Apparatus for pulling up semiconductor single crystal
专利汇可以提供Apparatus for pulling up semiconductor single crystal专利检索，专利查询，专利分析的服务。并且PURPOSE:To provide the titled pulling up apparatus having simple and low-cost structure, furnished with a one-dimensional image sensor to inspect the state of the surface of the molten liquid including the center part of the pulled up crystal and crossing the crystal, thereby determining the melting state of the raw material and the diameter of the pulled up crystal. CONSTITUTION:The semiconductor raw material thrown into the crucible 2 placed in the chamber 1 is heated and melted with a heater (not shown in the figure). The seed crystal 5 attached to the end of the pulling up shaft 6 is made to contact with the surface 3a of the molten liquid 3, and pulled up under rotation to effect the growth of the crystal 4. In the above semiconductor crystal pulling up apparatus by Czochralski process, the one-dimensional image sensor 10 is placed outside of the chamber 1, and the molten liquid surface 3a of the pulled up crystal 4 is inspected including the region near the center and crossing the pulled up crystal 4, via the inspection window 8 made of quartz glass plates 7a, 7b, a light-shielding glass plate 9, etc. The molten state of the molten liquid 3 is determined, the fusion ring at the pulled up crystal 4 and thereabout is detected, and the temperature of the molten liquid 3 and the diameter of the pulled up crystal 4 are controlled by this apparatus.，下面是Apparatus for pulling up semiconductor single crystal专利的具体信息内容。
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