序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
1 隔膜真空 CN201410321520.2 2014-07-07 CN104279147A 2015-01-14 索斯藤·布格格拉夫; 于尔根·维斯纳
发明涉及隔膜真空,隔膜真空泵具有至少一个隔膜泵级,具有至少一个入口,所述入口阀用于传输将要传输的工艺气体,并且与所述隔膜泵级相连,以及具有至少一个用于供应平衡气的气镇阀,在所述工艺气体的流动方向上,流过所述气镇阀的平衡气的流动路径通向所述入口阀后面的工艺气体的流动路径。
2 真空 CN98801692.3 1998-01-20 CN1133813C 2004-01-07 汉斯·约瑟夫·布格哈德; 沃尔夫冈·吉贝曼斯; 鲁道夫·巴赫奈; 于尔根·迈尔
发明涉及一种真空,它有至少一个抽吸腔(7、8、23至26)和至少一个与抽吸腔相邻的腔(3、5、27);为了避免在相邻腔内受被输送气体引起的损坏,规定此真空泵配备有载气装置,以及均衡气的输入通过与抽吸腔相邻的腔进行。
3 氦检漏器 CN96106153.7 1996-04-26 CN1083575C 2002-04-24 冈本英树
发明提供一种氦检漏器,它在因严重泄漏而在油旋转真空(RP2)的油中混入大量He时,能快速降低质量分析部的本底值,有效地再启动检漏。在质量分析部(ANAL)检出超过限值的测定值时,微机单元(4)判定为严重泄漏并控制使RP2所设镇气口(21)上的电磁(GBV)开启一定时间,导入大气,搅拌油中所溶氦气泡,使之加速排出RP2,从而无He倒流ANAL,达到上述效果。
4 真空 CN98801692.3 1998-01-20 CN1243563A 2000-02-02 汉斯·约瑟夫·布格哈德; 沃尔夫冈·吉贝曼斯; 鲁道夫·巴赫奈
发明涉及一种真空,它有至少一个抽吸腔(7、8、23至26)和至少一个与抽吸腔相邻的腔(3、5、27);为了避免在相邻腔内受被输送气体引起的损坏,规定此真空泵配备有载气装置,以及均衡气的输入通过与抽吸腔相邻的腔进行。
5 氦检漏器 CN96106153.7 1996-04-26 CN1142605A 1997-02-12 冈本英树
发明提供一种氦检漏器,它在因严重泄漏而在油旋转真空(RP2)的油中混入大量He时,能快速降低质量分析部的本底值,有效地再启动检漏。在质量分析部(ANAL)检出超过限值的测定值时,微机单元(14)判定为严重泄漏并控制使RP2所设镇气口(21)上的电磁(GBV)开启一定时间,导入大气,搅拌油中所溶氦气泡,使之加速排出RP2,从而无He倒流ANAL,达到上述效果。
6 Eccentric pump and method for operation of said pump US10508734 2003-02-18 US07186098B2 2007-03-06 Thomas Dreifert
A pump (1) is provided with a housing (2), having an inlet (28) and an outlet (29), a drive (5), a fixed cylinder (2) centered on a mid-axis (9), a displacer (18), rotating eccentrically within the cylinder (2), a crank drive (13) for the displacer (18), a circumferential sickle-shaped pumping chamber (26) between the cylinder (2) and displacer (18) and a helical sealing element (27, 27′, 27″, 39) in the pumping chamber (26). The pump is a dry vacuum pump, whereby the displacer (18) circulates in the cylinder (2) without making contact.
7 Eccentric pump and method for operation of said pump US10508734 2003-02-18 US20050163632A1 2005-07-28 Thomas Dreifert
A pump (1) is provided with a housing (2), having an inlet (28) and an outlet (29), a drive (5), a fixed cylinder (2) centered on a mid-axis (9), a displacer (18), rotating eccentrically within the cylinder (2), a crank drive (13) for the displacer (18), a circumferential sickle-shaped pumping chamber (26) between the cylinder (2) and displacer (18) and a helical sealing element (27, 27′, 27″, 39) in the pumping chamber (26). The pump is a dry vacuum pump, whereby the displacer (18) circulates in the cylinder (2) without making contact.
8 Vacuum pump US355222 1999-07-26 US6123516A 2000-09-26 Hans Josef Burghard; Wolfgang Giebmanns; Rudolf Bahnen
A vacuum pump, comprising at least one pump chamber (7, 8, 23 to 26) and at least one chamber (3, 5, 27) adjoining the pump chamber. The vacuum pump is fitted with a gas ballast device to avoid damage being caused in the adjoining chambers by the gases being pumped, the ballast gas being delivered via the chamber adjoining the pump chamber.
