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Plural beam electron beam scanner utilizing a modulation grid

阅读:149发布:2023-03-24

专利汇可以提供Plural beam electron beam scanner utilizing a modulation grid专利检索,专利查询,专利分析的服务。并且A plurality of flat coded dynode members are sandwiched between an electron emitting cathode in the form of a flat plate and a flat target plate. Each dynode member has a plurality of apertures formed therein which are aligned with corresponding apertures on all the other dynodes to form an electron beam channel. The dynodes further each have a pair of separate conductive portions thereon arranged in a predetermined finger pattern, the finest of such finger patterns defining an elemental scanning area of the target plate. Each of such basic resolution elements is formed by means of a channel for each of a plurality of scanning beams. A modulation grid having apertures therein corresponding to the apertures on the dynodes and aligned therewith is placed between the cathode and target and is used to control the energization of the beams. A dynode having one of the finest finger patterns thereon has such finger patterns arranged so that each basic scanning element has a single aperture for each of the separate scanning beams, thereby enabling simultaneous scanning over the entire target area for the separate beams.,下面是Plural beam electron beam scanner utilizing a modulation grid专利的具体信息内容。

1. In an electron beam scanner having a plurality of beams, the number of said beams being ''''n,'''' a flat plate cathode, a flat plate target, a plurality of control plates sandwiched between said cathode and said target for controlling the flow of electrons therebetween, each of said control plates having apertures therein, corresponding apertures on said control plates being aligned with each other to form electron channels between the cathode and target, electrodes arranged on said control plates in predetermined finger pattern pairs, switch means for alternatively forward biasing one or the other of the finger patterns of each of said pairs to activate a single separate channel for each of said plurality of beams at a time, so as to energize a single target scanning element, and modulation grid means interposed between said cathode and target for modulating each of said beams, said modulation grid means having a plurality of apertures formed therein corresponding to said control plate apertures and electrode elements arranged in strips on said modulation grid means, each of said strips encompassing a row of said apertures, succeeding ''''nth'''' rows of said strips being connected together, each set of said interconnected strips being used for modulating a separate one of said beams, at least one of said control plates having its electrodes arranged in a finger pattern finer than those of the other control plates, the finger pattern of said last mentioned control plate being formed such as to delineate said scanning elements.
2. The scanner of claim 1 and additionally including modulation means for providing modulating signals to each of said modulation grid member electrodes.
3. In an electron beam scanner having a plurality of beams, a flat plate cathode, a flat plate target, a plurality of control plates sandwiched between said cathode and said target for controlling the flow of electrons therebetween, each of said control plates having apertures therein, corresponding apertures on said control plates being aligned with each other to form electron channels between the cathode and target, electrodes arranged on said control plates in predetermined finger pattern pairs, switch means for alternatively forward biasing one or the other of the finger patterns of each of said pairs to activate a single separate channel for each of said plurality of beams at a time, so as to energize a single target scanning element, and modulation grid means interposed between said cathode and target for modulating each of said beams, said modulation grid means having a plurality of apertures formed therein corresponding to said control plate apertures and electrode elements arranged in strips on said modulation grid means, each of said strips encompassing a row of said apertures, succeeding third rows of said strips being connected together, each set of said interconnected strips being used for modulating a separate one of said beams, a least one of said control plates having its electrodes arranged in a finger pattern finer than those of the other control plates, the finger pattern of said last mentioned control plate being formed such as to delineate said target scanning elements.
4. The scanner of claim 1 wherein there are three beams, said one of said control plates having its electrodes in a zig-zag pattern so as to alternately encompass one and two dynode apertures, three electron channels being activated at a time to activate a single target scanning element.
5. A plural beam electron beam scanner comprising: a flat cathode member for emitting electrons, a target member mounted opposite said cathode member, a power source connected between said target member and said cathode member for providing an electron accelerating potential therebetween, a plurality of control plate members sandwiched between said cathode and target members for controlling the flow of electrons therebetween, said control plate members being aligned opposite each other and said cathode and target members, said control plate members having a plurality of conductive coded finger portions which are insulated from each other, said control plate members further having a plurality of aperture means therein forming channels for the flow of electrons between said cathode and said target members, corresponding aperture means of said control plate members being aligned with each other, control means for selectively applying an electron accelerating potential to at least one of the finger portions of each of said control plate members and a potential for preventing the flow of electrons to the others of the finger portions of each of said members, a modulation grid member interposed between said cathode and target members and aligned therewith, said modulation grid member having a plurality of apertures formed therein corresponding to and aligned with corresponding apertures in said control plate members, a least one of said control plate members having finger patterns finer than those of any of the others of said control plate members and arranged in a zig-zag configuration, and having groups of apertures, each of said aperture groups defining an elemental scanning area, said modulation grid member having electrode elements, each of said elements controlling one of the plural beams by controlling the flow of electrons through predetermined ones of said modulation grid apertures, and modulation means for providing separate modulation signals to predetermined ones of said modulation grid member electrodes, each elemental target scanning area receiving each of said beams as modulated by said modulation grid member.
6. The scanner of claim 5 wherein there are three beams, the zig-zag pattern alternatively encompassing one and two aperture means.
7. The scanner of claim 6 wherein the electrode elements of said modulation grid member are arranged in strips, each of such strips running diagonally across a row of the apertures of said grid member.
8. The scanner of claim 7 wherein succeeding fourth electrode element strips are connected together, each set of interconnected strips forming one of said electrode elements.
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