序号 专利名 申请号 申请日 公开(公告)号 公开(公告)日 发明人
1 接合装置及半导体装置的制造方法 CN201380027777.0 2013-06-05 CN104335337B 2017-05-10 谷大辅; 高桥浩一
发明提供一种接合装置及半导体装置的制造方法。本发明的倒装芯片接合装置(500)是在设置有第一贯通电极的第一层的半导体芯片(20)之上,将在与第一贯通电极对应的位置设置有第二贯通电极的第二层的半导体芯片(30)加以层叠接合,其具备:双视野摄影机(16),拍摄半导体芯片(20)、(30)的影像;以及控制部(50);控制部(50)具备相对位置检测程序(53),所述相对位置检测程序(53)根据在层叠接合前双视野摄影机(16)所拍摄的第一层的半导体芯片(20)表面的第一贯通电极的影像以及在层叠接合后双视野摄影机(16)所拍摄的第二层的半导体芯片(30)表面的第二贯通电极的影像,检测已层叠接合的各层的半导体芯片(20)、(30)的相对位置。由此,以简便方法高精度地连接贯通电极。
2 接合装置及半导体装置的制造方法 CN201380027777.0 2013-06-05 CN104335337A 2015-02-04 谷大辅; 高桥浩一
发明倒装芯片接合装置(500)是在设置有第一贯通电极的第一层的半导体芯片(20)之上,将在与第一贯通电极对应的位置设置有第二贯通电极的第二层的半导体芯片(30)加以层叠接合,其具备:双视野摄影机(16),拍摄半导体芯片(20)、(30)的影像;以及控制部(50);控制部(50)具备相对位置检测程序(53),所述相对位置检测程序(53)根据在层叠接合前双视野摄影机(16)所拍摄的第一层的半导体芯片(20)表面的第一贯通电极的影像以及在层叠接合后双视野摄影机(16)所拍摄的第二层的半导体芯片(30)表面的第二贯通电极的影像,检测已层叠接合的各层的半导体芯片(20)、(30)的相对位置。由此,以简便方法高精度地连接贯通电极。
3 层积体、层积体的制造方法、电极、EL元件、面发光体以及太阳能电池 CN201380039381.8 2013-07-22 CN104508849B 2017-06-13 椋木一词; 佐伯裕美子; 服部俊明; 小并谕吉; 古川浩二
本层积体包含基材、所述基材之上的底涂层以及所述底涂层之上的无机膜。所述无机膜材料为导电性的金属化物以及导电性的金属氮化物中的至少一种材料。将用原子显微镜拍摄的所述无机膜的表面的图像进行傅立叶变换得到的图像中,将从所述傅立叶变换得到的图像的中心朝向0点方向的方位作为0°,从0°开始,每隔10°沿径向绘制亮度值图而得到36个亮度值的第一近似曲线,在所述36个亮度值的第一近似曲线中,18个以上的第一近似曲线中可以观察到最大值。
4 半导体器件的制造方法 CN201480007989.7 2014-03-14 CN104981889B 2017-03-08 立冈正明; 中嶋经宏
发明提供一种利用能应用于1000℃左右的高温工艺的将支承基板半导体晶片相粘接的方法的半导体器件的制造方法。该半导体器件的制造方法,包括如下工序:背面接合工序,在该背面接合工序中,将支承基板隔着陶瓷粘接剂层以及掩模与半导体晶片的背面相接合,以形成接合体;功能结构形成工序,在该功能结构形成工序中,在所述半导体晶片的正面形成功能结构;剥离工序,在该剥离工序中,去除所述陶瓷粘接剂层及所述掩模,将所述支承基板从所述半导体晶片剥离;以及背面处理工序,在该背面处理工序中,对所述半导体晶片的背面进行背面处理。
5 层积体、层积体的制造方法、电极、EL元件、面发光体以及太阳能电池 CN201380039381.8 2013-07-22 CN104508849A 2015-04-08 椋木一词; 佐伯裕美子; 服部俊明; 小并谕吉; 古川浩二
本层积体包含基材、所述基材之上的底涂层以及所述底涂层之上的无机膜。所述无机膜材料为导电性的金属化物以及导电性的金属氮化物中的至少一种材料。将用原子显微镜拍摄的所述无机膜的表面的图像进行傅立叶变换得到的图像中,将从所述傅立叶变换得到的图像的中心朝向0点方向的方位作为0°,从0°开始,每隔10°沿径向绘制亮度值图而得到36个亮度值的第一近似曲线,在所述36个亮度值的第一近似曲线中,18个以上的第一近似曲线中可以观察到最大值。
6 量子点薄膜、照明器件及照明方法 CN201180057057.X 2011-11-02 CN103228983A 2013-07-31 R·S·杜博劳; W·P·弗里曼; E·李; P·弗鲁塔
发明提供发光量子点薄膜、量子点照明器件以及基于量子点的背光单元。本发明也描述相关组合物、组件及方法。本发明提供改良的量子点囊封及基体材料。本发明描述具有保护障壁的量子点薄膜。本发明也包括高效率、高亮度及高色纯度且基于量子点的照明器件,以及用于改良基于量子点的照明器件的效率及光学特性的方法。
7 一种高强度耐磨金属制品 CN201510742567.0 2015-11-02 CN105291505A 2016-02-03 沈广宗; 何军昌; 唐俊朝; 王凤美; 胡文雄; 李桢华
