序号 | 专利名 | 申请号 | 申请日 | 公开(公告)号 | 公开(公告)日 | 发明人 |
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61 | JPS4949209A - | JP4764373 | 1973-05-01 | JPS4949209A | 1974-05-13 | |
62 | Scroll vacuum pump | EP04018870.8 | 2004-08-09 | EP1626178B1 | 2007-10-10 | Muto, Ryusuke |
63 | Trockenverdichtende Vakuumpumpe mit Gasballasteinrichtung | EP00951529.7 | 2000-08-23 | EP1240433B1 | 2006-07-19 | ARNDT, Lutz; DREIFERT, Thomas; HÖLZEMER, Michael; MEYER, Jürgen; SCHÖNBORN, Frank |
The invention relates to a dry compressing vacuum pump (1) having a continuous or graduated inner compression and comprising a gas ballast device (8) having an isolating valve (11); the gas ballast device (8) also comprises a non-return valve (12), which prevents the escape of gases from the pump (1) through the gas ballast device (8) to the outside. | ||||||
64 | Gasballasteinrichtung für eine mehrstufige Verdrängerpumpe | EP99112217.7 | 1999-06-25 | EP0972938B1 | 2004-03-03 | Bernhardt, Karl-Heinz |
65 | VAKUUMPUMPE MIT ÖLABSCHEIDER | EP94926181.2 | 1994-08-11 | EP0714482B2 | 2002-10-09 | ARNDT, Lutz; KAISER, Winfried; MÜLLER, Peter |
A vacuum pump (1) has an oil separator (42) connected downstream of its outlet (33) and a duct (45, 46) through which the oil separated in the oil separator (42) is returned to the vacuum pump (1). To feed back the oil in a simple manner, the oil feedback duct (45, 46) opens into a duct (47) that supplies gas ballast to the pump (1). | ||||||
66 | Gasballasteinrichtung für eine mehrstufige Verdrängerpumpe | EP99112217.7 | 1999-06-25 | EP0972938A2 | 2000-01-19 | Bernhardt, Karl-Heinz |
Die Erfindung beschreibt eine Gasballasteinrichtung für mehrstufige Verdrängerpumpen wie z.B. Membranpumpen, Hubkolbenpumpen und dergleichen. Der Gasballast wird dabei zunächst über eine erste Anordnung (6) mit einer Drosselstelle (9) in den Zwischenvakuumraum eingelassen und dann über eine zweite Anordnung (7) mit einer Drosselstelle (10) in den Schöpfraum (8) der ersten Pumpstufe (1) weitergeleitet. |
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67 | VAKUUMPUMPE | EP98907961.0 | 1998-01-20 | EP0964999A1 | 1999-12-22 | BURGHARD, Hans, Josef; GIEBMANNS, Wolfgang; BAHNEN, Rudolf |
The invention relates to a vacuum pump, comprising at least one pump chamber (7, 8, 23 to 26) and at least one chamber (3, 5, 27) adjoining said pump chamber. The vacuum pump is fitted with a gas ballast device in order to avoid damage being caused in the adjoining chambers by the gases being pumped, the ballast gas being delivered via the chamber adjoining the pump chamber. | ||||||
68 | Two stage vacuum pump | EP93309083.9 | 1993-11-12 | EP0597730B1 | 1998-07-22 | Holbrook, Alan Ernest Kinnaird |
69 | Oil-free scroll vacuum pump | EP96111523.5 | 1996-07-17 | EP0754860A2 | 1997-01-22 | Haga, Shuji; Tsuchiya, Masaru |
It is sought to provide an oil-free scroll vacuum pump, which can discharge condensed fluid in it to the outside. An oil-free scroll vacuum pump body 1 for withdrawing fluid from a vessel to be evacuated, compressing the fluid and discharging the compressed fluid to the outside, comprises a stationary scroll constituted by a housing half 4 and a lap 7, another stationary scroll constituted by a housing half 5 and a lap 6, and a revolving scroll 3. The housing half 4 has a gas ballast gas inlet duct 10 and an inlet port 4a, and the revolving scroll 3 has a communication hole 3e. Gas is introduced through the inlet port 4e into a sealed space defined by laps of the individual scrolls engaged with one another. The introduced gas is compressed together with compression fluid in the sealed space, and the resultant fluid is discharged through a discharge port 4c to the outside. |
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70 | VAKUUMPUMPE MIT EINER GASBALLASTEINRICHTUNG | EP94918783.0 | 1994-05-26 | EP0711387A1 | 1996-05-15 | ABELEN, Thomas; ARNDT, Lutz; MÜLLER, Peter |