9 Oil-free scroll vacuum pump having a gas ballast part US682256 1996-07-17 US5743719A 1998-04-28 Shuji Haga; Masaru Tsuchiya
It is sought to provide an oil-free scroll vacuum pump, which can discharge condensed fluid in it to the outside. An oil-free scroll vacuum pump body 1 for withdrawing fluid from a vessel to be evacuated, compressing the fluid and discharging the compressed fluid to the outside, comprises a stationary scroll constituted by a housing half 4 and a wrap 7, another stationary scroll constituted by a housing half 5 and a wrap 6, and a revolving scroll 3. The housing half 4 has a gas ballast gas inlet duct 10 and an inlet port 4a, and the revolving scroll 3 has a communication hole 3e. Gas is introduced through the inlet port 4e into a sealed space defined by wraps of the individual scrolls engaged with one another. The introduced gas is compressed together with compression fluid in the sealed space, and the resultant fluid is discharged through a discharge port 4c to the outside.
10 Vacuum pump with oil separator US596222 1996-02-15 US5697771A 1997-12-16 Lutz Arndt; Winfried Kaiser; Peter Muller
The invention relates to a vacuum pump (1) with an oil separator (42) connected downstream of its outlet (33) and with a duct (45, 46) through which the oil separated in the oil separator (42) is returned to the vacuum pump (1); to feed back the oil in a simple manner, the oil feed duct (45, 46) opens into a duct (47) that supplies gas ballast to the pump (1).
11 Method and apparatus for delivering oil to a multi-stage pump US533535 1990-06-05 US5066202A 1991-11-19 Hanns-Peter Berges; Berthold Fischer; Peter Mueller; Dieter Vorberg
A method and apparatus for delivering oil into a pump chamber of a high-vacuum stage of a multi-stage pump. The method includes the steps of sensing a first pressure at an intake region of the high-vacuum stage of the pump, and sensing a second pressure at a discharge region of the high-vacuum stage of the pump. Oil is delivered to the high-vacuum stage of the pump in response to a pressure difference between the first and second pressures. Increased quantities of oil are delivered to the high-vacuum stage of the pump when the pressure difference exceeds a predetermined value. A gas ballast may also be delivered to the high-vacuum stage of the pump when the pressure difference exceeds this predetermined value. The apparatus may include a diaphragm valve including a diaphragm mounted between subchambers that are respectively in fluid communication with the intake and discharge regions of the high-vacuum stage of the pump. When the pressure differential between the intake and discharge regions, and thus the subchambers, reaches a predetermined level, the diaphragm is distended to a sufficient degree to unseat a valve element, which allows increased quantities of oil to be delivered to the high-vacuum stage of the pump.
12 Gas ballast for oil sealed mechanical vacuum vane pump US33628 1979-04-26 US4268230A 1981-05-19 Benjamin Bassan
A gas ballast device for an oil sealed mechanical rotary vane vacuum pump prevents vapor condensation in the outlet port region of the low vacuum stage of the pump as a vane cyclically approaches the outlet port, whereby molecules of condensed vapor in the oil do not flow back to the inlet port of the low vacuum stage through the oil seal between the inlet and outlet ports. A flow path for atmospheric air leading to the outlet port region includes a tortuous, constricted fluid passageway. An outlet passage connecting the tortuous, constricted fluid passageway to the outlet port region is positioned so that an orifice thereof into the outlet port region is filled with and sealed by oil except during a small portion of each vane cycle immediately after the vane passes the orifice, whereby no movement of mechanical parts is employed to control air flow in response to the cyclical movement of the vanes past the orifice. The flow path for atmospheric air can be adjusted or closed at will, and includes a sleeve through which a portion of the passageway extends. The sleeve is spring biased in an upward direction to be normally urged against an air filter body, threadedly secured to a housing for the pump. The spring bias and turning of the air filter body move a plug relative to a seat in the outlet passage. The air filter body may be removed without removing the sleeve from the housing.
13 Rotary vacuum pumps US3797971D 1972-04-13 US3797971A 1974-03-19 WATTS I
A rotary vacuum pump in which the pump shaft extends into a reservoir and is provided with a paddle element connected to a seal which can be located into and out of sealing contact with an oil feed passageway in the pump shaft to allow or prevent the passage of oil from the reservoir to the pump.
