子分类：
| 序号 | 专利名 | 申请号 | 申请日 | 公开（公告）号 | 公开（公告）日 | 发明人 |
|---|---|---|---|---|---|---|
| 21 | Photon-enhanced neutral beam etcher and cleaner | US861678 | 1997-05-22 | US5897844A | 1999-04-27 | Robert C. Amme; Bert Van Zyl |
| An apparatus for processing substrates, the apparatus including a plurality of molecular dissociation furnaces. Each dissociation furnace produces a directed beam of neutral dissociated reactive species. Each reactive beam is directed at a surface of the semiconductor substrate. A photon source is also directed at the surface of the semiconductor substrate. The intensity and wavelength of the photon source are selected to enhance the reaction rate over that of the reactive beam acting alone on the surface. | ||||||
| 22 | Processing substrates with a photon-enhanced neutral beam | US393154 | 1995-02-17 | US5637188A | 1997-06-10 | Robert C. Amme; Bert Van Zyl |
| An apparatus for processing substrates, the apparatus including a plurality of molecular dissociation furnaces. Each dissociation furnace produces a directed beam of neutral dissociated reactive species. Each reactive beam is directed at a surface of the semiconductor substrate. A photon source is also directed at the surface of the semiconductor substrate. The intensity and wavelength of the photon source are selected to enhance the reaction rate over that of the reactive beam acting alone on the surface. | ||||||
| 23 | Cluster beam thin film deposition apparatus with thermionic electron control | US560928 | 1990-07-31 | US5099791A | 1992-03-31 | Hisashi Tsukazaki; Kenichiro Yamanishi; Seiji Yasunaga |
| An apparatus for depositing, through evaporation, a thin film on a substrate disposed in a vacuum vessel by ionizing a beam of clusters emitted from an evaporation source and causing the ionized cluster beam to impinge on the substrate, comprises a thermionic emission portion for emitting thermoelectrons disposed in a plane orthogonal to the center axis of the cluster beam, a shield plate for preventing the cluster beam from striking the thermionic emission portion, and a reflection electrode for directing the thermoelectrons emitted from the thermionic emission portion toward the center axis of the cluster beam. | ||||||
| 24 | Energy-state-selected cesium beam intensifier | US49925574 | 1974-08-21 | US3902134A | 1975-08-26 | GEORGE JAMES |
| A cesium-beam atomic frequency standard in which the beam from the effuser is reflected from a reflector target surface placed between the concave and convex polepieces of the A-magnet energystate selector. The surface is coated with a colloidal suspension of graphite. The reflection is of the specular-type and the glancing angle may be between 2* and 10*. Condensation of atoms on the reflector surface is avoided by heating the reflector to approximately the temperature of the cesium source.
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| 25 | Molecular beam tube having means for degaussing the magnetic shielding structure | US3733511D | 1971-04-26 | US3733511A | 1973-05-15 | CUTLER L; HOLLOWAY J |
| The polarizing magnetic field structure of a molecular beam tube is degaussed during operation of the tube by a circuit including a solenoid coil coupled to a very low frequency, square wave, exponentially-decaying, current source.
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| 26 | Optically pumped alkali atomic beam frequency standard | US3667066D | 1969-07-07 | US3667066A | 1972-05-30 | KASTLER ALFRED; ARDITI MAURICE; CEREZ PIERRE |
| The frequency standard comprises an oven producing a beam of Rb85 and Rb87, a lamp using Rb85 for enriching the level F 1 of the fundamental state of the atoms of Rb87, a hyperfrequency cavity equalizing the population of the levels F 1, mF 0 and F 2, mF 0 of this state, a lamp using Rb87 or natural Rb filtered by a vat containing Rb85 for producing transitions between the levels F 1 of the fundamental state and an excited level, and a detector completed by an electronic unit coupling a quartz oscillator to the atomic resonance.
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| 27 | Atomic or molecular beam resonator having field concentrating means for the second state selector | US3591800D | 1969-02-25 | US3591800A | 1971-07-06 | KARTASCHOFF PETER; DEBELY PIERRE-ETIENNE |
| Disclosed herein is an atomic or molecular beam resonator having a source for producing the beam, a first and second state selector separated by an interaction zone, means for generating an oscillating field in the interaction zone, and a detector. The second state selector comprises by a dipolar assembly having a metallic member disposed within its field for concentrating the lines of the force of the field between the member and each of the poles of the assembly.