The invention pertains to a vacuum pump (1) with a closable line (63, 102) through which gas ballast can be fed into the pump chamber (8, 9). To eliminate the danger that a recipient hooked up to the vacuum pump may be charged with air in the event of a pump failure, the invention proposes that the line be equipped with a control valve (59, 60, 61; 98, 99; 109, 110) to regulate the gas ballast feed as a function of operating conditions, such that the line is closed in the event of a pump failure. | ||||||
71 | Cooling means for scroll fluid machine | JP2004246399 | 2004-08-26 | JP2006063858A | 2006-03-09 | ARATA TETSUYA |
PROBLEM TO BE SOLVED: To provide a compact, lightweight and low-cost fluid machine such as a scroll type vacuum pump and an air compressor having reduced noise and vibration and high reliability by using a method of directly injecting cooling gas as a cooling means into a working chamber. SOLUTION: The cooling means for the vacuum pump is constructed in the scroll type vacuum pump 1 by providing a gas introduction hole in a shell plate part of a fixed scroll 10, which is opened at one end in a working chamber of a closed space reduced to 40-60% of Vm and near the minimum clearance between side walls of spiral shape parts near an internal center portion of the working chamber with respect to the maximum volume Vm of a working chamber 15, formed inside with the minimum clearance between side walls of spiral terminal ends, and which is opened at the other end to the atmosphere, and by connecting an injection pipe 6, which makes heat exchange at a cooling part 6c such as a suction pipe having temperature lower than atmospheric temperature, to an atmosphere side outlet of the gas introduction pipe. COPYRIGHT: (C)2006,JPO&NCIPI | ||||||
72 | Vacuum pump with a gas ballast device | JP50550895 | 1994-05-26 | JP3611574B2 | 2005-01-19 | アベレン,トーマス; アルント,ルッツ; ミュラー,ペーター |
73 | Method for regenerating a cryopump | JP10174592 | 1992-03-27 | JP3279339B2 | 2002-04-30 | 耀 小田切; 繁治 松本 |
74 | Oil free scroll-type vacuum pump | JP2000311844 | 2000-10-12 | JP2002115676A | 2002-04-19 | SUZUKI TERUO; OGURA MITSUO; NAKAMORI KAZUAKI; HARUKI SHINICHI; NEMOTO KENICHI; NOZAKI YASUSHI |
PROBLEM TO BE SOLVED: To provide an oil free scroll-type vacuum pump capable of preventing high humidity gas sucked through a suction port from becoming water droplets inside the vacuum pump, reducing the wear of a chip seal, and suppressing the corrosion of a pump main body and having excellent durability. SOLUTION: A gas ballast introduction hole 17 for preventing water contained in the sucked gas from staying inside the vacuum pump is provided on a mirror plate face of a fixed scroll 2 within substantially three windings from a scroll lap outer peripheral side. COPYRIGHT: (C)2002,JPO | ||||||
75 | Vacuum pump | JP53809098 | 1998-01-20 | JP2001513862A | 2001-09-04 | ギープマンス ヴォルフガング; ヨーゼフ ブルクハルト ハンス; バーネン ルドルフ |
(57)【要約】 本発明は、少なくとも1つの吸込み室(7,8,23〜26)と少なくとも1つの、吸込み室に隣接した室(3,5,27)とを備える真空ポンプに関する。 真空ポンプは吸込まれたガスによって隣接の室内に惹起される損害を回避するためにガスバラスト装置を備えており、バラストガスは吸込み室に隣接する室を介して送られる。 | ||||||
76 | Gas ballast device for multistage displacement type pump | JP17117299 | 1999-06-17 | JP2000038986A | 2000-02-08 | BERNHARDT KARL-HEINZ |
PROBLEM TO BE SOLVED: To fill gas having a sufficient rate into a displacement chamber without narrowing a cross section of a throttle part by arranging a gas filling mechanism for filling as into an intermediate vacuum chamber, and arranging the other gas filling mechanism for filling gas from the intermediate vacuum chamber into the displacement chamber. SOLUTION: A two stage type displacement pump is provided with two pump stages 1, 2, and an intake valve 3 and a discharge valve 4 are mounted on the first pump stage 1 in those pump stages 1, 2. Two pump stages 1, 2 are connected to each other through an intermediate vacuum chamber 5. A first gas filling mechanism 6 is arranged for filling gas into the intermediate vacuum chamber 5, and is provided with a throttle part 9. A second gas filling mechanism 7 is arranged for filling gas from the intermediate vacuum chamber 5 into a displacement chamber 8, and is provided with a throttle part 10. As a gas ballast system can be efficiently formed and a rate for filling gas into the intermediate vacuum chamber 5 can be appropriately set in the throttle part, it is possible to prevent a wrong effect from exerting on a pump characteristic. COPYRIGHT: (C)2000,JPO | ||||||