发明公开了一种高强度耐磨金属制品,包括合金层以及分别覆盖其上下表面的两个耐磨塑料层,所述的两个耐磨塑料层结构组分相同,合金层占总重量的75~85%;合金层是由以下重量份的组分制成的:镧0.1~0.5份,7~10份,23~28份,8~12份,19~23份;耐磨塑料层是由以下重量份的组分制成的:聚四氟乙烯3~6份,二硫化钼8~12份,高耐磨炭黑8~12份,聚乙烯醇缩5~9份。本发明通过合金层和耐磨塑料层的共同作用,获得金属制品的磨耗≤0.03g/kg﹒h,莫氏硬度为9.25~10,有效提高了金属制品的高强度和耐磨性
8 半导体器件的制造方法 CN201480007989.7 2014-03-14 CN104981889A 2015-10-14 立冈正明; 中嶋经宏
发明提供一种利用能应用于1000℃左右的高温工艺的将支承基板半导体晶片相粘接的方法的半导体器件的制造方法。该半导体器件的制造方法,包括如下工序:背面接合工序,在该背面接合工序中,将支承基板隔着陶瓷粘接剂层以及掩模与半导体晶片的背面相接合,以形成接合体;功能结构形成工序,在该功能结构形成工序中,在所述半导体晶片的正面形成功能结构;剥离工序,在该剥离工序中,去除所述陶瓷粘接剂层及所述掩模,将所述支承基板从所述半导体晶片剥离;以及背面处理工序,在该背面处理工序中,对所述半导体晶片的背面进行背面处理。
9 一种抗静电高分子保护膜及其生产方法 CN201510305187.0 2015-06-07 CN104943256A 2015-09-30 不公告发明人
发明提供的抗静电高分子保护膜,包括抗静电原膜和离型膜,抗静电原膜为外涂层型抗静电原膜,原膜的上下两层均涂有外涂层,外涂层抗静电原膜与抗静电胶粘的结合,是提升抗静电胶粘层的抗静电功效的主要原因,是研发上最大的突破,判定基材材质是会对胶层的导电性能有一定程度影响,成功将胶层表面电阻值从10^10~10^11提升至10^6~10^9,抗静电原膜涂布抗静电胶黏层与离型膜结合在一起,所述抗静电胶黏层的胶黏剂中添加有金属性抗静电剂,抗静电剂选用锂盐型抗静电剂,金属锂本身电荷密度大,不容易受到极化,稳定性高,在与胶黏剂进行混合后形成良好导电网,抗静电胶黏层通过与抗静电原膜外涂层之间的增强附着层结合在一起。
10 2枚の基板を積層する方法 JP2015227657 2015-11-20 JP2016103637A 2016-06-02 ディディエ ランドリュ; キャプシーヌ ドラージュ; フランク フォーネル; エロディ ベーシュ
【課題】本発明は、2枚の基板(1、2)を分子接着によって積層する方法に係るものである。
【解決手段】前記積層する方法は、第1の基板(1)と第2の基板(2)とを密接に接触させて、積層界面(4)を有する積層(3)を形成する第1のステップ(a)と、積層(3)の接着度を、がもはや積層界面(4)に沿って拡散することができなくなる閾値接着値を超えて強化する第2のステップ(b)と、を含み、本発明によれば、この方法は、また、10℃未満の露点を有する処理雰囲気中で、第1の基板および第2の基板(1、2)を無水処理するステップ(c)と、無水処理するステップ(c)から第2のステップ(b)の終了まで、第1の基板および第2の基板(1、2)が曝露される作業雰囲気の露点を制御して、積層界面における結合不良の発生を制限または防止することを含む。
【選択図】図7
11 デバイスの製造方法 JP2014534436 2013-09-09 JP5922782B2 2016-05-24 松下 秀樹; 北田 勝信
12 半導体デバイスの製造方法 JP2014530853 2014-03-14 JP5610328B1 2014-10-22 正明 立岡; 中嶋 経宏; 経宏 中嶋
1000℃程度の高温プロセスに適用可能な半導体ウエハに支持基板を接着する方法を用いた半導体デバイスの製造方法を提供すること。半導体デバイスの製造方法であって、セラミック接着剤層およびマスクを介して、半導体ウエハの裏面に支持基板を接合して接合体とする裏面接合工程と、前記半導体ウエハのおもて面に機能構造を形成する機能構造形成工程と、前記セラミック接着剤層および前記マスクを除去して前記支持基板を前記半導体ウエハから剥離する剥離工程と、前記半導体ウエハの裏面に裏面処理をする裏面処理工程とを少なくとも含む半導体デバイスの製造方法。
13 Bonding apparatus and bonding method JP2013061589 2013-03-25 JP2014017471A 2014-01-30 TANI DAISUKE; TAKAHASHI KOICHI
