Method of fabricating semiconductor device
专利汇可以提供Method of fabricating semiconductor device专利检索，专利查询，专利分析的服务。并且PURPOSE: To prevent the lower layer aluminum film wiring of a semiconductor device from excessively corroding by providing selectivity at the lower layer aluminum film when aluminum oxide film for insulating the lower layer aluminum film wiring is removed by gas plasma treatment.
CONSTITUTION: An insulator layer 3 having an opening 4 is coated on a semiconductor substrate 1 incorporating an element region 2 at the position corresponding to the opening 4. An aluminum film 5 is coated on the entire surface of the insulator layer 3, and a hybrid aluminum oxide film 6 is further coated on the film 5. Then, a lower layer wiring photoresist film 7a is coated on the desired surface area of the film 6, and the regions coated with no film 7a are converted into porous aluminum oxide films 8. Then, the film 7a is removed from the surface of the film 6, and silicon oxide film 9 is, for example, coated instead as inter-layer insulator film. Further, a photoresist film 7b having an opening pattern is coated on the surface of the film 9 to thereby chemically etch the film 9 so as to expose the film 6. Then, the film 6 is corroded to be removed through the opening by means of plasma treatment to thereby expose the surface of the lower layer aluminum film 5. Since the hybrid aluminum oxide film 6 is corroded several times faster than the films 5 and 9 at this time, it does not excessively corrode. Then, a metal film 11 is wired in contact with the film 5. Thus, the through hole opening treatment can be completed by only one photoresist film coating treatment.
COPYRIGHT: (C)1980,JPO&Japio，下面是Method of fabricating semiconductor device专利的具体信息内容。
| 标题 | 发布/更新时间 | 阅读量 |
|---|---|---|
| 绝缘体上半导体结构以及制备方法 | 2020-05-08 | 674 |
| 半导体器件及其制造方法 | 2020-05-08 | 571 |
| 用于管腔内超声成像换能器的埋入式沟槽以及相关的设备、系统和方法 | 2020-05-08 | 813 |
| 用于制备用于微组装的GaN及相关材料的系统及方法 | 2020-05-08 | 48 |
| 绝缘体上半导体元器件及其制造方法 | 2020-05-08 | 670 |
| 电容性微结构 | 2020-05-08 | 606 |
| 带有梳状传输线的单片电光调制器 | 2020-05-08 | 963 |
| 半导体装置 | 2020-05-11 | 961 |
| 一种基于压电材料的压力传感器及制备方法 | 2020-05-11 | 184 |
| 硅基光耦合结构、硅基单片集成光器件 | 2020-05-12 | 63 |
高效检索全球专利专利汇是专利免费检索,专利查询,专利分析-国家发明专利查询检索分析平台，是提供专利分析，专利查询，专利检索等数据服务功能的知识产权数据服务商。
我们的产品包含105个国家的1.26亿组数据，免费查、免费专利分析。
专利汇分析报告产品可以对行业情报数据进行梳理分析，涉及维度包括行业专利基本状况分析、地域分析、技术分析、发明人分析、申请人分析、专利权人分析、失效分析、核心专利分析、法律分析、研发重点分析、企业专利处境分析、技术处境分析、专利寿命分析、企业定位分析、引证分析等超过60个分析角度，系统通过AI智能系统对图表进行解读，只需1分钟，一键生成行业专利分析报告。
-
5 浮栅的制备方法
