HIGH EFFICIENCY SILICON SOLAR CELLS AND METHODS OF FABRICATION
专利汇可以提供HIGH EFFICIENCY SILICON SOLAR CELLS AND METHODS OF FABRICATION专利检索，专利查询，专利分析的服务。并且A very inexpensive, uncomplicated, and high throughput manufacturing process for fabrication of high efficiency silicon solar cells is disclosed. The manufacturing process begins with a low resistivity Czochralski wafer substrate (20). Then the substrate's front surface is texturized and a lightly doped N type junction layer (24) is formed in the front surface. Next, silicon dioxide (26) is thermally grown on the substrate's front and back surfaces. Then a computer driven laser beam cuts the front surface oxide to form the grooves (28) needed for the fabrication of the topside electrical contacts (32). The next step is to diffuse phosphorus (30) deeply in the silicon under the groove areas, where the oxide has been eliminated by the laser beam. Thereafter, electroless plating of gold, nickel and copper in the groove areas is performed to form the topside ohmic contacts (32). Subsequently, junction edges at the wafer edges are plasma etched to remove any electrical shunts. Finally, rear ohmic contacts (36) are screen printed and sintered.，下面是HIGH EFFICIENCY SILICON SOLAR CELLS AND METHODS OF FABRICATION专利的具体信息内容。
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