序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
21 Oil flow metering structure for oil sealed mechanical vacuum vane pump US33629 1979-04-26 US4276005A 1981-06-30 Benjamin Bassan
A mechanical rotary vane vacuum pump has high and low vacuum stages for a pumped gas. Each stage includes a rotor for vanes cyclically driven about a common axis that is eccentric to a cylinder of a stator; the stator of each stage includes an inlet and outlet for the pumped gas. An oil seal between inlets and outlets for each stage is in a narrow gap between the stator and rotor. An interstage structure includes a flow path between the stages for the pumped gases and a shaft drivingly connected the rotors of the stages. An oil flow path comprises a first passage through the interstage structure leading radially to the shaft. The shaft includes diametrically opposed oil metering flats or cavities longitudinally aligned with an outlet of the first passage. A second passage through the interstage structure is longitudinally aligned with the cavities and leads tangentially from the peripheries of the shaft and a bore for the shaft. The second passage is in fluid flow relation with the cylinder of the low vacuum stage so oil metered by the cavities bursts into the second passage and flows to the cylinder of the low vacuum stage to form the oil seal and lubricate surfaces between the rotor and stator.
22 Multi-stage rotary vacuum pump with separate oil reservoir US41469573 1973-11-12 US3837764A 1974-09-24 FRITCH J; BRANDEBERRY D
An improved vacuum pump of the rotary mechanical type having interchangeable component parts which may be assembled in ''''building block'''' fashion to provide single and multi-stage pumps built up from the same basic parts. The multi-stage pump may be provided with a switchable feature whereby the stages may be operated in series or in parallel, with automatic switching therebetween if desired. Both air ballast and oil injection are provided, the latter incorporating a check valve to control the supply of oil to the pumping chamber.
23 Vacuum pump US3791780D 1972-05-11 US3791780A 1974-02-12 FRITCH J; BRANDEBERRY D
An improved vacuum pump of the rotary mechanical type having interchangeable component parts which may be assembled in ''''building block'''' fashion to provide single and multi-stage pumps built up from the same basic parts. The multi-stage pump may be provided with a switchable feature whereby the stages may be operated in series or in parallel, with automatic switching therebetween if desired. Both air ballast and oil injection are provided, the latter incorporating a check valve to control the supply of oil to the pumping chamber.
24 Pump with auxiliary vacuum pumping stage US57539266 1966-08-26 US3399826A 1968-09-03 VYTAUTAS ANDRIULIS
25 High-vacuum rotary oil pumps US47601654 1954-12-17 US2779533A 1957-01-29 KLAUS ZIOCK
26 진공 펌프 KR1019997007977 1998-01-20 KR1020000075898A 2000-12-26 부르하르트,한스,요제프; 지브만즈,볼프강; 바흐넨,루돌프; 마이어,위르겐
본발명은적어도하나의펌프실(7,8,23 내지 26) 및상기펌프실에인접한적어도하나의챔버(3,5,27)를포함하는진공펌프에관한것이다. 상기진공펌프는인접챔버내로가스가펌핑됨으로인한손상을방지하기위한가스안정장치를갖추고있으며, 안정가스는펌프실에인접한챔버를경유하여분배된다.
27 헬륨누설검출기 KR1019960018916 1996-05-31 KR100217434B1 1999-09-01 와카모토히데키
본 발명은, 그로스누설을 수반해서 오일회전진공펌프의 오일에 대량의 He가 혼입하였을 경우에도, 신속하게 질량분석부의 백그라운드치를 저하시키고, 누설테스트를 유효하게 재개할 수 있도록 한 헬륨누설검출기를 제공하는 것을 목적으로 한 것이며, 그 구성에 있어서, 질량분석부 ANAL이 임계치를 초과하는 측정치를 검출하였을 경우에, 마이크로컴퓨터유니트(4)가 그로스누설이라고 판정해서, RP(2)의 가스밸러스트구(21)에 장착되어 있는 전자밸브GBV를 일정시간 개방으로 유지하는 제어를 행한다. 이때, 가스밸러스트구(21)를 개재해서 RP(2)내로 대기가 도입되어, 오일속에 용해되어 있는 He의 기포를 교반하여, 신속하게 RP(2)로부터 외부로 배출한다. 이 때문에, 그로스누설발생후의 누설테스트시에 RP(2)로부터 He가 재방출되는 불편, 이것에 기인한 질량분석부 ANAL에 있어서의 백그라운드치의 상승문제가 해소되는 것을 그 특징으로 한 것이다.
