| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 141 | 핸드 부재 및 핸드 | KR1020160150069 | 2016-11-11 | KR1020170060575A | 2017-06-01 | 사카이데츠야; 사카우에히데키 |
| 반도체웨이퍼를옮기는로봇아암의핸드를구성하는핸드부재로서, 상기핸드부재는상기반도체웨이퍼가놓이는 U자형부재이고, 상기핸드부재는그 내주연부및 외주연부에상기반도체웨이퍼를보유지지하는마찰보유지지부재가측방으로부터끼워맞춰지는끼워맞춤부를구비한다. | ||||||
| 142 | 감소된 기판 입자 생성을 갖는 기판 지지 장치 | KR1020167019102 | 2014-12-08 | KR1020160098447A | 2016-08-18 | 아그라왈,풀킷; 서,송문; 모리,글렌; 산소니,스티븐브이. |
| 기판을지지하기위한장치의실시예들이본원에서개시된다. 몇몇실시예들에서, 기판을지지하기위한장치는: 지지표면; 및지지표면으로부터돌출되는복수의기판접촉엘리먼트들을포함하고, 복수의기판접촉엘리먼트들은, 실리콘의경도(hardness)와동일한또는그 미만인경도를갖고, 낮은접착력(adhesion)을가지며, 슬라이딩을방지하기에충분히큰 정지마찰계수(coefficient of static friction)를갖고, 10 Ra와동일한또는그 미만인표면거칠기(surface roughness)를가지며, 전기전도성인재료로형성된다. | ||||||
| 143 | 복합 엔드 이펙터들 | KR1020157027793 | 2014-03-12 | KR1020150131101A | 2015-11-24 | 페르간드,폴이.; 포더헤이스,폴 |
| 엔드이펙터는베이스, 베이스로부터연장하는복수의핑거들, 및기판을지지하기위해상기핑거들의각각상에배치된복수의패드들을포함한다. 핑거들은탄소섬유재료를포함하며, 상기베이스에인접한제 1 벽두께및 제 1 직경으로부터, 상기베이스로부터원위의상기제 1 벽두께보다더 작은제 2 벽두께및 상기제 1 직경보다더 작은제 2 직경으로테이퍼링된다. 방법은, 복수의테이퍼링된핑거들을따라복수의패드들을접착하는단계, 및복수의테이퍼링된핑거들의근위단부들을베이스의대응하는리세스들에접착하는단계를포함한다. 어셈블링된패드들, 테이퍼링된핑거들및 베이스가, 접착제가실온에서경화될때까지복수의패드들의상단표면들이고정물의상단표면상에놓이도록고정물상에위치된다. | ||||||
| 144 | 로봇 및 그를 구비한 기판 처리 장치 | KR1020140027896 | 2014-03-10 | KR1020150105846A | 2015-09-18 | 김병상; 박강민; 박정준; 황재철 |
| 본 발명은 로봇 및 그를 구비하는 기판 처리 장치를 개시한다. 로봇은, 본체와, 상기 본체에 연결된 암과, 상기 본체에 대향되는 암의 타측에 연결된 핸드 베이스와, 상기 핸드 베이스에 연결된 핑거를 구비한 핸드와, 상기 핸드 베이스와 상기 핑거 사이 또는 상기 핸드 베이스와 상기 암 사이에 배치되어 상기 핸드 베이스 또는 상기 핑거의 진동을 감쇠하는 진동 감쇄 부재를 구비한 핸드 브라켓 유닛을 포함한다.