14 Scroll vacuum pump and method of maintenance including replacing a tip seal of a scroll vacuum pump US13873793 2013-04-30 US09341186B2 2016-05-17 John Calhoun
A scroll pump has a tip seal between an axial end of the scroll blade of one of stationary and orbiting plate scrolls of the pump and the plate of the other of the stationary plate and orbiting plate scrolls. The scroll pump may have a ballast gas supply system and use the operation of the ballast gas supply system to assess the condition of the tip seal. Alternatively, the scroll pump may have two pressure sensors that sense pressure at two locations spaced along a compression mechanism of the pump to assess the condition of the tip seal.
15 MEMBRANE VACUUM PUMP US14320750 2014-07-01 US20150010409A1 2015-01-08 Thorsten BURGGRAF; Juergen WISSNER
A membrane vacuum pump includes at least one membrane pump stage, at least one inlet valve for a process gas to be conveyed associated with the membrane pump stage, and at least one gas ballast valve for the supply of a ballast gas. The flow path for the ballast gas, leading through the gas ballast valve, opens into the flow path for the process gas behind the inlet valve in the direction of flow of the process gas.
16 Scroll Vacuum Pump and Method of Maintenance Including Replacing a Tip Seal of a Scroll Vacuum Pump US13873793 2013-04-30 US20140322055A1 2014-10-30 John CALHOUN
A scroll pump has a tip seal between an axial end of the scroll blade of one of stationary and orbiting plate scrolls of the pump and the plate of the other of the stationary plate and orbiting plate scrolls. The scroll pump may have a ballast gas supply system and use the operation of the ballast gas supply system to assess the condition of the tip seal. Alternatively, the scroll pump may have two pressure sensors that sense pressure at two locations spaced along a compression mechanism of the pump to assess the condition of the tip seal.
17 Vacuum pump US11102991 2005-04-11 US20060228242A1 2006-10-12 William West; Duane Boehler
A vacuum pump may include a tubular stator located between an intake plate and a back plate. Mating portions on the intake plate and back plate may be used to properly locate the stator. The stator may include two internal pump chambers separated by a divider plate. The divider plate may be located within an internal cavity of the stator. A rotor in each chamber may include vanes and may be offset from the center of the chamber. Each rotor may be fixed to a rotatable shaft for operation of the vacuum pump. In some embodiments, the divider plate may have a fluid passageway extending therethrough. The fluid passageway may be located within the area swept by the rotors. In some embodiments, an exhaust outlet may include a flutter valve having a shaped surface that prevents the flutter valve from fully closing.
18 Vacuum pump with a gas ballast device US586927 1996-01-29 US5871338A 1999-02-16 Thomas Abelen; Lutz Arndt; Peter Muller
The invention pertains to a vacuum pump (1) with a closable line (63, 102) through which gas ballast can be fed into the pump chamber (8, 9); to eliminate the danger that a recipient hooked up to the vacuum pump may be charged with air in the event of a pump failure, the invention proposes that the line be equipped with a control valve (59, 60, 61; 98, 99; 109, 110) to regulate the gas ballast feed as a function of operating conditions, such that the line is closed in the event of a pump failure.
19 Vacuum pumps US349697 1994-12-05 US5573387A 1996-11-12 Alan E. K. Holbrook
A rotary vacuum pump having a low vacuum stage and a high vacuum stage. Each stage includes a stator body having a bore and a rotor mounted eccentrically in the bore to form a cavity between the stator body and the rotor. The rotor of each stage has two vanes slidably positioned in diametrically opposed slots in the rotor which in use of the pump are substantially in contact with an inner wall of the stator body during rotation of the rotor. The stator body of each stage has an inlet and an outlet to allow, in use of the pump, fluid being pumped to enter into and be expelled from the cavity by means of the rotating vanes. Oil to be injected into the low vacuum stage and, when required, into the high vacuum stage also. Differential flow rates (including zero) of ballast gas are introduced to the low vacuum stage, for example in an amount in excess of ten percent of the overall vacuum pump capacity (which equates to the capacity of the high vacuum stage). As a result, the rotary vacuum pump is operable as a one stage or as a two stage pump.
20 Rotary vane pump with ballast port US110904 1987-10-21 US4826407A 1989-05-02 Robert E. Poole
Rotary vane pump with ballast ports which introduce air into the swept cells before they reach the pump outlet port. To prevent overheating at very high vacuums, the ballast ports are arranged to provide a ratio of ballast air flow to pump displacement, at a standard working vacuum of 20 inches Hg gauge, of at least 35%. This permits operating at 25 inches Hg gauge without the need for a cooling fan.
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