Insulated gate type field effect semiconductor integrated circuit device and preparation of the same
专利汇可以提供Insulated gate type field effect semiconductor integrated circuit device and preparation of the same专利检索，专利查询，专利分析的服务。并且PURPOSE:To contrive microminiaturization of IC of IGFET by making the depth from the surface of substrate of opposing conductivity type diffusion layer larger than the width thereof. CONSTITUTION:The field oxide film 12, channel stopper 13, SiO2 gate insulation film 14 and the poly-Si gate electrode 15 are formed on the p type Si substrate 11. The SiO2 film 16 is then selectively formed in the periphery of the electrode 15. When the As ion is vertically implanted with an energy of 150KeV and the surface is activated at a temperature of 950 deg.C, the n layers 17, 18 are formed in the thickness of about 3mum, the channelling effect is cancelled by the film 14 in the vicinity of the electrode 15 and the source, drain layer 19 is formed in the thickness of about 0.2mum. The source, drain layer 19 is covered with the insulation film 20 and the metal wiring 21 is also provided. According to this structure, the layers 17, 18 are formed deeply with a comparatively low energy, and increase of resistance value per unit length can be prevented by forming deeply the such films even when the diffused window size can be reduced up to an extreme limit. Since increase of junction capacitance due to the depth of layers 17, 18 can be negligible, a high speed operation can further be improved by microminiaturization.，下面是Insulated gate type field effect semiconductor integrated circuit device and preparation of the same专利的具体信息内容。
| 标题 | 发布/更新时间 | 阅读量 |
|---|---|---|
| 一种MEMS层叠器件微波端口实现的工艺方法 | 2020-05-14 | 910 |
| 背光模组及显示装置 | 2020-05-17 | 417 |
| 基于近红外二区荧光成像用于侧向流免疫检测的试条、检测设备及非诊断目的的检测方法 | 2020-05-18 | 247 |
| 区分半导体光致逆自旋霍尔效应本征与非本征机制的方法 | 2020-05-14 | 484 |
| 一种多维微流控芯片及其使用方法 | 2020-05-15 | 269 |
| 一种C50强度等级的高性能纤维混凝土及其制备方法 | 2020-05-19 | 95 |
| 旋转紧凑型光测距系统 | 2020-05-11 | 582 |
| 磁性隧道结结构及磁性随机存储器 | 2020-05-14 | 894 |
| 一种基于谱图特征的并行卷积循环神经网络的语音情感识别方法 | 2020-05-17 | 780 |
| 颅内球囊扩张导管 | 2020-05-17 | 849 |
高效检索全球专利专利汇是专利免费检索,专利查询,专利分析-国家发明专利查询检索分析平台，是提供专利分析，专利查询，专利检索等数据服务功能的知识产权数据服务商。
我们的产品包含105个国家的1.26亿组数据，免费查、免费专利分析。
专利汇分析报告产品可以对行业情报数据进行梳理分析，涉及维度包括行业专利基本状况分析、地域分析、技术分析、发明人分析、申请人分析、专利权人分析、失效分析、核心专利分析、法律分析、研发重点分析、企业专利处境分析、技术处境分析、专利寿命分析、企业定位分析、引证分析等超过60个分析角度，系统通过AI智能系统对图表进行解读，只需1分钟，一键生成行业专利分析报告。
