专利汇可以提供INSTALLATION AND METHOD FOR PROCESSING SEMI-CONDUCTOR WAFERS (Si or GaAs WAFERS) FOR INTEGRATED CIRCUITS专利检索,专利查询,专利分析的服务。并且Installation and process for producing integrated circuits comprising Si or GaAs wafers, consisting of storage containers for several processing media such as various acids and solvents or cleaning agents, with measurement, filling, pumping and extraction systems as well as a processing unit for performing the processing operations on the Si or GaAs wafers which for transport and processing are arranged packet-wise, one over the other in support units referred to as trays. The disc-like rotary table, arranged in the processing container and equipped with vertical holding pins for receiving and fixing the tray-holders which can be inserted with grippers, is provided with program-controllable rotary drives for a high rotation speed for drying, a low rotation speed for spraying and for intermittent pivoting to enable passage into the loading and unloading position; it is also provided with the central spray rod projecting from below into the processing container and capable of being rotated with its own drive, with several sets of nozzles arranged thereon and with separate feed lines for the processing media passing through the central store of the rotary table and spray rod, leading from the stand-alone, mobile and readily-disposable units, each containing a specific processing medium.,下面是INSTALLATION AND METHOD FOR PROCESSING SEMI-CONDUCTOR WAFERS (Si or GaAs WAFERS) FOR INTEGRATED CIRCUITS专利的具体信息内容。
标题 | 发布/更新时间 | 阅读量 |
---|---|---|
用于在光伏电池上印刷的方法和自动生产设备 | 2020-05-15 | 452 |
一种基于CAN通讯的火灾探测器远程升级方法及装置 | 2020-05-15 | 376 |
一种POS机主板的自动测试装置、系统及方法 | 2020-05-11 | 812 |
一种基于龙芯处理器的主板固件快速烧录方法及装置 | 2020-05-14 | 569 |
分区为包括元数据区域的多个区域的字节可寻址非易失性读写主存储器 | 2020-05-16 | 282 |
感应器、装载端及水平方法 | 2020-05-08 | 483 |
消除驱动力突变的地铁屏蔽门控制系统和方法 | 2020-05-13 | 650 |
固件升级方法、电子设备、相机系统和无人飞行器 | 2020-05-15 | 938 |
基于视频图像处理的无人机巡线控制系统 | 2020-05-15 | 808 |
固件升级方法、电子设备、相机系统和无人飞行器 | 2020-05-15 | 853 |
高效检索全球专利专利汇是专利免费检索,专利查询,专利分析-国家发明专利查询检索分析平台,是提供专利分析,专利查询,专利检索等数据服务功能的知识产权数据服务商。
我们的产品包含105个国家的1.26亿组数据,免费查、免费专利分析。
专利汇分析报告产品可以对行业情报数据进行梳理分析,涉及维度包括行业专利基本状况分析、地域分析、技术分析、发明人分析、申请人分析、专利权人分析、失效分析、核心专利分析、法律分析、研发重点分析、企业专利处境分析、技术处境分析、专利寿命分析、企业定位分析、引证分析等超过60个分析角度,系统通过AI智能系统对图表进行解读,只需1分钟,一键生成行业专利分析报告。