Ion source for providing a supply of charged particles having a controlled kinetic energy distribution专利检索-脉冲电场电场物理专利检索查询-专利查询网

Ion source for providing a supply of charged particles having a controlled kinetic energy distribution

阅读：412发布：2023-07-19

专利汇可以提供Ion source for providing a supply of charged particles having a controlled kinetic energy distribution专利检索，专利查询，专利分析的服务。并且An ion source device that includes apparatus for pulse injecting ions into a field-free drift region where those ions separate according to their velocities or kinetic energies. A cyclically varying electric field is established at the end of the fieldfree drift region. Each charged particle enters the electric field at a time determined by its velocity and interacts with the field in a manner dependent upon the phase of the field upon receipt of that particle. The cyclically varying electric field decreases the velocity distribution for particles received during the first half of a cycle, and increases the distribution for particles received during the second half of a cycle. Mass analyzing apparatus is disposed to receive and measure the concentrations of species of charged particles expelled from the cyclically varying field. The output provided by the mass analyzing apparatus also facilitates variation of the cyclically varying electric field to provide a particular species with a desired velocity or kinetic energy distribution.，下面是Ion source for providing a supply of charged particles having a controlled kinetic energy distribution专利的具体信息内容。

权利要求

1. A device for generating a supply of charged particles having a predetermined kinetic energy comprising: means responsive to an input signal for generating groups of charged particles having a predetermined initial kinetic energy distribution and accelerating said groups of charged particles in a predetermined direction; means receiving said accelerated groups of charged particles for generating a field free drift region wherein the charged particles within each of said groups spatially separate along said predetermined direction in accordance with their kinetic energy; means having three mutually perpendicular axes for receiving said spatially separated groups of charged particles and for generating a dynamic electric field cyclically varying along at least one of said mutually perpendicular axes wherein the potential distribution phi of said dynamic field varies as a function of the square of the distance along said at least one axis, said dynamic electric field having at least two phases, a first phase wherein the potential distribution of the field increases as a function of time and a second phase wherein the potential distribution of the field decreases as a function of time, said electric field operative to reduce the kinetic energy distribution of the separated charged particles received during said first phase dependent upon the time the charged particles within each group enters the field, said dynamic electric field further operative to cause the received charged particles to oscillate for a predeterminable number of cyclical variations further reducing the kinetic energy distribution of the charged particles before being ejected from the electric field; means for generating a cyclical electrical voltage having a predetermined frequency, a predetermined DC component, and a predetermined AC component, said cyclical voltage applied to said electric field generating means determines the potential distribution and phase of said dynamic electric field; and means responsive to the cyclical electrical voltage for generating the input signal having a predetermined phase relationship to said cyclical voltage, said input signal communicated to said means for accelerating operative to cause said groups of accelerated charged particles, after passing through said field free region, to enter said dynamic field during said first phase.

2. The device as claimed in claim 1 wherein said means for generating said dynamic electric field is a monopole structure comprising: a V-shaped conductor having two planar surfaces angularly disposed with respect to each other and joined along a common edge, said V-shaped conductor further having an entrance aperture and an exit aperture disposed along said commonly joined edge and spatially separated a predetermined distance from each other; and a conductive rod symmetrically disposed between said planar surfaces and spaced therefrom; said monopole structure further having a z-axis along a line normal to the axis of said rod, passing through the center of said rod and the commonly joined edge of said V-shaped conductor, and a y-axis disposed normal to the plane formed by said z axis and the axis of said rod, further wherein the potential distribution is given by the equation phi (y,z,t) (Vdc + Vac sin Nu t) 1/zo2 (y2 - z2) where: y and Z are said y and z axes about which said dynamic field cyclically varies; zo is a distance along the z axis in the region bounded by the surface of said rod and said commonly joined edge; t time; Vdc the DC component of said cyclical voltage; Vac the AC component of said cyclical voltage; and Nu the frequency of said cyclical voltage.

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Ion source for providing a supply of charged particles having a controlled kinetic energy distribution

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