Inspecting method for mirror face body
专利汇可以提供Inspecting method for mirror face body专利检索，专利查询，专利分析的服务。并且PURPOSE: To inspect the mirror face quality of a plane mirror, wafer mirror face, etc., with high precision by measuring the distribution of reflected-light intensity by causing a diffused light ray from a spot light source to strike a mirror face to be inspected.
CONSTITUTION: To inspect mirror-face quality such as the reflection-coefficient distribution and flatness of a plane mirror, wafer mirror surface, etc., a diffused light ray from a spot light source is caused to strike mirror surface 3 to be inspected and the distribution of reflected-light intensity within the section of the reflected light ray is measured for the inspection. For example, diffused beams which never cross mutually are generated by pinholes 7 for spot light sources, halogen lamp 1a, and achromat condenser lenses 6a and 6b and then caused to strike silicon wafer mirror surface 3 to obtain inspection image 5. Then, inspection image 5 is inspected to judge a scratch, mirror-surface waviness, claw-track, flaw of the surface, etc. by a light and shade pattern with neither aberration nor strain.
COPYRIGHT: (C)1980,JPO&Japio，下面是Inspecting method for mirror face body专利的具体信息内容。
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