SUBSTRATE PROCESSING TOOL专利检索- .输送晶片用机器人专利检索查询-专利查询网

SUBSTRATE PROCESSING TOOL
申请号	PCT/US2012028790	申请日	2012-03-12	公开(公告)号	WO2012125572A4	公开(公告)日	2013-10-03
申请人	BROOKS AUTOMATION INC; GILCHRIST ULYSSES; CAVENEY ROBERT T; KRISHNASAMY JAYARAMAN; DREW MITCHELL; MOURA JAIRO T;			发明人	GILCHRIST ULYSSES; CAVENEY ROBERT T; KRISHNASAMY JAYARAMAN; DREW MITCHELL; MOURA JAIRO T;
摘要	A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
权利要求
说明书全文