ACCOMMODATING CONTAINER, SHUTTER OPENING AND CLOSING UNIT FOR ACCOMMODATING CONTAINER, AND WAFER STOCKER USING SAME |
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| 申请号 | EP13778995 | 申请日 | 2013-04-10 | 公开(公告)号 | EP2840599A4 | 公开(公告)日 | 2015-11-18 |
| 申请人 | RORZE CORP; | 发明人 | SAKIYA FUMIO; SAKATA KATSUNORI; | ||||
| 摘要 | Provided is a wafer stocker that can prevent the inflow of an external atmosphere, maintain a wafer storage space at a desired atmosphere with a relatively small amount of gas, and prevent dust from being attached to a wafer surface. A shutter portion, including multiple shield plates having the same height as an interval between shelf plates disposed in a storage container, is disposed with a slight space from a body portion, and by supplying clean gas into the storage container, a clean atmosphere of a higher pressure than an external environment is maintained, and a shutter portion is opened and closed by moving up and down the shield plate independently from the shelf plate that supports a wafer. | ||||||
| 权利要求 | |||||||
| 说明书全文 | |||||||
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