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| 28 | Molecular frequency standard | US3578968D | 1968-04-16 | US3578968A | 1971-05-18 | HELLWIG HELMUT W |
| A molecular beam tube frequency standard using a barium oxide molecule of the form Ba138016 having spinless atoms and using electrostatic state selection. The beam tube comprises a beam source including a thin-walled refractory electrically conductive oven tube containing Ba138016. The oven tube, which is chemically inert to barium oxide, is surrounded by a thermionic electron emitter which is made negative with respect to the oven tube. Electrons emitted from the electron emitter bombard the oven tube and heat the barium oxide to a temperature at which Ba138016 molecules are evaporated. The beam tube also comprises a cavity resonator supporting a TM mode which includes a cylinder and two end pieces provided with apertures for passage of the beam. Each of the ends of the cylinder is provided with a barbed edge; a flat surface of each end piece is pressed against a corresponding barbed edge of the cylinder by mounting means so that the barbed edges cut slightly into the surface of the end pieces. The beam tube also includes a detector comprising a heated elongated member stretched along the axis of the beam tube and arranged to intercept beam particles over a focal region extending along a portion of the length of the said member. Ions are formed in the vicinity of the elongated member and are collected by electrode means maintained negative with respect to said member.
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| 29 | Atomic beam tube having multipole state selecting magnet means with shaped poles to inhibit majorana transitions | US57145366 | 1966-08-10 | US3418463A | 1968-12-24 | LACEY RICHARD F |
| 30 | Atomic beam apparatus | US58907266 | 1966-10-24 | US3397310A | 1968-08-13 | HOLLOWAY JOSEPH H; ANDERSON JOSEPH W |
| 31 | Atomic resonance method and apparatus with improved magnetic field homogeneity control | US36649364 | 1964-05-11 | US3345581A | 1967-10-03 | CHARLES VESSOT ROBERT FREDERIC |
| 32 | Molecular beam tube | US26300563 | 1963-03-05 | US3328633A | 1967-06-27 | JAMES GEORGE |
| 33 | Temperature compensation for cesium beam frequency standard cavity | US34534364 | 1964-02-17 | US3284720A | 1966-11-08 | ALEXANDER BRANDLI |
| 34 | Carbon monoxide frequency standard | US85160559 | 1959-11-09 | US3060385A | 1962-10-23 | LIPPS JR FREDERICK W; HOLLOWAY JOSEPH H |
| 35 | Molecular beam apparatus | US69310457 | 1957-10-29 | US2972115A | 1961-02-14 | ZACHARIAS JERROLD R; HOLLOWAY JOSEPH H; GRANT EUGENE F |
| 36 | Apparatus utilizing atomic or molecular beams | US48425355 | 1955-01-26 | US2808510A | 1957-10-01 | NORTON LOWELL E |
| 37 | Frequency-stabilization by particle beams | US10623749 | 1949-07-22 | US2743366A | 1956-04-24 | HERSHBERGER WILLIAM D |
| 38 | 高性能ＦＲＣを形成し維持するシステムおよび方法 | JP2017521081 | 2015-10-30 | JP2017532745A | 2017-11-02 | ミヒル ビンデルバウアー，; エウセビオ ガラテ，; セルゲイ プトビンスキー，; 博司 郷田 |
| 高性能逆磁場構成(FRC)システムは、中心閉じ込め容器と、容器に結合される、2つの直径方向に対向する逆磁場シータピンチ形成区分と、形成区分に結合される、2つのダイバータチャンバとを含む。磁気システムは、FRCシステム構成要素に沿って軸方向に位置付けられる、準直流コイルと、閉じ込めチャンバと形成区分との間の準直流ミラーコイルと、形成区分とダイバータとの間のミラープラグとを含む。形成区分は、モジュール式パルス式パワー形成システムを含み、FRCの静的および動的形成および加速を可能にする。 | ||||||
| 39 | 中性ビームを配向するための方法および装置 | JP2015556236 | 2014-02-04 | JP2016507133A | 2016-03-07 | カークパトリック，ショーン，アール．; チャウ，ソン |
| ガスクラスターイオンビームに由来する中性ビームの偏向を生じさせるための装置および方法は、ガスクラスターの解離およびイオンの除去を行う前に前記ガスクラスターイオンビームを偏向する。 | ||||||
| 40 | Processing method using a fast atom beam | JP15681194 | 1994-06-14 | JP3394602B2 | 2003-04-07 | 雅規 畠山 |
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