77 | Oil-free scroll vacuum pump | JP20760195 | 1995-07-21 | JPH0932767A | 1997-02-04 | HAGA SHUJI; TSUCHIYA MASARU; NAKAMURA SENYO |
PROBLEM TO BE SOLVED: To provide an oil-free scroll vacuum pump capable of discharging liquid condensed in a pump to the outside. SOLUTION: An oil-free scroll vacuum pump main body 1 for taking fluid from a container to be evacuated, compressing it, and discharging it to the outside is constituted of a fixed scroll constituted of a housing 4 and a lap 7 and a turning scroll 3 constituted of a housing 5 and a lap 6. A gas ballast introducing pipe 10 and an introducing hole 4e are provided on the housing 4, a communication hole 3e is provided on the turning scroll 3, gas is introduced from the introducing hole 4e into a closed space formed by being engaged with the laps provided on respective scrolls, and compressed fluid in the closed space is compressed with gas and discharged from a discharging hole 4c to the outside. | ||||||
78 | Vacuum pump with a gas ballast device | JP50550895 | 1994-05-26 | JPH09500941A | 1997-01-28 | アベレン,トーマス; アルント,ルッツ; ミュラー,ペーター |
(57)【要約】 本発明は、遮断可能な管路(63,102)を有する真空ポンプ(1)に関するものである。 これら管路(63,102)を介して気体バラストをポンプの吸込み室(8,9)内へ供給可能である。 真空ポンプの故障のさい、真空ポンプに接続されている排気鐘への空気混入の危険を回避するために、管路(63,102)に、真空ポンプの作動に関連して動作する、気体バラストを供給するための制御弁(59,60,61;98,99;109,110)を備え、この制御弁が、真空ポンプの故障時に、管路(63,102)を閉じるように動作するようにする。 | ||||||
79 | Helium leak detector | JP15965995 | 1995-06-26 | JPH0915082A | 1997-01-17 | OKAMOTO HIDEKI |
PURPOSE: To resume the leak test effectively by lowering the background level at a mass spectrometric section quickly even when a large quantity of He is mixed into an oil in an oil-sealed rotary vacuum pump due to gross leak. CONSTITUTION: When a measurement at a mass spectrometric section ANAL exceeds a threshold level, a microcomputer unit 4 judges that gross leak has occurred, and controls a solenoid valve GBV fixed to the gas ballast port 21 of an RP2 to open for a predetermined time. Consequently, atmospheric air is introduced through the gas ballast port 21 into the RP2 and He bubbles in the oil are stirred to be discharged quickly through the RP2. Since no He is discharged again from the RP2 at the time of leak test after occurrence of gross leak, the problem of increasing background level at the mass spectrometric section ANAL is solved. | ||||||
80 | Improvement of vacuum pump | JP28521093 | 1993-11-15 | JPH06221289A | 1994-08-09 | AREN AANESUTO KINEAADO HORUBUR |
PURPOSE: To provide a two-stage mechanical rotary vacuum pump selectively operable by different characteristics by providing a means capable of selectively injecting oil to a low vacuum stage and a high vacuum stage and a means for supplying ballast gas having the amount in excess of 10% of capabilities of the high vacuum stage capacity (the overall vacuum pump capacity) to the low vacuum stage. CONSTITUTION: A two-stage vacuum pump is provided with a housing 1 and a stator body 2. A high vacuum stage 3, a low vacuum stage and an oil pump 5 are arranged in the stator body 2, and these are rotated by a shaft 7 of a motor 6 through an adapter 8 and provided with rotors having vanes slidably housed in slots. The oil pump 5 feeds oil to an oil box through a pressure relief valve 9 and an oil line 10 and also feeds oil to the low vacuum stage 4 through an oil line 11. A means for supplying ballast gas from a ballast line 14 to the low vacuum stage 4 through a valve 15 is provided on the housing 1. COPYRIGHT: (C)1994,JPO |