveyance chamber. A plurality of processing modules are connected, and the sliding box is provided with: a conveyance arm that moves wafers; a servo motor that moves the conveyance arm; and a servo motor driver that controls the electrical power supplied to the servo motor. A servo motor controller that controls the servo motor driver is disposed outside a transfer module, and the servo motor driver and servo motor controller perform optical communication. | ||||||
| 159 | Two-Link Arm Trajectory | US14703216 | 2015-05-04 | US20150314459A1 | 2015-11-05 | Martin Hosek |
| Providing a first movement including rotating a first arm about a rotational axis of a robot drive; rotating a second arm on the first arm, where the first and second arms form a robot arm, where the first and second arms are the only arms of the robot arm, where the robot arm has an end effector rotationally fixed to the second arm, and where the end effector is configured to support a substrate thereon for transporting the substrate by the robot arm; and controlling the rotating to provide a path of the end effector such that the end effector does not contact the substrate during the rotating. Providing a second movement including rotating the arms to provide an at least partially straight linear path of a center of the substrate relative to the rotational axis of the drive robot when the substrate is on the end effector. | ||||||
| 160 | INTERFACING WITH A MOBILE TELEPRESENCE ROBOT | US14799450 | 2015-07-14 | US20150314449A1 | 2015-11-05 | Yulun Wang; Charles S. Jordan; Tim Wright; Michael Chan; Marco Pinter; Kevin Hanrahan; Daniel Sanchez; James Ballantyne; Cody Herzog; Blair Whitney; Fuji Lai; Kelton Temby; Eben Christopher Rauhut; Justin H. Kearns; Cheuk Wah Wong; Timothy Sturtevant Farlow |
| A telepresence robot may include a drive system, a control system, an imaging system, and a mapping module. The mapping module may access a plan view map of an area and tags associated with the area. In various embodiments, each tag may include tag coordinates and tag information, which may include a tag annotation. A tag identification system may identify tags within a predetermined range of the current position and the control system may execute an action based on an identified tag whose tag information comprises a telepresence robot action modifier. The telepresence robot may rotate an upper portion independent from a lower portion. A remote terminal may allow an operator to control the telepresence robot using any combination of control methods, including by selecting a destination in a live video feed, by selecting a destination on a plan view map, or by using a joystick or other peripheral device. | ||||||
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