|
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| 145 | 반송 로봇, 그의 기판 반송 방법 및 기판 반송 중계 장치 | KR1020147024342 | 2011-12-15 | KR101528716B1 | 2015-06-15 | 고토,히로히코 |
| 반송로봇(50)은, 기판(6)을각각지지하는 2개의블레이드(55, 56)을구비한제1 및제2핸드(52, 53)와, 회동유닛(57), 제1진퇴유닛(58), 제2진퇴유닛(59) 및승강유닛(60)을구비한이동장치를구비하고있고, 이동장치에의해, 제1 및제2핸드(52, 53)를기판(6)이재치되어있는기판반송중계장치(25) 및 4개의프로세스챔버(23)로각각이동시킨다. | ||||||
| 146 | 엔드 이펙터를 갖춘 로봇 및 그 운전방법 | KR1020157010208 | 2010-01-29 | KR1020150052329A | 2015-05-13 | 하시모토,야스히코; 요시다,데츠야 |
| 본발명은, 로봇(1)의아암에장착되도록구성된엔드이펙터(6, 7)에있어서, 각각이기판을보유지지할수 있도록구성된복수의블레이드부재(9, 10, 12, 13)로서, 블레이드부재끼리의블레이드간격을변경할수 있도록구성된복수의블레이드부재(9, 10, 12, 13)와, 복수의블레이드부재를지지하는블레이드지지부(8, 11)로서, 로봇에의해복수의블레이드부재(9, 10, 12, 13)와일체적으로구동되는블레이드지지부(8, 11)와, 복수의블레이드부재(9, 10, 12, 13) 중의적어도 1개를다른블레이드부재에대해이동시켜블레이드간격을변경하는블레이드구동수단(17, 18)을구비한것을특징으로한다. | ||||||
| 147 | 다관절 로봇, 반송 장치 | KR1020147029842 | 2013-03-26 | KR1020140140097A | 2014-12-08 | 다시로유키히토 |
| 반송 속도를 고속화할 수 있는 다관절 로봇, 반송 장치를 제공한다. 다관절 로봇(1A)은 제1 처리부(54)로부터, 상기 제1 처리부(54)에 대해 직선상으로 배치된 제2 처리부(54)로, 피처리물(56)을 반송한다. 다관절 로봇(1A)은 신축 자재의 아암(2)과, 상기 아암(2)의 선단의 하측에 설치되고, 상기 피처리물(56)을 파지하는 파지부(3)를 구비하고, 상기 제1 처리부(54)로 상기 파지부(3)를 일단부(5E)로부터 진입시킴과 함께, 상기 파지부(3)를 상기 일단부(5E)에 대향하는 타단부(7E)로부터 상기 제2 처리부(54)로 진입시킨다.
|
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| 148 | 반송 장치 및 세라믹 부재 | KR1020147024822 | 2013-02-28 | KR1020140131946A | 2014-11-14 | 미와가나메; 니와도모노리; 구라노준 |
| 세라믹 부재 (200) 는, 절연성을 갖고, 일체 소성된 복수의 세라믹층 (291 ∼ 297) 과 ; 제 1 세라믹층 (296) 상에 형성되고, 정전력에 의해 유전체를 흡착 가능하게 구성된 전극인 흡착 전극 (372, 374 376, 378) 과 ; 세라믹 부재 (200) 의 외부로부터 흡착 전극 (372, 374 376, 378) 에 대한 전력의 공급을 받는 급전구 (312, 316) 와 ; 제 2 세라믹층 (295) 상에 형성되고, 급전구를 통하여 수전 가능하게 구성된 도체인 랜드 (332, 336) 와 ; 복수의 세라믹층 중 적어도 1 개를 관통하여 흡착 전극 (372, 374 376, 378) 과 랜드 (332, 336) 사이를 전기적으로 접속시키는 도체인 비아 (352, 354, 356, 358) 를 구비한다. | ||||||
| 149 | 기판 반송용 핸드 및 기판 반송 방법 | KR1020130137374 | 2013-11-13 | KR1020140061279A | 2014-05-21 | 다테야마유키; 이토야스노리 |
| The present invention relates to a hand for conveying a substrate. The hand for conveying a substrate comprises: a pair of first substrate support members arranged in parallel with each other; a drive part configured to parallely move the first substrate support members in a direction where the first substrate support members come close to each other or a direction where the first substrate support members are spaced apart from each other; a pair of second substrate support members arranged in parallel with each other in a direction orthogonal to a longitudinal direction of the first substrate support members; a parallel link member configured to connect the first and second substrate support members, to parallely move the second substrate support members in a direction where the second substrate support members come close to each other in conjunction with the parallel movement of the first substrate support members in the direction where the first substrate support members come close to each other, and to parallely move the second substrate support members in a direction where the second substrate support members are spaced apart from each other in conjunction with the parallel movement of the first substrate support members in the direction where the first substrate support members are spaced apart from each other; a plurality of first holding and supporting portions arranged along the longitudinal direction of the first substrate support members, and configured to hold and support the edges of the bottom surface of a substrate; and a plurality of second holding and supporting portions arranged along a longitudinal direction of the second substrate support members, and configured to hold and support the edges of the bottom surface of the substrate. | ||||||
| 150 | 엔드 이펙터를 갖춘 로봇 및 그 운전방법 | KR1020147010539 | 2010-01-29 | KR1020140057400A | 2014-05-12 | 하시모토,야스히코; 요시다,데츠야 |
| 본 발명은, 로봇(1)의 아암에 장착되도록 구성된 엔드 이펙터(6, 7)에 있어서, 각각이 기판을 보유지지할 수 있도록 구성된 복수의 블레이드 부재(9, 10, 12, 13)로서, 블레이드 부재끼리의 블레이드 간격을 변경할 수 있도록 구성된 복수의 블레이드 부재(9, 10, 12, 13)와, 복수의 블레이드 부재를 지지하는 블레이드 지지부(8, 11)로서, 로봇에 의해 복수의 블레이드 부재(9, 10, 12, 13)와 일체적으로 구동되는 블레이드 지지부(8, 11)와, 복수의 블레이드 부재(9, 10, 12, 13) 중의 적어도 1개를 다른 블레이드 부재에 대해 이동시켜 블레이드 간격을 변경하는 블레이드 구동수단(17, 18)을 구비한 것을 특징으로 한다. | ||||||
| 151 | 클램프 장치 및 워크 반송 로봇 | KR1020130070365 | 2013-06-19 | KR1020140051044A | 2014-04-30 | 우라베유우지; 미에노야스미치 |