28 VAKUUMPUMPE EP98907961.1 1998-01-20 EP0964999B1 2002-09-25 BURGHARD, Hans, Josef; GIEBMANNS, Wolfgang; BAHNEN, Rudolf; MEYER, Jürgen
The invention relates to a vacuum pump, comprising at least one pump chamber (7, 8, 23 to 26) and at least one chamber (3, 5, 27) adjoining said pump chamber. The vacuum pump is fitted with a gas ballast device in order to avoid damage being caused in the adjoining chambers by the gases being pumped, the ballast gas being delivered via the chamber adjoining the pump chamber.
29 Oil-free scroll vacuum pump EP96111523.5 1996-07-17 EP0754860B1 2002-04-10 Haga, Shuji; Tsuchiya, Masaru
30 Gasballasteinrichtung für eine mehrstufige Verdrängerpumpe EP99112217.7 1999-06-25 EP0972938A3 2000-06-28 Bernhardt, Karl-Heinz

Die Erfindung beschreibt eine Gasballasteinrichtung für mehrstufige Verdrängerpumpen wie z.B. Membranpumpen, Hubkolbenpumpen und dergleichen. Der Gasballast wird dabei zunächst über eine erste Anordnung (6) mit einer Drosselstelle (9) in den Zwischenvakuumraum eingelassen und dann über eine zweite Anordnung (7) mit einer Drosselstelle (10) in den Schöpfraum (8) der ersten Pumpstufe (1) weitergeleitet.

31 VAKUUMPUMPE MIT EINER GASBALLASTEINRICHTUNG EP94918783.5 1994-05-26 EP0711387B1 1997-07-09 ABELEN, Thomas; ARNDT, Lutz; MÜLLER, Peter
The invention pertains to a vacuum pump (1) with a closable line (63, 102) through which gas ballast can be fed into the pump chamber (8, 9). To eliminate the danger that a recipient hooked up to the vacuum pump may be charged with air in the event of a pump failure, the invention proposes that the line be equipped with a control valve (59, 60, 61; 98, 99; 109, 110) to regulate the gas ballast feed as a function of operating conditions, such that the line is closed in the event of a pump failure.
32 Zwei- oder mehrstufige Hochvakuumpumpe EP89110196.6 1989-06-06 EP0401399A1 1990-12-12 Fischer, Berthold; Müller, Peter; Vorberg, Dieter; Berges, Hanns-Peter, Dr.

Die Erfindung bezieht sich auf ein Verfahren für die Zufuhr von Öl in den Schöpfraum der Hochvakuumstufe (2) einer zwei- oder mehrstufigen Hochvakuumpumpe (1); um eine exakte betriebsab­hängige Ölversorgung zu erreichen, wird vorgeschlagen, daß eine ständige Ölzufuhr vorhanden ist, die für den Betrieb der Hoch­vakuumstufe (2) im Enddruckbereich ausreicht, und daß zusätz­liches Öl in den Schöpfraum eingelassen wird, wenn die Differenz der Drücke im Ansaugbereich (4) und im Auslaßbereich (6) der Hochvakuumstufe (2) einen bestimmten Wert überschreitet; die Erfindung bezieht sich außerdem noch auf eine Vorrichtung zur Durchführung des Verfahrens, welche als Steuerelement für die Zufuhr des Öls eine Membran (35) umfaßt.

33 Liquid ring pump port member having anti-cavitation constructions US15041688 2016-02-11 US10100834B2 2018-10-16 Douglas Eric Bissell; Wilson Fabian Gaibor
A pump includes a housing that contains a liquid, and a rotor including a plurality of blades extending radially from a shaft, and defining a conical space. A port member is disposed within the conical space. The port member defines an inlet port in communication with a low pressure region, a discharge port in communication with a high pressure region, and an anti-cavitation port in communication with a fluid supply having a pressure between the low and the high pressure regions. Each pair of adjacent blades cooperates with the liquid and the port member to enclose a variable volume bucket, wherein rotation of the rotor selectively positions a bucket in an inlet position adjacent the inlet port to draw in fluid, in an anti-cavitation position wherein the bucket is adjacent the anti-cavitation port and fluid is admitted into the bucket, and a discharge position wherein the bucket is positioned adjacent the discharge port to discharge fluid.