PROBLEM TO BE SOLVED: To connect a through electrode with good accuracy in a simple method.SOLUTION: A flip-chip bonding apparatus 500 for bonding on a semiconductor chip 20 in a first layer where a first through electrode is provided, a semiconductor chip 30 in a second layer where a second through electrode is provided at a position corresponding to the first through electrode, by laminate bonding comprises a two-field camera 16 and a control part 50. The control part 50 includes a relative position detection program 53 for detecting relative positions of the semiconductor chips 20, 30 in the laminated-bonded layers based on an image of the first through electrode on a surface of the semiconductor chip 20 in the first layer, which is imaged by the two-field camera 16 before the laminate bonding and an image of the second through electrode on a surface of the semiconductor chip 30 in the second layer, which is imaged by the two-field camera 16 after the laminate bonding.
14 COVER GLASS AND GLASS LAMINATE US15874357 2018-01-18 US20180215659A1 2018-08-02 Kazunobu MAESHIGE; Nobutaka AOMINE; Hiroyuki OKAWA; Kiyoshi TAMAI; Hitoshi ONODA; Makoto SANO; Yusuke KOBAYASHI
The present invention provides a cover glass and a glass laminate which are reduced in warpage, and have excellent scratch resistance, low reflecting properties and excellent optical properties. According to the present invention, a cover glass and a glass laminate which are reduced in glass warpage, retain the effect of scratch resistance, and have low reflecting properties and excellent optical properties can be provided by alternately superposing a film including a high-refractive-index material and a film including a low-refractive-index material, in given amounts.
15 PHOSPHOR DISC, PHOSPHOR WHEEL, LIGHT SOURCE DEVICE, PROJECTION DISPLAY APPARATUS, AND MANUFACTURING METHOD OF PHOSPHOR DISC US15646628 2017-07-11 US20180031958A1 2018-02-01 TAKASHI IKEDA; MASAFUMI TANAKA
The phosphor disc disclosed here includes the following structural elements: a disc-shaped metal plate; a phosphor layer disposed circumferentially on the metal plate; and a bonding layer for bonding the phosphor layer to the metal plate. The metal plate curves convexly toward the phosphor layer.