| A clamping device (101) comprises distal end side stationary blocks (41, 42) on a side of a distal end (31b) of a workpiece retaining base (31); proximal end side stationary blocks (51, 52) on a side of a proximal end (31a) of the workpiece retaining base, which faces the distal end side stationary blocks (41, 42) by being engaged with a workpiece (W); and a movable block (61) which is arranged at a position proximal to the proximal end side stationary blocks (51, 52) and which is capable of advancing to or retracting from a side of the distal end side stationary blocks (41, 42) with the workpiece (W) being held between the blocks. Each stationary block (41, 42, 51, 52) has upward stationary tilt faces (41a, 42a, 51a, 52a) tilting downwards to the center of the workpiece (W). The movable block (61) has a downward movable tilt face tilting upwards to the center of the workpiece (W). The present invention provides a clamping device which has strong bearing power against vibrations and a work transfer robot. | ||||||
| 152 | 로봇용 핸드 | KR1020080098607 | 2008-10-08 | KR1020090037815A | 2009-04-16 | 테젠히사미쯔 |
| A hand for a robot is provided to prevent a fork to be worn away and prevent an object to be stained by debris from the fork. A hand for a robot comprises a fork(10), and a weight member installed on the fork. The fork comprises at least a first position and a weight member movable to a second position, that is the tip part, rather than the first position. A movement space is formed inside the fork. The weight member is moved inside the movement space. The fork includes a storage and maintenance member for storing and maintaining the weight member to be moved between the first position and the second position. | ||||||
| 153 | Robot Having Vertically Oriented Articulated Arm Motion | US15888885 | 2018-02-05 | US20190240831A1 | 2019-08-08 | Anthony C. Bonora |
| A robotic structure providing theta-motion, R-motion and Z-motion and includes a platform. A rotatable base is mounted to the platform and is adapted to rotate in theta about the platform. A Z-tower is attached to the rotatable base, wherein the Z-tower rotates with the rotatable base. A vertical drive is configured within the Z-tower. A drive mechanism adapted to integrate with the vertical drive for linear movement along the Z-tower along a Z-axis. An arm comprising at least two linkages is rotatably attached to the drive mechanism and is further adapted for z-articulation in a corresponding vertical plane along an R-axis and the Z-axis. A gripper is adapted to attach to a pivot located at the distal end of the arm and pivotably mounted for rotation relative to the distal end, the gripper adapted to interface with a corresponding object. | ||||||
| 154 | WORKPIECE TRANSFERRING DEVICE AND METHOD FOR OPERATING THE SAME | US16315770 | 2017-06-30 | US20190233222A1 | 2019-08-01 | Toshiyuki TSUJIMORI; Kentaro AZUMA; Mitsunobu OKA |
| A workpiece transferring device is a device to transfer a workpiece from a first placement surface to a second placement surface. The device includes a first arm including, at a tip thereof, a first fork having a first branch part extending sideward, and configured to move the first fork, and a second arm including, at a tip thereof, a second fork having a second branch part extending downward, and configured to move the second fork. When the first branch part passes in between the workpiece and the first placement surface, the second branch part is located ahead of the workpiece in a moving direction of the first branch part. When the first branch part passes in between the workpiece and the second placement surface, the second branch part is located ahead of the workpiece in the moving direction of the first branch part. | ||||||
| 155 | SEMICONDUCTOR MANUFACTURING APPARATUS, WAFER CONVEYING APPARATUS AND WAFER CONVEYING METHOD | US15915792 | 2018-03-08 | US20190067066A1 | 2019-02-28 | Fumiki AISO; Ryota FUJITSUKA; Kensei TAKAHASHI; Takayuki MATSUI; Tomohisa IINO |
| In one embodiment, a semiconductor manufacturing apparatus includes a container to contain wafers, and supporting tables provided in the container so as to be stacked on one another, and each including a supporting face that comes into contact with a wafer to support the wafer. The apparatus further includes supporting columns to join the supporting tables together and provided at positions where the supporting columns are contained inside outer circumferences of the supporting tables. The apparatus further includes a gas feeder to feed a gas to the wafers on the supporting tables, and a gas discharger to discharge the gas fed to the wafers on the supporting tables. Each of the supporting tables includes a first upper face as the supporting face, and a second upper face provided so as to surround the first upper face at a level higher than a level of the first upper face. | ||||||