34 Scroll vacuum pump and method of maintenance including replacing a tip seal of a scroll vacuum pump US15074635 2016-03-18 US09822780B2 2017-11-21 John Calhoun
A scroll pump has a tip seal between an axial end of the scroll blade of one of stationary and orbiting plate scrolls of the pump and the plate of the other of the stationary plate and orbiting plate scrolls. The scroll pump may have a ballast gas supply system and use the operation of the ballast gas supply system to assess the condition of the tip seal. Alternatively, the scroll pump may have two pressure sensors that sense pressure at two locations spaced along a compression mechanism of the pump to assess the condition of the tip seal.
35 Scroll Vacuum Pump and Method of Maintenance Including Replacing a Tip Seal of a Scroll Vacuum Pump US15074635 2016-03-18 US20160201674A1 2016-07-14 John Calhoun
A scroll pump has a tip seal between an axial end of the scroll blade of one of stationary and orbiting plate scrolls of the pump and the plate of the other of the stationary plate and orbiting plate scrolls. The scroll pump may have a ballast gas supply system and use the operation of the ballast gas supply system to assess the condition of the tip seal. Alternatively, the scroll pump may have two pressure sensors that sense pressure at two locations spaced along a compression mechanism of the pump to assess the condition of the tip seal.
36 Vacuum pump US11103025 2005-04-11 US20060228246A1 2006-10-12 William West; Duane Boehler
A vacuum pump may include a stator located between an intake plate and a back plate. Mating portions on the intake plate and back plate may be used to properly locate the stator. The stator may comprise a tubular piece of material. The stator may include two internal pump chambers separated by a divider plate. In some embodiments, the divider plate may have a fluid passageway extending therethrough. A rotor in each chamber may include vanes and may be offset from the center of the chamber. Each rotor may be fixed to a rotatable shaft for operation of the vacuum pump.
37 Dry compressing vacuum pump having a gas ballast device US10168289 2002-06-17 US06776588B1 2004-08-17 Lutz Arndt; Thomas Dreifert; Michael Hölzemer; Jürgen Meyer; Frank Schönborn
A dry compressing vacuum pump (1) has a continuous or graduated inner compression. A gas ballast device (8) selectively adds a ballast gas to a pumped gas. The gas ballast device has an isolating valve (11), a non-return valve (12) which prevents the escape of gases from the pump through the gas ballast device to the outside, and a pressure differential valve (13).
38 Gas ballast system for a multi-stage positive displacement pump US351735 1999-07-12 US6071085A 2000-06-06 Karl-Heinz Bernhardt
A gas ballast system for a multi-stage positive displacement pump in which a first stage includes at least one positive displacement pump stage, is equipped with an inlet valve and an outlet valve, and is connected with the following stage by an intermediate vacuum chamber, with the gas ballast system including a first conduit for supplying gas into the intermediate vacuum chamber, and a second conduit for supplying gas from the intermediate vacuum chamber into a pump chamber of the first stage or to a suction region of the first stage.
39 Cooling structure for an oil sealed rotary vacuum pump US33631 1979-04-26 US4283167A 1981-08-11 Benjamin Bassan; Michael A. Grandinetti
An oil pool in a rotary vane, oil sealed mechanical vacuum pump casing is cooled by air drawn by a relatively low pressure and low speed laminar flow fan mounted on a motor shaft for the pump and positioned in a shroud between end plates for the motor and casing. The air pumped by the fan flows axially relative to the shaft through a horizotally extending slot at the bottom of the shroud and vertically extending slots on the sides of the shroud. The pumped air flows against vertically and horizontally extending fins respectively on the pump casing bottom and sides. The vertically extending fins at the bottom of the casing have bases slightly above the horizontal slot at the bottom of the housing so air flowing through that slot flows against the bases of the fins at a shallow angle. A vertical surface of the housing remote from the fan and the shroud has vertically extending fins that are aligned with the vertically extending fins on the bottom of the casing.
40 Liquid ring compressor including a calibrated gas input opening US721450 1976-09-08 US4083658A 1978-04-11 Claus Ramm
A liquid ring compressor including a separate gas input opening disposed in the control disc of the compressor near the delivery space of the compressor impeller between the suction and the output openings of the control disc. The improvement of the invention comprises the gas input opening comprising a calibrated gas input opening, and the compressor including means for coupling the opening to the compression space of the liquid ring compressor for continuously feeding a pressure-increasing gas ballast to the delivery space of the compressor through the calibrated opening. The pressure increase of the gas pumped by the impeller ahead of the output openings of the control disc in the direction of rotation of the impeller is thereby reduced.
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