MICROMECHANICAL COMPONENT HAVING A THIN LAYER CAP |
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| 申请号 | PCT/EP2008056117 | 申请日 | 2008-05-19 | 公开(公告)号 | WO2008145553A3 | 公开(公告)日 | 2009-02-12 |
| 申请人 | BOSCH GMBH ROBERT; SCHMITZ VOLKER; GROSSE AXEL; | 发明人 | SCHMITZ VOLKER; GROSSE AXEL; | ||||
| 摘要 | The invention relates to a micromechanical component having a substrate, a micromechanical functional layer located over the substrate, and a capping layer located over the functional layer, and to a method for producing the micromechanical component, the capping layer comprising at least one trench, the trench being bridged by at least one electrically insulating connecting bridge. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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