| 156 | LIFTING EQUIPMENT FOR WAFFLE SLAB | US15807692 | 2017-11-09 | US20190061171A1 | 2019-02-28 | Samuel YIN; Tzu-Liang WU |
| The present application relates to lifting equipment for a waffle slab used in a construction. The lifting equipment comprises a main body bracket, a sliding member and a plurality of clamping mechanisms. The main body bracket has a through hole in a center thereof. The sliding member is slidably disposed in the through hole of the main body bracket and is slidable between a first position and a second position. Each of the plurality of clamping mechanisms comprises a clamping member and a connecting rod. The clamping member comprises a first end and a second end, wherein the first end is pivotally connected to an outer edge of the main body bracket, and the second end is configured to extend into a hole of the waffle slab for clamping the waffle slab. A proximate end of the connecting rod is pivotally connected to a lower end of the sliding member, and a distal end of the connecting rod is pivotally connected to the clamping member between the first end and the second end. | ||||||
| 157 | SUBSTRATE TRANSFER HAND | US16072045 | 2017-01-27 | US20190035670A1 | 2019-01-31 | Kentaro OKAMOTO |
| A substrate transfer hand is provided that is capable of supporting a substrate in a rigid state while reducing the contact points with the substrate.A substrate transfer hand includes a longitudinal hand support 20a extending in a longitudinal direction, and a plurality of transverse hand supports 31a and 32a coupled to the longitudinal hand support 20a and extending transversely to the longitudinal direction of the longitudinal hand support 20a. The plurality of transverse hand supports 31a and 32a include a plurality of first transverse hand supports 31a and a plurality of second transverse hand supports 32a. Each of the first transverse hand supports 31a includes a plurality of first contact points 40A aligned in a direction in which the first transverse hand support 31a extends and capable of contacting the substrate SB. The maximum height position of the first contact points 40A is a first height. Each of the second transverse hand supports 32a includes a plurality of second contact points 40B aligned in a direction in which the second transverse hand support 32a extends and capable of contacting the substrate SB. The maximum height position of the second contact points 40B is a second height that is lower than the first height. | ||||||
| 158 | Automated replacement of consumable parts using end effectors interfacing with plasma processing system | US15048940 | 2016-02-19 | US10124492B2 | 2018-11-13 | Damon Tyrone Genetti; Jon McChesney; Alex Paterson; Derek John Witkowicki; Austin Ngo |
| A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state. | ||||||
| 159 | APPARATUS, SYSTEM AND METHOD FOR PROVIDING A CONFORMABLE VACUUM CUP FOR AN END EFFECTOR | US15964365 | 2018-04-27 | US20180311832A1 | 2018-11-01 | Jeroen BOSBOOM; Richard Munro; Tatiana Pankova Major |
| The disclosed embodiments are and include at least an apparatus, system and method for providing a vacuum grip for an end effector. The apparatus, system and method may include at least a vacuum draw eyelet connectively associated with a vacuum at a base portion thereof, and having a larger cross-sectional circumference at a topmost portion thereof than at the base portion; an extending cup foam portion including a receiving portion suitable for receiving therewithin the larger cross-sectional circumference of the topmost portion; and a wire clip having two legs inserted along a cross-sectional plane of the extending cup foam portion, the two legs being suitable to compress the receiving portion into frictional contact at two tangent points on a second cross-sectional circumference of the vacuum draw eyelet below the larger cross-sectional circumference. | ||||||
| 160 | Technologies for optical communication in rack clusters | US15396035 | 2016-12-30 | US10070207B2 | 2018-09-04 | Matthew J. Adiletta; Aaron Gorius; Myles Wilde; Michael T. Crocker |
| Technologies for optical communication in a rack cluster in a data center are disclosed. In the illustrative embodiment, a network switch is connected to each of 1,024 sleds by an optical cable that enables communication at a rate of 200 gigabits per second. The optical cable has low loss, allowing for long cable lengths, which in turn allows for connecting to a large number of sleds. The optical cable also has a very high intrinsic bandwidth limit, allowing for the bandwidth to be upgraded without upgrading the optical infrastructure. | ||||||
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