MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING |
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| 申请号 | EP11766622 | 申请日 | 2011-04-06 | 公开(公告)号 | EP2556014A4 | 公开(公告)日 | 2014-11-26 |
| 申请人 | ANALOG DEVICES INC; | 发明人 | GOGGIN RAYMOND; FITZGERALD PADRAIG; | ||||
| 摘要 | |||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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