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Semiconductor device and manufacture thereof

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专利汇可以提供Semiconductor device and manufacture thereof专利检索,专利查询,专利分析的服务。并且PURPOSE:To form source and drain regions in a self-aligning manner by forming an impurity-containing high melting point metallic silicide electrode via a channel region on a semiconductor substrate having a field insulating film and diffusing the impurity. CONSTITUTION:An Mo silicide 3 containing P or As is sputtered on a p type Si substrate 11 having a field insulating film 12, a channel region is exposed, an oxidized film 14 is then formed, impurity is introduced to the substrate to form source and drain region 15, Mo silicide is covered, and a gate electrode 16 is formed. Since the respective electrodes and the corresponding regions can be formed in a self-aligning manner, the element can be remarkably reduced in size.,下面是Semiconductor device and manufacture thereof专利的具体信息内容。

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