16 ROOM-TEMPERATURE BONDING APPARATUS US15039545 2014-12-26 US20170162428A1 2017-06-08 Masato KINOUCHI; Takayuki GOTO; Takeshi TSUNO; Kensuke IDE; Takenori SUZUKI
A room-temperature bonding apparatus includes a bonding chamber, an upper-side stage mechanism to support an upper-side wafer to be movable in an upper and lower direction in the bonding chamber, and a lower-side stage mechanism configured to support a lower-side wafer in a horizontal plane in the bonding chamber. The lower-side stage mechanism includes a carriage having a lower-side wafer holding section for holding the lower-side wafer, an elastic guide connected to the carriage to support the carriage, a positioning stage for finely moving the lower-side wafer holding section, and a fine movement mechanism for finely moving a lower-side wafer holding section, and a carriage support base. The elastic guide supports the carriage elastically deforms so as for the carriage to contact the carriage support base when the upper-side wafer contacts the lower-side wafer and a load is applied to the carriage into an upper and lower direction by the upper-side stage mechanism.
17 Bonding apparatus and method for manufacturing bonded substrate US14859627 2015-09-21 US09586391B2 2017-03-07 Konosuke Hayashi; Daisuke Matsushima
A bonding apparatus includes a substrate holder holding the second substrate; a pusher pushing a back surface of the second substrate; a substrate support unit including a support talon supporting a circumferential edge portion of the first substrate to oppose the second substrate with a prescribed spacing between the second substrate and the circumferential edge portion of the first substrate; and a controller controlling a lifting/lowering operation of the pusher. The pusher pushes one prescribed point of the back surface of the second substrate, the one prescribed point corresponding to a position where a distance between a bonding surface of the first substrate and a bonding surface of the second substrate is shorter than a distance from the circumferential edge portion of the bonding surface of the first substrate to the bonding surface of the second substrate.
18 GRAPHITE-SILICON COMPOSITE AND PRODUCTION METHOD THEREOF US15206264 2016-07-09 US20170015084A1 2017-01-19 KAZUHIRO NISHIKAWA; NAOMI NISHIKI; HIDETOSHI KITAURA; ATSUSHI TANAKA; KIMIAKI NAKAYA
A graphite-silicon composite, including: graphite; silicon; and an intermediate layer that is located between the graphite and the silicon, wherein the intermediate layer includes oxygen, carbon and silicon. Furthermore, provided is a method for producing a graphite-silicon composite, including: layering graphite and silicon; and heating the layered graphite and silicon while applying pressure to them, wherein, during heating the layered graphite and silicon while applying pressure to them, an oxygen concentration in the atmosphere is adjusted to 0.2 vol %, the applied pressure is adjusted to 24.5 MPa or higher, and the heating temperature is adjusted to 1260° C. or higher.
19 Quantum Dot Films, Lighting Devices, and Lighting Methods US15018512 2016-02-08 US20160349428A1 2016-12-01 Robert S. DUBROW; William P. FREEMAN; Ernest LEE; Paul FURUTA
Light-emitting quantum dot films, quantum dot lighting devices, and quantum dot-based backlight units are provided. Related compositions, components, and methods are also described. Improved quantum dot encapsulation and matrix materials are provided. Quantum dot films with protective barriers are described. High-efficiency, high brightness, and high-color purity quantum dot-based lighting devices are also included, as well as methods for improving efficiency and optical characteristics in quantum dot-based lighting devices.
20 Liquid ejection head and method of manufacturing the same US14706857 2015-05-07 US09421771B2 2016-08-23 Junji Tatsumi; Genji Inada; Sayaka Seki; Yuichiro Akama
A liquid ejection head includes a recording element substrate that ejects liquid, and an element-substrate support member to which the recording element substrate is bonded with an adhesive. A groove to be filled with the adhesive is provided in a bonding region of the element-substrate support member, at which the element-substrate support member and the recording element substrate are bonded together, along a part or an entirety of the outer circumference of the recording element substrate.
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